2/20/2012	12:10:38 AM	Helium valve closed
2/20/2012	12:10:38 AM	PH3 valve closed
2/20/2012	12:10:38 AM	Main Vac valve closed
2/20/2012	12:10:38 AM	Bypass valve closed
2/20/2012	12:10:38 AM	H2 valve opened
2/20/2012	12:10:38 AM	BCl3 valve opened
2/20/2012	12:10:38 AM	SiCl4 pre valve opened
2/20/2012	12:10:38 AM	SiCl4 post valve opened
2/20/2012	12:10:38 AM	Bubbler valve opened
2/20/2012	12:10:38 AM	Helium MFC set to  0.000000
2/20/2012	12:10:38 AM	H2 MFC set to  500.000000
2/20/2012	12:10:38 AM	BCl3 MFC set to  20.000000
2/20/2012	12:10:38 AM	PH3 MFC set to  0.000000
2/20/2012	12:10:38 AM	SiCl4 MFC set to  50.000000
2/20/2012	12:10:38 AM	Bypass solenoid MFC set to  0.000000
2/20/2012	12:10:38 AM	Tube furnace set to 1000
2/20/2012	12:20:38 AM	Helium valve closed
2/20/2012	12:20:38 AM	BCl3 valve closed
2/20/2012	12:20:38 AM	PH3 valve closed
2/20/2012	12:20:38 AM	SiCl4 pre valve closed
2/20/2012	12:20:38 AM	SiCl4 post valve closed
2/20/2012	12:20:38 AM	Main Vac valve closed
2/20/2012	12:20:38 AM	Bypass valve closed
2/20/2012	12:20:38 AM	H2 valve opened
2/20/2012	12:20:38 AM	Bubbler valve opened
2/20/2012	12:20:38 AM	Helium MFC set to  0.000000
2/20/2012	12:20:38 AM	H2 MFC set to  500.000000
2/20/2012	12:20:38 AM	BCl3 MFC set to  0.000000
2/20/2012	12:20:38 AM	PH3 MFC set to  0.000000
2/20/2012	12:20:38 AM	SiCl4 MFC set to  0.000000
2/20/2012	12:20:38 AM	Bypass solenoid MFC set to  0.000000
2/20/2012	12:20:38 AM	Tube furnace set to 975
2/20/2012	12:22:08 AM	Helium valve closed
2/20/2012	12:22:08 AM	BCl3 valve closed
2/20/2012	12:22:08 AM	PH3 valve closed
2/20/2012	12:22:08 AM	SiCl4 pre valve closed
2/20/2012	12:22:08 AM	SiCl4 post valve closed
2/20/2012	12:22:08 AM	Main Vac valve closed
2/20/2012	12:22:08 AM	Bypass valve closed
2/20/2012	12:22:08 AM	H2 valve opened
2/20/2012	12:22:08 AM	Bubbler valve opened
2/20/2012	12:22:08 AM	Helium MFC set to  0.000000
2/20/2012	12:22:08 AM	H2 MFC set to  500.000000
2/20/2012	12:22:08 AM	BCl3 MFC set to  0.000000
2/20/2012	12:22:08 AM	PH3 MFC set to  0.000000
2/20/2012	12:22:08 AM	SiCl4 MFC set to  0.000000
2/20/2012	12:22:08 AM	Bypass solenoid MFC set to  0.000000
2/20/2012	12:22:08 AM	Tube furnace set to 950
2/20/2012	12:23:38 AM	Helium valve closed
2/20/2012	12:23:38 AM	BCl3 valve closed
2/20/2012	12:23:38 AM	PH3 valve closed
2/20/2012	12:23:38 AM	SiCl4 pre valve closed
2/20/2012	12:23:38 AM	SiCl4 post valve closed
2/20/2012	12:23:38 AM	Main Vac valve closed
2/20/2012	12:23:38 AM	Bypass valve closed
2/20/2012	12:23:38 AM	H2 valve opened
2/20/2012	12:23:38 AM	Bubbler valve opened
2/20/2012	12:23:38 AM	Helium MFC set to  0.000000
2/20/2012	12:23:38 AM	H2 MFC set to  500.000000
2/20/2012	12:23:38 AM	BCl3 MFC set to  0.000000
2/20/2012	12:23:38 AM	PH3 MFC set to  0.000000
2/20/2012	12:23:38 AM	SiCl4 MFC set to  0.000000
2/20/2012	12:23:38 AM	Bypass solenoid MFC set to  0.000000
2/20/2012	12:23:38 AM	Tube furnace set to 925
2/20/2012	12:25:09 AM	Helium valve closed
2/20/2012	12:25:09 AM	BCl3 valve closed
2/20/2012	12:25:09 AM	PH3 valve closed
2/20/2012	12:25:09 AM	SiCl4 pre valve closed
2/20/2012	12:25:09 AM	SiCl4 post valve closed
2/20/2012	12:25:09 AM	Main Vac valve closed
2/20/2012	12:25:09 AM	Bypass valve closed
2/20/2012	12:25:09 AM	H2 valve opened
2/20/2012	12:25:09 AM	Bubbler valve opened
2/20/2012	12:25:09 AM	Helium MFC set to  0.000000
2/20/2012	12:25:09 AM	H2 MFC set to  500.000000
2/20/2012	12:25:09 AM	BCl3 MFC set to  0.000000
2/20/2012	12:25:09 AM	PH3 MFC set to  0.000000
2/20/2012	12:25:09 AM	SiCl4 MFC set to  0.000000
2/20/2012	12:25:09 AM	Bypass solenoid MFC set to  0.000000
2/20/2012	12:25:09 AM	Tube furnace set to 900
2/20/2012	12:26:39 AM	H2 valve closed
2/20/2012	12:26:39 AM	BCl3 valve closed
2/20/2012	12:26:39 AM	PH3 valve closed
2/20/2012	12:26:39 AM	SiCl4 pre valve closed
2/20/2012	12:26:39 AM	SiCl4 post valve closed
2/20/2012	12:26:39 AM	Main Vac valve closed
2/20/2012	12:26:39 AM	Bypass valve closed
2/20/2012	12:26:39 AM	Helium valve opened
2/20/2012	12:26:39 AM	Bubbler valve opened
2/20/2012	12:26:39 AM	Helium MFC set to  500.000000
2/20/2012	12:26:39 AM	H2 MFC set to  0.000000
2/20/2012	12:26:39 AM	BCl3 MFC set to  0.000000
2/20/2012	12:26:39 AM	PH3 MFC set to  0.000000
2/20/2012	12:26:39 AM	SiCl4 MFC set to  0.000000
2/20/2012	12:26:39 AM	Bypass solenoid MFC set to  0.000000
2/20/2012	12:26:39 AM	Tube furnace set to 875
2/20/2012	12:28:09 AM	H2 valve closed
2/20/2012	12:28:09 AM	BCl3 valve closed
2/20/2012	12:28:09 AM	PH3 valve closed
2/20/2012	12:28:09 AM	SiCl4 pre valve closed
2/20/2012	12:28:09 AM	SiCl4 post valve closed
2/20/2012	12:28:09 AM	Main Vac valve closed
2/20/2012	12:28:09 AM	Bypass valve closed
2/20/2012	12:28:09 AM	Helium valve opened
2/20/2012	12:28:09 AM	Bubbler valve opened
2/20/2012	12:28:09 AM	Helium MFC set to  500.000000
2/20/2012	12:28:09 AM	H2 MFC set to  0.000000
2/20/2012	12:28:09 AM	BCl3 MFC set to  0.000000
2/20/2012	12:28:09 AM	PH3 MFC set to  0.000000
2/20/2012	12:28:09 AM	SiCl4 MFC set to  0.000000
2/20/2012	12:28:09 AM	Bypass solenoid MFC set to  0.000000
2/20/2012	12:28:09 AM	Tube furnace set to 850
2/20/2012	12:29:39 AM	H2 valve closed
2/20/2012	12:29:39 AM	BCl3 valve closed
2/20/2012	12:29:39 AM	PH3 valve closed
2/20/2012	12:29:39 AM	SiCl4 pre valve closed
2/20/2012	12:29:39 AM	SiCl4 post valve closed
2/20/2012	12:29:39 AM	Main Vac valve closed
2/20/2012	12:29:39 AM	Bypass valve closed
2/20/2012	12:29:39 AM	Helium valve opened
2/20/2012	12:29:39 AM	Bubbler valve opened
2/20/2012	12:29:39 AM	Helium MFC set to  500.000000
2/20/2012	12:29:39 AM	H2 MFC set to  0.000000
2/20/2012	12:29:39 AM	BCl3 MFC set to  0.000000
2/20/2012	12:29:39 AM	PH3 MFC set to  0.000000
2/20/2012	12:29:39 AM	SiCl4 MFC set to  0.000000
2/20/2012	12:29:39 AM	Bypass solenoid MFC set to  0.000000
2/20/2012	12:29:39 AM	Tube furnace set to 825
2/20/2012	12:31:09 AM	H2 valve closed
2/20/2012	12:31:09 AM	BCl3 valve closed
2/20/2012	12:31:09 AM	PH3 valve closed
2/20/2012	12:31:09 AM	SiCl4 pre valve closed
2/20/2012	12:31:09 AM	SiCl4 post valve closed
2/20/2012	12:31:09 AM	Main Vac valve closed
2/20/2012	12:31:09 AM	Bypass valve closed
2/20/2012	12:31:09 AM	Helium valve opened
2/20/2012	12:31:09 AM	Bubbler valve opened
2/20/2012	12:31:09 AM	Helium MFC set to  500.000000
2/20/2012	12:31:09 AM	H2 MFC set to  0.000000
2/20/2012	12:31:09 AM	BCl3 MFC set to  0.000000
2/20/2012	12:31:09 AM	PH3 MFC set to  0.000000
2/20/2012	12:31:09 AM	SiCl4 MFC set to  0.000000
2/20/2012	12:31:09 AM	Bypass solenoid MFC set to  0.000000
2/20/2012	12:31:09 AM	Tube furnace set to 800
2/20/2012	12:32:40 AM	H2 valve closed
2/20/2012	12:32:40 AM	BCl3 valve closed
2/20/2012	12:32:40 AM	PH3 valve closed
2/20/2012	12:32:40 AM	SiCl4 pre valve closed
2/20/2012	12:32:40 AM	SiCl4 post valve closed
2/20/2012	12:32:40 AM	Main Vac valve closed
2/20/2012	12:32:40 AM	Bypass valve closed
2/20/2012	12:32:40 AM	Helium valve opened
2/20/2012	12:32:40 AM	Bubbler valve opened
2/20/2012	12:32:40 AM	Helium MFC set to  500.000000
2/20/2012	12:32:40 AM	H2 MFC set to  0.000000
2/20/2012	12:32:40 AM	BCl3 MFC set to  0.000000
2/20/2012	12:32:40 AM	PH3 MFC set to  0.000000
2/20/2012	12:32:40 AM	SiCl4 MFC set to  0.000000
2/20/2012	12:32:40 AM	Bypass solenoid MFC set to  0.000000
2/20/2012	12:32:40 AM	Tube furnace set to 0
2/20/2012	12:47:40 AM	Helium valve closed
2/20/2012	12:47:40 AM	H2 valve closed
2/20/2012	12:47:40 AM	BCl3 valve closed
2/20/2012	12:47:40 AM	PH3 valve closed
2/20/2012	12:47:40 AM	SiCl4 pre valve closed
2/20/2012	12:47:40 AM	SiCl4 post valve closed
2/20/2012	12:47:40 AM	Main Vac valve closed
2/20/2012	12:47:40 AM	Bypass valve closed
2/20/2012	12:47:40 AM	Bubbler valve closed
2/20/2012	12:47:40 AM	Helium MFC set to  0.000000
2/20/2012	12:47:40 AM	H2 MFC set to  0.000000
2/20/2012	12:47:40 AM	BCl3 MFC set to  0.000000
2/20/2012	12:47:40 AM	PH3 MFC set to  0.000000
2/20/2012	12:47:40 AM	SiCl4 MFC set to  0.000000
2/20/2012	12:47:40 AM	Bypass solenoid MFC set to  0.000000
2/20/2012	12:47:40 AM	Tube furnace set to 0
2/20/2012	1:47:40 AM	H2 valve closed
2/20/2012	1:47:40 AM	BCl3 valve closed
2/20/2012	1:47:40 AM	PH3 valve closed
2/20/2012	1:47:40 AM	SiCl4 pre valve closed
2/20/2012	1:47:40 AM	SiCl4 post valve closed
2/20/2012	1:47:40 AM	Main Vac valve closed
2/20/2012	1:47:40 AM	Bypass valve closed
2/20/2012	1:47:40 AM	Bubbler valve closed
2/20/2012	1:47:40 AM	Helium valve opened
2/20/2012	1:47:40 AM	Helium MFC set to  500.000000
2/20/2012	1:47:40 AM	H2 MFC set to  0.000000
2/20/2012	1:47:40 AM	BCl3 MFC set to  0.000000
2/20/2012	1:47:40 AM	PH3 MFC set to  0.000000
2/20/2012	1:47:40 AM	SiCl4 MFC set to  0.000000
2/20/2012	1:47:40 AM	Bypass solenoid MFC set to  0.000000
2/20/2012	1:47:40 AM	Tube furnace set to 0
2/20/2012	1:47:45 AM	H2 valve closed
2/20/2012	1:47:45 AM	BCl3 valve closed
2/20/2012	1:47:45 AM	PH3 valve closed
2/20/2012	1:47:45 AM	SiCl4 pre valve closed
2/20/2012	1:47:45 AM	SiCl4 post valve closed
2/20/2012	1:47:45 AM	Main Vac valve closed
2/20/2012	1:47:45 AM	Bypass valve closed
2/20/2012	1:47:45 AM	Helium valve opened
2/20/2012	1:47:45 AM	Bubbler valve opened
2/20/2012	1:47:45 AM	Helium MFC set to  500.000000
2/20/2012	1:47:45 AM	H2 MFC set to  0.000000
2/20/2012	1:47:45 AM	BCl3 MFC set to  0.000000
2/20/2012	1:47:45 AM	PH3 MFC set to  0.000000
2/20/2012	1:47:45 AM	SiCl4 MFC set to  0.000000
2/20/2012	1:47:45 AM	Bypass solenoid MFC set to  0.000000
2/20/2012	1:47:45 AM	Tube furnace set to 0
2/20/2012	1:52:45 AM	Helium valve closed
2/20/2012	1:52:45 AM	H2 valve closed
2/20/2012	1:52:45 AM	BCl3 valve closed
2/20/2012	1:52:45 AM	PH3 valve closed
2/20/2012	1:52:45 AM	SiCl4 pre valve closed
2/20/2012	1:52:45 AM	SiCl4 post valve closed
2/20/2012	1:52:45 AM	Main Vac valve closed
2/20/2012	1:52:45 AM	Bypass valve closed
2/20/2012	1:52:45 AM	Bubbler valve closed
2/20/2012	1:52:45 AM	Helium MFC set to  0.000000
2/20/2012	1:52:45 AM	H2 MFC set to  0.000000
2/20/2012	1:52:45 AM	BCl3 MFC set to  0.000000
2/20/2012	1:52:45 AM	PH3 MFC set to  0.000000
2/20/2012	1:52:45 AM	SiCl4 MFC set to  0.000000
2/20/2012	1:52:45 AM	Bypass solenoid MFC set to  0.000000
2/20/2012	1:52:46 AM	Tube furnace set to 0
2/20/2012	1:52:47 AM	Helium valve closed
2/20/2012	1:52:47 AM	H2 valve closed
2/20/2012	1:52:47 AM	BCl3 valve closed
2/20/2012	1:52:47 AM	PH3 valve closed
2/20/2012	1:52:47 AM	SiCl4 pre valve closed
2/20/2012	1:52:47 AM	SiCl4 post valve closed
2/20/2012	1:52:47 AM	Main Vac valve closed
2/20/2012	1:52:47 AM	Bubbler valve closed
2/20/2012	1:52:47 AM	Bypass valve opened
2/20/2012	1:52:47 AM	Helium MFC set to  0.000000
2/20/2012	1:52:47 AM	H2 MFC set to  0.000000
2/20/2012	1:52:47 AM	BCl3 MFC set to  0.000000
2/20/2012	1:52:47 AM	PH3 MFC set to  0.000000
2/20/2012	1:52:47 AM	SiCl4 MFC set to  0.000000
2/20/2012	1:52:47 AM	Bypass solenoid MFC set to  0.000000
2/20/2012	1:52:47 AM	Tube furnace set to 0
2/20/2012	1:53:34 AM	Helium valve closed
2/20/2012	1:53:34 AM	H2 valve closed
2/20/2012	1:53:34 AM	BCl3 valve closed
2/20/2012	1:53:34 AM	PH3 valve closed
2/20/2012	1:53:34 AM	SiCl4 pre valve closed
2/20/2012	1:53:34 AM	SiCl4 post valve closed
2/20/2012	1:53:34 AM	Main Vac valve closed
2/20/2012	1:53:34 AM	Bubbler valve closed
2/20/2012	1:53:34 AM	Bypass valve opened
2/20/2012	1:53:34 AM	Helium MFC set to  0.000000
2/20/2012	1:53:34 AM	H2 MFC set to  0.000000
2/20/2012	1:53:34 AM	BCl3 MFC set to  0.000000
2/20/2012	1:53:34 AM	PH3 MFC set to  0.000000
2/20/2012	1:53:34 AM	SiCl4 MFC set to  0.000000
2/20/2012	1:53:34 AM	Bypass solenoid MFC set to  0.000000
2/20/2012	1:53:34 AM	Tube furnace set to 0
2/20/2012	1:54:34 AM	Helium valve closed
2/20/2012	1:54:34 AM	H2 valve closed
2/20/2012	1:54:34 AM	BCl3 valve closed
2/20/2012	1:54:34 AM	PH3 valve closed
2/20/2012	1:54:34 AM	SiCl4 pre valve closed
2/20/2012	1:54:34 AM	SiCl4 post valve closed
2/20/2012	1:54:34 AM	Bypass valve closed
2/20/2012	1:54:34 AM	Bubbler valve closed
2/20/2012	1:54:34 AM	Main Vac valve opened
2/20/2012	1:54:34 AM	Helium MFC set to  0.000000
2/20/2012	1:54:34 AM	H2 MFC set to  0.000000
2/20/2012	1:54:34 AM	BCl3 MFC set to  0.000000
2/20/2012	1:54:34 AM	PH3 MFC set to  0.000000
2/20/2012	1:54:34 AM	SiCl4 MFC set to  0.000000
2/20/2012	1:54:34 AM	Bypass solenoid MFC set to  0.000000
2/20/2012	1:54:34 AM	Tube furnace set to 0
2/20/2012	4:34:35 AM	Run finished at 4:34 AM
2/20/2012	9:24:43 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/20/2012	9:24:44 AM	Recipe started at 9:24 AM
2/20/2012	9:24:44 AM	Helium valve closed
2/20/2012	9:24:44 AM	H2 valve closed
2/20/2012	9:24:44 AM	BCl3 valve closed
2/20/2012	9:24:44 AM	PH3 valve closed
2/20/2012	9:24:44 AM	SiCl4 pre valve closed
2/20/2012	9:24:44 AM	SiCl4 post valve closed
2/20/2012	9:24:44 AM	Main Vac valve closed
2/20/2012	9:24:44 AM	Bypass valve closed
2/20/2012	9:24:44 AM	Bubbler valve closed
2/20/2012	9:24:44 AM	Helium MFC set to  0.000000
2/20/2012	9:24:44 AM	H2 MFC set to  0.000000
2/20/2012	9:24:44 AM	BCl3 MFC set to  0.000000
2/20/2012	9:24:44 AM	PH3 MFC set to  0.000000
2/20/2012	9:24:44 AM	SiCl4 MFC set to  0.000000
2/20/2012	9:24:44 AM	Bypass solenoid MFC set to  0.000000
2/20/2012	9:24:44 AM	Tube furnace set to 0
2/20/2012	9:24:47 AM	H2 valve closed
2/20/2012	9:24:47 AM	BCl3 valve closed
2/20/2012	9:24:47 AM	PH3 valve closed
2/20/2012	9:24:47 AM	SiCl4 pre valve closed
2/20/2012	9:24:47 AM	SiCl4 post valve closed
2/20/2012	9:24:47 AM	Main Vac valve closed
2/20/2012	9:24:47 AM	Bypass valve closed
2/20/2012	9:24:47 AM	Bubbler valve closed
2/20/2012	9:24:47 AM	Helium valve opened
2/20/2012	9:24:47 AM	Helium MFC set to  500.000000
2/20/2012	9:24:47 AM	H2 MFC set to  0.000000
2/20/2012	9:24:47 AM	BCl3 MFC set to  0.000000
2/20/2012	9:24:47 AM	PH3 MFC set to  0.000000
2/20/2012	9:24:47 AM	SiCl4 MFC set to  0.000000
2/20/2012	9:24:47 AM	Bypass solenoid MFC set to  0.000000
2/20/2012	9:24:47 AM	Tube furnace set to 0
2/20/2012	9:25:52 AM	Helium valve closed
2/20/2012	9:25:52 AM	H2 valve closed
2/20/2012	9:25:52 AM	BCl3 valve closed
2/20/2012	9:25:52 AM	PH3 valve closed
2/20/2012	9:25:52 AM	SiCl4 pre valve closed
2/20/2012	9:25:52 AM	SiCl4 post valve closed
2/20/2012	9:25:52 AM	Main Vac valve closed
2/20/2012	9:25:52 AM	Bypass valve closed
2/20/2012	9:25:52 AM	Bubbler valve closed
2/20/2012	9:25:52 AM	Helium MFC set to  0.000000
2/20/2012	9:25:52 AM	H2 MFC set to  0.000000
2/20/2012	9:25:52 AM	BCl3 MFC set to  0.000000
2/20/2012	9:25:52 AM	PH3 MFC set to  0.000000
2/20/2012	9:25:52 AM	SiCl4 MFC set to  0.000000
2/20/2012	9:25:52 AM	Bypass solenoid MFC set to  0.000000
2/20/2012	9:25:52 AM	Tube furnace set to 0
2/20/2012	9:25:53 AM	Run finished at 9:25 AM
2/20/2012	9:25:53 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/20/2012	9:29:49 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/20/2012	9:29:50 AM	Recipe started at 9:29 AM
2/20/2012	9:29:50 AM	Helium valve closed
2/20/2012	9:29:50 AM	H2 valve closed
2/20/2012	9:29:50 AM	BCl3 valve closed
2/20/2012	9:29:50 AM	PH3 valve closed
2/20/2012	9:29:50 AM	SiCl4 pre valve closed
2/20/2012	9:29:50 AM	SiCl4 post valve closed
2/20/2012	9:29:50 AM	Main Vac valve closed
2/20/2012	9:29:50 AM	Bubbler valve closed
2/20/2012	9:29:50 AM	Bypass valve opened
2/20/2012	9:29:50 AM	Helium MFC set to  0.000000
2/20/2012	9:29:50 AM	H2 MFC set to  0.000000
2/20/2012	9:29:50 AM	BCl3 MFC set to  0.000000
2/20/2012	9:29:50 AM	PH3 MFC set to  0.000000
2/20/2012	9:29:50 AM	SiCl4 MFC set to  0.000000
2/20/2012	9:29:50 AM	Bypass solenoid MFC set to  0.000000
2/20/2012	9:29:50 AM	Tube furnace set to 0
2/20/2012	9:30:53 AM	Helium valve closed
2/20/2012	9:30:53 AM	H2 valve closed
2/20/2012	9:30:53 AM	BCl3 valve closed
2/20/2012	9:30:53 AM	PH3 valve closed
2/20/2012	9:30:53 AM	SiCl4 pre valve closed
2/20/2012	9:30:53 AM	SiCl4 post valve closed
2/20/2012	9:30:53 AM	Main Vac valve closed
2/20/2012	9:30:53 AM	Bubbler valve closed
2/20/2012	9:30:53 AM	Bypass valve opened
2/20/2012	9:30:53 AM	Helium MFC set to  0.000000
2/20/2012	9:30:53 AM	H2 MFC set to  0.000000
2/20/2012	9:30:53 AM	BCl3 MFC set to  0.000000
2/20/2012	9:30:53 AM	PH3 MFC set to  0.000000
2/20/2012	9:30:53 AM	SiCl4 MFC set to  0.000000
2/20/2012	9:30:53 AM	Bypass solenoid MFC set to  0.000000
2/20/2012	9:30:53 AM	Tube furnace set to 0
2/20/2012	9:31:53 AM	Helium valve closed
2/20/2012	9:31:53 AM	H2 valve closed
2/20/2012	9:31:53 AM	BCl3 valve closed
2/20/2012	9:31:53 AM	PH3 valve closed
2/20/2012	9:31:53 AM	SiCl4 pre valve closed
2/20/2012	9:31:53 AM	SiCl4 post valve closed
2/20/2012	9:31:53 AM	Bypass valve closed
2/20/2012	9:31:53 AM	Bubbler valve closed
2/20/2012	9:31:53 AM	Main Vac valve opened
2/20/2012	9:31:53 AM	Helium MFC set to  0.000000
2/20/2012	9:31:53 AM	H2 MFC set to  0.000000
2/20/2012	9:31:53 AM	BCl3 MFC set to  0.000000
2/20/2012	9:31:53 AM	PH3 MFC set to  0.000000
2/20/2012	9:31:53 AM	SiCl4 MFC set to  0.000000
2/20/2012	9:31:53 AM	Bypass solenoid MFC set to  0.000000
2/20/2012	9:31:54 AM	Tube furnace set to 0
2/20/2012	9:31:55 AM	Run finished at 9:31 AM
2/20/2012	9:31:55 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/20/2012	10:20:45 AM	Main Vac valve closed
2/20/2012	10:20:57 AM	Main Vac valve opened
2/20/2012	10:21:13 AM	Recipe started at 10:21 AM
2/20/2012	10:21:13 AM	Helium valve closed
2/20/2012	10:21:13 AM	H2 valve closed
2/20/2012	10:21:13 AM	BCl3 valve closed
2/20/2012	10:21:13 AM	PH3 valve closed
2/20/2012	10:21:13 AM	SiCl4 pre valve closed
2/20/2012	10:21:13 AM	SiCl4 post valve closed
2/20/2012	10:21:13 AM	Bypass valve closed
2/20/2012	10:21:13 AM	Bubbler valve closed
2/20/2012	10:21:13 AM	Main Vac valve opened
2/20/2012	10:21:13 AM	Helium MFC set to  0.000000
2/20/2012	10:21:13 AM	H2 MFC set to  0.000000
2/20/2012	10:21:13 AM	BCl3 MFC set to  0.000000
2/20/2012	10:21:13 AM	PH3 MFC set to  0.000000
2/20/2012	10:21:13 AM	SiCl4 MFC set to  0.000000
2/20/2012	10:21:13 AM	Bypass solenoid MFC set to  0.000000
2/20/2012	10:21:13 AM	Tube furnace set to 0
2/20/2012	10:21:15 AM	H2 valve closed
2/20/2012	10:21:15 AM	BCl3 valve closed
2/20/2012	10:21:15 AM	PH3 valve closed
2/20/2012	10:21:15 AM	SiCl4 pre valve closed
2/20/2012	10:21:15 AM	SiCl4 post valve closed
2/20/2012	10:21:15 AM	Bypass valve closed
2/20/2012	10:21:15 AM	Bubbler valve closed
2/20/2012	10:21:15 AM	Helium valve opened
2/20/2012	10:21:15 AM	Main Vac valve opened
2/20/2012	10:21:15 AM	Helium MFC set to  20.000000
2/20/2012	10:21:15 AM	H2 MFC set to  0.000000
2/20/2012	10:21:15 AM	BCl3 MFC set to  0.000000
2/20/2012	10:21:15 AM	PH3 MFC set to  0.000000
2/20/2012	10:21:15 AM	SiCl4 MFC set to  0.000000
2/20/2012	10:21:15 AM	Bypass solenoid MFC set to  0.000000
2/20/2012	10:21:15 AM	Tube furnace set to 0
2/20/2012	10:21:16 AM	Helium valve closed
2/20/2012	10:21:16 AM	H2 valve closed
2/20/2012	10:21:16 AM	BCl3 valve closed
2/20/2012	10:21:16 AM	PH3 valve closed
2/20/2012	10:21:16 AM	SiCl4 pre valve closed
2/20/2012	10:21:16 AM	SiCl4 post valve closed
2/20/2012	10:21:16 AM	Bypass valve closed
2/20/2012	10:21:16 AM	Bubbler valve closed
2/20/2012	10:21:16 AM	Main Vac valve opened
2/20/2012	10:21:16 AM	Helium MFC set to  0.000000
2/20/2012	10:21:16 AM	H2 MFC set to  0.000000
2/20/2012	10:21:16 AM	BCl3 MFC set to  0.000000
2/20/2012	10:21:16 AM	PH3 MFC set to  0.000000
2/20/2012	10:21:16 AM	SiCl4 MFC set to  0.000000
2/20/2012	10:21:16 AM	Bypass solenoid MFC set to  0.000000
2/20/2012	10:21:16 AM	Tube furnace set to 0
2/20/2012	10:21:16 AM	H2 valve closed
2/20/2012	10:21:16 AM	BCl3 valve closed
2/20/2012	10:21:16 AM	PH3 valve closed
2/20/2012	10:21:16 AM	SiCl4 pre valve closed
2/20/2012	10:21:16 AM	SiCl4 post valve closed
2/20/2012	10:21:16 AM	Bypass valve closed
2/20/2012	10:21:16 AM	Bubbler valve closed
2/20/2012	10:21:16 AM	Helium valve opened
2/20/2012	10:21:16 AM	Main Vac valve opened
2/20/2012	10:21:16 AM	Helium MFC set to  20.000000
2/20/2012	10:21:16 AM	H2 MFC set to  0.000000
2/20/2012	10:21:16 AM	BCl3 MFC set to  0.000000
2/20/2012	10:21:16 AM	PH3 MFC set to  0.000000
2/20/2012	10:21:16 AM	SiCl4 MFC set to  0.000000
2/20/2012	10:21:16 AM	Bypass solenoid MFC set to  0.000000
2/20/2012	10:21:17 AM	Tube furnace set to 0
2/20/2012	10:21:17 AM	Helium valve closed
2/20/2012	10:21:17 AM	H2 valve closed
2/20/2012	10:21:17 AM	BCl3 valve closed
2/20/2012	10:21:17 AM	PH3 valve closed
2/20/2012	10:21:17 AM	SiCl4 pre valve closed
2/20/2012	10:21:17 AM	SiCl4 post valve closed
2/20/2012	10:21:17 AM	Bypass valve closed
2/20/2012	10:21:17 AM	Bubbler valve closed
2/20/2012	10:21:17 AM	Main Vac valve opened
2/20/2012	10:21:17 AM	Helium MFC set to  0.000000
2/20/2012	10:21:17 AM	H2 MFC set to  0.000000
2/20/2012	10:21:17 AM	BCl3 MFC set to  0.000000
2/20/2012	10:21:17 AM	PH3 MFC set to  0.000000
2/20/2012	10:21:17 AM	SiCl4 MFC set to  0.000000
2/20/2012	10:21:17 AM	Bypass solenoid MFC set to  0.000000
2/20/2012	10:21:17 AM	Tube furnace set to 0
2/20/2012	10:21:18 AM	H2 valve closed
2/20/2012	10:21:18 AM	BCl3 valve closed
2/20/2012	10:21:18 AM	PH3 valve closed
2/20/2012	10:21:18 AM	SiCl4 pre valve closed
2/20/2012	10:21:18 AM	SiCl4 post valve closed
2/20/2012	10:21:18 AM	Bypass valve closed
2/20/2012	10:21:18 AM	Bubbler valve closed
2/20/2012	10:21:18 AM	Helium valve opened
2/20/2012	10:21:18 AM	Main Vac valve opened
2/20/2012	10:21:18 AM	Helium MFC set to  20.000000
2/20/2012	10:21:18 AM	H2 MFC set to  0.000000
2/20/2012	10:21:18 AM	BCl3 MFC set to  0.000000
2/20/2012	10:21:18 AM	PH3 MFC set to  0.000000
2/20/2012	10:21:18 AM	SiCl4 MFC set to  0.000000
2/20/2012	10:21:18 AM	Bypass solenoid MFC set to  0.000000
2/20/2012	10:21:18 AM	Tube furnace set to 0
2/20/2012	10:21:19 AM	Helium valve closed
2/20/2012	10:21:19 AM	H2 valve closed
2/20/2012	10:21:19 AM	BCl3 valve closed
2/20/2012	10:21:19 AM	PH3 valve closed
2/20/2012	10:21:19 AM	SiCl4 pre valve closed
2/20/2012	10:21:19 AM	SiCl4 post valve closed
2/20/2012	10:21:19 AM	Bypass valve closed
2/20/2012	10:21:19 AM	Bubbler valve closed
2/20/2012	10:21:19 AM	Main Vac valve opened
2/20/2012	10:21:19 AM	Helium MFC set to  0.000000
2/20/2012	10:21:19 AM	H2 MFC set to  0.000000
2/20/2012	10:21:19 AM	BCl3 MFC set to  0.000000
2/20/2012	10:21:19 AM	PH3 MFC set to  0.000000
2/20/2012	10:21:19 AM	SiCl4 MFC set to  0.000000
2/20/2012	10:21:19 AM	Bypass solenoid MFC set to  0.000000
2/20/2012	10:21:19 AM	Tube furnace set to 0
2/20/2012	10:21:20 AM	H2 valve closed
2/20/2012	10:21:20 AM	BCl3 valve closed
2/20/2012	10:21:20 AM	PH3 valve closed
2/20/2012	10:21:20 AM	SiCl4 pre valve closed
2/20/2012	10:21:20 AM	SiCl4 post valve closed
2/20/2012	10:21:20 AM	Bypass valve closed
2/20/2012	10:21:20 AM	Bubbler valve closed
2/20/2012	10:21:20 AM	Helium valve opened
2/20/2012	10:21:20 AM	Main Vac valve opened
2/20/2012	10:21:20 AM	Helium MFC set to  20.000000
2/20/2012	10:21:20 AM	H2 MFC set to  0.000000
2/20/2012	10:21:20 AM	BCl3 MFC set to  0.000000
2/20/2012	10:21:20 AM	PH3 MFC set to  0.000000
2/20/2012	10:21:20 AM	SiCl4 MFC set to  0.000000
2/20/2012	10:21:20 AM	Bypass solenoid MFC set to  0.000000
2/20/2012	10:21:20 AM	Tube furnace set to 0
2/20/2012	10:21:50 AM	Helium valve closed
2/20/2012	10:21:50 AM	H2 valve closed
2/20/2012	10:21:50 AM	BCl3 valve closed
2/20/2012	10:21:50 AM	PH3 valve closed
2/20/2012	10:21:50 AM	SiCl4 pre valve closed
2/20/2012	10:21:50 AM	SiCl4 post valve closed
2/20/2012	10:21:50 AM	Bypass valve closed
2/20/2012	10:21:50 AM	Bubbler valve closed
2/20/2012	10:21:50 AM	Main Vac valve opened
2/20/2012	10:21:50 AM	Helium MFC set to  0.000000
2/20/2012	10:21:50 AM	H2 MFC set to  0.000000
2/20/2012	10:21:50 AM	BCl3 MFC set to  0.000000
2/20/2012	10:21:50 AM	PH3 MFC set to  0.000000
2/20/2012	10:21:50 AM	SiCl4 MFC set to  0.000000
2/20/2012	10:21:50 AM	Bypass solenoid MFC set to  0.000000
2/20/2012	10:21:50 AM	Tube furnace set to 0
2/20/2012	10:22:20 AM	H2 valve closed
2/20/2012	10:22:20 AM	BCl3 valve closed
2/20/2012	10:22:20 AM	PH3 valve closed
2/20/2012	10:22:20 AM	SiCl4 pre valve closed
2/20/2012	10:22:20 AM	SiCl4 post valve closed
2/20/2012	10:22:20 AM	Bypass valve closed
2/20/2012	10:22:20 AM	Bubbler valve closed
2/20/2012	10:22:20 AM	Helium valve opened
2/20/2012	10:22:20 AM	Main Vac valve opened
2/20/2012	10:22:20 AM	Helium MFC set to  20.000000
2/20/2012	10:22:20 AM	H2 MFC set to  0.000000
2/20/2012	10:22:20 AM	BCl3 MFC set to  0.000000
2/20/2012	10:22:20 AM	PH3 MFC set to  0.000000
2/20/2012	10:22:20 AM	SiCl4 MFC set to  0.000000
2/20/2012	10:22:20 AM	Bypass solenoid MFC set to  0.000000
2/20/2012	10:22:21 AM	Tube furnace set to 0
2/20/2012	10:22:51 AM	Helium valve closed
2/20/2012	10:22:51 AM	H2 valve closed
2/20/2012	10:22:51 AM	BCl3 valve closed
2/20/2012	10:22:51 AM	PH3 valve closed
2/20/2012	10:22:51 AM	SiCl4 pre valve closed
2/20/2012	10:22:51 AM	SiCl4 post valve closed
2/20/2012	10:22:51 AM	Bypass valve closed
2/20/2012	10:22:51 AM	Bubbler valve closed
2/20/2012	10:22:51 AM	Main Vac valve opened
2/20/2012	10:22:51 AM	Helium MFC set to  0.000000
2/20/2012	10:22:51 AM	H2 MFC set to  0.000000
2/20/2012	10:22:51 AM	BCl3 MFC set to  0.000000
2/20/2012	10:22:51 AM	PH3 MFC set to  0.000000
2/20/2012	10:22:51 AM	SiCl4 MFC set to  0.000000
2/20/2012	10:22:51 AM	Bypass solenoid MFC set to  0.000000
2/20/2012	10:22:51 AM	Tube furnace set to 0
2/20/2012	10:23:21 AM	H2 valve closed
2/20/2012	10:23:21 AM	BCl3 valve closed
2/20/2012	10:23:21 AM	PH3 valve closed
2/20/2012	10:23:21 AM	SiCl4 pre valve closed
2/20/2012	10:23:21 AM	SiCl4 post valve closed
2/20/2012	10:23:21 AM	Bypass valve closed
2/20/2012	10:23:21 AM	Bubbler valve closed
2/20/2012	10:23:21 AM	Helium valve opened
2/20/2012	10:23:21 AM	Main Vac valve opened
2/20/2012	10:23:21 AM	Helium MFC set to  20.000000
2/20/2012	10:23:21 AM	H2 MFC set to  0.000000
2/20/2012	10:23:21 AM	BCl3 MFC set to  0.000000
2/20/2012	10:23:21 AM	PH3 MFC set to  0.000000
2/20/2012	10:23:21 AM	SiCl4 MFC set to  0.000000
2/20/2012	10:23:21 AM	Bypass solenoid MFC set to  0.000000
2/20/2012	10:23:21 AM	Tube furnace set to 0
2/20/2012	10:23:51 AM	Helium valve closed
2/20/2012	10:23:51 AM	H2 valve closed
2/20/2012	10:23:51 AM	BCl3 valve closed
2/20/2012	10:23:51 AM	PH3 valve closed
2/20/2012	10:23:51 AM	SiCl4 pre valve closed
2/20/2012	10:23:51 AM	SiCl4 post valve closed
2/20/2012	10:23:51 AM	Bypass valve closed
2/20/2012	10:23:51 AM	Bubbler valve closed
2/20/2012	10:23:51 AM	Main Vac valve opened
2/20/2012	10:23:51 AM	Helium MFC set to  0.000000
2/20/2012	10:23:51 AM	H2 MFC set to  0.000000
2/20/2012	10:23:51 AM	BCl3 MFC set to  0.000000
2/20/2012	10:23:51 AM	PH3 MFC set to  0.000000
2/20/2012	10:23:51 AM	SiCl4 MFC set to  0.000000
2/20/2012	10:23:51 AM	Bypass solenoid MFC set to  0.000000
2/20/2012	10:23:51 AM	Tube furnace set to 0
2/20/2012	10:24:21 AM	H2 valve closed
2/20/2012	10:24:21 AM	BCl3 valve closed
2/20/2012	10:24:21 AM	PH3 valve closed
2/20/2012	10:24:21 AM	SiCl4 pre valve closed
2/20/2012	10:24:21 AM	SiCl4 post valve closed
2/20/2012	10:24:21 AM	Bypass valve closed
2/20/2012	10:24:21 AM	Bubbler valve closed
2/20/2012	10:24:21 AM	Helium valve opened
2/20/2012	10:24:21 AM	Main Vac valve opened
2/20/2012	10:24:21 AM	Helium MFC set to  20.000000
2/20/2012	10:24:21 AM	H2 MFC set to  0.000000
2/20/2012	10:24:21 AM	BCl3 MFC set to  0.000000
2/20/2012	10:24:21 AM	PH3 MFC set to  0.000000
2/20/2012	10:24:21 AM	SiCl4 MFC set to  0.000000
2/20/2012	10:24:21 AM	Bypass solenoid MFC set to  0.000000
2/20/2012	10:24:21 AM	Tube furnace set to 0
2/20/2012	10:24:51 AM	Helium valve closed
2/20/2012	10:24:51 AM	H2 valve closed
2/20/2012	10:24:51 AM	BCl3 valve closed
2/20/2012	10:24:51 AM	PH3 valve closed
2/20/2012	10:24:51 AM	SiCl4 pre valve closed
2/20/2012	10:24:51 AM	SiCl4 post valve closed
2/20/2012	10:24:51 AM	Bypass valve closed
2/20/2012	10:24:51 AM	Bubbler valve closed
2/20/2012	10:24:51 AM	Main Vac valve opened
2/20/2012	10:24:51 AM	Helium MFC set to  0.000000
2/20/2012	10:24:51 AM	H2 MFC set to  0.000000
2/20/2012	10:24:51 AM	BCl3 MFC set to  0.000000
2/20/2012	10:24:51 AM	PH3 MFC set to  0.000000
2/20/2012	10:24:51 AM	SiCl4 MFC set to  0.000000
2/20/2012	10:24:51 AM	Bypass solenoid MFC set to  0.000000
2/20/2012	10:24:52 AM	Tube furnace set to 0
2/20/2012	10:25:22 AM	H2 valve closed
2/20/2012	10:25:22 AM	BCl3 valve closed
2/20/2012	10:25:22 AM	PH3 valve closed
2/20/2012	10:25:22 AM	SiCl4 pre valve closed
2/20/2012	10:25:22 AM	SiCl4 post valve closed
2/20/2012	10:25:22 AM	Bypass valve closed
2/20/2012	10:25:22 AM	Bubbler valve closed
2/20/2012	10:25:22 AM	Helium valve opened
2/20/2012	10:25:22 AM	Main Vac valve opened
2/20/2012	10:25:22 AM	Helium MFC set to  20.000000
2/20/2012	10:25:22 AM	H2 MFC set to  0.000000
2/20/2012	10:25:22 AM	BCl3 MFC set to  0.000000
2/20/2012	10:25:22 AM	PH3 MFC set to  0.000000
2/20/2012	10:25:22 AM	SiCl4 MFC set to  0.000000
2/20/2012	10:25:22 AM	Bypass solenoid MFC set to  0.000000
2/20/2012	10:25:22 AM	Tube furnace set to 0
2/20/2012	10:25:52 AM	Helium valve closed
2/20/2012	10:25:52 AM	H2 valve closed
2/20/2012	10:25:52 AM	BCl3 valve closed
2/20/2012	10:25:52 AM	PH3 valve closed
2/20/2012	10:25:52 AM	SiCl4 pre valve closed
2/20/2012	10:25:52 AM	SiCl4 post valve closed
2/20/2012	10:25:52 AM	Bypass valve closed
2/20/2012	10:25:52 AM	Bubbler valve closed
2/20/2012	10:25:52 AM	Main Vac valve opened
2/20/2012	10:25:52 AM	Helium MFC set to  0.000000
2/20/2012	10:25:52 AM	H2 MFC set to  0.000000
2/20/2012	10:25:52 AM	BCl3 MFC set to  0.000000
2/20/2012	10:25:52 AM	PH3 MFC set to  0.000000
2/20/2012	10:25:52 AM	SiCl4 MFC set to  0.000000
2/20/2012	10:25:52 AM	Bypass solenoid MFC set to  0.000000
2/20/2012	10:25:52 AM	Tube furnace set to 0
2/20/2012	10:26:22 AM	H2 valve closed
2/20/2012	10:26:22 AM	BCl3 valve closed
2/20/2012	10:26:22 AM	PH3 valve closed
2/20/2012	10:26:22 AM	SiCl4 pre valve closed
2/20/2012	10:26:22 AM	SiCl4 post valve closed
2/20/2012	10:26:22 AM	Bypass valve closed
2/20/2012	10:26:22 AM	Bubbler valve closed
2/20/2012	10:26:22 AM	Helium valve opened
2/20/2012	10:26:22 AM	Main Vac valve opened
2/20/2012	10:26:22 AM	Helium MFC set to  20.000000
2/20/2012	10:26:22 AM	H2 MFC set to  0.000000
2/20/2012	10:26:22 AM	BCl3 MFC set to  0.000000
2/20/2012	10:26:22 AM	PH3 MFC set to  0.000000
2/20/2012	10:26:22 AM	SiCl4 MFC set to  0.000000
2/20/2012	10:26:22 AM	Bypass solenoid MFC set to  0.000000
2/20/2012	10:26:22 AM	Tube furnace set to 0
2/20/2012	10:26:52 AM	Helium valve closed
2/20/2012	10:26:52 AM	H2 valve closed
2/20/2012	10:26:52 AM	BCl3 valve closed
2/20/2012	10:26:52 AM	PH3 valve closed
2/20/2012	10:26:52 AM	SiCl4 pre valve closed
2/20/2012	10:26:52 AM	SiCl4 post valve closed
2/20/2012	10:26:52 AM	Bypass valve closed
2/20/2012	10:26:52 AM	Bubbler valve closed
2/20/2012	10:26:52 AM	Main Vac valve opened
2/20/2012	10:26:52 AM	Helium MFC set to  0.000000
2/20/2012	10:26:52 AM	H2 MFC set to  0.000000
2/20/2012	10:26:52 AM	BCl3 MFC set to  0.000000
2/20/2012	10:26:52 AM	PH3 MFC set to  0.000000
2/20/2012	10:26:52 AM	SiCl4 MFC set to  0.000000
2/20/2012	10:26:52 AM	Bypass solenoid MFC set to  0.000000
2/20/2012	10:26:52 AM	Tube furnace set to 200
2/20/2012	10:27:22 AM	H2 valve closed
2/20/2012	10:27:22 AM	BCl3 valve closed
2/20/2012	10:27:22 AM	PH3 valve closed
2/20/2012	10:27:22 AM	SiCl4 pre valve closed
2/20/2012	10:27:22 AM	SiCl4 post valve closed
2/20/2012	10:27:22 AM	Bypass valve closed
2/20/2012	10:27:22 AM	Bubbler valve closed
2/20/2012	10:27:22 AM	Helium valve opened
2/20/2012	10:27:22 AM	Main Vac valve opened
2/20/2012	10:27:22 AM	Helium MFC set to  20.000000
2/20/2012	10:27:22 AM	H2 MFC set to  0.000000
2/20/2012	10:27:22 AM	BCl3 MFC set to  0.000000
2/20/2012	10:27:22 AM	PH3 MFC set to  0.000000
2/20/2012	10:27:22 AM	SiCl4 MFC set to  0.000000
2/20/2012	10:27:22 AM	Bypass solenoid MFC set to  0.000000
2/20/2012	10:27:23 AM	Tube furnace set to 200
2/20/2012	10:27:53 AM	Helium valve closed
2/20/2012	10:27:53 AM	H2 valve closed
2/20/2012	10:27:53 AM	BCl3 valve closed
2/20/2012	10:27:53 AM	PH3 valve closed
2/20/2012	10:27:53 AM	SiCl4 pre valve closed
2/20/2012	10:27:53 AM	SiCl4 post valve closed
2/20/2012	10:27:53 AM	Bypass valve closed
2/20/2012	10:27:53 AM	Bubbler valve closed
2/20/2012	10:27:53 AM	Main Vac valve opened
2/20/2012	10:27:53 AM	Helium MFC set to  0.000000
2/20/2012	10:27:53 AM	H2 MFC set to  0.000000
2/20/2012	10:27:53 AM	BCl3 MFC set to  0.000000
2/20/2012	10:27:53 AM	PH3 MFC set to  0.000000
2/20/2012	10:27:53 AM	SiCl4 MFC set to  0.000000
2/20/2012	10:27:53 AM	Bypass solenoid MFC set to  0.000000
2/20/2012	10:27:53 AM	Tube furnace set to 200
2/20/2012	10:28:23 AM	H2 valve closed
2/20/2012	10:28:23 AM	BCl3 valve closed
2/20/2012	10:28:23 AM	PH3 valve closed
2/20/2012	10:28:23 AM	SiCl4 pre valve closed
2/20/2012	10:28:23 AM	SiCl4 post valve closed
2/20/2012	10:28:23 AM	Bypass valve closed
2/20/2012	10:28:23 AM	Bubbler valve closed
2/20/2012	10:28:23 AM	Helium valve opened
2/20/2012	10:28:23 AM	Main Vac valve opened
2/20/2012	10:28:23 AM	Helium MFC set to  20.000000
2/20/2012	10:28:23 AM	H2 MFC set to  0.000000
2/20/2012	10:28:23 AM	BCl3 MFC set to  0.000000
2/20/2012	10:28:23 AM	PH3 MFC set to  0.000000
2/20/2012	10:28:23 AM	SiCl4 MFC set to  0.000000
2/20/2012	10:28:23 AM	Bypass solenoid MFC set to  0.000000
2/20/2012	10:28:23 AM	Tube furnace set to 200
2/20/2012	10:28:53 AM	Helium valve closed
2/20/2012	10:28:53 AM	H2 valve closed
2/20/2012	10:28:53 AM	BCl3 valve closed
2/20/2012	10:28:53 AM	PH3 valve closed
2/20/2012	10:28:53 AM	SiCl4 pre valve closed
2/20/2012	10:28:53 AM	SiCl4 post valve closed
2/20/2012	10:28:53 AM	Bypass valve closed
2/20/2012	10:28:53 AM	Bubbler valve closed
2/20/2012	10:28:53 AM	Main Vac valve opened
2/20/2012	10:28:53 AM	Helium MFC set to  0.000000
2/20/2012	10:28:53 AM	H2 MFC set to  0.000000
2/20/2012	10:28:53 AM	BCl3 MFC set to  0.000000
2/20/2012	10:28:53 AM	PH3 MFC set to  0.000000
2/20/2012	10:28:53 AM	SiCl4 MFC set to  0.000000
2/20/2012	10:28:53 AM	Bypass solenoid MFC set to  0.000000
2/20/2012	10:28:53 AM	Tube furnace set to 200
2/20/2012	10:29:23 AM	H2 valve closed
2/20/2012	10:29:23 AM	BCl3 valve closed
2/20/2012	10:29:23 AM	PH3 valve closed
2/20/2012	10:29:23 AM	SiCl4 pre valve closed
2/20/2012	10:29:23 AM	SiCl4 post valve closed
2/20/2012	10:29:23 AM	Bypass valve closed
2/20/2012	10:29:23 AM	Bubbler valve closed
2/20/2012	10:29:23 AM	Helium valve opened
2/20/2012	10:29:23 AM	Main Vac valve opened
2/20/2012	10:29:23 AM	Helium MFC set to  20.000000
2/20/2012	10:29:23 AM	H2 MFC set to  0.000000
2/20/2012	10:29:23 AM	BCl3 MFC set to  0.000000
2/20/2012	10:29:23 AM	PH3 MFC set to  0.000000
2/20/2012	10:29:23 AM	SiCl4 MFC set to  0.000000
2/20/2012	10:29:23 AM	Bypass solenoid MFC set to  0.000000
2/20/2012	10:29:23 AM	Tube furnace set to 200
2/20/2012	10:29:53 AM	Helium valve closed
2/20/2012	10:29:53 AM	H2 valve closed
2/20/2012	10:29:53 AM	BCl3 valve closed
2/20/2012	10:29:53 AM	PH3 valve closed
2/20/2012	10:29:53 AM	SiCl4 pre valve closed
2/20/2012	10:29:53 AM	SiCl4 post valve closed
2/20/2012	10:29:53 AM	Bypass valve closed
2/20/2012	10:29:53 AM	Bubbler valve closed
2/20/2012	10:29:53 AM	Main Vac valve opened
2/20/2012	10:29:53 AM	Helium MFC set to  0.000000
2/20/2012	10:29:53 AM	H2 MFC set to  0.000000
2/20/2012	10:29:53 AM	BCl3 MFC set to  0.000000
2/20/2012	10:29:53 AM	PH3 MFC set to  0.000000
2/20/2012	10:29:53 AM	SiCl4 MFC set to  0.000000
2/20/2012	10:29:53 AM	Bypass solenoid MFC set to  0.000000
2/20/2012	10:29:54 AM	Tube furnace set to 200
2/20/2012	10:30:24 AM	H2 valve closed
2/20/2012	10:30:24 AM	BCl3 valve closed
2/20/2012	10:30:24 AM	PH3 valve closed
2/20/2012	10:30:24 AM	SiCl4 pre valve closed
2/20/2012	10:30:24 AM	SiCl4 post valve closed
2/20/2012	10:30:24 AM	Bypass valve closed
2/20/2012	10:30:24 AM	Bubbler valve closed
2/20/2012	10:30:24 AM	Helium valve opened
2/20/2012	10:30:24 AM	Main Vac valve opened
2/20/2012	10:30:24 AM	Helium MFC set to  20.000000
2/20/2012	10:30:24 AM	H2 MFC set to  0.000000
2/20/2012	10:30:24 AM	BCl3 MFC set to  0.000000
2/20/2012	10:30:24 AM	PH3 MFC set to  0.000000
2/20/2012	10:30:24 AM	SiCl4 MFC set to  0.000000
2/20/2012	10:30:24 AM	Bypass solenoid MFC set to  0.000000
2/20/2012	10:30:24 AM	Tube furnace set to 200
2/20/2012	10:30:54 AM	Helium valve closed
2/20/2012	10:30:54 AM	H2 valve closed
2/20/2012	10:30:54 AM	BCl3 valve closed
2/20/2012	10:30:54 AM	PH3 valve closed
2/20/2012	10:30:54 AM	SiCl4 pre valve closed
2/20/2012	10:30:54 AM	SiCl4 post valve closed
2/20/2012	10:30:54 AM	Bypass valve closed
2/20/2012	10:30:54 AM	Bubbler valve closed
2/20/2012	10:30:54 AM	Main Vac valve opened
2/20/2012	10:30:54 AM	Helium MFC set to  0.000000
2/20/2012	10:30:54 AM	H2 MFC set to  0.000000
2/20/2012	10:30:54 AM	BCl3 MFC set to  0.000000
2/20/2012	10:30:54 AM	PH3 MFC set to  0.000000
2/20/2012	10:30:54 AM	SiCl4 MFC set to  0.000000
2/20/2012	10:30:54 AM	Bypass solenoid MFC set to  0.000000
2/20/2012	10:30:54 AM	Tube furnace set to 200
2/20/2012	10:31:24 AM	H2 valve closed
2/20/2012	10:31:24 AM	BCl3 valve closed
2/20/2012	10:31:24 AM	PH3 valve closed
2/20/2012	10:31:24 AM	SiCl4 pre valve closed
2/20/2012	10:31:24 AM	SiCl4 post valve closed
2/20/2012	10:31:24 AM	Bypass valve closed
2/20/2012	10:31:24 AM	Bubbler valve closed
2/20/2012	10:31:24 AM	Helium valve opened
2/20/2012	10:31:24 AM	Main Vac valve opened
2/20/2012	10:31:24 AM	Helium MFC set to  20.000000
2/20/2012	10:31:24 AM	H2 MFC set to  0.000000
2/20/2012	10:31:24 AM	BCl3 MFC set to  0.000000
2/20/2012	10:31:24 AM	PH3 MFC set to  0.000000
2/20/2012	10:31:24 AM	SiCl4 MFC set to  0.000000
2/20/2012	10:31:24 AM	Bypass solenoid MFC set to  0.000000
2/20/2012	10:31:24 AM	Tube furnace set to 200
2/20/2012	10:31:54 AM	Helium valve closed
2/20/2012	10:31:54 AM	H2 valve closed
2/20/2012	10:31:54 AM	BCl3 valve closed
2/20/2012	10:31:54 AM	PH3 valve closed
2/20/2012	10:31:54 AM	SiCl4 pre valve closed
2/20/2012	10:31:54 AM	SiCl4 post valve closed
2/20/2012	10:31:54 AM	Bypass valve closed
2/20/2012	10:31:54 AM	Bubbler valve closed
2/20/2012	10:31:54 AM	Main Vac valve opened
2/20/2012	10:31:54 AM	Helium MFC set to  0.000000
2/20/2012	10:31:54 AM	H2 MFC set to  0.000000
2/20/2012	10:31:54 AM	BCl3 MFC set to  0.000000
2/20/2012	10:31:54 AM	PH3 MFC set to  0.000000
2/20/2012	10:31:54 AM	SiCl4 MFC set to  0.000000
2/20/2012	10:31:54 AM	Bypass solenoid MFC set to  0.000000
2/20/2012	10:31:54 AM	Tube furnace set to 200
2/20/2012	10:32:24 AM	H2 valve closed
2/20/2012	10:32:24 AM	BCl3 valve closed
2/20/2012	10:32:24 AM	PH3 valve closed
2/20/2012	10:32:24 AM	SiCl4 pre valve closed
2/20/2012	10:32:24 AM	SiCl4 post valve closed
2/20/2012	10:32:24 AM	Bypass valve closed
2/20/2012	10:32:24 AM	Bubbler valve closed
2/20/2012	10:32:24 AM	Helium valve opened
2/20/2012	10:32:24 AM	Main Vac valve opened
2/20/2012	10:32:24 AM	Helium MFC set to  20.000000
2/20/2012	10:32:24 AM	H2 MFC set to  0.000000
2/20/2012	10:32:24 AM	BCl3 MFC set to  0.000000
2/20/2012	10:32:24 AM	PH3 MFC set to  0.000000
2/20/2012	10:32:24 AM	SiCl4 MFC set to  0.000000
2/20/2012	10:32:24 AM	Bypass solenoid MFC set to  0.000000
2/20/2012	10:32:25 AM	Tube furnace set to 200
2/20/2012	10:32:55 AM	Helium valve closed
2/20/2012	10:32:55 AM	H2 valve closed
2/20/2012	10:32:55 AM	BCl3 valve closed
2/20/2012	10:32:55 AM	PH3 valve closed
2/20/2012	10:32:55 AM	SiCl4 pre valve closed
2/20/2012	10:32:55 AM	SiCl4 post valve closed
2/20/2012	10:32:55 AM	Bypass valve closed
2/20/2012	10:32:55 AM	Bubbler valve closed
2/20/2012	10:32:55 AM	Main Vac valve opened
2/20/2012	10:32:55 AM	Helium MFC set to  0.000000
2/20/2012	10:32:55 AM	H2 MFC set to  0.000000
2/20/2012	10:32:55 AM	BCl3 MFC set to  0.000000
2/20/2012	10:32:55 AM	PH3 MFC set to  0.000000
2/20/2012	10:32:55 AM	SiCl4 MFC set to  0.000000
2/20/2012	10:32:55 AM	Bypass solenoid MFC set to  0.000000
2/20/2012	10:32:55 AM	Tube furnace set to 0
2/20/2012	10:32:56 AM	Run finished at 10:32 AM
2/20/2012	10:56:02 AM	Main Vac valve closed
2/20/2012	10:56:12 AM	Main Vac valve opened
2/20/2012	10:57:51 AM	Recipe started at 10:57 AM
2/20/2012	10:57:51 AM	Helium valve closed
2/20/2012	10:57:51 AM	H2 valve closed
2/20/2012	10:57:51 AM	BCl3 valve closed
2/20/2012	10:57:51 AM	PH3 valve closed
2/20/2012	10:57:51 AM	SiCl4 pre valve closed
2/20/2012	10:57:51 AM	SiCl4 post valve closed
2/20/2012	10:57:51 AM	Main Vac valve closed
2/20/2012	10:57:51 AM	Bypass valve closed
2/20/2012	10:57:51 AM	Bubbler valve closed
2/20/2012	10:57:51 AM	Helium MFC set to  0.000000
2/20/2012	10:57:51 AM	H2 MFC set to  0.000000
2/20/2012	10:57:51 AM	BCl3 MFC set to  0.000000
2/20/2012	10:57:51 AM	PH3 MFC set to  0.000000
2/20/2012	10:57:51 AM	SiCl4 MFC set to  0.000000
2/20/2012	10:57:51 AM	Bypass solenoid MFC set to  0.000000
2/20/2012	10:57:51 AM	Tube furnace set to 0
2/20/2012	10:57:55 AM	Helium valve closed
2/20/2012	10:57:55 AM	BCl3 valve closed
2/20/2012	10:57:55 AM	PH3 valve closed
2/20/2012	10:57:55 AM	SiCl4 pre valve closed
2/20/2012	10:57:55 AM	SiCl4 post valve closed
2/20/2012	10:57:55 AM	Main Vac valve closed
2/20/2012	10:57:55 AM	Bypass valve closed
2/20/2012	10:57:55 AM	Bubbler valve closed
2/20/2012	10:57:55 AM	H2 valve opened
2/20/2012	10:57:55 AM	Helium MFC set to  0.000000
2/20/2012	10:57:55 AM	H2 MFC set to  500.000000
2/20/2012	10:57:55 AM	BCl3 MFC set to  0.000000
2/20/2012	10:57:55 AM	PH3 MFC set to  0.000000
2/20/2012	10:57:55 AM	SiCl4 MFC set to  0.000000
2/20/2012	10:57:55 AM	Bypass solenoid MFC set to  0.000000
2/20/2012	10:57:55 AM	Tube furnace set to 0
2/20/2012	10:58:59 AM	Helium valve closed
2/20/2012	10:58:59 AM	BCl3 valve closed
2/20/2012	10:58:59 AM	PH3 valve closed
2/20/2012	10:58:59 AM	SiCl4 pre valve closed
2/20/2012	10:58:59 AM	SiCl4 post valve closed
2/20/2012	10:58:59 AM	Main Vac valve closed
2/20/2012	10:58:59 AM	Bypass valve closed
2/20/2012	10:58:59 AM	H2 valve opened
2/20/2012	10:58:59 AM	Bubbler valve opened
2/20/2012	10:58:59 AM	Helium MFC set to  0.000000
2/20/2012	10:58:59 AM	H2 MFC set to  500.000000
2/20/2012	10:58:59 AM	BCl3 MFC set to  0.000000
2/20/2012	10:58:59 AM	PH3 MFC set to  0.000000
2/20/2012	10:58:59 AM	SiCl4 MFC set to  0.000000
2/20/2012	10:58:59 AM	Bypass solenoid MFC set to  0.000000
2/20/2012	10:59:00 AM	Tube furnace set to 0
2/20/2012	10:59:01 AM	Helium valve closed
2/20/2012	10:59:01 AM	BCl3 valve closed
2/20/2012	10:59:01 AM	PH3 valve closed
2/20/2012	10:59:01 AM	SiCl4 pre valve closed
2/20/2012	10:59:01 AM	SiCl4 post valve closed
2/20/2012	10:59:01 AM	Main Vac valve closed
2/20/2012	10:59:01 AM	Bypass valve closed
2/20/2012	10:59:01 AM	H2 valve opened
2/20/2012	10:59:01 AM	Bubbler valve opened
2/20/2012	10:59:01 AM	Helium MFC set to  0.000000
2/20/2012	10:59:01 AM	H2 MFC set to  500.000000
2/20/2012	10:59:01 AM	BCl3 MFC set to  0.000000
2/20/2012	10:59:01 AM	PH3 MFC set to  0.000000
2/20/2012	10:59:01 AM	SiCl4 MFC set to  0.000000
2/20/2012	10:59:01 AM	Bypass solenoid MFC set to  0.000000
2/20/2012	10:59:01 AM	Tube furnace set to 1000
2/20/2012	11:19:01 AM	Helium valve closed
2/20/2012	11:19:01 AM	BCl3 valve closed
2/20/2012	11:19:01 AM	PH3 valve closed
2/20/2012	11:19:01 AM	Main Vac valve closed
2/20/2012	11:19:01 AM	Bypass valve closed
2/20/2012	11:19:01 AM	H2 valve opened
2/20/2012	11:19:01 AM	SiCl4 pre valve opened
2/20/2012	11:19:01 AM	SiCl4 post valve opened
2/20/2012	11:19:01 AM	Bubbler valve opened
2/20/2012	11:19:01 AM	Helium MFC set to  0.000000
2/20/2012	11:19:01 AM	H2 MFC set to  500.000000
2/20/2012	11:19:01 AM	BCl3 MFC set to  0.000000
2/20/2012	11:19:01 AM	PH3 MFC set to  0.000000
2/20/2012	11:19:01 AM	SiCl4 MFC set to  50.000000
2/20/2012	11:19:01 AM	Bypass solenoid MFC set to  0.000000
2/20/2012	11:19:01 AM	Tube furnace set to 1000
2/20/2012	11:34:01 AM	Helium valve closed
2/20/2012	11:34:01 AM	BCl3 valve closed
2/20/2012	11:34:01 AM	PH3 valve closed
2/20/2012	11:34:01 AM	SiCl4 pre valve closed
2/20/2012	11:34:01 AM	SiCl4 post valve closed
2/20/2012	11:34:01 AM	Main Vac valve closed
2/20/2012	11:34:01 AM	Bypass valve closed
2/20/2012	11:34:01 AM	H2 valve opened
2/20/2012	11:34:01 AM	Bubbler valve opened
2/20/2012	11:34:01 AM	Helium MFC set to  0.000000
2/20/2012	11:34:01 AM	H2 MFC set to  500.000000
2/20/2012	11:34:01 AM	BCl3 MFC set to  0.000000
2/20/2012	11:34:01 AM	PH3 MFC set to  0.000000
2/20/2012	11:34:01 AM	SiCl4 MFC set to  0.000000
2/20/2012	11:34:01 AM	Bypass solenoid MFC set to  0.000000
2/20/2012	11:34:01 AM	Tube furnace set to 950
2/20/2012	11:36:01 AM	Helium valve closed
2/20/2012	11:36:01 AM	BCl3 valve closed
2/20/2012	11:36:01 AM	PH3 valve closed
2/20/2012	11:36:01 AM	SiCl4 pre valve closed
2/20/2012	11:36:01 AM	SiCl4 post valve closed
2/20/2012	11:36:01 AM	Main Vac valve closed
2/20/2012	11:36:01 AM	Bypass valve closed
2/20/2012	11:36:01 AM	H2 valve opened
2/20/2012	11:36:01 AM	Bubbler valve opened
2/20/2012	11:36:01 AM	Helium MFC set to  0.000000
2/20/2012	11:36:01 AM	H2 MFC set to  500.000000
2/20/2012	11:36:01 AM	BCl3 MFC set to  0.000000
2/20/2012	11:36:01 AM	PH3 MFC set to  0.000000
2/20/2012	11:36:01 AM	SiCl4 MFC set to  0.000000
2/20/2012	11:36:01 AM	Bypass solenoid MFC set to  0.000000
2/20/2012	11:36:02 AM	Tube furnace set to 900
2/20/2012	11:38:02 AM	Helium valve closed
2/20/2012	11:38:02 AM	BCl3 valve closed
2/20/2012	11:38:02 AM	PH3 valve closed
2/20/2012	11:38:02 AM	SiCl4 pre valve closed
2/20/2012	11:38:02 AM	SiCl4 post valve closed
2/20/2012	11:38:02 AM	Main Vac valve closed
2/20/2012	11:38:02 AM	Bypass valve closed
2/20/2012	11:38:02 AM	H2 valve opened
2/20/2012	11:38:02 AM	Bubbler valve opened
2/20/2012	11:38:02 AM	Helium MFC set to  0.000000
2/20/2012	11:38:02 AM	H2 MFC set to  500.000000
2/20/2012	11:38:02 AM	BCl3 MFC set to  0.000000
2/20/2012	11:38:02 AM	PH3 MFC set to  0.000000
2/20/2012	11:38:02 AM	SiCl4 MFC set to  0.000000
2/20/2012	11:38:02 AM	Bypass solenoid MFC set to  0.000000
2/20/2012	11:38:02 AM	Tube furnace set to 850
2/20/2012	11:40:02 AM	H2 valve closed
2/20/2012	11:40:02 AM	BCl3 valve closed
2/20/2012	11:40:02 AM	PH3 valve closed
2/20/2012	11:40:02 AM	SiCl4 pre valve closed
2/20/2012	11:40:02 AM	SiCl4 post valve closed
2/20/2012	11:40:02 AM	Main Vac valve closed
2/20/2012	11:40:02 AM	Bypass valve closed
2/20/2012	11:40:02 AM	Helium valve opened
2/20/2012	11:40:02 AM	Bubbler valve opened
2/20/2012	11:40:02 AM	Helium MFC set to  500.000000
2/20/2012	11:40:02 AM	H2 MFC set to  0.000000
2/20/2012	11:40:02 AM	BCl3 MFC set to  0.000000
2/20/2012	11:40:02 AM	PH3 MFC set to  0.000000
2/20/2012	11:40:02 AM	SiCl4 MFC set to  0.000000
2/20/2012	11:40:02 AM	Bypass solenoid MFC set to  0.000000
2/20/2012	11:40:02 AM	Tube furnace set to 800
2/20/2012	11:42:02 AM	H2 valve closed
2/20/2012	11:42:02 AM	BCl3 valve closed
2/20/2012	11:42:02 AM	PH3 valve closed
2/20/2012	11:42:02 AM	SiCl4 pre valve closed
2/20/2012	11:42:02 AM	SiCl4 post valve closed
2/20/2012	11:42:02 AM	Main Vac valve closed
2/20/2012	11:42:02 AM	Bypass valve closed
2/20/2012	11:42:02 AM	Helium valve opened
2/20/2012	11:42:02 AM	Bubbler valve opened
2/20/2012	11:42:02 AM	Helium MFC set to  500.000000
2/20/2012	11:42:02 AM	H2 MFC set to  0.000000
2/20/2012	11:42:02 AM	BCl3 MFC set to  0.000000
2/20/2012	11:42:02 AM	PH3 MFC set to  0.000000
2/20/2012	11:42:02 AM	SiCl4 MFC set to  0.000000
2/20/2012	11:42:02 AM	Bypass solenoid MFC set to  0.000000
2/20/2012	11:42:02 AM	Tube furnace set to 750
2/20/2012	11:44:02 AM	H2 valve closed
2/20/2012	11:44:02 AM	BCl3 valve closed
2/20/2012	11:44:02 AM	PH3 valve closed
2/20/2012	11:44:02 AM	SiCl4 pre valve closed
2/20/2012	11:44:02 AM	SiCl4 post valve closed
2/20/2012	11:44:02 AM	Main Vac valve closed
2/20/2012	11:44:02 AM	Bypass valve closed
2/20/2012	11:44:02 AM	Helium valve opened
2/20/2012	11:44:02 AM	Bubbler valve opened
2/20/2012	11:44:02 AM	Helium MFC set to  500.000000
2/20/2012	11:44:02 AM	H2 MFC set to  0.000000
2/20/2012	11:44:02 AM	BCl3 MFC set to  0.000000
2/20/2012	11:44:02 AM	PH3 MFC set to  0.000000
2/20/2012	11:44:02 AM	SiCl4 MFC set to  0.000000
2/20/2012	11:44:02 AM	Bypass solenoid MFC set to  0.000000
2/20/2012	11:44:02 AM	Tube furnace set to 0
2/20/2012	12:04:02 PM	Helium valve closed
2/20/2012	12:04:02 PM	H2 valve closed
2/20/2012	12:04:02 PM	BCl3 valve closed
2/20/2012	12:04:02 PM	PH3 valve closed
2/20/2012	12:04:02 PM	SiCl4 pre valve closed
2/20/2012	12:04:02 PM	SiCl4 post valve closed
2/20/2012	12:04:02 PM	Main Vac valve closed
2/20/2012	12:04:02 PM	Bypass valve closed
2/20/2012	12:04:02 PM	Bubbler valve closed
2/20/2012	12:04:02 PM	Helium MFC set to  0.000000
2/20/2012	12:04:02 PM	H2 MFC set to  0.000000
2/20/2012	12:04:02 PM	BCl3 MFC set to  0.000000
2/20/2012	12:04:02 PM	PH3 MFC set to  0.000000
2/20/2012	12:04:02 PM	SiCl4 MFC set to  0.000000
2/20/2012	12:04:02 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	12:04:02 PM	Tube furnace set to 0
2/20/2012	12:04:03 PM	Run finished at 12:04 PM
2/20/2012	12:44:08 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/20/2012	12:44:09 PM	Recipe started at 12:44 PM
2/20/2012	12:44:09 PM	Helium valve closed
2/20/2012	12:44:09 PM	H2 valve closed
2/20/2012	12:44:09 PM	BCl3 valve closed
2/20/2012	12:44:09 PM	PH3 valve closed
2/20/2012	12:44:09 PM	SiCl4 pre valve closed
2/20/2012	12:44:09 PM	SiCl4 post valve closed
2/20/2012	12:44:09 PM	Main Vac valve closed
2/20/2012	12:44:09 PM	Bypass valve closed
2/20/2012	12:44:09 PM	Bubbler valve closed
2/20/2012	12:44:09 PM	Helium MFC set to  0.000000
2/20/2012	12:44:09 PM	H2 MFC set to  0.000000
2/20/2012	12:44:09 PM	BCl3 MFC set to  0.000000
2/20/2012	12:44:09 PM	PH3 MFC set to  0.000000
2/20/2012	12:44:09 PM	SiCl4 MFC set to  0.000000
2/20/2012	12:44:09 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	12:44:09 PM	Tube furnace set to 0
2/20/2012	12:44:12 PM	H2 valve closed
2/20/2012	12:44:12 PM	BCl3 valve closed
2/20/2012	12:44:12 PM	PH3 valve closed
2/20/2012	12:44:12 PM	SiCl4 pre valve closed
2/20/2012	12:44:12 PM	SiCl4 post valve closed
2/20/2012	12:44:12 PM	Main Vac valve closed
2/20/2012	12:44:12 PM	Bypass valve closed
2/20/2012	12:44:12 PM	Bubbler valve closed
2/20/2012	12:44:12 PM	Helium valve opened
2/20/2012	12:44:12 PM	Helium MFC set to  500.000000
2/20/2012	12:44:12 PM	H2 MFC set to  0.000000
2/20/2012	12:44:12 PM	BCl3 MFC set to  0.000000
2/20/2012	12:44:12 PM	PH3 MFC set to  0.000000
2/20/2012	12:44:12 PM	SiCl4 MFC set to  0.000000
2/20/2012	12:44:12 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	12:44:12 PM	Tube furnace set to 0
2/20/2012	12:44:18 PM	Helium valve closed
2/20/2012	12:44:18 PM	H2 valve closed
2/20/2012	12:44:18 PM	BCl3 valve closed
2/20/2012	12:44:18 PM	PH3 valve closed
2/20/2012	12:44:18 PM	SiCl4 pre valve closed
2/20/2012	12:44:18 PM	SiCl4 post valve closed
2/20/2012	12:44:18 PM	Main Vac valve closed
2/20/2012	12:44:18 PM	Bypass valve closed
2/20/2012	12:44:18 PM	Bubbler valve closed
2/20/2012	12:44:18 PM	Helium MFC set to  0.000000
2/20/2012	12:44:18 PM	H2 MFC set to  0.000000
2/20/2012	12:44:18 PM	BCl3 MFC set to  0.000000
2/20/2012	12:44:18 PM	PH3 MFC set to  0.000000
2/20/2012	12:44:18 PM	SiCl4 MFC set to  0.000000
2/20/2012	12:44:18 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	12:44:18 PM	Tube furnace set to 0
2/20/2012	12:44:19 PM	Run finished at 12:44 PM
2/20/2012	12:44:19 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/20/2012	12:46:33 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/20/2012	12:46:34 PM	Recipe started at 12:46 PM
2/20/2012	12:46:34 PM	Helium valve closed
2/20/2012	12:46:34 PM	H2 valve closed
2/20/2012	12:46:34 PM	BCl3 valve closed
2/20/2012	12:46:34 PM	PH3 valve closed
2/20/2012	12:46:34 PM	SiCl4 pre valve closed
2/20/2012	12:46:34 PM	SiCl4 post valve closed
2/20/2012	12:46:34 PM	Main Vac valve closed
2/20/2012	12:46:34 PM	Bubbler valve closed
2/20/2012	12:46:34 PM	Bypass valve opened
2/20/2012	12:46:34 PM	Helium MFC set to  0.000000
2/20/2012	12:46:34 PM	H2 MFC set to  0.000000
2/20/2012	12:46:34 PM	BCl3 MFC set to  0.000000
2/20/2012	12:46:34 PM	PH3 MFC set to  0.000000
2/20/2012	12:46:34 PM	SiCl4 MFC set to  0.000000
2/20/2012	12:46:34 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	12:46:34 PM	Tube furnace set to 0
2/20/2012	12:47:33 PM	Helium valve closed
2/20/2012	12:47:33 PM	H2 valve closed
2/20/2012	12:47:33 PM	BCl3 valve closed
2/20/2012	12:47:33 PM	PH3 valve closed
2/20/2012	12:47:33 PM	SiCl4 pre valve closed
2/20/2012	12:47:33 PM	SiCl4 post valve closed
2/20/2012	12:47:33 PM	Main Vac valve closed
2/20/2012	12:47:33 PM	Bubbler valve closed
2/20/2012	12:47:33 PM	Bypass valve opened
2/20/2012	12:47:33 PM	Helium MFC set to  0.000000
2/20/2012	12:47:33 PM	H2 MFC set to  0.000000
2/20/2012	12:47:33 PM	BCl3 MFC set to  0.000000
2/20/2012	12:47:33 PM	PH3 MFC set to  0.000000
2/20/2012	12:47:33 PM	SiCl4 MFC set to  0.000000
2/20/2012	12:47:33 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	12:47:34 PM	Tube furnace set to 0
2/20/2012	12:48:34 PM	Helium valve closed
2/20/2012	12:48:34 PM	H2 valve closed
2/20/2012	12:48:34 PM	BCl3 valve closed
2/20/2012	12:48:34 PM	PH3 valve closed
2/20/2012	12:48:34 PM	SiCl4 pre valve closed
2/20/2012	12:48:34 PM	SiCl4 post valve closed
2/20/2012	12:48:34 PM	Bypass valve closed
2/20/2012	12:48:34 PM	Bubbler valve closed
2/20/2012	12:48:34 PM	Main Vac valve opened
2/20/2012	12:48:34 PM	Helium MFC set to  0.000000
2/20/2012	12:48:34 PM	H2 MFC set to  0.000000
2/20/2012	12:48:34 PM	BCl3 MFC set to  0.000000
2/20/2012	12:48:34 PM	PH3 MFC set to  0.000000
2/20/2012	12:48:34 PM	SiCl4 MFC set to  0.000000
2/20/2012	12:48:34 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	12:48:34 PM	Tube furnace set to 0
2/20/2012	12:48:35 PM	Run finished at 12:48 PM
2/20/2012	12:48:35 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/20/2012	12:56:34 PM	Main Vac valve closed
2/20/2012	12:56:38 PM	Main Vac valve opened
2/20/2012	1:15:40 PM	Recipe started at 1:15 PM
2/20/2012	1:15:40 PM	Helium valve closed
2/20/2012	1:15:40 PM	H2 valve closed
2/20/2012	1:15:40 PM	BCl3 valve closed
2/20/2012	1:15:40 PM	PH3 valve closed
2/20/2012	1:15:40 PM	SiCl4 pre valve closed
2/20/2012	1:15:40 PM	SiCl4 post valve closed
2/20/2012	1:15:40 PM	Bypass valve closed
2/20/2012	1:15:40 PM	Bubbler valve closed
2/20/2012	1:15:40 PM	Main Vac valve opened
2/20/2012	1:15:40 PM	Helium MFC set to  0.000000
2/20/2012	1:15:40 PM	H2 MFC set to  0.000000
2/20/2012	1:15:40 PM	BCl3 MFC set to  0.000000
2/20/2012	1:15:40 PM	PH3 MFC set to  0.000000
2/20/2012	1:15:40 PM	SiCl4 MFC set to  0.000000
2/20/2012	1:15:40 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	1:15:41 PM	Tube furnace set to 0
2/20/2012	1:16:11 PM	H2 valve closed
2/20/2012	1:16:11 PM	BCl3 valve closed
2/20/2012	1:16:11 PM	PH3 valve closed
2/20/2012	1:16:11 PM	SiCl4 pre valve closed
2/20/2012	1:16:11 PM	SiCl4 post valve closed
2/20/2012	1:16:11 PM	Bypass valve closed
2/20/2012	1:16:11 PM	Bubbler valve closed
2/20/2012	1:16:11 PM	Helium valve opened
2/20/2012	1:16:11 PM	Main Vac valve opened
2/20/2012	1:16:11 PM	Helium MFC set to  20.000000
2/20/2012	1:16:11 PM	H2 MFC set to  0.000000
2/20/2012	1:16:11 PM	BCl3 MFC set to  0.000000
2/20/2012	1:16:11 PM	PH3 MFC set to  0.000000
2/20/2012	1:16:11 PM	SiCl4 MFC set to  0.000000
2/20/2012	1:16:11 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	1:16:11 PM	Tube furnace set to 0
2/20/2012	1:16:41 PM	Helium valve closed
2/20/2012	1:16:41 PM	H2 valve closed
2/20/2012	1:16:41 PM	BCl3 valve closed
2/20/2012	1:16:41 PM	PH3 valve closed
2/20/2012	1:16:41 PM	SiCl4 pre valve closed
2/20/2012	1:16:41 PM	SiCl4 post valve closed
2/20/2012	1:16:41 PM	Bypass valve closed
2/20/2012	1:16:41 PM	Bubbler valve closed
2/20/2012	1:16:41 PM	Main Vac valve opened
2/20/2012	1:16:41 PM	Helium MFC set to  0.000000
2/20/2012	1:16:41 PM	H2 MFC set to  0.000000
2/20/2012	1:16:41 PM	BCl3 MFC set to  0.000000
2/20/2012	1:16:41 PM	PH3 MFC set to  0.000000
2/20/2012	1:16:41 PM	SiCl4 MFC set to  0.000000
2/20/2012	1:16:41 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	1:16:41 PM	Tube furnace set to 0
2/20/2012	1:17:11 PM	H2 valve closed
2/20/2012	1:17:11 PM	BCl3 valve closed
2/20/2012	1:17:11 PM	PH3 valve closed
2/20/2012	1:17:11 PM	SiCl4 pre valve closed
2/20/2012	1:17:11 PM	SiCl4 post valve closed
2/20/2012	1:17:11 PM	Bypass valve closed
2/20/2012	1:17:11 PM	Bubbler valve closed
2/20/2012	1:17:11 PM	Helium valve opened
2/20/2012	1:17:11 PM	Main Vac valve opened
2/20/2012	1:17:11 PM	Helium MFC set to  20.000000
2/20/2012	1:17:11 PM	H2 MFC set to  0.000000
2/20/2012	1:17:11 PM	BCl3 MFC set to  0.000000
2/20/2012	1:17:11 PM	PH3 MFC set to  0.000000
2/20/2012	1:17:11 PM	SiCl4 MFC set to  0.000000
2/20/2012	1:17:11 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	1:17:11 PM	Tube furnace set to 0
2/20/2012	1:17:41 PM	Helium valve closed
2/20/2012	1:17:41 PM	H2 valve closed
2/20/2012	1:17:41 PM	BCl3 valve closed
2/20/2012	1:17:41 PM	PH3 valve closed
2/20/2012	1:17:41 PM	SiCl4 pre valve closed
2/20/2012	1:17:41 PM	SiCl4 post valve closed
2/20/2012	1:17:41 PM	Bypass valve closed
2/20/2012	1:17:41 PM	Bubbler valve closed
2/20/2012	1:17:41 PM	Main Vac valve opened
2/20/2012	1:17:41 PM	Helium MFC set to  0.000000
2/20/2012	1:17:41 PM	H2 MFC set to  0.000000
2/20/2012	1:17:41 PM	BCl3 MFC set to  0.000000
2/20/2012	1:17:41 PM	PH3 MFC set to  0.000000
2/20/2012	1:17:41 PM	SiCl4 MFC set to  0.000000
2/20/2012	1:17:41 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	1:17:41 PM	Tube furnace set to 0
2/20/2012	1:18:11 PM	H2 valve closed
2/20/2012	1:18:11 PM	BCl3 valve closed
2/20/2012	1:18:11 PM	PH3 valve closed
2/20/2012	1:18:11 PM	SiCl4 pre valve closed
2/20/2012	1:18:11 PM	SiCl4 post valve closed
2/20/2012	1:18:11 PM	Bypass valve closed
2/20/2012	1:18:11 PM	Bubbler valve closed
2/20/2012	1:18:11 PM	Helium valve opened
2/20/2012	1:18:11 PM	Main Vac valve opened
2/20/2012	1:18:11 PM	Helium MFC set to  20.000000
2/20/2012	1:18:11 PM	H2 MFC set to  0.000000
2/20/2012	1:18:11 PM	BCl3 MFC set to  0.000000
2/20/2012	1:18:11 PM	PH3 MFC set to  0.000000
2/20/2012	1:18:11 PM	SiCl4 MFC set to  0.000000
2/20/2012	1:18:11 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	1:18:12 PM	Tube furnace set to 0
2/20/2012	1:18:42 PM	Helium valve closed
2/20/2012	1:18:42 PM	H2 valve closed
2/20/2012	1:18:42 PM	BCl3 valve closed
2/20/2012	1:18:42 PM	PH3 valve closed
2/20/2012	1:18:42 PM	SiCl4 pre valve closed
2/20/2012	1:18:42 PM	SiCl4 post valve closed
2/20/2012	1:18:42 PM	Bypass valve closed
2/20/2012	1:18:42 PM	Bubbler valve closed
2/20/2012	1:18:42 PM	Main Vac valve opened
2/20/2012	1:18:42 PM	Helium MFC set to  0.000000
2/20/2012	1:18:42 PM	H2 MFC set to  0.000000
2/20/2012	1:18:42 PM	BCl3 MFC set to  0.000000
2/20/2012	1:18:42 PM	PH3 MFC set to  0.000000
2/20/2012	1:18:42 PM	SiCl4 MFC set to  0.000000
2/20/2012	1:18:42 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	1:18:42 PM	Tube furnace set to 0
2/20/2012	1:19:12 PM	H2 valve closed
2/20/2012	1:19:12 PM	BCl3 valve closed
2/20/2012	1:19:12 PM	PH3 valve closed
2/20/2012	1:19:12 PM	SiCl4 pre valve closed
2/20/2012	1:19:12 PM	SiCl4 post valve closed
2/20/2012	1:19:12 PM	Bypass valve closed
2/20/2012	1:19:12 PM	Bubbler valve closed
2/20/2012	1:19:12 PM	Helium valve opened
2/20/2012	1:19:12 PM	Main Vac valve opened
2/20/2012	1:19:12 PM	Helium MFC set to  20.000000
2/20/2012	1:19:12 PM	H2 MFC set to  0.000000
2/20/2012	1:19:12 PM	BCl3 MFC set to  0.000000
2/20/2012	1:19:12 PM	PH3 MFC set to  0.000000
2/20/2012	1:19:12 PM	SiCl4 MFC set to  0.000000
2/20/2012	1:19:12 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	1:19:12 PM	Tube furnace set to 0
2/20/2012	1:19:42 PM	Helium valve closed
2/20/2012	1:19:42 PM	H2 valve closed
2/20/2012	1:19:42 PM	BCl3 valve closed
2/20/2012	1:19:42 PM	PH3 valve closed
2/20/2012	1:19:42 PM	SiCl4 pre valve closed
2/20/2012	1:19:42 PM	SiCl4 post valve closed
2/20/2012	1:19:42 PM	Bypass valve closed
2/20/2012	1:19:42 PM	Bubbler valve closed
2/20/2012	1:19:42 PM	Main Vac valve opened
2/20/2012	1:19:42 PM	Helium MFC set to  0.000000
2/20/2012	1:19:42 PM	H2 MFC set to  0.000000
2/20/2012	1:19:42 PM	BCl3 MFC set to  0.000000
2/20/2012	1:19:42 PM	PH3 MFC set to  0.000000
2/20/2012	1:19:42 PM	SiCl4 MFC set to  0.000000
2/20/2012	1:19:42 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	1:19:42 PM	Tube furnace set to 0
2/20/2012	1:20:12 PM	H2 valve closed
2/20/2012	1:20:12 PM	BCl3 valve closed
2/20/2012	1:20:12 PM	PH3 valve closed
2/20/2012	1:20:12 PM	SiCl4 pre valve closed
2/20/2012	1:20:12 PM	SiCl4 post valve closed
2/20/2012	1:20:12 PM	Bypass valve closed
2/20/2012	1:20:12 PM	Bubbler valve closed
2/20/2012	1:20:12 PM	Helium valve opened
2/20/2012	1:20:12 PM	Main Vac valve opened
2/20/2012	1:20:12 PM	Helium MFC set to  20.000000
2/20/2012	1:20:12 PM	H2 MFC set to  0.000000
2/20/2012	1:20:12 PM	BCl3 MFC set to  0.000000
2/20/2012	1:20:12 PM	PH3 MFC set to  0.000000
2/20/2012	1:20:12 PM	SiCl4 MFC set to  0.000000
2/20/2012	1:20:12 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	1:20:12 PM	Tube furnace set to 0
2/20/2012	1:20:42 PM	Helium valve closed
2/20/2012	1:20:42 PM	H2 valve closed
2/20/2012	1:20:42 PM	BCl3 valve closed
2/20/2012	1:20:42 PM	PH3 valve closed
2/20/2012	1:20:42 PM	SiCl4 pre valve closed
2/20/2012	1:20:42 PM	SiCl4 post valve closed
2/20/2012	1:20:42 PM	Bypass valve closed
2/20/2012	1:20:42 PM	Bubbler valve closed
2/20/2012	1:20:42 PM	Main Vac valve opened
2/20/2012	1:20:42 PM	Helium MFC set to  0.000000
2/20/2012	1:20:42 PM	H2 MFC set to  0.000000
2/20/2012	1:20:42 PM	BCl3 MFC set to  0.000000
2/20/2012	1:20:42 PM	PH3 MFC set to  0.000000
2/20/2012	1:20:42 PM	SiCl4 MFC set to  0.000000
2/20/2012	1:20:42 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	1:20:43 PM	Tube furnace set to 0
2/20/2012	1:21:13 PM	H2 valve closed
2/20/2012	1:21:13 PM	BCl3 valve closed
2/20/2012	1:21:13 PM	PH3 valve closed
2/20/2012	1:21:13 PM	SiCl4 pre valve closed
2/20/2012	1:21:13 PM	SiCl4 post valve closed
2/20/2012	1:21:13 PM	Bypass valve closed
2/20/2012	1:21:13 PM	Bubbler valve closed
2/20/2012	1:21:13 PM	Helium valve opened
2/20/2012	1:21:13 PM	Main Vac valve opened
2/20/2012	1:21:13 PM	Helium MFC set to  20.000000
2/20/2012	1:21:13 PM	H2 MFC set to  0.000000
2/20/2012	1:21:13 PM	BCl3 MFC set to  0.000000
2/20/2012	1:21:13 PM	PH3 MFC set to  0.000000
2/20/2012	1:21:13 PM	SiCl4 MFC set to  0.000000
2/20/2012	1:21:13 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	1:21:13 PM	Tube furnace set to 0
2/20/2012	1:21:43 PM	Helium valve closed
2/20/2012	1:21:43 PM	H2 valve closed
2/20/2012	1:21:43 PM	BCl3 valve closed
2/20/2012	1:21:43 PM	PH3 valve closed
2/20/2012	1:21:43 PM	SiCl4 pre valve closed
2/20/2012	1:21:43 PM	SiCl4 post valve closed
2/20/2012	1:21:43 PM	Bypass valve closed
2/20/2012	1:21:43 PM	Bubbler valve closed
2/20/2012	1:21:43 PM	Main Vac valve opened
2/20/2012	1:21:43 PM	Helium MFC set to  0.000000
2/20/2012	1:21:43 PM	H2 MFC set to  0.000000
2/20/2012	1:21:43 PM	BCl3 MFC set to  0.000000
2/20/2012	1:21:43 PM	PH3 MFC set to  0.000000
2/20/2012	1:21:43 PM	SiCl4 MFC set to  0.000000
2/20/2012	1:21:43 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	1:21:43 PM	Tube furnace set to 0
2/20/2012	1:22:13 PM	H2 valve closed
2/20/2012	1:22:13 PM	BCl3 valve closed
2/20/2012	1:22:13 PM	PH3 valve closed
2/20/2012	1:22:13 PM	SiCl4 pre valve closed
2/20/2012	1:22:13 PM	SiCl4 post valve closed
2/20/2012	1:22:13 PM	Bypass valve closed
2/20/2012	1:22:13 PM	Bubbler valve closed
2/20/2012	1:22:13 PM	Helium valve opened
2/20/2012	1:22:13 PM	Main Vac valve opened
2/20/2012	1:22:13 PM	Helium MFC set to  20.000000
2/20/2012	1:22:13 PM	H2 MFC set to  0.000000
2/20/2012	1:22:13 PM	BCl3 MFC set to  0.000000
2/20/2012	1:22:13 PM	PH3 MFC set to  0.000000
2/20/2012	1:22:13 PM	SiCl4 MFC set to  0.000000
2/20/2012	1:22:13 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	1:22:13 PM	Tube furnace set to 0
2/20/2012	1:22:43 PM	Helium valve closed
2/20/2012	1:22:43 PM	H2 valve closed
2/20/2012	1:22:43 PM	BCl3 valve closed
2/20/2012	1:22:43 PM	PH3 valve closed
2/20/2012	1:22:43 PM	SiCl4 pre valve closed
2/20/2012	1:22:43 PM	SiCl4 post valve closed
2/20/2012	1:22:43 PM	Bypass valve closed
2/20/2012	1:22:43 PM	Bubbler valve closed
2/20/2012	1:22:43 PM	Main Vac valve opened
2/20/2012	1:22:43 PM	Helium MFC set to  0.000000
2/20/2012	1:22:43 PM	H2 MFC set to  0.000000
2/20/2012	1:22:43 PM	BCl3 MFC set to  0.000000
2/20/2012	1:22:43 PM	PH3 MFC set to  0.000000
2/20/2012	1:22:43 PM	SiCl4 MFC set to  0.000000
2/20/2012	1:22:43 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	1:22:43 PM	Tube furnace set to 0
2/20/2012	1:23:13 PM	H2 valve closed
2/20/2012	1:23:13 PM	BCl3 valve closed
2/20/2012	1:23:13 PM	PH3 valve closed
2/20/2012	1:23:13 PM	SiCl4 pre valve closed
2/20/2012	1:23:13 PM	SiCl4 post valve closed
2/20/2012	1:23:13 PM	Bypass valve closed
2/20/2012	1:23:13 PM	Bubbler valve closed
2/20/2012	1:23:13 PM	Helium valve opened
2/20/2012	1:23:13 PM	Main Vac valve opened
2/20/2012	1:23:13 PM	Helium MFC set to  20.000000
2/20/2012	1:23:13 PM	H2 MFC set to  0.000000
2/20/2012	1:23:13 PM	BCl3 MFC set to  0.000000
2/20/2012	1:23:13 PM	PH3 MFC set to  0.000000
2/20/2012	1:23:13 PM	SiCl4 MFC set to  0.000000
2/20/2012	1:23:13 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	1:23:14 PM	Tube furnace set to 0
2/20/2012	1:23:44 PM	Helium valve closed
2/20/2012	1:23:44 PM	H2 valve closed
2/20/2012	1:23:44 PM	BCl3 valve closed
2/20/2012	1:23:44 PM	PH3 valve closed
2/20/2012	1:23:44 PM	SiCl4 pre valve closed
2/20/2012	1:23:44 PM	SiCl4 post valve closed
2/20/2012	1:23:44 PM	Bypass valve closed
2/20/2012	1:23:44 PM	Bubbler valve closed
2/20/2012	1:23:44 PM	Main Vac valve opened
2/20/2012	1:23:44 PM	Helium MFC set to  0.000000
2/20/2012	1:23:44 PM	H2 MFC set to  0.000000
2/20/2012	1:23:44 PM	BCl3 MFC set to  0.000000
2/20/2012	1:23:44 PM	PH3 MFC set to  0.000000
2/20/2012	1:23:44 PM	SiCl4 MFC set to  0.000000
2/20/2012	1:23:44 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	1:23:44 PM	Tube furnace set to 0
2/20/2012	1:24:14 PM	H2 valve closed
2/20/2012	1:24:14 PM	BCl3 valve closed
2/20/2012	1:24:14 PM	PH3 valve closed
2/20/2012	1:24:14 PM	SiCl4 pre valve closed
2/20/2012	1:24:14 PM	SiCl4 post valve closed
2/20/2012	1:24:14 PM	Bypass valve closed
2/20/2012	1:24:14 PM	Bubbler valve closed
2/20/2012	1:24:14 PM	Helium valve opened
2/20/2012	1:24:14 PM	Main Vac valve opened
2/20/2012	1:24:14 PM	Helium MFC set to  20.000000
2/20/2012	1:24:14 PM	H2 MFC set to  0.000000
2/20/2012	1:24:14 PM	BCl3 MFC set to  0.000000
2/20/2012	1:24:14 PM	PH3 MFC set to  0.000000
2/20/2012	1:24:14 PM	SiCl4 MFC set to  0.000000
2/20/2012	1:24:14 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	1:24:14 PM	Tube furnace set to 0
2/20/2012	1:24:44 PM	Helium valve closed
2/20/2012	1:24:44 PM	H2 valve closed
2/20/2012	1:24:44 PM	BCl3 valve closed
2/20/2012	1:24:44 PM	PH3 valve closed
2/20/2012	1:24:44 PM	SiCl4 pre valve closed
2/20/2012	1:24:44 PM	SiCl4 post valve closed
2/20/2012	1:24:44 PM	Bypass valve closed
2/20/2012	1:24:44 PM	Bubbler valve closed
2/20/2012	1:24:44 PM	Main Vac valve opened
2/20/2012	1:24:44 PM	Helium MFC set to  0.000000
2/20/2012	1:24:44 PM	H2 MFC set to  0.000000
2/20/2012	1:24:44 PM	BCl3 MFC set to  0.000000
2/20/2012	1:24:44 PM	PH3 MFC set to  0.000000
2/20/2012	1:24:44 PM	SiCl4 MFC set to  0.000000
2/20/2012	1:24:44 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	1:24:44 PM	Tube furnace set to 200
2/20/2012	1:25:14 PM	H2 valve closed
2/20/2012	1:25:14 PM	BCl3 valve closed
2/20/2012	1:25:14 PM	PH3 valve closed
2/20/2012	1:25:14 PM	SiCl4 pre valve closed
2/20/2012	1:25:14 PM	SiCl4 post valve closed
2/20/2012	1:25:14 PM	Bypass valve closed
2/20/2012	1:25:14 PM	Bubbler valve closed
2/20/2012	1:25:14 PM	Helium valve opened
2/20/2012	1:25:14 PM	Main Vac valve opened
2/20/2012	1:25:14 PM	Helium MFC set to  20.000000
2/20/2012	1:25:14 PM	H2 MFC set to  0.000000
2/20/2012	1:25:14 PM	BCl3 MFC set to  0.000000
2/20/2012	1:25:14 PM	PH3 MFC set to  0.000000
2/20/2012	1:25:14 PM	SiCl4 MFC set to  0.000000
2/20/2012	1:25:14 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	1:25:14 PM	Tube furnace set to 200
2/20/2012	1:25:44 PM	Helium valve closed
2/20/2012	1:25:44 PM	H2 valve closed
2/20/2012	1:25:44 PM	BCl3 valve closed
2/20/2012	1:25:44 PM	PH3 valve closed
2/20/2012	1:25:44 PM	SiCl4 pre valve closed
2/20/2012	1:25:44 PM	SiCl4 post valve closed
2/20/2012	1:25:44 PM	Bypass valve closed
2/20/2012	1:25:44 PM	Bubbler valve closed
2/20/2012	1:25:44 PM	Main Vac valve opened
2/20/2012	1:25:44 PM	Helium MFC set to  0.000000
2/20/2012	1:25:44 PM	H2 MFC set to  0.000000
2/20/2012	1:25:44 PM	BCl3 MFC set to  0.000000
2/20/2012	1:25:44 PM	PH3 MFC set to  0.000000
2/20/2012	1:25:44 PM	SiCl4 MFC set to  0.000000
2/20/2012	1:25:44 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	1:25:45 PM	Tube furnace set to 200
2/20/2012	1:26:15 PM	H2 valve closed
2/20/2012	1:26:15 PM	BCl3 valve closed
2/20/2012	1:26:15 PM	PH3 valve closed
2/20/2012	1:26:15 PM	SiCl4 pre valve closed
2/20/2012	1:26:15 PM	SiCl4 post valve closed
2/20/2012	1:26:15 PM	Bypass valve closed
2/20/2012	1:26:15 PM	Bubbler valve closed
2/20/2012	1:26:15 PM	Helium valve opened
2/20/2012	1:26:15 PM	Main Vac valve opened
2/20/2012	1:26:15 PM	Helium MFC set to  20.000000
2/20/2012	1:26:15 PM	H2 MFC set to  0.000000
2/20/2012	1:26:15 PM	BCl3 MFC set to  0.000000
2/20/2012	1:26:15 PM	PH3 MFC set to  0.000000
2/20/2012	1:26:15 PM	SiCl4 MFC set to  0.000000
2/20/2012	1:26:15 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	1:26:15 PM	Tube furnace set to 200
2/20/2012	1:26:45 PM	Helium valve closed
2/20/2012	1:26:45 PM	H2 valve closed
2/20/2012	1:26:45 PM	BCl3 valve closed
2/20/2012	1:26:45 PM	PH3 valve closed
2/20/2012	1:26:45 PM	SiCl4 pre valve closed
2/20/2012	1:26:45 PM	SiCl4 post valve closed
2/20/2012	1:26:45 PM	Bypass valve closed
2/20/2012	1:26:45 PM	Bubbler valve closed
2/20/2012	1:26:45 PM	Main Vac valve opened
2/20/2012	1:26:45 PM	Helium MFC set to  0.000000
2/20/2012	1:26:45 PM	H2 MFC set to  0.000000
2/20/2012	1:26:45 PM	BCl3 MFC set to  0.000000
2/20/2012	1:26:45 PM	PH3 MFC set to  0.000000
2/20/2012	1:26:45 PM	SiCl4 MFC set to  0.000000
2/20/2012	1:26:45 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	1:26:45 PM	Tube furnace set to 200
2/20/2012	1:27:15 PM	H2 valve closed
2/20/2012	1:27:15 PM	BCl3 valve closed
2/20/2012	1:27:15 PM	PH3 valve closed
2/20/2012	1:27:15 PM	SiCl4 pre valve closed
2/20/2012	1:27:15 PM	SiCl4 post valve closed
2/20/2012	1:27:15 PM	Bypass valve closed
2/20/2012	1:27:15 PM	Bubbler valve closed
2/20/2012	1:27:15 PM	Helium valve opened
2/20/2012	1:27:15 PM	Main Vac valve opened
2/20/2012	1:27:15 PM	Helium MFC set to  20.000000
2/20/2012	1:27:15 PM	H2 MFC set to  0.000000
2/20/2012	1:27:15 PM	BCl3 MFC set to  0.000000
2/20/2012	1:27:15 PM	PH3 MFC set to  0.000000
2/20/2012	1:27:15 PM	SiCl4 MFC set to  0.000000
2/20/2012	1:27:15 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	1:27:15 PM	Tube furnace set to 200
2/20/2012	1:27:45 PM	Helium valve closed
2/20/2012	1:27:45 PM	H2 valve closed
2/20/2012	1:27:45 PM	BCl3 valve closed
2/20/2012	1:27:45 PM	PH3 valve closed
2/20/2012	1:27:45 PM	SiCl4 pre valve closed
2/20/2012	1:27:45 PM	SiCl4 post valve closed
2/20/2012	1:27:45 PM	Bypass valve closed
2/20/2012	1:27:45 PM	Bubbler valve closed
2/20/2012	1:27:45 PM	Main Vac valve opened
2/20/2012	1:27:45 PM	Helium MFC set to  0.000000
2/20/2012	1:27:45 PM	H2 MFC set to  0.000000
2/20/2012	1:27:45 PM	BCl3 MFC set to  0.000000
2/20/2012	1:27:45 PM	PH3 MFC set to  0.000000
2/20/2012	1:27:45 PM	SiCl4 MFC set to  0.000000
2/20/2012	1:27:45 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	1:27:45 PM	Tube furnace set to 200
2/20/2012	1:28:15 PM	H2 valve closed
2/20/2012	1:28:15 PM	BCl3 valve closed
2/20/2012	1:28:15 PM	PH3 valve closed
2/20/2012	1:28:15 PM	SiCl4 pre valve closed
2/20/2012	1:28:15 PM	SiCl4 post valve closed
2/20/2012	1:28:15 PM	Bypass valve closed
2/20/2012	1:28:15 PM	Bubbler valve closed
2/20/2012	1:28:15 PM	Helium valve opened
2/20/2012	1:28:15 PM	Main Vac valve opened
2/20/2012	1:28:16 PM	Helium MFC set to  20.000000
2/20/2012	1:28:16 PM	H2 MFC set to  0.000000
2/20/2012	1:28:16 PM	BCl3 MFC set to  0.000000
2/20/2012	1:28:16 PM	PH3 MFC set to  0.000000
2/20/2012	1:28:16 PM	SiCl4 MFC set to  0.000000
2/20/2012	1:28:16 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	1:28:16 PM	Tube furnace set to 200
2/20/2012	1:28:46 PM	Helium valve closed
2/20/2012	1:28:46 PM	H2 valve closed
2/20/2012	1:28:46 PM	BCl3 valve closed
2/20/2012	1:28:46 PM	PH3 valve closed
2/20/2012	1:28:46 PM	SiCl4 pre valve closed
2/20/2012	1:28:46 PM	SiCl4 post valve closed
2/20/2012	1:28:46 PM	Bypass valve closed
2/20/2012	1:28:46 PM	Bubbler valve closed
2/20/2012	1:28:46 PM	Main Vac valve opened
2/20/2012	1:28:46 PM	Helium MFC set to  0.000000
2/20/2012	1:28:46 PM	H2 MFC set to  0.000000
2/20/2012	1:28:46 PM	BCl3 MFC set to  0.000000
2/20/2012	1:28:46 PM	PH3 MFC set to  0.000000
2/20/2012	1:28:46 PM	SiCl4 MFC set to  0.000000
2/20/2012	1:28:46 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	1:28:46 PM	Tube furnace set to 200
2/20/2012	1:29:16 PM	H2 valve closed
2/20/2012	1:29:16 PM	BCl3 valve closed
2/20/2012	1:29:16 PM	PH3 valve closed
2/20/2012	1:29:16 PM	SiCl4 pre valve closed
2/20/2012	1:29:16 PM	SiCl4 post valve closed
2/20/2012	1:29:16 PM	Bypass valve closed
2/20/2012	1:29:16 PM	Bubbler valve closed
2/20/2012	1:29:16 PM	Helium valve opened
2/20/2012	1:29:16 PM	Main Vac valve opened
2/20/2012	1:29:16 PM	Helium MFC set to  20.000000
2/20/2012	1:29:16 PM	H2 MFC set to  0.000000
2/20/2012	1:29:16 PM	BCl3 MFC set to  0.000000
2/20/2012	1:29:16 PM	PH3 MFC set to  0.000000
2/20/2012	1:29:16 PM	SiCl4 MFC set to  0.000000
2/20/2012	1:29:16 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	1:29:16 PM	Tube furnace set to 200
2/20/2012	1:29:46 PM	Helium valve closed
2/20/2012	1:29:46 PM	H2 valve closed
2/20/2012	1:29:46 PM	BCl3 valve closed
2/20/2012	1:29:46 PM	PH3 valve closed
2/20/2012	1:29:46 PM	SiCl4 pre valve closed
2/20/2012	1:29:46 PM	SiCl4 post valve closed
2/20/2012	1:29:46 PM	Bypass valve closed
2/20/2012	1:29:46 PM	Bubbler valve closed
2/20/2012	1:29:46 PM	Main Vac valve opened
2/20/2012	1:29:46 PM	Helium MFC set to  0.000000
2/20/2012	1:29:46 PM	H2 MFC set to  0.000000
2/20/2012	1:29:46 PM	BCl3 MFC set to  0.000000
2/20/2012	1:29:46 PM	PH3 MFC set to  0.000000
2/20/2012	1:29:46 PM	SiCl4 MFC set to  0.000000
2/20/2012	1:29:46 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	1:29:46 PM	Tube furnace set to 200
2/20/2012	1:30:16 PM	H2 valve closed
2/20/2012	1:30:16 PM	BCl3 valve closed
2/20/2012	1:30:16 PM	PH3 valve closed
2/20/2012	1:30:16 PM	SiCl4 pre valve closed
2/20/2012	1:30:16 PM	SiCl4 post valve closed
2/20/2012	1:30:16 PM	Bypass valve closed
2/20/2012	1:30:16 PM	Bubbler valve closed
2/20/2012	1:30:16 PM	Helium valve opened
2/20/2012	1:30:16 PM	Main Vac valve opened
2/20/2012	1:30:16 PM	Helium MFC set to  20.000000
2/20/2012	1:30:16 PM	H2 MFC set to  0.000000
2/20/2012	1:30:16 PM	BCl3 MFC set to  0.000000
2/20/2012	1:30:16 PM	PH3 MFC set to  0.000000
2/20/2012	1:30:16 PM	SiCl4 MFC set to  0.000000
2/20/2012	1:30:16 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	1:30:17 PM	Tube furnace set to 200
2/20/2012	1:30:47 PM	Helium valve closed
2/20/2012	1:30:47 PM	H2 valve closed
2/20/2012	1:30:47 PM	BCl3 valve closed
2/20/2012	1:30:47 PM	PH3 valve closed
2/20/2012	1:30:47 PM	SiCl4 pre valve closed
2/20/2012	1:30:47 PM	SiCl4 post valve closed
2/20/2012	1:30:47 PM	Bypass valve closed
2/20/2012	1:30:47 PM	Bubbler valve closed
2/20/2012	1:30:47 PM	Main Vac valve opened
2/20/2012	1:30:47 PM	Helium MFC set to  0.000000
2/20/2012	1:30:47 PM	H2 MFC set to  0.000000
2/20/2012	1:30:47 PM	BCl3 MFC set to  0.000000
2/20/2012	1:30:47 PM	PH3 MFC set to  0.000000
2/20/2012	1:30:47 PM	SiCl4 MFC set to  0.000000
2/20/2012	1:30:47 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	1:30:47 PM	Tube furnace set to 0
2/20/2012	1:30:48 PM	Run finished at 1:30 PM
2/20/2012	1:52:51 PM	Main Vac valve closed
2/20/2012	1:53:00 PM	Main Vac valve opened
2/20/2012	1:54:02 PM	Recipe started at 1:53 PM
2/20/2012	1:54:02 PM	Helium valve closed
2/20/2012	1:54:02 PM	H2 valve closed
2/20/2012	1:54:02 PM	BCl3 valve closed
2/20/2012	1:54:02 PM	PH3 valve closed
2/20/2012	1:54:02 PM	SiCl4 pre valve closed
2/20/2012	1:54:02 PM	SiCl4 post valve closed
2/20/2012	1:54:02 PM	Main Vac valve closed
2/20/2012	1:54:02 PM	Bypass valve closed
2/20/2012	1:54:02 PM	Bubbler valve closed
2/20/2012	1:54:02 PM	Helium MFC set to  0.000000
2/20/2012	1:54:02 PM	H2 MFC set to  0.000000
2/20/2012	1:54:02 PM	BCl3 MFC set to  0.000000
2/20/2012	1:54:02 PM	PH3 MFC set to  0.000000
2/20/2012	1:54:02 PM	SiCl4 MFC set to  0.000000
2/20/2012	1:54:02 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	1:54:02 PM	Tube furnace set to 0
2/20/2012	1:54:05 PM	Helium valve closed
2/20/2012	1:54:05 PM	BCl3 valve closed
2/20/2012	1:54:05 PM	PH3 valve closed
2/20/2012	1:54:05 PM	SiCl4 pre valve closed
2/20/2012	1:54:05 PM	SiCl4 post valve closed
2/20/2012	1:54:05 PM	Main Vac valve closed
2/20/2012	1:54:05 PM	Bypass valve closed
2/20/2012	1:54:05 PM	Bubbler valve closed
2/20/2012	1:54:05 PM	H2 valve opened
2/20/2012	1:54:05 PM	Helium MFC set to  0.000000
2/20/2012	1:54:05 PM	H2 MFC set to  500.000000
2/20/2012	1:54:05 PM	BCl3 MFC set to  0.000000
2/20/2012	1:54:05 PM	PH3 MFC set to  0.000000
2/20/2012	1:54:05 PM	SiCl4 MFC set to  0.000000
2/20/2012	1:54:05 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	1:54:05 PM	Tube furnace set to 0
2/20/2012	1:55:10 PM	Helium valve closed
2/20/2012	1:55:10 PM	BCl3 valve closed
2/20/2012	1:55:10 PM	PH3 valve closed
2/20/2012	1:55:10 PM	SiCl4 pre valve closed
2/20/2012	1:55:10 PM	SiCl4 post valve closed
2/20/2012	1:55:10 PM	Main Vac valve closed
2/20/2012	1:55:10 PM	Bypass valve closed
2/20/2012	1:55:10 PM	H2 valve opened
2/20/2012	1:55:10 PM	Bubbler valve opened
2/20/2012	1:55:10 PM	Helium MFC set to  0.000000
2/20/2012	1:55:10 PM	H2 MFC set to  500.000000
2/20/2012	1:55:10 PM	BCl3 MFC set to  0.000000
2/20/2012	1:55:10 PM	PH3 MFC set to  0.000000
2/20/2012	1:55:10 PM	SiCl4 MFC set to  0.000000
2/20/2012	1:55:10 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	1:55:10 PM	Tube furnace set to 0
2/20/2012	1:55:11 PM	Helium valve closed
2/20/2012	1:55:11 PM	BCl3 valve closed
2/20/2012	1:55:11 PM	PH3 valve closed
2/20/2012	1:55:11 PM	SiCl4 pre valve closed
2/20/2012	1:55:11 PM	SiCl4 post valve closed
2/20/2012	1:55:11 PM	Main Vac valve closed
2/20/2012	1:55:11 PM	Bypass valve closed
2/20/2012	1:55:11 PM	H2 valve opened
2/20/2012	1:55:11 PM	Bubbler valve opened
2/20/2012	1:55:11 PM	Helium MFC set to  0.000000
2/20/2012	1:55:11 PM	H2 MFC set to  500.000000
2/20/2012	1:55:11 PM	BCl3 MFC set to  0.000000
2/20/2012	1:55:11 PM	PH3 MFC set to  0.000000
2/20/2012	1:55:11 PM	SiCl4 MFC set to  0.000000
2/20/2012	1:55:11 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	1:55:11 PM	Tube furnace set to 1000
2/20/2012	2:15:11 PM	Helium valve closed
2/20/2012	2:15:11 PM	BCl3 valve closed
2/20/2012	2:15:11 PM	Main Vac valve closed
2/20/2012	2:15:11 PM	Bypass valve closed
2/20/2012	2:15:11 PM	H2 valve opened
2/20/2012	2:15:11 PM	PH3 valve opened
2/20/2012	2:15:11 PM	SiCl4 pre valve opened
2/20/2012	2:15:11 PM	SiCl4 post valve opened
2/20/2012	2:15:11 PM	Bubbler valve opened
2/20/2012	2:15:11 PM	Helium MFC set to  0.000000
2/20/2012	2:15:11 PM	H2 MFC set to  500.000000
2/20/2012	2:15:11 PM	BCl3 MFC set to  0.000000
2/20/2012	2:15:11 PM	PH3 MFC set to  1.000000
2/20/2012	2:15:11 PM	SiCl4 MFC set to  50.000000
2/20/2012	2:15:11 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	2:15:12 PM	Tube furnace set to 1000
2/20/2012	2:30:11 PM	Helium valve closed
2/20/2012	2:30:11 PM	BCl3 valve closed
2/20/2012	2:30:11 PM	PH3 valve closed
2/20/2012	2:30:11 PM	SiCl4 pre valve closed
2/20/2012	2:30:11 PM	SiCl4 post valve closed
2/20/2012	2:30:11 PM	Main Vac valve closed
2/20/2012	2:30:11 PM	Bypass valve closed
2/20/2012	2:30:12 PM	H2 valve opened
2/20/2012	2:30:12 PM	Bubbler valve opened
2/20/2012	2:30:12 PM	Helium MFC set to  0.000000
2/20/2012	2:30:12 PM	H2 MFC set to  500.000000
2/20/2012	2:30:12 PM	BCl3 MFC set to  0.000000
2/20/2012	2:30:12 PM	PH3 MFC set to  0.000000
2/20/2012	2:30:12 PM	SiCl4 MFC set to  0.000000
2/20/2012	2:30:12 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	2:30:12 PM	Tube furnace set to 950
2/20/2012	2:32:12 PM	Helium valve closed
2/20/2012	2:32:12 PM	BCl3 valve closed
2/20/2012	2:32:12 PM	PH3 valve closed
2/20/2012	2:32:12 PM	SiCl4 pre valve closed
2/20/2012	2:32:12 PM	SiCl4 post valve closed
2/20/2012	2:32:12 PM	Main Vac valve closed
2/20/2012	2:32:12 PM	Bypass valve closed
2/20/2012	2:32:12 PM	H2 valve opened
2/20/2012	2:32:12 PM	Bubbler valve opened
2/20/2012	2:32:12 PM	Helium MFC set to  0.000000
2/20/2012	2:32:12 PM	H2 MFC set to  500.000000
2/20/2012	2:32:12 PM	BCl3 MFC set to  0.000000
2/20/2012	2:32:12 PM	PH3 MFC set to  0.000000
2/20/2012	2:32:12 PM	SiCl4 MFC set to  0.000000
2/20/2012	2:32:12 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	2:32:12 PM	Tube furnace set to 900
2/20/2012	2:34:12 PM	Helium valve closed
2/20/2012	2:34:12 PM	BCl3 valve closed
2/20/2012	2:34:12 PM	PH3 valve closed
2/20/2012	2:34:12 PM	SiCl4 pre valve closed
2/20/2012	2:34:12 PM	SiCl4 post valve closed
2/20/2012	2:34:12 PM	Main Vac valve closed
2/20/2012	2:34:12 PM	Bypass valve closed
2/20/2012	2:34:12 PM	H2 valve opened
2/20/2012	2:34:12 PM	Bubbler valve opened
2/20/2012	2:34:12 PM	Helium MFC set to  0.000000
2/20/2012	2:34:12 PM	H2 MFC set to  500.000000
2/20/2012	2:34:12 PM	BCl3 MFC set to  0.000000
2/20/2012	2:34:12 PM	PH3 MFC set to  0.000000
2/20/2012	2:34:12 PM	SiCl4 MFC set to  0.000000
2/20/2012	2:34:12 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	2:34:12 PM	Tube furnace set to 850
2/20/2012	2:36:12 PM	H2 valve closed
2/20/2012	2:36:12 PM	BCl3 valve closed
2/20/2012	2:36:12 PM	PH3 valve closed
2/20/2012	2:36:12 PM	SiCl4 pre valve closed
2/20/2012	2:36:12 PM	SiCl4 post valve closed
2/20/2012	2:36:12 PM	Main Vac valve closed
2/20/2012	2:36:12 PM	Bypass valve closed
2/20/2012	2:36:12 PM	Helium valve opened
2/20/2012	2:36:12 PM	Bubbler valve opened
2/20/2012	2:36:12 PM	Helium MFC set to  500.000000
2/20/2012	2:36:12 PM	H2 MFC set to  0.000000
2/20/2012	2:36:12 PM	BCl3 MFC set to  0.000000
2/20/2012	2:36:12 PM	PH3 MFC set to  0.000000
2/20/2012	2:36:12 PM	SiCl4 MFC set to  0.000000
2/20/2012	2:36:12 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	2:36:12 PM	Tube furnace set to 800
2/20/2012	2:38:12 PM	H2 valve closed
2/20/2012	2:38:12 PM	BCl3 valve closed
2/20/2012	2:38:12 PM	PH3 valve closed
2/20/2012	2:38:12 PM	SiCl4 pre valve closed
2/20/2012	2:38:12 PM	SiCl4 post valve closed
2/20/2012	2:38:12 PM	Main Vac valve closed
2/20/2012	2:38:12 PM	Bypass valve closed
2/20/2012	2:38:12 PM	Helium valve opened
2/20/2012	2:38:12 PM	Bubbler valve opened
2/20/2012	2:38:12 PM	Helium MFC set to  500.000000
2/20/2012	2:38:12 PM	H2 MFC set to  0.000000
2/20/2012	2:38:12 PM	BCl3 MFC set to  0.000000
2/20/2012	2:38:12 PM	PH3 MFC set to  0.000000
2/20/2012	2:38:12 PM	SiCl4 MFC set to  0.000000
2/20/2012	2:38:12 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	2:38:12 PM	Tube furnace set to 750
2/20/2012	2:40:12 PM	H2 valve closed
2/20/2012	2:40:12 PM	BCl3 valve closed
2/20/2012	2:40:12 PM	PH3 valve closed
2/20/2012	2:40:12 PM	SiCl4 pre valve closed
2/20/2012	2:40:12 PM	SiCl4 post valve closed
2/20/2012	2:40:12 PM	Main Vac valve closed
2/20/2012	2:40:12 PM	Bypass valve closed
2/20/2012	2:40:12 PM	Helium valve opened
2/20/2012	2:40:12 PM	Bubbler valve opened
2/20/2012	2:40:12 PM	Helium MFC set to  500.000000
2/20/2012	2:40:12 PM	H2 MFC set to  0.000000
2/20/2012	2:40:12 PM	BCl3 MFC set to  0.000000
2/20/2012	2:40:12 PM	PH3 MFC set to  0.000000
2/20/2012	2:40:13 PM	SiCl4 MFC set to  0.000000
2/20/2012	2:40:13 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	2:40:13 PM	Tube furnace set to 0
2/20/2012	3:00:13 PM	Helium valve closed
2/20/2012	3:00:13 PM	H2 valve closed
2/20/2012	3:00:13 PM	BCl3 valve closed
2/20/2012	3:00:13 PM	PH3 valve closed
2/20/2012	3:00:13 PM	SiCl4 pre valve closed
2/20/2012	3:00:13 PM	SiCl4 post valve closed
2/20/2012	3:00:13 PM	Main Vac valve closed
2/20/2012	3:00:13 PM	Bypass valve closed
2/20/2012	3:00:13 PM	Bubbler valve closed
2/20/2012	3:00:13 PM	Helium MFC set to  0.000000
2/20/2012	3:00:13 PM	H2 MFC set to  0.000000
2/20/2012	3:00:13 PM	BCl3 MFC set to  0.000000
2/20/2012	3:00:13 PM	PH3 MFC set to  0.000000
2/20/2012	3:00:13 PM	SiCl4 MFC set to  0.000000
2/20/2012	3:00:13 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	3:00:13 PM	Tube furnace set to 0
2/20/2012	3:00:14 PM	Run finished at 3:00 PM
2/20/2012	3:06:06 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/20/2012	3:06:07 PM	Recipe started at 3:06 PM
2/20/2012	3:06:07 PM	Helium valve closed
2/20/2012	3:06:07 PM	H2 valve closed
2/20/2012	3:06:07 PM	BCl3 valve closed
2/20/2012	3:06:07 PM	PH3 valve closed
2/20/2012	3:06:07 PM	SiCl4 pre valve closed
2/20/2012	3:06:07 PM	SiCl4 post valve closed
2/20/2012	3:06:07 PM	Main Vac valve closed
2/20/2012	3:06:07 PM	Bypass valve closed
2/20/2012	3:06:07 PM	Bubbler valve closed
2/20/2012	3:06:07 PM	Helium MFC set to  0.000000
2/20/2012	3:06:07 PM	H2 MFC set to  0.000000
2/20/2012	3:06:07 PM	BCl3 MFC set to  0.000000
2/20/2012	3:06:07 PM	PH3 MFC set to  0.000000
2/20/2012	3:06:07 PM	SiCl4 MFC set to  0.000000
2/20/2012	3:06:07 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	3:06:07 PM	Tube furnace set to 0
2/20/2012	3:06:10 PM	H2 valve closed
2/20/2012	3:06:10 PM	BCl3 valve closed
2/20/2012	3:06:10 PM	PH3 valve closed
2/20/2012	3:06:10 PM	SiCl4 pre valve closed
2/20/2012	3:06:10 PM	SiCl4 post valve closed
2/20/2012	3:06:10 PM	Main Vac valve closed
2/20/2012	3:06:10 PM	Bypass valve closed
2/20/2012	3:06:10 PM	Bubbler valve closed
2/20/2012	3:06:10 PM	Helium valve opened
2/20/2012	3:06:10 PM	Helium MFC set to  500.000000
2/20/2012	3:06:10 PM	H2 MFC set to  0.000000
2/20/2012	3:06:10 PM	BCl3 MFC set to  0.000000
2/20/2012	3:06:10 PM	PH3 MFC set to  0.000000
2/20/2012	3:06:10 PM	SiCl4 MFC set to  0.000000
2/20/2012	3:06:10 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	3:06:10 PM	Tube furnace set to 0
2/20/2012	3:06:11 PM	Helium valve closed
2/20/2012	3:06:11 PM	H2 valve closed
2/20/2012	3:06:11 PM	BCl3 valve closed
2/20/2012	3:06:11 PM	PH3 valve closed
2/20/2012	3:06:11 PM	SiCl4 pre valve closed
2/20/2012	3:06:11 PM	SiCl4 post valve closed
2/20/2012	3:06:11 PM	Main Vac valve closed
2/20/2012	3:06:11 PM	Bypass valve closed
2/20/2012	3:06:11 PM	Bubbler valve closed
2/20/2012	3:06:11 PM	Helium MFC set to  0.000000
2/20/2012	3:06:11 PM	H2 MFC set to  0.000000
2/20/2012	3:06:11 PM	BCl3 MFC set to  0.000000
2/20/2012	3:06:11 PM	PH3 MFC set to  0.000000
2/20/2012	3:06:11 PM	SiCl4 MFC set to  0.000000
2/20/2012	3:06:11 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	3:06:11 PM	Tube furnace set to 0
2/20/2012	3:06:12 PM	Run finished at 3:06 PM
2/20/2012	3:06:12 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/20/2012	3:08:26 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/20/2012	3:08:27 PM	Recipe started at 3:08 PM
2/20/2012	3:08:27 PM	Helium valve closed
2/20/2012	3:08:27 PM	H2 valve closed
2/20/2012	3:08:27 PM	BCl3 valve closed
2/20/2012	3:08:27 PM	PH3 valve closed
2/20/2012	3:08:27 PM	SiCl4 pre valve closed
2/20/2012	3:08:27 PM	SiCl4 post valve closed
2/20/2012	3:08:27 PM	Main Vac valve closed
2/20/2012	3:08:27 PM	Bubbler valve closed
2/20/2012	3:08:27 PM	Bypass valve opened
2/20/2012	3:08:27 PM	Helium MFC set to  0.000000
2/20/2012	3:08:27 PM	H2 MFC set to  0.000000
2/20/2012	3:08:27 PM	BCl3 MFC set to  0.000000
2/20/2012	3:08:27 PM	PH3 MFC set to  0.000000
2/20/2012	3:08:27 PM	SiCl4 MFC set to  0.000000
2/20/2012	3:08:27 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	3:08:27 PM	Tube furnace set to 0
2/20/2012	3:09:26 PM	Helium valve closed
2/20/2012	3:09:26 PM	H2 valve closed
2/20/2012	3:09:26 PM	BCl3 valve closed
2/20/2012	3:09:26 PM	PH3 valve closed
2/20/2012	3:09:26 PM	SiCl4 pre valve closed
2/20/2012	3:09:26 PM	SiCl4 post valve closed
2/20/2012	3:09:26 PM	Main Vac valve closed
2/20/2012	3:09:26 PM	Bubbler valve closed
2/20/2012	3:09:26 PM	Bypass valve opened
2/20/2012	3:09:26 PM	Helium MFC set to  0.000000
2/20/2012	3:09:26 PM	H2 MFC set to  0.000000
2/20/2012	3:09:26 PM	BCl3 MFC set to  0.000000
2/20/2012	3:09:26 PM	PH3 MFC set to  0.000000
2/20/2012	3:09:26 PM	SiCl4 MFC set to  0.000000
2/20/2012	3:09:26 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	3:09:26 PM	Tube furnace set to 0
2/20/2012	3:10:26 PM	Helium valve closed
2/20/2012	3:10:26 PM	H2 valve closed
2/20/2012	3:10:26 PM	BCl3 valve closed
2/20/2012	3:10:26 PM	PH3 valve closed
2/20/2012	3:10:26 PM	SiCl4 pre valve closed
2/20/2012	3:10:26 PM	SiCl4 post valve closed
2/20/2012	3:10:26 PM	Bypass valve closed
2/20/2012	3:10:26 PM	Bubbler valve closed
2/20/2012	3:10:26 PM	Main Vac valve opened
2/20/2012	3:10:26 PM	Helium MFC set to  0.000000
2/20/2012	3:10:26 PM	H2 MFC set to  0.000000
2/20/2012	3:10:26 PM	BCl3 MFC set to  0.000000
2/20/2012	3:10:26 PM	PH3 MFC set to  0.000000
2/20/2012	3:10:26 PM	SiCl4 MFC set to  0.000000
2/20/2012	3:10:26 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	3:10:26 PM	Tube furnace set to 0
2/20/2012	3:10:27 PM	Run finished at 3:10 PM
2/20/2012	3:10:27 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/20/2012	3:20:02 PM	Recipe started at 3:19 PM
2/20/2012	3:20:02 PM	Helium valve closed
2/20/2012	3:20:02 PM	H2 valve closed
2/20/2012	3:20:02 PM	BCl3 valve closed
2/20/2012	3:20:02 PM	PH3 valve closed
2/20/2012	3:20:02 PM	SiCl4 pre valve closed
2/20/2012	3:20:02 PM	SiCl4 post valve closed
2/20/2012	3:20:02 PM	Bypass valve closed
2/20/2012	3:20:02 PM	Bubbler valve closed
2/20/2012	3:20:02 PM	Main Vac valve opened
2/20/2012	3:20:02 PM	Helium MFC set to  0.000000
2/20/2012	3:20:02 PM	H2 MFC set to  0.000000
2/20/2012	3:20:02 PM	BCl3 MFC set to  0.000000
2/20/2012	3:20:02 PM	PH3 MFC set to  0.000000
2/20/2012	3:20:02 PM	SiCl4 MFC set to  0.000000
2/20/2012	3:20:02 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	3:20:02 PM	Tube furnace set to 0
2/20/2012	3:20:32 PM	H2 valve closed
2/20/2012	3:20:32 PM	BCl3 valve closed
2/20/2012	3:20:32 PM	PH3 valve closed
2/20/2012	3:20:32 PM	SiCl4 pre valve closed
2/20/2012	3:20:32 PM	SiCl4 post valve closed
2/20/2012	3:20:32 PM	Bypass valve closed
2/20/2012	3:20:32 PM	Bubbler valve closed
2/20/2012	3:20:32 PM	Helium valve opened
2/20/2012	3:20:32 PM	Main Vac valve opened
2/20/2012	3:20:32 PM	Helium MFC set to  20.000000
2/20/2012	3:20:32 PM	H2 MFC set to  0.000000
2/20/2012	3:20:32 PM	BCl3 MFC set to  0.000000
2/20/2012	3:20:32 PM	PH3 MFC set to  0.000000
2/20/2012	3:20:32 PM	SiCl4 MFC set to  0.000000
2/20/2012	3:20:32 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	3:20:32 PM	Tube furnace set to 0
2/20/2012	3:21:02 PM	Helium valve closed
2/20/2012	3:21:02 PM	H2 valve closed
2/20/2012	3:21:02 PM	BCl3 valve closed
2/20/2012	3:21:02 PM	PH3 valve closed
2/20/2012	3:21:02 PM	SiCl4 pre valve closed
2/20/2012	3:21:02 PM	SiCl4 post valve closed
2/20/2012	3:21:02 PM	Bypass valve closed
2/20/2012	3:21:02 PM	Bubbler valve closed
2/20/2012	3:21:02 PM	Main Vac valve opened
2/20/2012	3:21:02 PM	Helium MFC set to  0.000000
2/20/2012	3:21:02 PM	H2 MFC set to  0.000000
2/20/2012	3:21:02 PM	BCl3 MFC set to  0.000000
2/20/2012	3:21:02 PM	PH3 MFC set to  0.000000
2/20/2012	3:21:02 PM	SiCl4 MFC set to  0.000000
2/20/2012	3:21:02 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	3:21:02 PM	Tube furnace set to 0
2/20/2012	3:21:32 PM	H2 valve closed
2/20/2012	3:21:32 PM	BCl3 valve closed
2/20/2012	3:21:32 PM	PH3 valve closed
2/20/2012	3:21:32 PM	SiCl4 pre valve closed
2/20/2012	3:21:32 PM	SiCl4 post valve closed
2/20/2012	3:21:32 PM	Bypass valve closed
2/20/2012	3:21:32 PM	Bubbler valve closed
2/20/2012	3:21:32 PM	Helium valve opened
2/20/2012	3:21:32 PM	Main Vac valve opened
2/20/2012	3:21:32 PM	Helium MFC set to  20.000000
2/20/2012	3:21:32 PM	H2 MFC set to  0.000000
2/20/2012	3:21:32 PM	BCl3 MFC set to  0.000000
2/20/2012	3:21:32 PM	PH3 MFC set to  0.000000
2/20/2012	3:21:32 PM	SiCl4 MFC set to  0.000000
2/20/2012	3:21:32 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	3:21:33 PM	Tube furnace set to 0
2/20/2012	3:22:03 PM	Helium valve closed
2/20/2012	3:22:03 PM	H2 valve closed
2/20/2012	3:22:03 PM	BCl3 valve closed
2/20/2012	3:22:03 PM	PH3 valve closed
2/20/2012	3:22:03 PM	SiCl4 pre valve closed
2/20/2012	3:22:03 PM	SiCl4 post valve closed
2/20/2012	3:22:03 PM	Bypass valve closed
2/20/2012	3:22:03 PM	Bubbler valve closed
2/20/2012	3:22:03 PM	Main Vac valve opened
2/20/2012	3:22:03 PM	Helium MFC set to  0.000000
2/20/2012	3:22:03 PM	H2 MFC set to  0.000000
2/20/2012	3:22:03 PM	BCl3 MFC set to  0.000000
2/20/2012	3:22:03 PM	PH3 MFC set to  0.000000
2/20/2012	3:22:03 PM	SiCl4 MFC set to  0.000000
2/20/2012	3:22:03 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	3:22:03 PM	Tube furnace set to 0
2/20/2012	3:22:33 PM	H2 valve closed
2/20/2012	3:22:33 PM	BCl3 valve closed
2/20/2012	3:22:33 PM	PH3 valve closed
2/20/2012	3:22:33 PM	SiCl4 pre valve closed
2/20/2012	3:22:33 PM	SiCl4 post valve closed
2/20/2012	3:22:33 PM	Bypass valve closed
2/20/2012	3:22:33 PM	Bubbler valve closed
2/20/2012	3:22:33 PM	Helium valve opened
2/20/2012	3:22:33 PM	Main Vac valve opened
2/20/2012	3:22:33 PM	Helium MFC set to  20.000000
2/20/2012	3:22:33 PM	H2 MFC set to  0.000000
2/20/2012	3:22:33 PM	BCl3 MFC set to  0.000000
2/20/2012	3:22:33 PM	PH3 MFC set to  0.000000
2/20/2012	3:22:33 PM	SiCl4 MFC set to  0.000000
2/20/2012	3:22:33 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	3:22:33 PM	Tube furnace set to 0
2/20/2012	3:23:03 PM	Helium valve closed
2/20/2012	3:23:03 PM	H2 valve closed
2/20/2012	3:23:03 PM	BCl3 valve closed
2/20/2012	3:23:03 PM	PH3 valve closed
2/20/2012	3:23:03 PM	SiCl4 pre valve closed
2/20/2012	3:23:03 PM	SiCl4 post valve closed
2/20/2012	3:23:03 PM	Bypass valve closed
2/20/2012	3:23:03 PM	Bubbler valve closed
2/20/2012	3:23:03 PM	Main Vac valve opened
2/20/2012	3:23:03 PM	Helium MFC set to  0.000000
2/20/2012	3:23:03 PM	H2 MFC set to  0.000000
2/20/2012	3:23:03 PM	BCl3 MFC set to  0.000000
2/20/2012	3:23:03 PM	PH3 MFC set to  0.000000
2/20/2012	3:23:03 PM	SiCl4 MFC set to  0.000000
2/20/2012	3:23:03 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	3:23:03 PM	Tube furnace set to 0
2/20/2012	3:23:04 PM	H2 valve closed
2/20/2012	3:23:04 PM	BCl3 valve closed
2/20/2012	3:23:04 PM	PH3 valve closed
2/20/2012	3:23:04 PM	SiCl4 pre valve closed
2/20/2012	3:23:04 PM	SiCl4 post valve closed
2/20/2012	3:23:04 PM	Bypass valve closed
2/20/2012	3:23:04 PM	Bubbler valve closed
2/20/2012	3:23:04 PM	Helium valve opened
2/20/2012	3:23:04 PM	Main Vac valve opened
2/20/2012	3:23:04 PM	Helium MFC set to  20.000000
2/20/2012	3:23:04 PM	H2 MFC set to  0.000000
2/20/2012	3:23:04 PM	BCl3 MFC set to  0.000000
2/20/2012	3:23:04 PM	PH3 MFC set to  0.000000
2/20/2012	3:23:04 PM	SiCl4 MFC set to  0.000000
2/20/2012	3:23:04 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	3:23:04 PM	Tube furnace set to 0
2/20/2012	3:23:08 PM	Helium valve closed
2/20/2012	3:23:08 PM	H2 valve closed
2/20/2012	3:23:08 PM	BCl3 valve closed
2/20/2012	3:23:08 PM	PH3 valve closed
2/20/2012	3:23:08 PM	SiCl4 pre valve closed
2/20/2012	3:23:08 PM	SiCl4 post valve closed
2/20/2012	3:23:08 PM	Bypass valve closed
2/20/2012	3:23:08 PM	Bubbler valve closed
2/20/2012	3:23:08 PM	Main Vac valve opened
2/20/2012	3:23:08 PM	Helium MFC set to  0.000000
2/20/2012	3:23:08 PM	H2 MFC set to  0.000000
2/20/2012	3:23:08 PM	BCl3 MFC set to  0.000000
2/20/2012	3:23:08 PM	PH3 MFC set to  0.000000
2/20/2012	3:23:08 PM	SiCl4 MFC set to  0.000000
2/20/2012	3:23:08 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	3:23:08 PM	Tube furnace set to 0
2/20/2012	3:23:08 PM	H2 valve closed
2/20/2012	3:23:08 PM	BCl3 valve closed
2/20/2012	3:23:08 PM	PH3 valve closed
2/20/2012	3:23:08 PM	SiCl4 pre valve closed
2/20/2012	3:23:08 PM	SiCl4 post valve closed
2/20/2012	3:23:08 PM	Bypass valve closed
2/20/2012	3:23:08 PM	Bubbler valve closed
2/20/2012	3:23:08 PM	Helium valve opened
2/20/2012	3:23:08 PM	Main Vac valve opened
2/20/2012	3:23:08 PM	Helium MFC set to  20.000000
2/20/2012	3:23:08 PM	H2 MFC set to  0.000000
2/20/2012	3:23:08 PM	BCl3 MFC set to  0.000000
2/20/2012	3:23:08 PM	PH3 MFC set to  0.000000
2/20/2012	3:23:08 PM	SiCl4 MFC set to  0.000000
2/20/2012	3:23:08 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	3:23:08 PM	Tube furnace set to 0
2/20/2012	3:23:17 PM	Helium valve closed
2/20/2012	3:23:17 PM	H2 valve closed
2/20/2012	3:23:17 PM	BCl3 valve closed
2/20/2012	3:23:17 PM	PH3 valve closed
2/20/2012	3:23:17 PM	SiCl4 pre valve closed
2/20/2012	3:23:17 PM	SiCl4 post valve closed
2/20/2012	3:23:17 PM	Bypass valve closed
2/20/2012	3:23:17 PM	Bubbler valve closed
2/20/2012	3:23:17 PM	Main Vac valve opened
2/20/2012	3:23:17 PM	Helium MFC set to  0.000000
2/20/2012	3:23:17 PM	H2 MFC set to  0.000000
2/20/2012	3:23:17 PM	BCl3 MFC set to  0.000000
2/20/2012	3:23:17 PM	PH3 MFC set to  0.000000
2/20/2012	3:23:17 PM	SiCl4 MFC set to  0.000000
2/20/2012	3:23:17 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	3:23:17 PM	Tube furnace set to 0
2/20/2012	3:23:31 PM	Run aborted at 3:23 PM
2/20/2012	3:23:31 PM	Helium valve closed
2/20/2012	3:23:31 PM	H2 valve closed
2/20/2012	3:23:31 PM	BCl3 valve closed
2/20/2012	3:23:31 PM	PH3 valve closed
2/20/2012	3:23:31 PM	SiCl4 pre valve closed
2/20/2012	3:23:31 PM	SiCl4 post valve closed
2/20/2012	3:23:31 PM	Bypass valve closed
2/20/2012	3:23:31 PM	Main Vac valve closed
2/20/2012	3:23:31 PM	Bubbler valve closed
2/20/2012	3:23:31 PM	Helium MFC set to  0.000000
2/20/2012	3:23:31 PM	H2 MFC set to  0.000000
2/20/2012	3:23:31 PM	BCl3 MFC set to  0.000000
2/20/2012	3:23:31 PM	PH3 MFC set to  0.000000
2/20/2012	3:23:31 PM	SiCl4 MFC set to  0.000000
2/20/2012	3:23:31 PM	Tube furnace set to 0
2/20/2012	3:23:44 PM	Recipe started at 3:23 PM
2/20/2012	3:23:44 PM	Helium valve closed
2/20/2012	3:23:44 PM	H2 valve closed
2/20/2012	3:23:44 PM	BCl3 valve closed
2/20/2012	3:23:44 PM	PH3 valve closed
2/20/2012	3:23:44 PM	SiCl4 pre valve closed
2/20/2012	3:23:44 PM	SiCl4 post valve closed
2/20/2012	3:23:44 PM	Bypass valve closed
2/20/2012	3:23:44 PM	Bubbler valve closed
2/20/2012	3:23:44 PM	Main Vac valve opened
2/20/2012	3:23:44 PM	Helium MFC set to  0.000000
2/20/2012	3:23:44 PM	H2 MFC set to  0.000000
2/20/2012	3:23:44 PM	BCl3 MFC set to  0.000000
2/20/2012	3:23:44 PM	PH3 MFC set to  0.000000
2/20/2012	3:23:44 PM	SiCl4 MFC set to  0.000000
2/20/2012	3:23:44 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	3:23:44 PM	Tube furnace set to 0
2/20/2012	3:24:14 PM	H2 valve closed
2/20/2012	3:24:14 PM	BCl3 valve closed
2/20/2012	3:24:14 PM	PH3 valve closed
2/20/2012	3:24:14 PM	SiCl4 pre valve closed
2/20/2012	3:24:14 PM	SiCl4 post valve closed
2/20/2012	3:24:14 PM	Bypass valve closed
2/20/2012	3:24:14 PM	Bubbler valve closed
2/20/2012	3:24:14 PM	Helium valve opened
2/20/2012	3:24:14 PM	Main Vac valve opened
2/20/2012	3:24:14 PM	Helium MFC set to  20.000000
2/20/2012	3:24:14 PM	H2 MFC set to  0.000000
2/20/2012	3:24:14 PM	BCl3 MFC set to  0.000000
2/20/2012	3:24:14 PM	PH3 MFC set to  0.000000
2/20/2012	3:24:14 PM	SiCl4 MFC set to  0.000000
2/20/2012	3:24:14 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	3:24:14 PM	Tube furnace set to 0
2/20/2012	3:24:45 PM	Helium valve closed
2/20/2012	3:24:45 PM	H2 valve closed
2/20/2012	3:24:45 PM	BCl3 valve closed
2/20/2012	3:24:45 PM	PH3 valve closed
2/20/2012	3:24:45 PM	SiCl4 pre valve closed
2/20/2012	3:24:45 PM	SiCl4 post valve closed
2/20/2012	3:24:45 PM	Bypass valve closed
2/20/2012	3:24:45 PM	Bubbler valve closed
2/20/2012	3:24:45 PM	Main Vac valve opened
2/20/2012	3:24:45 PM	Helium MFC set to  0.000000
2/20/2012	3:24:45 PM	H2 MFC set to  0.000000
2/20/2012	3:24:45 PM	BCl3 MFC set to  0.000000
2/20/2012	3:24:45 PM	PH3 MFC set to  0.000000
2/20/2012	3:24:45 PM	SiCl4 MFC set to  0.000000
2/20/2012	3:24:45 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	3:24:45 PM	Tube furnace set to 0
2/20/2012	3:25:15 PM	H2 valve closed
2/20/2012	3:25:15 PM	BCl3 valve closed
2/20/2012	3:25:15 PM	PH3 valve closed
2/20/2012	3:25:15 PM	SiCl4 pre valve closed
2/20/2012	3:25:15 PM	SiCl4 post valve closed
2/20/2012	3:25:15 PM	Bypass valve closed
2/20/2012	3:25:15 PM	Bubbler valve closed
2/20/2012	3:25:15 PM	Helium valve opened
2/20/2012	3:25:15 PM	Main Vac valve opened
2/20/2012	3:25:15 PM	Helium MFC set to  20.000000
2/20/2012	3:25:15 PM	H2 MFC set to  0.000000
2/20/2012	3:25:15 PM	BCl3 MFC set to  0.000000
2/20/2012	3:25:15 PM	PH3 MFC set to  0.000000
2/20/2012	3:25:15 PM	SiCl4 MFC set to  0.000000
2/20/2012	3:25:15 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	3:25:15 PM	Tube furnace set to 0
2/20/2012	3:25:45 PM	Helium valve closed
2/20/2012	3:25:45 PM	H2 valve closed
2/20/2012	3:25:45 PM	BCl3 valve closed
2/20/2012	3:25:45 PM	PH3 valve closed
2/20/2012	3:25:45 PM	SiCl4 pre valve closed
2/20/2012	3:25:45 PM	SiCl4 post valve closed
2/20/2012	3:25:45 PM	Bypass valve closed
2/20/2012	3:25:45 PM	Bubbler valve closed
2/20/2012	3:25:45 PM	Main Vac valve opened
2/20/2012	3:25:45 PM	Helium MFC set to  0.000000
2/20/2012	3:25:45 PM	H2 MFC set to  0.000000
2/20/2012	3:25:45 PM	BCl3 MFC set to  0.000000
2/20/2012	3:25:45 PM	PH3 MFC set to  0.000000
2/20/2012	3:25:45 PM	SiCl4 MFC set to  0.000000
2/20/2012	3:25:45 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	3:25:45 PM	Tube furnace set to 0
2/20/2012	3:26:15 PM	H2 valve closed
2/20/2012	3:26:15 PM	BCl3 valve closed
2/20/2012	3:26:15 PM	PH3 valve closed
2/20/2012	3:26:15 PM	SiCl4 pre valve closed
2/20/2012	3:26:15 PM	SiCl4 post valve closed
2/20/2012	3:26:15 PM	Bypass valve closed
2/20/2012	3:26:15 PM	Bubbler valve closed
2/20/2012	3:26:15 PM	Helium valve opened
2/20/2012	3:26:15 PM	Main Vac valve opened
2/20/2012	3:26:15 PM	Helium MFC set to  20.000000
2/20/2012	3:26:15 PM	H2 MFC set to  0.000000
2/20/2012	3:26:15 PM	BCl3 MFC set to  0.000000
2/20/2012	3:26:15 PM	PH3 MFC set to  0.000000
2/20/2012	3:26:15 PM	SiCl4 MFC set to  0.000000
2/20/2012	3:26:15 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	3:26:15 PM	Tube furnace set to 0
2/20/2012	3:26:45 PM	Helium valve closed
2/20/2012	3:26:45 PM	H2 valve closed
2/20/2012	3:26:45 PM	BCl3 valve closed
2/20/2012	3:26:45 PM	PH3 valve closed
2/20/2012	3:26:45 PM	SiCl4 pre valve closed
2/20/2012	3:26:45 PM	SiCl4 post valve closed
2/20/2012	3:26:45 PM	Bypass valve closed
2/20/2012	3:26:45 PM	Bubbler valve closed
2/20/2012	3:26:45 PM	Main Vac valve opened
2/20/2012	3:26:45 PM	Helium MFC set to  0.000000
2/20/2012	3:26:45 PM	H2 MFC set to  0.000000
2/20/2012	3:26:45 PM	BCl3 MFC set to  0.000000
2/20/2012	3:26:45 PM	PH3 MFC set to  0.000000
2/20/2012	3:26:45 PM	SiCl4 MFC set to  0.000000
2/20/2012	3:26:45 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	3:26:45 PM	Tube furnace set to 0
2/20/2012	3:27:16 PM	H2 valve closed
2/20/2012	3:27:16 PM	BCl3 valve closed
2/20/2012	3:27:16 PM	PH3 valve closed
2/20/2012	3:27:16 PM	SiCl4 pre valve closed
2/20/2012	3:27:16 PM	SiCl4 post valve closed
2/20/2012	3:27:16 PM	Bypass valve closed
2/20/2012	3:27:16 PM	Bubbler valve closed
2/20/2012	3:27:16 PM	Helium valve opened
2/20/2012	3:27:16 PM	Main Vac valve opened
2/20/2012	3:27:16 PM	Helium MFC set to  20.000000
2/20/2012	3:27:16 PM	H2 MFC set to  0.000000
2/20/2012	3:27:16 PM	BCl3 MFC set to  0.000000
2/20/2012	3:27:16 PM	PH3 MFC set to  0.000000
2/20/2012	3:27:16 PM	SiCl4 MFC set to  0.000000
2/20/2012	3:27:16 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	3:27:16 PM	Tube furnace set to 0
2/20/2012	3:27:46 PM	Helium valve closed
2/20/2012	3:27:46 PM	H2 valve closed
2/20/2012	3:27:46 PM	BCl3 valve closed
2/20/2012	3:27:46 PM	PH3 valve closed
2/20/2012	3:27:46 PM	SiCl4 pre valve closed
2/20/2012	3:27:46 PM	SiCl4 post valve closed
2/20/2012	3:27:46 PM	Bypass valve closed
2/20/2012	3:27:46 PM	Bubbler valve closed
2/20/2012	3:27:46 PM	Main Vac valve opened
2/20/2012	3:27:46 PM	Helium MFC set to  0.000000
2/20/2012	3:27:46 PM	H2 MFC set to  0.000000
2/20/2012	3:27:46 PM	BCl3 MFC set to  0.000000
2/20/2012	3:27:46 PM	PH3 MFC set to  0.000000
2/20/2012	3:27:46 PM	SiCl4 MFC set to  0.000000
2/20/2012	3:27:46 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	3:27:46 PM	Tube furnace set to 0
2/20/2012	3:28:16 PM	H2 valve closed
2/20/2012	3:28:16 PM	BCl3 valve closed
2/20/2012	3:28:16 PM	PH3 valve closed
2/20/2012	3:28:16 PM	SiCl4 pre valve closed
2/20/2012	3:28:16 PM	SiCl4 post valve closed
2/20/2012	3:28:16 PM	Bypass valve closed
2/20/2012	3:28:16 PM	Bubbler valve closed
2/20/2012	3:28:16 PM	Helium valve opened
2/20/2012	3:28:16 PM	Main Vac valve opened
2/20/2012	3:28:16 PM	Helium MFC set to  20.000000
2/20/2012	3:28:16 PM	H2 MFC set to  0.000000
2/20/2012	3:28:16 PM	BCl3 MFC set to  0.000000
2/20/2012	3:28:16 PM	PH3 MFC set to  0.000000
2/20/2012	3:28:16 PM	SiCl4 MFC set to  0.000000
2/20/2012	3:28:16 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	3:28:16 PM	Tube furnace set to 0
2/20/2012	3:28:46 PM	Helium valve closed
2/20/2012	3:28:46 PM	H2 valve closed
2/20/2012	3:28:46 PM	BCl3 valve closed
2/20/2012	3:28:46 PM	PH3 valve closed
2/20/2012	3:28:46 PM	SiCl4 pre valve closed
2/20/2012	3:28:46 PM	SiCl4 post valve closed
2/20/2012	3:28:46 PM	Bypass valve closed
2/20/2012	3:28:46 PM	Bubbler valve closed
2/20/2012	3:28:46 PM	Main Vac valve opened
2/20/2012	3:28:46 PM	Helium MFC set to  0.000000
2/20/2012	3:28:46 PM	H2 MFC set to  0.000000
2/20/2012	3:28:46 PM	BCl3 MFC set to  0.000000
2/20/2012	3:28:46 PM	PH3 MFC set to  0.000000
2/20/2012	3:28:46 PM	SiCl4 MFC set to  0.000000
2/20/2012	3:28:46 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	3:28:46 PM	Tube furnace set to 0
2/20/2012	3:29:16 PM	H2 valve closed
2/20/2012	3:29:16 PM	BCl3 valve closed
2/20/2012	3:29:16 PM	PH3 valve closed
2/20/2012	3:29:16 PM	SiCl4 pre valve closed
2/20/2012	3:29:16 PM	SiCl4 post valve closed
2/20/2012	3:29:16 PM	Bypass valve closed
2/20/2012	3:29:16 PM	Bubbler valve closed
2/20/2012	3:29:16 PM	Helium valve opened
2/20/2012	3:29:16 PM	Main Vac valve opened
2/20/2012	3:29:16 PM	Helium MFC set to  20.000000
2/20/2012	3:29:16 PM	H2 MFC set to  0.000000
2/20/2012	3:29:16 PM	BCl3 MFC set to  0.000000
2/20/2012	3:29:16 PM	PH3 MFC set to  0.000000
2/20/2012	3:29:16 PM	SiCl4 MFC set to  0.000000
2/20/2012	3:29:16 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	3:29:17 PM	Tube furnace set to 0
2/20/2012	3:29:47 PM	Helium valve closed
2/20/2012	3:29:47 PM	H2 valve closed
2/20/2012	3:29:47 PM	BCl3 valve closed
2/20/2012	3:29:47 PM	PH3 valve closed
2/20/2012	3:29:47 PM	SiCl4 pre valve closed
2/20/2012	3:29:47 PM	SiCl4 post valve closed
2/20/2012	3:29:47 PM	Bypass valve closed
2/20/2012	3:29:47 PM	Bubbler valve closed
2/20/2012	3:29:47 PM	Main Vac valve opened
2/20/2012	3:29:47 PM	Helium MFC set to  0.000000
2/20/2012	3:29:47 PM	H2 MFC set to  0.000000
2/20/2012	3:29:47 PM	BCl3 MFC set to  0.000000
2/20/2012	3:29:47 PM	PH3 MFC set to  0.000000
2/20/2012	3:29:47 PM	SiCl4 MFC set to  0.000000
2/20/2012	3:29:47 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	3:29:47 PM	Tube furnace set to 0
2/20/2012	3:30:17 PM	H2 valve closed
2/20/2012	3:30:17 PM	BCl3 valve closed
2/20/2012	3:30:17 PM	PH3 valve closed
2/20/2012	3:30:17 PM	SiCl4 pre valve closed
2/20/2012	3:30:17 PM	SiCl4 post valve closed
2/20/2012	3:30:17 PM	Bypass valve closed
2/20/2012	3:30:17 PM	Bubbler valve closed
2/20/2012	3:30:17 PM	Helium valve opened
2/20/2012	3:30:17 PM	Main Vac valve opened
2/20/2012	3:30:17 PM	Helium MFC set to  20.000000
2/20/2012	3:30:17 PM	H2 MFC set to  0.000000
2/20/2012	3:30:17 PM	BCl3 MFC set to  0.000000
2/20/2012	3:30:17 PM	PH3 MFC set to  0.000000
2/20/2012	3:30:17 PM	SiCl4 MFC set to  0.000000
2/20/2012	3:30:17 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	3:30:17 PM	Tube furnace set to 0
2/20/2012	3:30:47 PM	Helium valve closed
2/20/2012	3:30:47 PM	H2 valve closed
2/20/2012	3:30:47 PM	BCl3 valve closed
2/20/2012	3:30:47 PM	PH3 valve closed
2/20/2012	3:30:47 PM	SiCl4 pre valve closed
2/20/2012	3:30:47 PM	SiCl4 post valve closed
2/20/2012	3:30:47 PM	Bypass valve closed
2/20/2012	3:30:47 PM	Bubbler valve closed
2/20/2012	3:30:47 PM	Main Vac valve opened
2/20/2012	3:30:47 PM	Helium MFC set to  0.000000
2/20/2012	3:30:47 PM	H2 MFC set to  0.000000
2/20/2012	3:30:47 PM	BCl3 MFC set to  0.000000
2/20/2012	3:30:47 PM	PH3 MFC set to  0.000000
2/20/2012	3:30:47 PM	SiCl4 MFC set to  0.000000
2/20/2012	3:30:47 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	3:30:47 PM	Tube furnace set to 0
2/20/2012	3:31:17 PM	H2 valve closed
2/20/2012	3:31:17 PM	BCl3 valve closed
2/20/2012	3:31:17 PM	PH3 valve closed
2/20/2012	3:31:17 PM	SiCl4 pre valve closed
2/20/2012	3:31:17 PM	SiCl4 post valve closed
2/20/2012	3:31:17 PM	Bypass valve closed
2/20/2012	3:31:17 PM	Bubbler valve closed
2/20/2012	3:31:17 PM	Helium valve opened
2/20/2012	3:31:17 PM	Main Vac valve opened
2/20/2012	3:31:17 PM	Helium MFC set to  20.000000
2/20/2012	3:31:17 PM	H2 MFC set to  0.000000
2/20/2012	3:31:17 PM	BCl3 MFC set to  0.000000
2/20/2012	3:31:17 PM	PH3 MFC set to  0.000000
2/20/2012	3:31:17 PM	SiCl4 MFC set to  0.000000
2/20/2012	3:31:17 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	3:31:17 PM	Tube furnace set to 0
2/20/2012	3:31:47 PM	Helium valve closed
2/20/2012	3:31:47 PM	H2 valve closed
2/20/2012	3:31:47 PM	BCl3 valve closed
2/20/2012	3:31:47 PM	PH3 valve closed
2/20/2012	3:31:47 PM	SiCl4 pre valve closed
2/20/2012	3:31:47 PM	SiCl4 post valve closed
2/20/2012	3:31:47 PM	Bypass valve closed
2/20/2012	3:31:47 PM	Bubbler valve closed
2/20/2012	3:31:47 PM	Main Vac valve opened
2/20/2012	3:31:47 PM	Helium MFC set to  0.000000
2/20/2012	3:31:47 PM	H2 MFC set to  0.000000
2/20/2012	3:31:47 PM	BCl3 MFC set to  0.000000
2/20/2012	3:31:47 PM	PH3 MFC set to  0.000000
2/20/2012	3:31:47 PM	SiCl4 MFC set to  0.000000
2/20/2012	3:31:47 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	3:31:48 PM	Tube furnace set to 0
2/20/2012	3:32:18 PM	H2 valve closed
2/20/2012	3:32:18 PM	BCl3 valve closed
2/20/2012	3:32:18 PM	PH3 valve closed
2/20/2012	3:32:18 PM	SiCl4 pre valve closed
2/20/2012	3:32:18 PM	SiCl4 post valve closed
2/20/2012	3:32:18 PM	Bypass valve closed
2/20/2012	3:32:18 PM	Bubbler valve closed
2/20/2012	3:32:18 PM	Helium valve opened
2/20/2012	3:32:18 PM	Main Vac valve opened
2/20/2012	3:32:18 PM	Helium MFC set to  20.000000
2/20/2012	3:32:18 PM	H2 MFC set to  0.000000
2/20/2012	3:32:18 PM	BCl3 MFC set to  0.000000
2/20/2012	3:32:18 PM	PH3 MFC set to  0.000000
2/20/2012	3:32:18 PM	SiCl4 MFC set to  0.000000
2/20/2012	3:32:18 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	3:32:18 PM	Tube furnace set to 0
2/20/2012	3:32:48 PM	Helium valve closed
2/20/2012	3:32:48 PM	H2 valve closed
2/20/2012	3:32:48 PM	BCl3 valve closed
2/20/2012	3:32:48 PM	PH3 valve closed
2/20/2012	3:32:48 PM	SiCl4 pre valve closed
2/20/2012	3:32:48 PM	SiCl4 post valve closed
2/20/2012	3:32:48 PM	Bypass valve closed
2/20/2012	3:32:48 PM	Bubbler valve closed
2/20/2012	3:32:48 PM	Main Vac valve opened
2/20/2012	3:32:48 PM	Helium MFC set to  0.000000
2/20/2012	3:32:48 PM	H2 MFC set to  0.000000
2/20/2012	3:32:48 PM	BCl3 MFC set to  0.000000
2/20/2012	3:32:48 PM	PH3 MFC set to  0.000000
2/20/2012	3:32:48 PM	SiCl4 MFC set to  0.000000
2/20/2012	3:32:48 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	3:32:48 PM	Tube furnace set to 200
2/20/2012	3:33:18 PM	H2 valve closed
2/20/2012	3:33:18 PM	BCl3 valve closed
2/20/2012	3:33:18 PM	PH3 valve closed
2/20/2012	3:33:18 PM	SiCl4 pre valve closed
2/20/2012	3:33:18 PM	SiCl4 post valve closed
2/20/2012	3:33:18 PM	Bypass valve closed
2/20/2012	3:33:18 PM	Bubbler valve closed
2/20/2012	3:33:18 PM	Helium valve opened
2/20/2012	3:33:18 PM	Main Vac valve opened
2/20/2012	3:33:18 PM	Helium MFC set to  20.000000
2/20/2012	3:33:18 PM	H2 MFC set to  0.000000
2/20/2012	3:33:18 PM	BCl3 MFC set to  0.000000
2/20/2012	3:33:18 PM	PH3 MFC set to  0.000000
2/20/2012	3:33:18 PM	SiCl4 MFC set to  0.000000
2/20/2012	3:33:18 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	3:33:18 PM	Tube furnace set to 200
2/20/2012	3:33:48 PM	Helium valve closed
2/20/2012	3:33:48 PM	H2 valve closed
2/20/2012	3:33:48 PM	BCl3 valve closed
2/20/2012	3:33:48 PM	PH3 valve closed
2/20/2012	3:33:48 PM	SiCl4 pre valve closed
2/20/2012	3:33:48 PM	SiCl4 post valve closed
2/20/2012	3:33:48 PM	Bypass valve closed
2/20/2012	3:33:48 PM	Bubbler valve closed
2/20/2012	3:33:48 PM	Main Vac valve opened
2/20/2012	3:33:48 PM	Helium MFC set to  0.000000
2/20/2012	3:33:48 PM	H2 MFC set to  0.000000
2/20/2012	3:33:48 PM	BCl3 MFC set to  0.000000
2/20/2012	3:33:48 PM	PH3 MFC set to  0.000000
2/20/2012	3:33:48 PM	SiCl4 MFC set to  0.000000
2/20/2012	3:33:48 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	3:33:48 PM	Tube furnace set to 200
2/20/2012	3:34:18 PM	H2 valve closed
2/20/2012	3:34:18 PM	BCl3 valve closed
2/20/2012	3:34:18 PM	PH3 valve closed
2/20/2012	3:34:18 PM	SiCl4 pre valve closed
2/20/2012	3:34:18 PM	SiCl4 post valve closed
2/20/2012	3:34:18 PM	Bypass valve closed
2/20/2012	3:34:18 PM	Bubbler valve closed
2/20/2012	3:34:18 PM	Helium valve opened
2/20/2012	3:34:18 PM	Main Vac valve opened
2/20/2012	3:34:18 PM	Helium MFC set to  20.000000
2/20/2012	3:34:19 PM	H2 MFC set to  0.000000
2/20/2012	3:34:19 PM	BCl3 MFC set to  0.000000
2/20/2012	3:34:19 PM	PH3 MFC set to  0.000000
2/20/2012	3:34:19 PM	SiCl4 MFC set to  0.000000
2/20/2012	3:34:19 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	3:34:19 PM	Tube furnace set to 200
2/20/2012	3:34:49 PM	Helium valve closed
2/20/2012	3:34:49 PM	H2 valve closed
2/20/2012	3:34:49 PM	BCl3 valve closed
2/20/2012	3:34:49 PM	PH3 valve closed
2/20/2012	3:34:49 PM	SiCl4 pre valve closed
2/20/2012	3:34:49 PM	SiCl4 post valve closed
2/20/2012	3:34:49 PM	Bypass valve closed
2/20/2012	3:34:49 PM	Bubbler valve closed
2/20/2012	3:34:49 PM	Main Vac valve opened
2/20/2012	3:34:49 PM	Helium MFC set to  0.000000
2/20/2012	3:34:49 PM	H2 MFC set to  0.000000
2/20/2012	3:34:49 PM	BCl3 MFC set to  0.000000
2/20/2012	3:34:49 PM	PH3 MFC set to  0.000000
2/20/2012	3:34:49 PM	SiCl4 MFC set to  0.000000
2/20/2012	3:34:49 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	3:34:49 PM	Tube furnace set to 200
2/20/2012	3:35:19 PM	H2 valve closed
2/20/2012	3:35:19 PM	BCl3 valve closed
2/20/2012	3:35:19 PM	PH3 valve closed
2/20/2012	3:35:19 PM	SiCl4 pre valve closed
2/20/2012	3:35:19 PM	SiCl4 post valve closed
2/20/2012	3:35:19 PM	Bypass valve closed
2/20/2012	3:35:19 PM	Bubbler valve closed
2/20/2012	3:35:19 PM	Helium valve opened
2/20/2012	3:35:19 PM	Main Vac valve opened
2/20/2012	3:35:19 PM	Helium MFC set to  20.000000
2/20/2012	3:35:19 PM	H2 MFC set to  0.000000
2/20/2012	3:35:19 PM	BCl3 MFC set to  0.000000
2/20/2012	3:35:19 PM	PH3 MFC set to  0.000000
2/20/2012	3:35:19 PM	SiCl4 MFC set to  0.000000
2/20/2012	3:35:19 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	3:35:19 PM	Tube furnace set to 200
2/20/2012	3:35:49 PM	Helium valve closed
2/20/2012	3:35:49 PM	H2 valve closed
2/20/2012	3:35:49 PM	BCl3 valve closed
2/20/2012	3:35:49 PM	PH3 valve closed
2/20/2012	3:35:49 PM	SiCl4 pre valve closed
2/20/2012	3:35:49 PM	SiCl4 post valve closed
2/20/2012	3:35:49 PM	Bypass valve closed
2/20/2012	3:35:49 PM	Bubbler valve closed
2/20/2012	3:35:49 PM	Main Vac valve opened
2/20/2012	3:35:49 PM	Helium MFC set to  0.000000
2/20/2012	3:35:49 PM	H2 MFC set to  0.000000
2/20/2012	3:35:49 PM	BCl3 MFC set to  0.000000
2/20/2012	3:35:49 PM	PH3 MFC set to  0.000000
2/20/2012	3:35:49 PM	SiCl4 MFC set to  0.000000
2/20/2012	3:35:49 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	3:35:49 PM	Tube furnace set to 200
2/20/2012	3:36:19 PM	H2 valve closed
2/20/2012	3:36:19 PM	BCl3 valve closed
2/20/2012	3:36:19 PM	PH3 valve closed
2/20/2012	3:36:19 PM	SiCl4 pre valve closed
2/20/2012	3:36:19 PM	SiCl4 post valve closed
2/20/2012	3:36:19 PM	Bypass valve closed
2/20/2012	3:36:19 PM	Bubbler valve closed
2/20/2012	3:36:19 PM	Helium valve opened
2/20/2012	3:36:19 PM	Main Vac valve opened
2/20/2012	3:36:19 PM	Helium MFC set to  20.000000
2/20/2012	3:36:19 PM	H2 MFC set to  0.000000
2/20/2012	3:36:19 PM	BCl3 MFC set to  0.000000
2/20/2012	3:36:19 PM	PH3 MFC set to  0.000000
2/20/2012	3:36:19 PM	SiCl4 MFC set to  0.000000
2/20/2012	3:36:19 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	3:36:20 PM	Tube furnace set to 200
2/20/2012	3:36:50 PM	Helium valve closed
2/20/2012	3:36:50 PM	H2 valve closed
2/20/2012	3:36:50 PM	BCl3 valve closed
2/20/2012	3:36:50 PM	PH3 valve closed
2/20/2012	3:36:50 PM	SiCl4 pre valve closed
2/20/2012	3:36:50 PM	SiCl4 post valve closed
2/20/2012	3:36:50 PM	Bypass valve closed
2/20/2012	3:36:50 PM	Bubbler valve closed
2/20/2012	3:36:50 PM	Main Vac valve opened
2/20/2012	3:36:50 PM	Helium MFC set to  0.000000
2/20/2012	3:36:50 PM	H2 MFC set to  0.000000
2/20/2012	3:36:50 PM	BCl3 MFC set to  0.000000
2/20/2012	3:36:50 PM	PH3 MFC set to  0.000000
2/20/2012	3:36:50 PM	SiCl4 MFC set to  0.000000
2/20/2012	3:36:50 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	3:36:50 PM	Tube furnace set to 200
2/20/2012	3:37:20 PM	H2 valve closed
2/20/2012	3:37:20 PM	BCl3 valve closed
2/20/2012	3:37:20 PM	PH3 valve closed
2/20/2012	3:37:20 PM	SiCl4 pre valve closed
2/20/2012	3:37:20 PM	SiCl4 post valve closed
2/20/2012	3:37:20 PM	Bypass valve closed
2/20/2012	3:37:20 PM	Bubbler valve closed
2/20/2012	3:37:20 PM	Helium valve opened
2/20/2012	3:37:20 PM	Main Vac valve opened
2/20/2012	3:37:20 PM	Helium MFC set to  20.000000
2/20/2012	3:37:20 PM	H2 MFC set to  0.000000
2/20/2012	3:37:20 PM	BCl3 MFC set to  0.000000
2/20/2012	3:37:20 PM	PH3 MFC set to  0.000000
2/20/2012	3:37:20 PM	SiCl4 MFC set to  0.000000
2/20/2012	3:37:20 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	3:37:20 PM	Tube furnace set to 200
2/20/2012	3:37:50 PM	Helium valve closed
2/20/2012	3:37:50 PM	H2 valve closed
2/20/2012	3:37:50 PM	BCl3 valve closed
2/20/2012	3:37:50 PM	PH3 valve closed
2/20/2012	3:37:50 PM	SiCl4 pre valve closed
2/20/2012	3:37:50 PM	SiCl4 post valve closed
2/20/2012	3:37:50 PM	Bypass valve closed
2/20/2012	3:37:50 PM	Bubbler valve closed
2/20/2012	3:37:50 PM	Main Vac valve opened
2/20/2012	3:37:50 PM	Helium MFC set to  0.000000
2/20/2012	3:37:50 PM	H2 MFC set to  0.000000
2/20/2012	3:37:50 PM	BCl3 MFC set to  0.000000
2/20/2012	3:37:50 PM	PH3 MFC set to  0.000000
2/20/2012	3:37:50 PM	SiCl4 MFC set to  0.000000
2/20/2012	3:37:50 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	3:37:50 PM	Tube furnace set to 200
2/20/2012	3:38:20 PM	H2 valve closed
2/20/2012	3:38:20 PM	BCl3 valve closed
2/20/2012	3:38:20 PM	PH3 valve closed
2/20/2012	3:38:20 PM	SiCl4 pre valve closed
2/20/2012	3:38:20 PM	SiCl4 post valve closed
2/20/2012	3:38:20 PM	Bypass valve closed
2/20/2012	3:38:20 PM	Bubbler valve closed
2/20/2012	3:38:20 PM	Helium valve opened
2/20/2012	3:38:20 PM	Main Vac valve opened
2/20/2012	3:38:20 PM	Helium MFC set to  20.000000
2/20/2012	3:38:20 PM	H2 MFC set to  0.000000
2/20/2012	3:38:20 PM	BCl3 MFC set to  0.000000
2/20/2012	3:38:20 PM	PH3 MFC set to  0.000000
2/20/2012	3:38:20 PM	SiCl4 MFC set to  0.000000
2/20/2012	3:38:20 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	3:38:20 PM	Tube furnace set to 200
2/20/2012	3:38:50 PM	Helium valve closed
2/20/2012	3:38:50 PM	H2 valve closed
2/20/2012	3:38:50 PM	BCl3 valve closed
2/20/2012	3:38:50 PM	PH3 valve closed
2/20/2012	3:38:50 PM	SiCl4 pre valve closed
2/20/2012	3:38:50 PM	SiCl4 post valve closed
2/20/2012	3:38:50 PM	Bypass valve closed
2/20/2012	3:38:50 PM	Bubbler valve closed
2/20/2012	3:38:50 PM	Main Vac valve opened
2/20/2012	3:38:50 PM	Helium MFC set to  0.000000
2/20/2012	3:38:50 PM	H2 MFC set to  0.000000
2/20/2012	3:38:50 PM	BCl3 MFC set to  0.000000
2/20/2012	3:38:50 PM	PH3 MFC set to  0.000000
2/20/2012	3:38:50 PM	SiCl4 MFC set to  0.000000
2/20/2012	3:38:50 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	3:38:51 PM	Tube furnace set to 0
2/20/2012	3:38:52 PM	Run finished at 3:38 PM
2/20/2012	4:02:42 PM	Main Vac valve closed
2/20/2012	4:02:50 PM	Main Vac valve opened
2/20/2012	4:03:19 PM	Recipe started at 4:03 PM
2/20/2012	4:03:19 PM	Helium valve closed
2/20/2012	4:03:20 PM	H2 valve closed
2/20/2012	4:03:20 PM	BCl3 valve closed
2/20/2012	4:03:20 PM	PH3 valve closed
2/20/2012	4:03:20 PM	SiCl4 pre valve closed
2/20/2012	4:03:20 PM	SiCl4 post valve closed
2/20/2012	4:03:20 PM	Main Vac valve closed
2/20/2012	4:03:20 PM	Bypass valve closed
2/20/2012	4:03:20 PM	Bubbler valve closed
2/20/2012	4:03:20 PM	Helium MFC set to  0.000000
2/20/2012	4:03:20 PM	H2 MFC set to  0.000000
2/20/2012	4:03:20 PM	BCl3 MFC set to  0.000000
2/20/2012	4:03:20 PM	PH3 MFC set to  0.000000
2/20/2012	4:03:20 PM	SiCl4 MFC set to  0.000000
2/20/2012	4:03:20 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	4:03:20 PM	Tube furnace set to 0
2/20/2012	4:03:23 PM	Helium valve closed
2/20/2012	4:03:23 PM	BCl3 valve closed
2/20/2012	4:03:23 PM	PH3 valve closed
2/20/2012	4:03:23 PM	SiCl4 pre valve closed
2/20/2012	4:03:23 PM	SiCl4 post valve closed
2/20/2012	4:03:23 PM	Main Vac valve closed
2/20/2012	4:03:23 PM	Bypass valve closed
2/20/2012	4:03:23 PM	Bubbler valve closed
2/20/2012	4:03:23 PM	H2 valve opened
2/20/2012	4:03:23 PM	Helium MFC set to  0.000000
2/20/2012	4:03:23 PM	H2 MFC set to  500.000000
2/20/2012	4:03:23 PM	BCl3 MFC set to  0.000000
2/20/2012	4:03:23 PM	PH3 MFC set to  0.000000
2/20/2012	4:03:23 PM	SiCl4 MFC set to  0.000000
2/20/2012	4:03:23 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	4:03:23 PM	Tube furnace set to 0
2/20/2012	4:04:27 PM	Helium valve closed
2/20/2012	4:04:27 PM	BCl3 valve closed
2/20/2012	4:04:27 PM	PH3 valve closed
2/20/2012	4:04:27 PM	SiCl4 pre valve closed
2/20/2012	4:04:27 PM	SiCl4 post valve closed
2/20/2012	4:04:27 PM	Main Vac valve closed
2/20/2012	4:04:27 PM	Bypass valve closed
2/20/2012	4:04:27 PM	H2 valve opened
2/20/2012	4:04:27 PM	Bubbler valve opened
2/20/2012	4:04:27 PM	Helium MFC set to  0.000000
2/20/2012	4:04:27 PM	H2 MFC set to  500.000000
2/20/2012	4:04:27 PM	BCl3 MFC set to  0.000000
2/20/2012	4:04:27 PM	PH3 MFC set to  0.000000
2/20/2012	4:04:27 PM	SiCl4 MFC set to  0.000000
2/20/2012	4:04:27 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	4:04:27 PM	Tube furnace set to 0
2/20/2012	4:04:28 PM	Helium valve closed
2/20/2012	4:04:28 PM	BCl3 valve closed
2/20/2012	4:04:28 PM	PH3 valve closed
2/20/2012	4:04:28 PM	SiCl4 pre valve closed
2/20/2012	4:04:28 PM	SiCl4 post valve closed
2/20/2012	4:04:28 PM	Main Vac valve closed
2/20/2012	4:04:28 PM	Bypass valve closed
2/20/2012	4:04:28 PM	H2 valve opened
2/20/2012	4:04:28 PM	Bubbler valve opened
2/20/2012	4:04:28 PM	Helium MFC set to  0.000000
2/20/2012	4:04:28 PM	H2 MFC set to  500.000000
2/20/2012	4:04:28 PM	BCl3 MFC set to  0.000000
2/20/2012	4:04:28 PM	PH3 MFC set to  0.000000
2/20/2012	4:04:28 PM	SiCl4 MFC set to  0.000000
2/20/2012	4:04:28 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	4:04:29 PM	Tube furnace set to 1000
2/20/2012	4:24:29 PM	Helium valve closed
2/20/2012	4:24:29 PM	BCl3 valve closed
2/20/2012	4:24:29 PM	Main Vac valve closed
2/20/2012	4:24:29 PM	Bypass valve closed
2/20/2012	4:24:29 PM	H2 valve opened
2/20/2012	4:24:29 PM	PH3 valve opened
2/20/2012	4:24:29 PM	SiCl4 pre valve opened
2/20/2012	4:24:29 PM	SiCl4 post valve opened
2/20/2012	4:24:29 PM	Bubbler valve opened
2/20/2012	4:24:29 PM	Helium MFC set to  0.000000
2/20/2012	4:24:29 PM	H2 MFC set to  500.000000
2/20/2012	4:24:29 PM	BCl3 MFC set to  0.000000
2/20/2012	4:24:29 PM	PH3 MFC set to  1.000000
2/20/2012	4:24:29 PM	SiCl4 MFC set to  50.000000
2/20/2012	4:24:29 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	4:24:29 PM	Tube furnace set to 1000
2/20/2012	4:37:29 PM	Helium valve closed
2/20/2012	4:37:29 PM	BCl3 valve closed
2/20/2012	4:37:29 PM	PH3 valve closed
2/20/2012	4:37:29 PM	SiCl4 pre valve closed
2/20/2012	4:37:29 PM	SiCl4 post valve closed
2/20/2012	4:37:29 PM	Main Vac valve closed
2/20/2012	4:37:29 PM	Bypass valve closed
2/20/2012	4:37:29 PM	H2 valve opened
2/20/2012	4:37:29 PM	Bubbler valve opened
2/20/2012	4:37:29 PM	Helium MFC set to  0.000000
2/20/2012	4:37:29 PM	H2 MFC set to  500.000000
2/20/2012	4:37:29 PM	BCl3 MFC set to  0.000000
2/20/2012	4:37:29 PM	PH3 MFC set to  0.000000
2/20/2012	4:37:29 PM	SiCl4 MFC set to  0.000000
2/20/2012	4:37:29 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	4:37:29 PM	Tube furnace set to 950
2/20/2012	4:39:29 PM	Helium valve closed
2/20/2012	4:39:29 PM	BCl3 valve closed
2/20/2012	4:39:29 PM	PH3 valve closed
2/20/2012	4:39:29 PM	SiCl4 pre valve closed
2/20/2012	4:39:29 PM	SiCl4 post valve closed
2/20/2012	4:39:29 PM	Main Vac valve closed
2/20/2012	4:39:29 PM	Bypass valve closed
2/20/2012	4:39:29 PM	H2 valve opened
2/20/2012	4:39:29 PM	Bubbler valve opened
2/20/2012	4:39:29 PM	Helium MFC set to  0.000000
2/20/2012	4:39:29 PM	H2 MFC set to  500.000000
2/20/2012	4:39:29 PM	BCl3 MFC set to  0.000000
2/20/2012	4:39:29 PM	PH3 MFC set to  0.000000
2/20/2012	4:39:29 PM	SiCl4 MFC set to  0.000000
2/20/2012	4:39:29 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	4:39:29 PM	Tube furnace set to 900
2/20/2012	4:41:29 PM	Helium valve closed
2/20/2012	4:41:29 PM	BCl3 valve closed
2/20/2012	4:41:29 PM	PH3 valve closed
2/20/2012	4:41:29 PM	SiCl4 pre valve closed
2/20/2012	4:41:29 PM	SiCl4 post valve closed
2/20/2012	4:41:29 PM	Main Vac valve closed
2/20/2012	4:41:29 PM	Bypass valve closed
2/20/2012	4:41:29 PM	H2 valve opened
2/20/2012	4:41:29 PM	Bubbler valve opened
2/20/2012	4:41:29 PM	Helium MFC set to  0.000000
2/20/2012	4:41:29 PM	H2 MFC set to  500.000000
2/20/2012	4:41:29 PM	BCl3 MFC set to  0.000000
2/20/2012	4:41:29 PM	PH3 MFC set to  0.000000
2/20/2012	4:41:29 PM	SiCl4 MFC set to  0.000000
2/20/2012	4:41:29 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	4:41:29 PM	Tube furnace set to 850
2/20/2012	4:43:29 PM	H2 valve closed
2/20/2012	4:43:29 PM	BCl3 valve closed
2/20/2012	4:43:29 PM	PH3 valve closed
2/20/2012	4:43:29 PM	SiCl4 pre valve closed
2/20/2012	4:43:29 PM	SiCl4 post valve closed
2/20/2012	4:43:29 PM	Main Vac valve closed
2/20/2012	4:43:29 PM	Bypass valve closed
2/20/2012	4:43:29 PM	Helium valve opened
2/20/2012	4:43:29 PM	Bubbler valve opened
2/20/2012	4:43:29 PM	Helium MFC set to  500.000000
2/20/2012	4:43:29 PM	H2 MFC set to  0.000000
2/20/2012	4:43:29 PM	BCl3 MFC set to  0.000000
2/20/2012	4:43:29 PM	PH3 MFC set to  0.000000
2/20/2012	4:43:29 PM	SiCl4 MFC set to  0.000000
2/20/2012	4:43:29 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	4:43:30 PM	Tube furnace set to 800
2/20/2012	4:45:30 PM	H2 valve closed
2/20/2012	4:45:30 PM	BCl3 valve closed
2/20/2012	4:45:30 PM	PH3 valve closed
2/20/2012	4:45:30 PM	SiCl4 pre valve closed
2/20/2012	4:45:30 PM	SiCl4 post valve closed
2/20/2012	4:45:30 PM	Main Vac valve closed
2/20/2012	4:45:30 PM	Bypass valve closed
2/20/2012	4:45:30 PM	Helium valve opened
2/20/2012	4:45:30 PM	Bubbler valve opened
2/20/2012	4:45:30 PM	Helium MFC set to  500.000000
2/20/2012	4:45:30 PM	H2 MFC set to  0.000000
2/20/2012	4:45:30 PM	BCl3 MFC set to  0.000000
2/20/2012	4:45:30 PM	PH3 MFC set to  0.000000
2/20/2012	4:45:30 PM	SiCl4 MFC set to  0.000000
2/20/2012	4:45:30 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	4:45:30 PM	Tube furnace set to 750
2/20/2012	4:47:30 PM	H2 valve closed
2/20/2012	4:47:30 PM	BCl3 valve closed
2/20/2012	4:47:30 PM	PH3 valve closed
2/20/2012	4:47:30 PM	SiCl4 pre valve closed
2/20/2012	4:47:30 PM	SiCl4 post valve closed
2/20/2012	4:47:30 PM	Main Vac valve closed
2/20/2012	4:47:30 PM	Bypass valve closed
2/20/2012	4:47:30 PM	Helium valve opened
2/20/2012	4:47:30 PM	Bubbler valve opened
2/20/2012	4:47:30 PM	Helium MFC set to  500.000000
2/20/2012	4:47:30 PM	H2 MFC set to  0.000000
2/20/2012	4:47:30 PM	BCl3 MFC set to  0.000000
2/20/2012	4:47:30 PM	PH3 MFC set to  0.000000
2/20/2012	4:47:30 PM	SiCl4 MFC set to  0.000000
2/20/2012	4:47:30 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	4:47:30 PM	Tube furnace set to 0
2/20/2012	5:07:30 PM	Helium valve closed
2/20/2012	5:07:30 PM	H2 valve closed
2/20/2012	5:07:30 PM	BCl3 valve closed
2/20/2012	5:07:30 PM	PH3 valve closed
2/20/2012	5:07:30 PM	SiCl4 pre valve closed
2/20/2012	5:07:30 PM	SiCl4 post valve closed
2/20/2012	5:07:30 PM	Main Vac valve closed
2/20/2012	5:07:30 PM	Bypass valve closed
2/20/2012	5:07:30 PM	Bubbler valve closed
2/20/2012	5:07:30 PM	Helium MFC set to  0.000000
2/20/2012	5:07:30 PM	H2 MFC set to  0.000000
2/20/2012	5:07:30 PM	BCl3 MFC set to  0.000000
2/20/2012	5:07:30 PM	PH3 MFC set to  0.000000
2/20/2012	5:07:30 PM	SiCl4 MFC set to  0.000000
2/20/2012	5:07:30 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	5:07:30 PM	Tube furnace set to 0
2/20/2012	5:07:31 PM	Run finished at 5:07 PM
2/20/2012	5:18:07 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/20/2012	5:18:08 PM	Recipe started at 5:18 PM
2/20/2012	5:18:08 PM	Helium valve closed
2/20/2012	5:18:08 PM	H2 valve closed
2/20/2012	5:18:08 PM	BCl3 valve closed
2/20/2012	5:18:08 PM	PH3 valve closed
2/20/2012	5:18:08 PM	SiCl4 pre valve closed
2/20/2012	5:18:08 PM	SiCl4 post valve closed
2/20/2012	5:18:08 PM	Main Vac valve closed
2/20/2012	5:18:08 PM	Bypass valve closed
2/20/2012	5:18:08 PM	Bubbler valve closed
2/20/2012	5:18:08 PM	Helium MFC set to  0.000000
2/20/2012	5:18:08 PM	H2 MFC set to  0.000000
2/20/2012	5:18:08 PM	BCl3 MFC set to  0.000000
2/20/2012	5:18:08 PM	PH3 MFC set to  0.000000
2/20/2012	5:18:08 PM	SiCl4 MFC set to  0.000000
2/20/2012	5:18:08 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	5:18:08 PM	Tube furnace set to 0
2/20/2012	5:18:11 PM	H2 valve closed
2/20/2012	5:18:11 PM	BCl3 valve closed
2/20/2012	5:18:11 PM	PH3 valve closed
2/20/2012	5:18:12 PM	SiCl4 pre valve closed
2/20/2012	5:18:12 PM	SiCl4 post valve closed
2/20/2012	5:18:12 PM	Main Vac valve closed
2/20/2012	5:18:12 PM	Bypass valve closed
2/20/2012	5:18:12 PM	Bubbler valve closed
2/20/2012	5:18:12 PM	Helium valve opened
2/20/2012	5:18:12 PM	Helium MFC set to  500.000000
2/20/2012	5:18:12 PM	H2 MFC set to  0.000000
2/20/2012	5:18:12 PM	BCl3 MFC set to  0.000000
2/20/2012	5:18:12 PM	PH3 MFC set to  0.000000
2/20/2012	5:18:12 PM	SiCl4 MFC set to  0.000000
2/20/2012	5:18:12 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	5:18:12 PM	Tube furnace set to 0
2/20/2012	5:18:13 PM	Helium valve closed
2/20/2012	5:18:13 PM	H2 valve closed
2/20/2012	5:18:13 PM	BCl3 valve closed
2/20/2012	5:18:13 PM	PH3 valve closed
2/20/2012	5:18:13 PM	SiCl4 pre valve closed
2/20/2012	5:18:13 PM	SiCl4 post valve closed
2/20/2012	5:18:13 PM	Main Vac valve closed
2/20/2012	5:18:13 PM	Bypass valve closed
2/20/2012	5:18:13 PM	Bubbler valve closed
2/20/2012	5:18:13 PM	Helium MFC set to  0.000000
2/20/2012	5:18:13 PM	H2 MFC set to  0.000000
2/20/2012	5:18:13 PM	BCl3 MFC set to  0.000000
2/20/2012	5:18:13 PM	PH3 MFC set to  0.000000
2/20/2012	5:18:13 PM	SiCl4 MFC set to  0.000000
2/20/2012	5:18:13 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	5:18:13 PM	Tube furnace set to 0
2/20/2012	5:18:14 PM	Run finished at 5:18 PM
2/20/2012	5:18:14 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/20/2012	5:20:02 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/20/2012	5:20:02 PM	Recipe started at 5:20 PM
2/20/2012	5:20:02 PM	Helium valve closed
2/20/2012	5:20:03 PM	H2 valve closed
2/20/2012	5:20:03 PM	BCl3 valve closed
2/20/2012	5:20:03 PM	PH3 valve closed
2/20/2012	5:20:03 PM	SiCl4 pre valve closed
2/20/2012	5:20:03 PM	SiCl4 post valve closed
2/20/2012	5:20:03 PM	Main Vac valve closed
2/20/2012	5:20:03 PM	Bubbler valve closed
2/20/2012	5:20:03 PM	Bypass valve opened
2/20/2012	5:20:03 PM	Helium MFC set to  0.000000
2/20/2012	5:20:03 PM	H2 MFC set to  0.000000
2/20/2012	5:20:03 PM	BCl3 MFC set to  0.000000
2/20/2012	5:20:03 PM	PH3 MFC set to  0.000000
2/20/2012	5:20:03 PM	SiCl4 MFC set to  0.000000
2/20/2012	5:20:03 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	5:20:03 PM	Tube furnace set to 0
2/20/2012	5:21:02 PM	Helium valve closed
2/20/2012	5:21:02 PM	H2 valve closed
2/20/2012	5:21:02 PM	BCl3 valve closed
2/20/2012	5:21:02 PM	PH3 valve closed
2/20/2012	5:21:02 PM	SiCl4 pre valve closed
2/20/2012	5:21:02 PM	SiCl4 post valve closed
2/20/2012	5:21:03 PM	Main Vac valve closed
2/20/2012	5:21:03 PM	Bubbler valve closed
2/20/2012	5:21:03 PM	Bypass valve opened
2/20/2012	5:21:03 PM	Helium MFC set to  0.000000
2/20/2012	5:21:03 PM	H2 MFC set to  0.000000
2/20/2012	5:21:03 PM	BCl3 MFC set to  0.000000
2/20/2012	5:21:03 PM	PH3 MFC set to  0.000000
2/20/2012	5:21:03 PM	SiCl4 MFC set to  0.000000
2/20/2012	5:21:03 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	5:21:03 PM	Tube furnace set to 0
2/20/2012	5:22:03 PM	Helium valve closed
2/20/2012	5:22:03 PM	H2 valve closed
2/20/2012	5:22:03 PM	BCl3 valve closed
2/20/2012	5:22:03 PM	PH3 valve closed
2/20/2012	5:22:03 PM	SiCl4 pre valve closed
2/20/2012	5:22:03 PM	SiCl4 post valve closed
2/20/2012	5:22:03 PM	Bypass valve closed
2/20/2012	5:22:03 PM	Bubbler valve closed
2/20/2012	5:22:03 PM	Main Vac valve opened
2/20/2012	5:22:03 PM	Helium MFC set to  0.000000
2/20/2012	5:22:03 PM	H2 MFC set to  0.000000
2/20/2012	5:22:03 PM	BCl3 MFC set to  0.000000
2/20/2012	5:22:03 PM	PH3 MFC set to  0.000000
2/20/2012	5:22:03 PM	SiCl4 MFC set to  0.000000
2/20/2012	5:22:03 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	5:22:03 PM	Tube furnace set to 0
2/20/2012	5:22:04 PM	Run finished at 5:22 PM
2/20/2012	5:22:04 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/20/2012	5:42:40 PM	Main Vac valve closed
2/20/2012	5:42:46 PM	Main Vac valve opened
2/20/2012	5:42:58 PM	Recipe started at 5:42 PM
2/20/2012	5:42:58 PM	Helium valve closed
2/20/2012	5:42:58 PM	H2 valve closed
2/20/2012	5:42:58 PM	BCl3 valve closed
2/20/2012	5:42:58 PM	PH3 valve closed
2/20/2012	5:42:58 PM	SiCl4 pre valve closed
2/20/2012	5:42:58 PM	SiCl4 post valve closed
2/20/2012	5:42:58 PM	Bypass valve closed
2/20/2012	5:42:58 PM	Bubbler valve closed
2/20/2012	5:42:58 PM	Main Vac valve opened
2/20/2012	5:42:58 PM	Helium MFC set to  0.000000
2/20/2012	5:42:59 PM	H2 MFC set to  0.000000
2/20/2012	5:42:59 PM	BCl3 MFC set to  0.000000
2/20/2012	5:42:59 PM	PH3 MFC set to  0.000000
2/20/2012	5:42:59 PM	SiCl4 MFC set to  0.000000
2/20/2012	5:42:59 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	5:42:59 PM	Tube furnace set to 0
2/20/2012	5:43:29 PM	H2 valve closed
2/20/2012	5:43:29 PM	BCl3 valve closed
2/20/2012	5:43:29 PM	PH3 valve closed
2/20/2012	5:43:29 PM	SiCl4 pre valve closed
2/20/2012	5:43:29 PM	SiCl4 post valve closed
2/20/2012	5:43:29 PM	Bypass valve closed
2/20/2012	5:43:29 PM	Bubbler valve closed
2/20/2012	5:43:29 PM	Helium valve opened
2/20/2012	5:43:29 PM	Main Vac valve opened
2/20/2012	5:43:29 PM	Helium MFC set to  20.000000
2/20/2012	5:43:29 PM	H2 MFC set to  0.000000
2/20/2012	5:43:29 PM	BCl3 MFC set to  0.000000
2/20/2012	5:43:29 PM	PH3 MFC set to  0.000000
2/20/2012	5:43:29 PM	SiCl4 MFC set to  0.000000
2/20/2012	5:43:29 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	5:43:29 PM	Tube furnace set to 0
2/20/2012	5:43:59 PM	Helium valve closed
2/20/2012	5:43:59 PM	H2 valve closed
2/20/2012	5:43:59 PM	BCl3 valve closed
2/20/2012	5:43:59 PM	PH3 valve closed
2/20/2012	5:43:59 PM	SiCl4 pre valve closed
2/20/2012	5:43:59 PM	SiCl4 post valve closed
2/20/2012	5:43:59 PM	Bypass valve closed
2/20/2012	5:43:59 PM	Bubbler valve closed
2/20/2012	5:43:59 PM	Main Vac valve opened
2/20/2012	5:43:59 PM	Helium MFC set to  0.000000
2/20/2012	5:43:59 PM	H2 MFC set to  0.000000
2/20/2012	5:43:59 PM	BCl3 MFC set to  0.000000
2/20/2012	5:43:59 PM	PH3 MFC set to  0.000000
2/20/2012	5:43:59 PM	SiCl4 MFC set to  0.000000
2/20/2012	5:43:59 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	5:43:59 PM	Tube furnace set to 0
2/20/2012	5:44:29 PM	H2 valve closed
2/20/2012	5:44:29 PM	BCl3 valve closed
2/20/2012	5:44:29 PM	PH3 valve closed
2/20/2012	5:44:29 PM	SiCl4 pre valve closed
2/20/2012	5:44:29 PM	SiCl4 post valve closed
2/20/2012	5:44:29 PM	Bypass valve closed
2/20/2012	5:44:29 PM	Bubbler valve closed
2/20/2012	5:44:29 PM	Helium valve opened
2/20/2012	5:44:29 PM	Main Vac valve opened
2/20/2012	5:44:29 PM	Helium MFC set to  20.000000
2/20/2012	5:44:29 PM	H2 MFC set to  0.000000
2/20/2012	5:44:29 PM	BCl3 MFC set to  0.000000
2/20/2012	5:44:29 PM	PH3 MFC set to  0.000000
2/20/2012	5:44:29 PM	SiCl4 MFC set to  0.000000
2/20/2012	5:44:29 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	5:44:29 PM	Tube furnace set to 0
2/20/2012	5:44:59 PM	Helium valve closed
2/20/2012	5:44:59 PM	H2 valve closed
2/20/2012	5:44:59 PM	BCl3 valve closed
2/20/2012	5:44:59 PM	PH3 valve closed
2/20/2012	5:44:59 PM	SiCl4 pre valve closed
2/20/2012	5:44:59 PM	SiCl4 post valve closed
2/20/2012	5:44:59 PM	Bypass valve closed
2/20/2012	5:44:59 PM	Bubbler valve closed
2/20/2012	5:44:59 PM	Main Vac valve opened
2/20/2012	5:44:59 PM	Helium MFC set to  0.000000
2/20/2012	5:44:59 PM	H2 MFC set to  0.000000
2/20/2012	5:44:59 PM	BCl3 MFC set to  0.000000
2/20/2012	5:44:59 PM	PH3 MFC set to  0.000000
2/20/2012	5:44:59 PM	SiCl4 MFC set to  0.000000
2/20/2012	5:44:59 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	5:44:59 PM	Tube furnace set to 0
2/20/2012	5:45:29 PM	H2 valve closed
2/20/2012	5:45:29 PM	BCl3 valve closed
2/20/2012	5:45:29 PM	PH3 valve closed
2/20/2012	5:45:29 PM	SiCl4 pre valve closed
2/20/2012	5:45:30 PM	SiCl4 post valve closed
2/20/2012	5:45:30 PM	Bypass valve closed
2/20/2012	5:45:30 PM	Bubbler valve closed
2/20/2012	5:45:30 PM	Helium valve opened
2/20/2012	5:45:30 PM	Main Vac valve opened
2/20/2012	5:45:30 PM	Helium MFC set to  20.000000
2/20/2012	5:45:30 PM	H2 MFC set to  0.000000
2/20/2012	5:45:30 PM	BCl3 MFC set to  0.000000
2/20/2012	5:45:30 PM	PH3 MFC set to  0.000000
2/20/2012	5:45:30 PM	SiCl4 MFC set to  0.000000
2/20/2012	5:45:30 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	5:45:30 PM	Tube furnace set to 0
2/20/2012	5:46:00 PM	Helium valve closed
2/20/2012	5:46:00 PM	H2 valve closed
2/20/2012	5:46:00 PM	BCl3 valve closed
2/20/2012	5:46:00 PM	PH3 valve closed
2/20/2012	5:46:00 PM	SiCl4 pre valve closed
2/20/2012	5:46:00 PM	SiCl4 post valve closed
2/20/2012	5:46:00 PM	Bypass valve closed
2/20/2012	5:46:00 PM	Bubbler valve closed
2/20/2012	5:46:00 PM	Main Vac valve opened
2/20/2012	5:46:00 PM	Helium MFC set to  0.000000
2/20/2012	5:46:00 PM	H2 MFC set to  0.000000
2/20/2012	5:46:00 PM	BCl3 MFC set to  0.000000
2/20/2012	5:46:00 PM	PH3 MFC set to  0.000000
2/20/2012	5:46:00 PM	SiCl4 MFC set to  0.000000
2/20/2012	5:46:00 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	5:46:00 PM	Tube furnace set to 0
2/20/2012	5:46:30 PM	H2 valve closed
2/20/2012	5:46:30 PM	BCl3 valve closed
2/20/2012	5:46:30 PM	PH3 valve closed
2/20/2012	5:46:30 PM	SiCl4 pre valve closed
2/20/2012	5:46:30 PM	SiCl4 post valve closed
2/20/2012	5:46:30 PM	Bypass valve closed
2/20/2012	5:46:30 PM	Bubbler valve closed
2/20/2012	5:46:30 PM	Helium valve opened
2/20/2012	5:46:30 PM	Main Vac valve opened
2/20/2012	5:46:30 PM	Helium MFC set to  20.000000
2/20/2012	5:46:30 PM	H2 MFC set to  0.000000
2/20/2012	5:46:30 PM	BCl3 MFC set to  0.000000
2/20/2012	5:46:30 PM	PH3 MFC set to  0.000000
2/20/2012	5:46:30 PM	SiCl4 MFC set to  0.000000
2/20/2012	5:46:30 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	5:46:30 PM	Tube furnace set to 0
2/20/2012	5:47:00 PM	Helium valve closed
2/20/2012	5:47:00 PM	H2 valve closed
2/20/2012	5:47:00 PM	BCl3 valve closed
2/20/2012	5:47:00 PM	PH3 valve closed
2/20/2012	5:47:00 PM	SiCl4 pre valve closed
2/20/2012	5:47:00 PM	SiCl4 post valve closed
2/20/2012	5:47:00 PM	Bypass valve closed
2/20/2012	5:47:00 PM	Bubbler valve closed
2/20/2012	5:47:00 PM	Main Vac valve opened
2/20/2012	5:47:00 PM	Helium MFC set to  0.000000
2/20/2012	5:47:00 PM	H2 MFC set to  0.000000
2/20/2012	5:47:00 PM	BCl3 MFC set to  0.000000
2/20/2012	5:47:00 PM	PH3 MFC set to  0.000000
2/20/2012	5:47:00 PM	SiCl4 MFC set to  0.000000
2/20/2012	5:47:00 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	5:47:00 PM	Tube furnace set to 0
2/20/2012	5:47:30 PM	H2 valve closed
2/20/2012	5:47:30 PM	BCl3 valve closed
2/20/2012	5:47:30 PM	PH3 valve closed
2/20/2012	5:47:30 PM	SiCl4 pre valve closed
2/20/2012	5:47:30 PM	SiCl4 post valve closed
2/20/2012	5:47:30 PM	Bypass valve closed
2/20/2012	5:47:30 PM	Bubbler valve closed
2/20/2012	5:47:30 PM	Helium valve opened
2/20/2012	5:47:30 PM	Main Vac valve opened
2/20/2012	5:47:30 PM	Helium MFC set to  20.000000
2/20/2012	5:47:30 PM	H2 MFC set to  0.000000
2/20/2012	5:47:30 PM	BCl3 MFC set to  0.000000
2/20/2012	5:47:30 PM	PH3 MFC set to  0.000000
2/20/2012	5:47:30 PM	SiCl4 MFC set to  0.000000
2/20/2012	5:47:30 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	5:47:30 PM	Tube furnace set to 0
2/20/2012	5:48:01 PM	Helium valve closed
2/20/2012	5:48:01 PM	H2 valve closed
2/20/2012	5:48:01 PM	BCl3 valve closed
2/20/2012	5:48:01 PM	PH3 valve closed
2/20/2012	5:48:01 PM	SiCl4 pre valve closed
2/20/2012	5:48:01 PM	SiCl4 post valve closed
2/20/2012	5:48:01 PM	Bypass valve closed
2/20/2012	5:48:01 PM	Bubbler valve closed
2/20/2012	5:48:01 PM	Main Vac valve opened
2/20/2012	5:48:01 PM	Helium MFC set to  0.000000
2/20/2012	5:48:01 PM	H2 MFC set to  0.000000
2/20/2012	5:48:01 PM	BCl3 MFC set to  0.000000
2/20/2012	5:48:01 PM	PH3 MFC set to  0.000000
2/20/2012	5:48:01 PM	SiCl4 MFC set to  0.000000
2/20/2012	5:48:01 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	5:48:01 PM	Tube furnace set to 0
2/20/2012	5:48:31 PM	H2 valve closed
2/20/2012	5:48:31 PM	BCl3 valve closed
2/20/2012	5:48:31 PM	PH3 valve closed
2/20/2012	5:48:31 PM	SiCl4 pre valve closed
2/20/2012	5:48:31 PM	SiCl4 post valve closed
2/20/2012	5:48:31 PM	Bypass valve closed
2/20/2012	5:48:31 PM	Bubbler valve closed
2/20/2012	5:48:31 PM	Helium valve opened
2/20/2012	5:48:31 PM	Main Vac valve opened
2/20/2012	5:48:31 PM	Helium MFC set to  20.000000
2/20/2012	5:48:31 PM	H2 MFC set to  0.000000
2/20/2012	5:48:31 PM	BCl3 MFC set to  0.000000
2/20/2012	5:48:31 PM	PH3 MFC set to  0.000000
2/20/2012	5:48:31 PM	SiCl4 MFC set to  0.000000
2/20/2012	5:48:31 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	5:48:31 PM	Tube furnace set to 0
2/20/2012	5:49:01 PM	Helium valve closed
2/20/2012	5:49:01 PM	H2 valve closed
2/20/2012	5:49:01 PM	BCl3 valve closed
2/20/2012	5:49:01 PM	PH3 valve closed
2/20/2012	5:49:01 PM	SiCl4 pre valve closed
2/20/2012	5:49:01 PM	SiCl4 post valve closed
2/20/2012	5:49:01 PM	Bypass valve closed
2/20/2012	5:49:01 PM	Bubbler valve closed
2/20/2012	5:49:01 PM	Main Vac valve opened
2/20/2012	5:49:01 PM	Helium MFC set to  0.000000
2/20/2012	5:49:01 PM	H2 MFC set to  0.000000
2/20/2012	5:49:01 PM	BCl3 MFC set to  0.000000
2/20/2012	5:49:01 PM	PH3 MFC set to  0.000000
2/20/2012	5:49:01 PM	SiCl4 MFC set to  0.000000
2/20/2012	5:49:01 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	5:49:01 PM	Tube furnace set to 0
2/20/2012	5:49:31 PM	H2 valve closed
2/20/2012	5:49:31 PM	BCl3 valve closed
2/20/2012	5:49:31 PM	PH3 valve closed
2/20/2012	5:49:31 PM	SiCl4 pre valve closed
2/20/2012	5:49:31 PM	SiCl4 post valve closed
2/20/2012	5:49:31 PM	Bypass valve closed
2/20/2012	5:49:31 PM	Bubbler valve closed
2/20/2012	5:49:31 PM	Helium valve opened
2/20/2012	5:49:31 PM	Main Vac valve opened
2/20/2012	5:49:31 PM	Helium MFC set to  20.000000
2/20/2012	5:49:31 PM	H2 MFC set to  0.000000
2/20/2012	5:49:31 PM	BCl3 MFC set to  0.000000
2/20/2012	5:49:31 PM	PH3 MFC set to  0.000000
2/20/2012	5:49:31 PM	SiCl4 MFC set to  0.000000
2/20/2012	5:49:31 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	5:49:31 PM	Tube furnace set to 0
2/20/2012	5:50:01 PM	Helium valve closed
2/20/2012	5:50:01 PM	H2 valve closed
2/20/2012	5:50:01 PM	BCl3 valve closed
2/20/2012	5:50:01 PM	PH3 valve closed
2/20/2012	5:50:01 PM	SiCl4 pre valve closed
2/20/2012	5:50:01 PM	SiCl4 post valve closed
2/20/2012	5:50:01 PM	Bypass valve closed
2/20/2012	5:50:01 PM	Bubbler valve closed
2/20/2012	5:50:01 PM	Main Vac valve opened
2/20/2012	5:50:01 PM	Helium MFC set to  0.000000
2/20/2012	5:50:01 PM	H2 MFC set to  0.000000
2/20/2012	5:50:01 PM	BCl3 MFC set to  0.000000
2/20/2012	5:50:01 PM	PH3 MFC set to  0.000000
2/20/2012	5:50:01 PM	SiCl4 MFC set to  0.000000
2/20/2012	5:50:01 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	5:50:02 PM	Tube furnace set to 0
2/20/2012	5:50:32 PM	H2 valve closed
2/20/2012	5:50:32 PM	BCl3 valve closed
2/20/2012	5:50:32 PM	PH3 valve closed
2/20/2012	5:50:32 PM	SiCl4 pre valve closed
2/20/2012	5:50:32 PM	SiCl4 post valve closed
2/20/2012	5:50:32 PM	Bypass valve closed
2/20/2012	5:50:32 PM	Bubbler valve closed
2/20/2012	5:50:32 PM	Helium valve opened
2/20/2012	5:50:32 PM	Main Vac valve opened
2/20/2012	5:50:32 PM	Helium MFC set to  20.000000
2/20/2012	5:50:32 PM	H2 MFC set to  0.000000
2/20/2012	5:50:32 PM	BCl3 MFC set to  0.000000
2/20/2012	5:50:32 PM	PH3 MFC set to  0.000000
2/20/2012	5:50:32 PM	SiCl4 MFC set to  0.000000
2/20/2012	5:50:32 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	5:50:32 PM	Tube furnace set to 0
2/20/2012	5:51:02 PM	Helium valve closed
2/20/2012	5:51:02 PM	H2 valve closed
2/20/2012	5:51:02 PM	BCl3 valve closed
2/20/2012	5:51:02 PM	PH3 valve closed
2/20/2012	5:51:02 PM	SiCl4 pre valve closed
2/20/2012	5:51:02 PM	SiCl4 post valve closed
2/20/2012	5:51:02 PM	Bypass valve closed
2/20/2012	5:51:02 PM	Bubbler valve closed
2/20/2012	5:51:02 PM	Main Vac valve opened
2/20/2012	5:51:02 PM	Helium MFC set to  0.000000
2/20/2012	5:51:02 PM	H2 MFC set to  0.000000
2/20/2012	5:51:02 PM	BCl3 MFC set to  0.000000
2/20/2012	5:51:02 PM	PH3 MFC set to  0.000000
2/20/2012	5:51:02 PM	SiCl4 MFC set to  0.000000
2/20/2012	5:51:02 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	5:51:02 PM	Tube furnace set to 0
2/20/2012	5:51:32 PM	H2 valve closed
2/20/2012	5:51:32 PM	BCl3 valve closed
2/20/2012	5:51:32 PM	PH3 valve closed
2/20/2012	5:51:32 PM	SiCl4 pre valve closed
2/20/2012	5:51:32 PM	SiCl4 post valve closed
2/20/2012	5:51:32 PM	Bypass valve closed
2/20/2012	5:51:32 PM	Bubbler valve closed
2/20/2012	5:51:32 PM	Helium valve opened
2/20/2012	5:51:32 PM	Main Vac valve opened
2/20/2012	5:51:32 PM	Helium MFC set to  20.000000
2/20/2012	5:51:32 PM	H2 MFC set to  0.000000
2/20/2012	5:51:32 PM	BCl3 MFC set to  0.000000
2/20/2012	5:51:32 PM	PH3 MFC set to  0.000000
2/20/2012	5:51:32 PM	SiCl4 MFC set to  0.000000
2/20/2012	5:51:32 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	5:51:32 PM	Tube furnace set to 0
2/20/2012	5:52:02 PM	Helium valve closed
2/20/2012	5:52:02 PM	H2 valve closed
2/20/2012	5:52:02 PM	BCl3 valve closed
2/20/2012	5:52:02 PM	PH3 valve closed
2/20/2012	5:52:02 PM	SiCl4 pre valve closed
2/20/2012	5:52:02 PM	SiCl4 post valve closed
2/20/2012	5:52:02 PM	Bypass valve closed
2/20/2012	5:52:02 PM	Bubbler valve closed
2/20/2012	5:52:02 PM	Main Vac valve opened
2/20/2012	5:52:02 PM	Helium MFC set to  0.000000
2/20/2012	5:52:02 PM	H2 MFC set to  0.000000
2/20/2012	5:52:02 PM	BCl3 MFC set to  0.000000
2/20/2012	5:52:02 PM	PH3 MFC set to  0.000000
2/20/2012	5:52:02 PM	SiCl4 MFC set to  0.000000
2/20/2012	5:52:02 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	5:52:02 PM	Tube furnace set to 200
2/20/2012	5:52:32 PM	H2 valve closed
2/20/2012	5:52:32 PM	BCl3 valve closed
2/20/2012	5:52:32 PM	PH3 valve closed
2/20/2012	5:52:32 PM	SiCl4 pre valve closed
2/20/2012	5:52:32 PM	SiCl4 post valve closed
2/20/2012	5:52:32 PM	Bypass valve closed
2/20/2012	5:52:32 PM	Bubbler valve closed
2/20/2012	5:52:32 PM	Helium valve opened
2/20/2012	5:52:32 PM	Main Vac valve opened
2/20/2012	5:52:32 PM	Helium MFC set to  20.000000
2/20/2012	5:52:32 PM	H2 MFC set to  0.000000
2/20/2012	5:52:32 PM	BCl3 MFC set to  0.000000
2/20/2012	5:52:32 PM	PH3 MFC set to  0.000000
2/20/2012	5:52:32 PM	SiCl4 MFC set to  0.000000
2/20/2012	5:52:32 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	5:52:33 PM	Tube furnace set to 200
2/20/2012	5:53:03 PM	Helium valve closed
2/20/2012	5:53:03 PM	H2 valve closed
2/20/2012	5:53:03 PM	BCl3 valve closed
2/20/2012	5:53:03 PM	PH3 valve closed
2/20/2012	5:53:03 PM	SiCl4 pre valve closed
2/20/2012	5:53:03 PM	SiCl4 post valve closed
2/20/2012	5:53:03 PM	Bypass valve closed
2/20/2012	5:53:03 PM	Bubbler valve closed
2/20/2012	5:53:03 PM	Main Vac valve opened
2/20/2012	5:53:03 PM	Helium MFC set to  0.000000
2/20/2012	5:53:03 PM	H2 MFC set to  0.000000
2/20/2012	5:53:03 PM	BCl3 MFC set to  0.000000
2/20/2012	5:53:03 PM	PH3 MFC set to  0.000000
2/20/2012	5:53:03 PM	SiCl4 MFC set to  0.000000
2/20/2012	5:53:03 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	5:53:03 PM	Tube furnace set to 200
2/20/2012	5:53:33 PM	H2 valve closed
2/20/2012	5:53:33 PM	BCl3 valve closed
2/20/2012	5:53:33 PM	PH3 valve closed
2/20/2012	5:53:33 PM	SiCl4 pre valve closed
2/20/2012	5:53:33 PM	SiCl4 post valve closed
2/20/2012	5:53:33 PM	Bypass valve closed
2/20/2012	5:53:33 PM	Bubbler valve closed
2/20/2012	5:53:33 PM	Helium valve opened
2/20/2012	5:53:33 PM	Main Vac valve opened
2/20/2012	5:53:33 PM	Helium MFC set to  20.000000
2/20/2012	5:53:33 PM	H2 MFC set to  0.000000
2/20/2012	5:53:33 PM	BCl3 MFC set to  0.000000
2/20/2012	5:53:33 PM	PH3 MFC set to  0.000000
2/20/2012	5:53:33 PM	SiCl4 MFC set to  0.000000
2/20/2012	5:53:33 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	5:53:33 PM	Tube furnace set to 200
2/20/2012	5:54:03 PM	Helium valve closed
2/20/2012	5:54:03 PM	H2 valve closed
2/20/2012	5:54:03 PM	BCl3 valve closed
2/20/2012	5:54:03 PM	PH3 valve closed
2/20/2012	5:54:03 PM	SiCl4 pre valve closed
2/20/2012	5:54:03 PM	SiCl4 post valve closed
2/20/2012	5:54:03 PM	Bypass valve closed
2/20/2012	5:54:03 PM	Bubbler valve closed
2/20/2012	5:54:03 PM	Main Vac valve opened
2/20/2012	5:54:03 PM	Helium MFC set to  0.000000
2/20/2012	5:54:03 PM	H2 MFC set to  0.000000
2/20/2012	5:54:03 PM	BCl3 MFC set to  0.000000
2/20/2012	5:54:03 PM	PH3 MFC set to  0.000000
2/20/2012	5:54:03 PM	SiCl4 MFC set to  0.000000
2/20/2012	5:54:03 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	5:54:03 PM	Tube furnace set to 200
2/20/2012	5:54:33 PM	H2 valve closed
2/20/2012	5:54:33 PM	BCl3 valve closed
2/20/2012	5:54:33 PM	PH3 valve closed
2/20/2012	5:54:33 PM	SiCl4 pre valve closed
2/20/2012	5:54:33 PM	SiCl4 post valve closed
2/20/2012	5:54:33 PM	Bypass valve closed
2/20/2012	5:54:33 PM	Bubbler valve closed
2/20/2012	5:54:33 PM	Helium valve opened
2/20/2012	5:54:33 PM	Main Vac valve opened
2/20/2012	5:54:33 PM	Helium MFC set to  20.000000
2/20/2012	5:54:33 PM	H2 MFC set to  0.000000
2/20/2012	5:54:33 PM	BCl3 MFC set to  0.000000
2/20/2012	5:54:33 PM	PH3 MFC set to  0.000000
2/20/2012	5:54:33 PM	SiCl4 MFC set to  0.000000
2/20/2012	5:54:33 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	5:54:33 PM	Tube furnace set to 200
2/20/2012	5:55:03 PM	Helium valve closed
2/20/2012	5:55:03 PM	H2 valve closed
2/20/2012	5:55:03 PM	BCl3 valve closed
2/20/2012	5:55:03 PM	PH3 valve closed
2/20/2012	5:55:03 PM	SiCl4 pre valve closed
2/20/2012	5:55:03 PM	SiCl4 post valve closed
2/20/2012	5:55:03 PM	Bypass valve closed
2/20/2012	5:55:03 PM	Bubbler valve closed
2/20/2012	5:55:03 PM	Main Vac valve opened
2/20/2012	5:55:03 PM	Helium MFC set to  0.000000
2/20/2012	5:55:03 PM	H2 MFC set to  0.000000
2/20/2012	5:55:03 PM	BCl3 MFC set to  0.000000
2/20/2012	5:55:03 PM	PH3 MFC set to  0.000000
2/20/2012	5:55:03 PM	SiCl4 MFC set to  0.000000
2/20/2012	5:55:03 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	5:55:04 PM	Tube furnace set to 200
2/20/2012	5:55:34 PM	H2 valve closed
2/20/2012	5:55:34 PM	BCl3 valve closed
2/20/2012	5:55:34 PM	PH3 valve closed
2/20/2012	5:55:34 PM	SiCl4 pre valve closed
2/20/2012	5:55:34 PM	SiCl4 post valve closed
2/20/2012	5:55:34 PM	Bypass valve closed
2/20/2012	5:55:34 PM	Bubbler valve closed
2/20/2012	5:55:34 PM	Helium valve opened
2/20/2012	5:55:34 PM	Main Vac valve opened
2/20/2012	5:55:34 PM	Helium MFC set to  20.000000
2/20/2012	5:55:34 PM	H2 MFC set to  0.000000
2/20/2012	5:55:34 PM	BCl3 MFC set to  0.000000
2/20/2012	5:55:34 PM	PH3 MFC set to  0.000000
2/20/2012	5:55:34 PM	SiCl4 MFC set to  0.000000
2/20/2012	5:55:34 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	5:55:34 PM	Tube furnace set to 200
2/20/2012	5:56:04 PM	Helium valve closed
2/20/2012	5:56:04 PM	H2 valve closed
2/20/2012	5:56:04 PM	BCl3 valve closed
2/20/2012	5:56:04 PM	PH3 valve closed
2/20/2012	5:56:04 PM	SiCl4 pre valve closed
2/20/2012	5:56:04 PM	SiCl4 post valve closed
2/20/2012	5:56:04 PM	Bypass valve closed
2/20/2012	5:56:04 PM	Bubbler valve closed
2/20/2012	5:56:04 PM	Main Vac valve opened
2/20/2012	5:56:04 PM	Helium MFC set to  0.000000
2/20/2012	5:56:04 PM	H2 MFC set to  0.000000
2/20/2012	5:56:04 PM	BCl3 MFC set to  0.000000
2/20/2012	5:56:04 PM	PH3 MFC set to  0.000000
2/20/2012	5:56:04 PM	SiCl4 MFC set to  0.000000
2/20/2012	5:56:04 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	5:56:04 PM	Tube furnace set to 200
2/20/2012	5:56:34 PM	H2 valve closed
2/20/2012	5:56:34 PM	BCl3 valve closed
2/20/2012	5:56:34 PM	PH3 valve closed
2/20/2012	5:56:34 PM	SiCl4 pre valve closed
2/20/2012	5:56:34 PM	SiCl4 post valve closed
2/20/2012	5:56:34 PM	Bypass valve closed
2/20/2012	5:56:34 PM	Bubbler valve closed
2/20/2012	5:56:34 PM	Helium valve opened
2/20/2012	5:56:34 PM	Main Vac valve opened
2/20/2012	5:56:34 PM	Helium MFC set to  20.000000
2/20/2012	5:56:34 PM	H2 MFC set to  0.000000
2/20/2012	5:56:34 PM	BCl3 MFC set to  0.000000
2/20/2012	5:56:34 PM	PH3 MFC set to  0.000000
2/20/2012	5:56:34 PM	SiCl4 MFC set to  0.000000
2/20/2012	5:56:34 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	5:56:34 PM	Tube furnace set to 200
2/20/2012	5:57:04 PM	Helium valve closed
2/20/2012	5:57:04 PM	H2 valve closed
2/20/2012	5:57:04 PM	BCl3 valve closed
2/20/2012	5:57:04 PM	PH3 valve closed
2/20/2012	5:57:04 PM	SiCl4 pre valve closed
2/20/2012	5:57:04 PM	SiCl4 post valve closed
2/20/2012	5:57:04 PM	Bypass valve closed
2/20/2012	5:57:04 PM	Bubbler valve closed
2/20/2012	5:57:04 PM	Main Vac valve opened
2/20/2012	5:57:04 PM	Helium MFC set to  0.000000
2/20/2012	5:57:04 PM	H2 MFC set to  0.000000
2/20/2012	5:57:04 PM	BCl3 MFC set to  0.000000
2/20/2012	5:57:04 PM	PH3 MFC set to  0.000000
2/20/2012	5:57:04 PM	SiCl4 MFC set to  0.000000
2/20/2012	5:57:04 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	5:57:04 PM	Tube furnace set to 200
2/20/2012	5:57:34 PM	H2 valve closed
2/20/2012	5:57:34 PM	BCl3 valve closed
2/20/2012	5:57:34 PM	PH3 valve closed
2/20/2012	5:57:34 PM	SiCl4 pre valve closed
2/20/2012	5:57:34 PM	SiCl4 post valve closed
2/20/2012	5:57:34 PM	Bypass valve closed
2/20/2012	5:57:34 PM	Bubbler valve closed
2/20/2012	5:57:34 PM	Helium valve opened
2/20/2012	5:57:34 PM	Main Vac valve opened
2/20/2012	5:57:34 PM	Helium MFC set to  20.000000
2/20/2012	5:57:34 PM	H2 MFC set to  0.000000
2/20/2012	5:57:34 PM	BCl3 MFC set to  0.000000
2/20/2012	5:57:34 PM	PH3 MFC set to  0.000000
2/20/2012	5:57:34 PM	SiCl4 MFC set to  0.000000
2/20/2012	5:57:34 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	5:57:35 PM	Tube furnace set to 200
2/20/2012	5:58:05 PM	Helium valve closed
2/20/2012	5:58:05 PM	H2 valve closed
2/20/2012	5:58:05 PM	BCl3 valve closed
2/20/2012	5:58:05 PM	PH3 valve closed
2/20/2012	5:58:05 PM	SiCl4 pre valve closed
2/20/2012	5:58:05 PM	SiCl4 post valve closed
2/20/2012	5:58:05 PM	Bypass valve closed
2/20/2012	5:58:05 PM	Bubbler valve closed
2/20/2012	5:58:05 PM	Main Vac valve opened
2/20/2012	5:58:05 PM	Helium MFC set to  0.000000
2/20/2012	5:58:05 PM	H2 MFC set to  0.000000
2/20/2012	5:58:05 PM	BCl3 MFC set to  0.000000
2/20/2012	5:58:05 PM	PH3 MFC set to  0.000000
2/20/2012	5:58:05 PM	SiCl4 MFC set to  0.000000
2/20/2012	5:58:05 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	5:58:05 PM	Tube furnace set to 0
2/20/2012	5:58:06 PM	Run finished at 5:58 PM
2/20/2012	6:14:17 PM	Recipe started at 6:14 PM
2/20/2012	6:14:17 PM	Helium valve closed
2/20/2012	6:14:17 PM	H2 valve closed
2/20/2012	6:14:17 PM	BCl3 valve closed
2/20/2012	6:14:17 PM	PH3 valve closed
2/20/2012	6:14:17 PM	SiCl4 pre valve closed
2/20/2012	6:14:17 PM	SiCl4 post valve closed
2/20/2012	6:14:17 PM	Bypass valve closed
2/20/2012	6:14:17 PM	Bubbler valve closed
2/20/2012	6:14:17 PM	Main Vac valve opened
2/20/2012	6:14:17 PM	Helium MFC set to  0.000000
2/20/2012	6:14:17 PM	H2 MFC set to  0.000000
2/20/2012	6:14:17 PM	BCl3 MFC set to  0.000000
2/20/2012	6:14:17 PM	PH3 MFC set to  0.000000
2/20/2012	6:14:17 PM	SiCl4 MFC set to  0.000000
2/20/2012	6:14:17 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	6:14:17 PM	Tube furnace set to 0
2/20/2012	6:14:47 PM	H2 valve closed
2/20/2012	6:14:47 PM	BCl3 valve closed
2/20/2012	6:14:47 PM	PH3 valve closed
2/20/2012	6:14:47 PM	SiCl4 pre valve closed
2/20/2012	6:14:47 PM	SiCl4 post valve closed
2/20/2012	6:14:47 PM	Bypass valve closed
2/20/2012	6:14:47 PM	Bubbler valve closed
2/20/2012	6:14:47 PM	Helium valve opened
2/20/2012	6:14:47 PM	Main Vac valve opened
2/20/2012	6:14:47 PM	Helium MFC set to  20.000000
2/20/2012	6:14:47 PM	H2 MFC set to  0.000000
2/20/2012	6:14:47 PM	BCl3 MFC set to  0.000000
2/20/2012	6:14:47 PM	PH3 MFC set to  0.000000
2/20/2012	6:14:47 PM	SiCl4 MFC set to  0.000000
2/20/2012	6:14:47 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	6:14:47 PM	Tube furnace set to 0
2/20/2012	6:15:17 PM	Helium valve closed
2/20/2012	6:15:17 PM	H2 valve closed
2/20/2012	6:15:17 PM	BCl3 valve closed
2/20/2012	6:15:17 PM	PH3 valve closed
2/20/2012	6:15:17 PM	SiCl4 pre valve closed
2/20/2012	6:15:17 PM	SiCl4 post valve closed
2/20/2012	6:15:17 PM	Bypass valve closed
2/20/2012	6:15:17 PM	Bubbler valve closed
2/20/2012	6:15:17 PM	Main Vac valve opened
2/20/2012	6:15:17 PM	Helium MFC set to  0.000000
2/20/2012	6:15:17 PM	H2 MFC set to  0.000000
2/20/2012	6:15:17 PM	BCl3 MFC set to  0.000000
2/20/2012	6:15:17 PM	PH3 MFC set to  0.000000
2/20/2012	6:15:17 PM	SiCl4 MFC set to  0.000000
2/20/2012	6:15:17 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	6:15:17 PM	Tube furnace set to 0
2/20/2012	6:15:47 PM	H2 valve closed
2/20/2012	6:15:47 PM	BCl3 valve closed
2/20/2012	6:15:47 PM	PH3 valve closed
2/20/2012	6:15:47 PM	SiCl4 pre valve closed
2/20/2012	6:15:47 PM	SiCl4 post valve closed
2/20/2012	6:15:47 PM	Bypass valve closed
2/20/2012	6:15:47 PM	Bubbler valve closed
2/20/2012	6:15:47 PM	Helium valve opened
2/20/2012	6:15:47 PM	Main Vac valve opened
2/20/2012	6:15:47 PM	Helium MFC set to  20.000000
2/20/2012	6:15:47 PM	H2 MFC set to  0.000000
2/20/2012	6:15:47 PM	BCl3 MFC set to  0.000000
2/20/2012	6:15:47 PM	PH3 MFC set to  0.000000
2/20/2012	6:15:47 PM	SiCl4 MFC set to  0.000000
2/20/2012	6:15:47 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	6:15:47 PM	Tube furnace set to 0
2/20/2012	6:16:17 PM	Helium valve closed
2/20/2012	6:16:17 PM	H2 valve closed
2/20/2012	6:16:17 PM	BCl3 valve closed
2/20/2012	6:16:17 PM	PH3 valve closed
2/20/2012	6:16:17 PM	SiCl4 pre valve closed
2/20/2012	6:16:17 PM	SiCl4 post valve closed
2/20/2012	6:16:17 PM	Bypass valve closed
2/20/2012	6:16:17 PM	Bubbler valve closed
2/20/2012	6:16:17 PM	Main Vac valve opened
2/20/2012	6:16:17 PM	Helium MFC set to  0.000000
2/20/2012	6:16:17 PM	H2 MFC set to  0.000000
2/20/2012	6:16:17 PM	BCl3 MFC set to  0.000000
2/20/2012	6:16:17 PM	PH3 MFC set to  0.000000
2/20/2012	6:16:17 PM	SiCl4 MFC set to  0.000000
2/20/2012	6:16:17 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	6:16:18 PM	Tube furnace set to 0
2/20/2012	6:16:48 PM	H2 valve closed
2/20/2012	6:16:48 PM	BCl3 valve closed
2/20/2012	6:16:48 PM	PH3 valve closed
2/20/2012	6:16:48 PM	SiCl4 pre valve closed
2/20/2012	6:16:48 PM	SiCl4 post valve closed
2/20/2012	6:16:48 PM	Bypass valve closed
2/20/2012	6:16:48 PM	Bubbler valve closed
2/20/2012	6:16:48 PM	Helium valve opened
2/20/2012	6:16:48 PM	Main Vac valve opened
2/20/2012	6:16:48 PM	Helium MFC set to  20.000000
2/20/2012	6:16:48 PM	H2 MFC set to  0.000000
2/20/2012	6:16:48 PM	BCl3 MFC set to  0.000000
2/20/2012	6:16:48 PM	PH3 MFC set to  0.000000
2/20/2012	6:16:48 PM	SiCl4 MFC set to  0.000000
2/20/2012	6:16:48 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	6:16:48 PM	Tube furnace set to 0
2/20/2012	6:17:18 PM	Helium valve closed
2/20/2012	6:17:18 PM	H2 valve closed
2/20/2012	6:17:18 PM	BCl3 valve closed
2/20/2012	6:17:18 PM	PH3 valve closed
2/20/2012	6:17:18 PM	SiCl4 pre valve closed
2/20/2012	6:17:18 PM	SiCl4 post valve closed
2/20/2012	6:17:18 PM	Bypass valve closed
2/20/2012	6:17:18 PM	Bubbler valve closed
2/20/2012	6:17:18 PM	Main Vac valve opened
2/20/2012	6:17:18 PM	Helium MFC set to  0.000000
2/20/2012	6:17:18 PM	H2 MFC set to  0.000000
2/20/2012	6:17:18 PM	BCl3 MFC set to  0.000000
2/20/2012	6:17:18 PM	PH3 MFC set to  0.000000
2/20/2012	6:17:18 PM	SiCl4 MFC set to  0.000000
2/20/2012	6:17:18 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	6:17:18 PM	Tube furnace set to 0
2/20/2012	6:17:48 PM	H2 valve closed
2/20/2012	6:17:48 PM	BCl3 valve closed
2/20/2012	6:17:48 PM	PH3 valve closed
2/20/2012	6:17:48 PM	SiCl4 pre valve closed
2/20/2012	6:17:48 PM	SiCl4 post valve closed
2/20/2012	6:17:48 PM	Bypass valve closed
2/20/2012	6:17:48 PM	Bubbler valve closed
2/20/2012	6:17:48 PM	Helium valve opened
2/20/2012	6:17:48 PM	Main Vac valve opened
2/20/2012	6:17:48 PM	Helium MFC set to  20.000000
2/20/2012	6:17:48 PM	H2 MFC set to  0.000000
2/20/2012	6:17:48 PM	BCl3 MFC set to  0.000000
2/20/2012	6:17:48 PM	PH3 MFC set to  0.000000
2/20/2012	6:17:48 PM	SiCl4 MFC set to  0.000000
2/20/2012	6:17:48 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	6:17:48 PM	Tube furnace set to 0
2/20/2012	6:18:18 PM	Helium valve closed
2/20/2012	6:18:18 PM	H2 valve closed
2/20/2012	6:18:18 PM	BCl3 valve closed
2/20/2012	6:18:18 PM	PH3 valve closed
2/20/2012	6:18:18 PM	SiCl4 pre valve closed
2/20/2012	6:18:18 PM	SiCl4 post valve closed
2/20/2012	6:18:18 PM	Bypass valve closed
2/20/2012	6:18:18 PM	Bubbler valve closed
2/20/2012	6:18:18 PM	Main Vac valve opened
2/20/2012	6:18:18 PM	Helium MFC set to  0.000000
2/20/2012	6:18:18 PM	H2 MFC set to  0.000000
2/20/2012	6:18:18 PM	BCl3 MFC set to  0.000000
2/20/2012	6:18:18 PM	PH3 MFC set to  0.000000
2/20/2012	6:18:18 PM	SiCl4 MFC set to  0.000000
2/20/2012	6:18:18 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	6:18:18 PM	Tube furnace set to 0
2/20/2012	6:18:48 PM	H2 valve closed
2/20/2012	6:18:48 PM	BCl3 valve closed
2/20/2012	6:18:48 PM	PH3 valve closed
2/20/2012	6:18:48 PM	SiCl4 pre valve closed
2/20/2012	6:18:48 PM	SiCl4 post valve closed
2/20/2012	6:18:48 PM	Bypass valve closed
2/20/2012	6:18:48 PM	Bubbler valve closed
2/20/2012	6:18:48 PM	Helium valve opened
2/20/2012	6:18:48 PM	Main Vac valve opened
2/20/2012	6:18:48 PM	Helium MFC set to  20.000000
2/20/2012	6:18:48 PM	H2 MFC set to  0.000000
2/20/2012	6:18:48 PM	BCl3 MFC set to  0.000000
2/20/2012	6:18:48 PM	PH3 MFC set to  0.000000
2/20/2012	6:18:48 PM	SiCl4 MFC set to  0.000000
2/20/2012	6:18:48 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	6:18:49 PM	Tube furnace set to 0
2/20/2012	6:19:19 PM	Helium valve closed
2/20/2012	6:19:19 PM	H2 valve closed
2/20/2012	6:19:19 PM	BCl3 valve closed
2/20/2012	6:19:19 PM	PH3 valve closed
2/20/2012	6:19:19 PM	SiCl4 pre valve closed
2/20/2012	6:19:19 PM	SiCl4 post valve closed
2/20/2012	6:19:19 PM	Bypass valve closed
2/20/2012	6:19:19 PM	Bubbler valve closed
2/20/2012	6:19:19 PM	Main Vac valve opened
2/20/2012	6:19:19 PM	Helium MFC set to  0.000000
2/20/2012	6:19:19 PM	H2 MFC set to  0.000000
2/20/2012	6:19:19 PM	BCl3 MFC set to  0.000000
2/20/2012	6:19:19 PM	PH3 MFC set to  0.000000
2/20/2012	6:19:19 PM	SiCl4 MFC set to  0.000000
2/20/2012	6:19:19 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	6:19:19 PM	Tube furnace set to 0
2/20/2012	6:19:49 PM	H2 valve closed
2/20/2012	6:19:49 PM	BCl3 valve closed
2/20/2012	6:19:49 PM	PH3 valve closed
2/20/2012	6:19:49 PM	SiCl4 pre valve closed
2/20/2012	6:19:49 PM	SiCl4 post valve closed
2/20/2012	6:19:49 PM	Bypass valve closed
2/20/2012	6:19:49 PM	Bubbler valve closed
2/20/2012	6:19:49 PM	Helium valve opened
2/20/2012	6:19:49 PM	Main Vac valve opened
2/20/2012	6:19:49 PM	Helium MFC set to  20.000000
2/20/2012	6:19:49 PM	H2 MFC set to  0.000000
2/20/2012	6:19:49 PM	BCl3 MFC set to  0.000000
2/20/2012	6:19:49 PM	PH3 MFC set to  0.000000
2/20/2012	6:19:49 PM	SiCl4 MFC set to  0.000000
2/20/2012	6:19:49 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	6:19:49 PM	Tube furnace set to 0
2/20/2012	6:20:19 PM	Helium valve closed
2/20/2012	6:20:19 PM	H2 valve closed
2/20/2012	6:20:19 PM	BCl3 valve closed
2/20/2012	6:20:19 PM	PH3 valve closed
2/20/2012	6:20:19 PM	SiCl4 pre valve closed
2/20/2012	6:20:19 PM	SiCl4 post valve closed
2/20/2012	6:20:19 PM	Bypass valve closed
2/20/2012	6:20:19 PM	Bubbler valve closed
2/20/2012	6:20:19 PM	Main Vac valve opened
2/20/2012	6:20:19 PM	Helium MFC set to  0.000000
2/20/2012	6:20:19 PM	H2 MFC set to  0.000000
2/20/2012	6:20:19 PM	BCl3 MFC set to  0.000000
2/20/2012	6:20:19 PM	PH3 MFC set to  0.000000
2/20/2012	6:20:19 PM	SiCl4 MFC set to  0.000000
2/20/2012	6:20:19 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	6:20:19 PM	Tube furnace set to 0
2/20/2012	6:20:49 PM	H2 valve closed
2/20/2012	6:20:49 PM	BCl3 valve closed
2/20/2012	6:20:49 PM	PH3 valve closed
2/20/2012	6:20:49 PM	SiCl4 pre valve closed
2/20/2012	6:20:49 PM	SiCl4 post valve closed
2/20/2012	6:20:49 PM	Bypass valve closed
2/20/2012	6:20:49 PM	Bubbler valve closed
2/20/2012	6:20:49 PM	Helium valve opened
2/20/2012	6:20:49 PM	Main Vac valve opened
2/20/2012	6:20:49 PM	Helium MFC set to  20.000000
2/20/2012	6:20:49 PM	H2 MFC set to  0.000000
2/20/2012	6:20:49 PM	BCl3 MFC set to  0.000000
2/20/2012	6:20:49 PM	PH3 MFC set to  0.000000
2/20/2012	6:20:49 PM	SiCl4 MFC set to  0.000000
2/20/2012	6:20:49 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	6:20:49 PM	Tube furnace set to 0
2/20/2012	6:21:19 PM	Helium valve closed
2/20/2012	6:21:19 PM	H2 valve closed
2/20/2012	6:21:19 PM	BCl3 valve closed
2/20/2012	6:21:19 PM	PH3 valve closed
2/20/2012	6:21:19 PM	SiCl4 pre valve closed
2/20/2012	6:21:19 PM	SiCl4 post valve closed
2/20/2012	6:21:19 PM	Bypass valve closed
2/20/2012	6:21:19 PM	Bubbler valve closed
2/20/2012	6:21:19 PM	Main Vac valve opened
2/20/2012	6:21:19 PM	Helium MFC set to  0.000000
2/20/2012	6:21:19 PM	H2 MFC set to  0.000000
2/20/2012	6:21:19 PM	BCl3 MFC set to  0.000000
2/20/2012	6:21:19 PM	PH3 MFC set to  0.000000
2/20/2012	6:21:19 PM	SiCl4 MFC set to  0.000000
2/20/2012	6:21:19 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	6:21:20 PM	Tube furnace set to 0
2/20/2012	6:21:50 PM	H2 valve closed
2/20/2012	6:21:50 PM	BCl3 valve closed
2/20/2012	6:21:50 PM	PH3 valve closed
2/20/2012	6:21:50 PM	SiCl4 pre valve closed
2/20/2012	6:21:50 PM	SiCl4 post valve closed
2/20/2012	6:21:50 PM	Bypass valve closed
2/20/2012	6:21:50 PM	Bubbler valve closed
2/20/2012	6:21:50 PM	Helium valve opened
2/20/2012	6:21:50 PM	Main Vac valve opened
2/20/2012	6:21:50 PM	Helium MFC set to  20.000000
2/20/2012	6:21:50 PM	H2 MFC set to  0.000000
2/20/2012	6:21:50 PM	BCl3 MFC set to  0.000000
2/20/2012	6:21:50 PM	PH3 MFC set to  0.000000
2/20/2012	6:21:50 PM	SiCl4 MFC set to  0.000000
2/20/2012	6:21:50 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	6:21:50 PM	Tube furnace set to 0
2/20/2012	6:22:20 PM	Helium valve closed
2/20/2012	6:22:20 PM	H2 valve closed
2/20/2012	6:22:20 PM	BCl3 valve closed
2/20/2012	6:22:20 PM	PH3 valve closed
2/20/2012	6:22:20 PM	SiCl4 pre valve closed
2/20/2012	6:22:20 PM	SiCl4 post valve closed
2/20/2012	6:22:20 PM	Bypass valve closed
2/20/2012	6:22:20 PM	Bubbler valve closed
2/20/2012	6:22:20 PM	Main Vac valve opened
2/20/2012	6:22:20 PM	Helium MFC set to  0.000000
2/20/2012	6:22:20 PM	H2 MFC set to  0.000000
2/20/2012	6:22:20 PM	BCl3 MFC set to  0.000000
2/20/2012	6:22:20 PM	PH3 MFC set to  0.000000
2/20/2012	6:22:20 PM	SiCl4 MFC set to  0.000000
2/20/2012	6:22:20 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	6:22:20 PM	Tube furnace set to 0
2/20/2012	6:22:50 PM	H2 valve closed
2/20/2012	6:22:50 PM	BCl3 valve closed
2/20/2012	6:22:50 PM	PH3 valve closed
2/20/2012	6:22:50 PM	SiCl4 pre valve closed
2/20/2012	6:22:50 PM	SiCl4 post valve closed
2/20/2012	6:22:50 PM	Bypass valve closed
2/20/2012	6:22:50 PM	Bubbler valve closed
2/20/2012	6:22:50 PM	Helium valve opened
2/20/2012	6:22:50 PM	Main Vac valve opened
2/20/2012	6:22:50 PM	Helium MFC set to  20.000000
2/20/2012	6:22:50 PM	H2 MFC set to  0.000000
2/20/2012	6:22:50 PM	BCl3 MFC set to  0.000000
2/20/2012	6:22:50 PM	PH3 MFC set to  0.000000
2/20/2012	6:22:50 PM	SiCl4 MFC set to  0.000000
2/20/2012	6:22:50 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	6:22:50 PM	Tube furnace set to 0
2/20/2012	6:23:20 PM	Helium valve closed
2/20/2012	6:23:20 PM	H2 valve closed
2/20/2012	6:23:20 PM	BCl3 valve closed
2/20/2012	6:23:20 PM	PH3 valve closed
2/20/2012	6:23:20 PM	SiCl4 pre valve closed
2/20/2012	6:23:20 PM	SiCl4 post valve closed
2/20/2012	6:23:20 PM	Bypass valve closed
2/20/2012	6:23:20 PM	Bubbler valve closed
2/20/2012	6:23:20 PM	Main Vac valve opened
2/20/2012	6:23:20 PM	Helium MFC set to  0.000000
2/20/2012	6:23:20 PM	H2 MFC set to  0.000000
2/20/2012	6:23:20 PM	BCl3 MFC set to  0.000000
2/20/2012	6:23:20 PM	PH3 MFC set to  0.000000
2/20/2012	6:23:20 PM	SiCl4 MFC set to  0.000000
2/20/2012	6:23:20 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	6:23:20 PM	Tube furnace set to 200
2/20/2012	6:23:50 PM	H2 valve closed
2/20/2012	6:23:50 PM	BCl3 valve closed
2/20/2012	6:23:50 PM	PH3 valve closed
2/20/2012	6:23:50 PM	SiCl4 pre valve closed
2/20/2012	6:23:50 PM	SiCl4 post valve closed
2/20/2012	6:23:50 PM	Bypass valve closed
2/20/2012	6:23:50 PM	Bubbler valve closed
2/20/2012	6:23:50 PM	Helium valve opened
2/20/2012	6:23:50 PM	Main Vac valve opened
2/20/2012	6:23:50 PM	Helium MFC set to  20.000000
2/20/2012	6:23:50 PM	H2 MFC set to  0.000000
2/20/2012	6:23:50 PM	BCl3 MFC set to  0.000000
2/20/2012	6:23:50 PM	PH3 MFC set to  0.000000
2/20/2012	6:23:50 PM	SiCl4 MFC set to  0.000000
2/20/2012	6:23:50 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	6:23:51 PM	Tube furnace set to 200
2/20/2012	6:24:21 PM	Helium valve closed
2/20/2012	6:24:21 PM	H2 valve closed
2/20/2012	6:24:21 PM	BCl3 valve closed
2/20/2012	6:24:21 PM	PH3 valve closed
2/20/2012	6:24:21 PM	SiCl4 pre valve closed
2/20/2012	6:24:21 PM	SiCl4 post valve closed
2/20/2012	6:24:21 PM	Bypass valve closed
2/20/2012	6:24:21 PM	Bubbler valve closed
2/20/2012	6:24:21 PM	Main Vac valve opened
2/20/2012	6:24:21 PM	Helium MFC set to  0.000000
2/20/2012	6:24:21 PM	H2 MFC set to  0.000000
2/20/2012	6:24:21 PM	BCl3 MFC set to  0.000000
2/20/2012	6:24:21 PM	PH3 MFC set to  0.000000
2/20/2012	6:24:21 PM	SiCl4 MFC set to  0.000000
2/20/2012	6:24:21 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	6:24:21 PM	Tube furnace set to 200
2/20/2012	6:24:51 PM	H2 valve closed
2/20/2012	6:24:51 PM	BCl3 valve closed
2/20/2012	6:24:51 PM	PH3 valve closed
2/20/2012	6:24:51 PM	SiCl4 pre valve closed
2/20/2012	6:24:51 PM	SiCl4 post valve closed
2/20/2012	6:24:51 PM	Bypass valve closed
2/20/2012	6:24:51 PM	Bubbler valve closed
2/20/2012	6:24:51 PM	Helium valve opened
2/20/2012	6:24:51 PM	Main Vac valve opened
2/20/2012	6:24:51 PM	Helium MFC set to  20.000000
2/20/2012	6:24:51 PM	H2 MFC set to  0.000000
2/20/2012	6:24:51 PM	BCl3 MFC set to  0.000000
2/20/2012	6:24:51 PM	PH3 MFC set to  0.000000
2/20/2012	6:24:51 PM	SiCl4 MFC set to  0.000000
2/20/2012	6:24:51 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	6:24:51 PM	Tube furnace set to 200
2/20/2012	6:25:21 PM	Helium valve closed
2/20/2012	6:25:21 PM	H2 valve closed
2/20/2012	6:25:21 PM	BCl3 valve closed
2/20/2012	6:25:21 PM	PH3 valve closed
2/20/2012	6:25:21 PM	SiCl4 pre valve closed
2/20/2012	6:25:21 PM	SiCl4 post valve closed
2/20/2012	6:25:21 PM	Bypass valve closed
2/20/2012	6:25:21 PM	Bubbler valve closed
2/20/2012	6:25:21 PM	Main Vac valve opened
2/20/2012	6:25:21 PM	Helium MFC set to  0.000000
2/20/2012	6:25:21 PM	H2 MFC set to  0.000000
2/20/2012	6:25:21 PM	BCl3 MFC set to  0.000000
2/20/2012	6:25:21 PM	PH3 MFC set to  0.000000
2/20/2012	6:25:21 PM	SiCl4 MFC set to  0.000000
2/20/2012	6:25:21 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	6:25:21 PM	Tube furnace set to 200
2/20/2012	6:25:51 PM	H2 valve closed
2/20/2012	6:25:51 PM	BCl3 valve closed
2/20/2012	6:25:51 PM	PH3 valve closed
2/20/2012	6:25:51 PM	SiCl4 pre valve closed
2/20/2012	6:25:51 PM	SiCl4 post valve closed
2/20/2012	6:25:51 PM	Bypass valve closed
2/20/2012	6:25:51 PM	Bubbler valve closed
2/20/2012	6:25:51 PM	Helium valve opened
2/20/2012	6:25:51 PM	Main Vac valve opened
2/20/2012	6:25:51 PM	Helium MFC set to  20.000000
2/20/2012	6:25:51 PM	H2 MFC set to  0.000000
2/20/2012	6:25:51 PM	BCl3 MFC set to  0.000000
2/20/2012	6:25:51 PM	PH3 MFC set to  0.000000
2/20/2012	6:25:51 PM	SiCl4 MFC set to  0.000000
2/20/2012	6:25:51 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	6:25:51 PM	Tube furnace set to 200
2/20/2012	6:26:21 PM	Helium valve closed
2/20/2012	6:26:21 PM	H2 valve closed
2/20/2012	6:26:21 PM	BCl3 valve closed
2/20/2012	6:26:21 PM	PH3 valve closed
2/20/2012	6:26:21 PM	SiCl4 pre valve closed
2/20/2012	6:26:21 PM	SiCl4 post valve closed
2/20/2012	6:26:21 PM	Bypass valve closed
2/20/2012	6:26:21 PM	Bubbler valve closed
2/20/2012	6:26:21 PM	Main Vac valve opened
2/20/2012	6:26:21 PM	Helium MFC set to  0.000000
2/20/2012	6:26:21 PM	H2 MFC set to  0.000000
2/20/2012	6:26:21 PM	BCl3 MFC set to  0.000000
2/20/2012	6:26:21 PM	PH3 MFC set to  0.000000
2/20/2012	6:26:21 PM	SiCl4 MFC set to  0.000000
2/20/2012	6:26:21 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	6:26:22 PM	Tube furnace set to 200
2/20/2012	6:26:48 PM	H2 valve closed
2/20/2012	6:26:48 PM	BCl3 valve closed
2/20/2012	6:26:48 PM	PH3 valve closed
2/20/2012	6:26:48 PM	SiCl4 pre valve closed
2/20/2012	6:26:48 PM	SiCl4 post valve closed
2/20/2012	6:26:48 PM	Bypass valve closed
2/20/2012	6:26:48 PM	Bubbler valve closed
2/20/2012	6:26:48 PM	Helium valve opened
2/20/2012	6:26:48 PM	Main Vac valve opened
2/20/2012	6:26:48 PM	Helium MFC set to  20.000000
2/20/2012	6:26:48 PM	H2 MFC set to  0.000000
2/20/2012	6:26:48 PM	BCl3 MFC set to  0.000000
2/20/2012	6:26:48 PM	PH3 MFC set to  0.000000
2/20/2012	6:26:48 PM	SiCl4 MFC set to  0.000000
2/20/2012	6:26:48 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	6:26:48 PM	Tube furnace set to 200
2/20/2012	6:26:48 PM	Helium valve closed
2/20/2012	6:26:48 PM	H2 valve closed
2/20/2012	6:26:48 PM	BCl3 valve closed
2/20/2012	6:26:48 PM	PH3 valve closed
2/20/2012	6:26:48 PM	SiCl4 pre valve closed
2/20/2012	6:26:48 PM	SiCl4 post valve closed
2/20/2012	6:26:48 PM	Bypass valve closed
2/20/2012	6:26:48 PM	Bubbler valve closed
2/20/2012	6:26:48 PM	Main Vac valve opened
2/20/2012	6:26:48 PM	Helium MFC set to  0.000000
2/20/2012	6:26:48 PM	H2 MFC set to  0.000000
2/20/2012	6:26:48 PM	BCl3 MFC set to  0.000000
2/20/2012	6:26:48 PM	PH3 MFC set to  0.000000
2/20/2012	6:26:48 PM	SiCl4 MFC set to  0.000000
2/20/2012	6:26:48 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	6:26:49 PM	Tube furnace set to 200
2/20/2012	6:26:49 PM	H2 valve closed
2/20/2012	6:26:49 PM	BCl3 valve closed
2/20/2012	6:26:49 PM	PH3 valve closed
2/20/2012	6:26:49 PM	SiCl4 pre valve closed
2/20/2012	6:26:49 PM	SiCl4 post valve closed
2/20/2012	6:26:49 PM	Bypass valve closed
2/20/2012	6:26:49 PM	Bubbler valve closed
2/20/2012	6:26:49 PM	Helium valve opened
2/20/2012	6:26:49 PM	Main Vac valve opened
2/20/2012	6:26:49 PM	Helium MFC set to  20.000000
2/20/2012	6:26:49 PM	H2 MFC set to  0.000000
2/20/2012	6:26:49 PM	BCl3 MFC set to  0.000000
2/20/2012	6:26:49 PM	PH3 MFC set to  0.000000
2/20/2012	6:26:49 PM	SiCl4 MFC set to  0.000000
2/20/2012	6:26:49 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	6:26:49 PM	Tube furnace set to 200
2/20/2012	6:26:49 PM	Helium valve closed
2/20/2012	6:26:49 PM	H2 valve closed
2/20/2012	6:26:50 PM	BCl3 valve closed
2/20/2012	6:26:50 PM	PH3 valve closed
2/20/2012	6:26:50 PM	SiCl4 pre valve closed
2/20/2012	6:26:50 PM	SiCl4 post valve closed
2/20/2012	6:26:50 PM	Bypass valve closed
2/20/2012	6:26:50 PM	Bubbler valve closed
2/20/2012	6:26:50 PM	Main Vac valve opened
2/20/2012	6:26:50 PM	Helium MFC set to  0.000000
2/20/2012	6:26:50 PM	H2 MFC set to  0.000000
2/20/2012	6:26:50 PM	BCl3 MFC set to  0.000000
2/20/2012	6:26:50 PM	PH3 MFC set to  0.000000
2/20/2012	6:26:50 PM	SiCl4 MFC set to  0.000000
2/20/2012	6:26:50 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	6:26:50 PM	Tube furnace set to 200
2/20/2012	6:26:50 PM	H2 valve closed
2/20/2012	6:26:50 PM	BCl3 valve closed
2/20/2012	6:26:50 PM	PH3 valve closed
2/20/2012	6:26:50 PM	SiCl4 pre valve closed
2/20/2012	6:26:50 PM	SiCl4 post valve closed
2/20/2012	6:26:50 PM	Bypass valve closed
2/20/2012	6:26:50 PM	Bubbler valve closed
2/20/2012	6:26:50 PM	Helium valve opened
2/20/2012	6:26:50 PM	Main Vac valve opened
2/20/2012	6:26:50 PM	Helium MFC set to  20.000000
2/20/2012	6:26:50 PM	H2 MFC set to  0.000000
2/20/2012	6:26:50 PM	BCl3 MFC set to  0.000000
2/20/2012	6:26:50 PM	PH3 MFC set to  0.000000
2/20/2012	6:26:50 PM	SiCl4 MFC set to  0.000000
2/20/2012	6:26:50 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	6:26:50 PM	Tube furnace set to 200
2/20/2012	6:26:51 PM	Helium valve closed
2/20/2012	6:26:51 PM	H2 valve closed
2/20/2012	6:26:51 PM	BCl3 valve closed
2/20/2012	6:26:51 PM	PH3 valve closed
2/20/2012	6:26:51 PM	SiCl4 pre valve closed
2/20/2012	6:26:51 PM	SiCl4 post valve closed
2/20/2012	6:26:51 PM	Bypass valve closed
2/20/2012	6:26:51 PM	Bubbler valve closed
2/20/2012	6:26:51 PM	Main Vac valve opened
2/20/2012	6:26:51 PM	Helium MFC set to  0.000000
2/20/2012	6:26:51 PM	H2 MFC set to  0.000000
2/20/2012	6:26:51 PM	BCl3 MFC set to  0.000000
2/20/2012	6:26:51 PM	PH3 MFC set to  0.000000
2/20/2012	6:26:51 PM	SiCl4 MFC set to  0.000000
2/20/2012	6:26:51 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	6:26:51 PM	Tube furnace set to 0
2/20/2012	6:26:52 PM	Run finished at 6:26 PM
2/20/2012	6:28:06 PM	Main Vac valve closed
2/20/2012	6:28:16 PM	Main Vac valve opened
2/20/2012	6:28:29 PM	Recipe started at 6:28 PM
2/20/2012	6:28:29 PM	Helium valve closed
2/20/2012	6:28:29 PM	H2 valve closed
2/20/2012	6:28:29 PM	BCl3 valve closed
2/20/2012	6:28:29 PM	PH3 valve closed
2/20/2012	6:28:29 PM	SiCl4 pre valve closed
2/20/2012	6:28:29 PM	SiCl4 post valve closed
2/20/2012	6:28:29 PM	Main Vac valve closed
2/20/2012	6:28:29 PM	Bypass valve closed
2/20/2012	6:28:29 PM	Bubbler valve closed
2/20/2012	6:28:29 PM	Helium MFC set to  0.000000
2/20/2012	6:28:29 PM	H2 MFC set to  0.000000
2/20/2012	6:28:29 PM	BCl3 MFC set to  0.000000
2/20/2012	6:28:29 PM	PH3 MFC set to  0.000000
2/20/2012	6:28:29 PM	SiCl4 MFC set to  0.000000
2/20/2012	6:28:29 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	6:28:29 PM	Tube furnace set to 0
2/20/2012	6:28:32 PM	Helium valve closed
2/20/2012	6:28:32 PM	BCl3 valve closed
2/20/2012	6:28:32 PM	PH3 valve closed
2/20/2012	6:28:32 PM	SiCl4 pre valve closed
2/20/2012	6:28:32 PM	SiCl4 post valve closed
2/20/2012	6:28:32 PM	Main Vac valve closed
2/20/2012	6:28:32 PM	Bypass valve closed
2/20/2012	6:28:32 PM	Bubbler valve closed
2/20/2012	6:28:32 PM	H2 valve opened
2/20/2012	6:28:32 PM	Helium MFC set to  0.000000
2/20/2012	6:28:32 PM	H2 MFC set to  500.000000
2/20/2012	6:28:32 PM	BCl3 MFC set to  0.000000
2/20/2012	6:28:32 PM	PH3 MFC set to  0.000000
2/20/2012	6:28:32 PM	SiCl4 MFC set to  0.000000
2/20/2012	6:28:32 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	6:28:32 PM	Tube furnace set to 0
2/20/2012	6:29:36 PM	Helium valve closed
2/20/2012	6:29:36 PM	BCl3 valve closed
2/20/2012	6:29:36 PM	PH3 valve closed
2/20/2012	6:29:36 PM	SiCl4 pre valve closed
2/20/2012	6:29:36 PM	SiCl4 post valve closed
2/20/2012	6:29:36 PM	Main Vac valve closed
2/20/2012	6:29:36 PM	Bypass valve closed
2/20/2012	6:29:36 PM	H2 valve opened
2/20/2012	6:29:36 PM	Bubbler valve opened
2/20/2012	6:29:36 PM	Helium MFC set to  0.000000
2/20/2012	6:29:36 PM	H2 MFC set to  500.000000
2/20/2012	6:29:36 PM	BCl3 MFC set to  0.000000
2/20/2012	6:29:36 PM	PH3 MFC set to  0.000000
2/20/2012	6:29:36 PM	SiCl4 MFC set to  0.000000
2/20/2012	6:29:36 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	6:29:36 PM	Tube furnace set to 0
2/20/2012	6:29:37 PM	Helium valve closed
2/20/2012	6:29:37 PM	BCl3 valve closed
2/20/2012	6:29:37 PM	PH3 valve closed
2/20/2012	6:29:37 PM	SiCl4 pre valve closed
2/20/2012	6:29:37 PM	SiCl4 post valve closed
2/20/2012	6:29:37 PM	Main Vac valve closed
2/20/2012	6:29:37 PM	Bypass valve closed
2/20/2012	6:29:37 PM	H2 valve opened
2/20/2012	6:29:37 PM	Bubbler valve opened
2/20/2012	6:29:37 PM	Helium MFC set to  0.000000
2/20/2012	6:29:37 PM	H2 MFC set to  500.000000
2/20/2012	6:29:37 PM	BCl3 MFC set to  0.000000
2/20/2012	6:29:37 PM	PH3 MFC set to  0.000000
2/20/2012	6:29:37 PM	SiCl4 MFC set to  0.000000
2/20/2012	6:29:37 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	6:29:37 PM	Tube furnace set to 1000
2/20/2012	6:49:37 PM	Helium valve closed
2/20/2012	6:49:37 PM	BCl3 valve closed
2/20/2012	6:49:37 PM	Main Vac valve closed
2/20/2012	6:49:37 PM	Bypass valve closed
2/20/2012	6:49:37 PM	H2 valve opened
2/20/2012	6:49:37 PM	PH3 valve opened
2/20/2012	6:49:37 PM	SiCl4 pre valve opened
2/20/2012	6:49:37 PM	SiCl4 post valve opened
2/20/2012	6:49:37 PM	Bubbler valve opened
2/20/2012	6:49:37 PM	Helium MFC set to  0.000000
2/20/2012	6:49:37 PM	H2 MFC set to  500.000000
2/20/2012	6:49:37 PM	BCl3 MFC set to  0.000000
2/20/2012	6:49:37 PM	PH3 MFC set to  0.700000
2/20/2012	6:49:37 PM	SiCl4 MFC set to  50.000000
2/20/2012	6:49:37 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	6:49:37 PM	Tube furnace set to 1000
2/20/2012	7:03:37 PM	Helium valve closed
2/20/2012	7:03:37 PM	BCl3 valve closed
2/20/2012	7:03:37 PM	PH3 valve closed
2/20/2012	7:03:37 PM	SiCl4 pre valve closed
2/20/2012	7:03:37 PM	SiCl4 post valve closed
2/20/2012	7:03:37 PM	Main Vac valve closed
2/20/2012	7:03:37 PM	Bypass valve closed
2/20/2012	7:03:37 PM	H2 valve opened
2/20/2012	7:03:37 PM	Bubbler valve opened
2/20/2012	7:03:37 PM	Helium MFC set to  0.000000
2/20/2012	7:03:37 PM	H2 MFC set to  500.000000
2/20/2012	7:03:37 PM	BCl3 MFC set to  0.000000
2/20/2012	7:03:37 PM	PH3 MFC set to  0.000000
2/20/2012	7:03:37 PM	SiCl4 MFC set to  0.000000
2/20/2012	7:03:37 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	7:03:37 PM	Tube furnace set to 950
2/20/2012	7:05:38 PM	Helium valve closed
2/20/2012	7:05:38 PM	BCl3 valve closed
2/20/2012	7:05:38 PM	PH3 valve closed
2/20/2012	7:05:38 PM	SiCl4 pre valve closed
2/20/2012	7:05:38 PM	SiCl4 post valve closed
2/20/2012	7:05:38 PM	Main Vac valve closed
2/20/2012	7:05:38 PM	Bypass valve closed
2/20/2012	7:05:38 PM	H2 valve opened
2/20/2012	7:05:38 PM	Bubbler valve opened
2/20/2012	7:05:38 PM	Helium MFC set to  0.000000
2/20/2012	7:05:38 PM	H2 MFC set to  500.000000
2/20/2012	7:05:38 PM	BCl3 MFC set to  0.000000
2/20/2012	7:05:38 PM	PH3 MFC set to  0.000000
2/20/2012	7:05:38 PM	SiCl4 MFC set to  0.000000
2/20/2012	7:05:38 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	7:05:38 PM	Tube furnace set to 900
2/20/2012	7:07:38 PM	Helium valve closed
2/20/2012	7:07:38 PM	BCl3 valve closed
2/20/2012	7:07:38 PM	PH3 valve closed
2/20/2012	7:07:38 PM	SiCl4 pre valve closed
2/20/2012	7:07:38 PM	SiCl4 post valve closed
2/20/2012	7:07:38 PM	Main Vac valve closed
2/20/2012	7:07:38 PM	Bypass valve closed
2/20/2012	7:07:38 PM	H2 valve opened
2/20/2012	7:07:38 PM	Bubbler valve opened
2/20/2012	7:07:38 PM	Helium MFC set to  0.000000
2/20/2012	7:07:38 PM	H2 MFC set to  500.000000
2/20/2012	7:07:38 PM	BCl3 MFC set to  0.000000
2/20/2012	7:07:38 PM	PH3 MFC set to  0.000000
2/20/2012	7:07:38 PM	SiCl4 MFC set to  0.000000
2/20/2012	7:07:38 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	7:07:38 PM	Tube furnace set to 850
2/20/2012	7:09:38 PM	H2 valve closed
2/20/2012	7:09:38 PM	BCl3 valve closed
2/20/2012	7:09:38 PM	PH3 valve closed
2/20/2012	7:09:38 PM	SiCl4 pre valve closed
2/20/2012	7:09:38 PM	SiCl4 post valve closed
2/20/2012	7:09:38 PM	Main Vac valve closed
2/20/2012	7:09:38 PM	Bypass valve closed
2/20/2012	7:09:38 PM	Helium valve opened
2/20/2012	7:09:38 PM	Bubbler valve opened
2/20/2012	7:09:38 PM	Helium MFC set to  500.000000
2/20/2012	7:09:38 PM	H2 MFC set to  0.000000
2/20/2012	7:09:38 PM	BCl3 MFC set to  0.000000
2/20/2012	7:09:38 PM	PH3 MFC set to  0.000000
2/20/2012	7:09:38 PM	SiCl4 MFC set to  0.000000
2/20/2012	7:09:38 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	7:09:38 PM	Tube furnace set to 800
2/20/2012	7:11:38 PM	H2 valve closed
2/20/2012	7:11:38 PM	BCl3 valve closed
2/20/2012	7:11:38 PM	PH3 valve closed
2/20/2012	7:11:38 PM	SiCl4 pre valve closed
2/20/2012	7:11:38 PM	SiCl4 post valve closed
2/20/2012	7:11:38 PM	Main Vac valve closed
2/20/2012	7:11:38 PM	Bypass valve closed
2/20/2012	7:11:38 PM	Helium valve opened
2/20/2012	7:11:38 PM	Bubbler valve opened
2/20/2012	7:11:38 PM	Helium MFC set to  500.000000
2/20/2012	7:11:38 PM	H2 MFC set to  0.000000
2/20/2012	7:11:38 PM	BCl3 MFC set to  0.000000
2/20/2012	7:11:38 PM	PH3 MFC set to  0.000000
2/20/2012	7:11:38 PM	SiCl4 MFC set to  0.000000
2/20/2012	7:11:38 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	7:11:38 PM	Tube furnace set to 750
2/20/2012	7:13:38 PM	H2 valve closed
2/20/2012	7:13:38 PM	BCl3 valve closed
2/20/2012	7:13:38 PM	PH3 valve closed
2/20/2012	7:13:38 PM	SiCl4 pre valve closed
2/20/2012	7:13:38 PM	SiCl4 post valve closed
2/20/2012	7:13:38 PM	Main Vac valve closed
2/20/2012	7:13:38 PM	Bypass valve closed
2/20/2012	7:13:38 PM	Helium valve opened
2/20/2012	7:13:38 PM	Bubbler valve opened
2/20/2012	7:13:38 PM	Helium MFC set to  500.000000
2/20/2012	7:13:38 PM	H2 MFC set to  0.000000
2/20/2012	7:13:38 PM	BCl3 MFC set to  0.000000
2/20/2012	7:13:38 PM	PH3 MFC set to  0.000000
2/20/2012	7:13:38 PM	SiCl4 MFC set to  0.000000
2/20/2012	7:13:38 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	7:13:38 PM	Tube furnace set to 0
2/20/2012	7:30:11 PM	Helium valve closed
2/20/2012	7:30:11 PM	H2 valve closed
2/20/2012	7:30:11 PM	BCl3 valve closed
2/20/2012	7:30:11 PM	PH3 valve closed
2/20/2012	7:30:11 PM	SiCl4 pre valve closed
2/20/2012	7:30:11 PM	SiCl4 post valve closed
2/20/2012	7:30:11 PM	Main Vac valve closed
2/20/2012	7:30:11 PM	Bypass valve closed
2/20/2012	7:30:11 PM	Bubbler valve closed
2/20/2012	7:30:11 PM	Helium MFC set to  0.000000
2/20/2012	7:30:11 PM	H2 MFC set to  0.000000
2/20/2012	7:30:11 PM	BCl3 MFC set to  0.000000
2/20/2012	7:30:11 PM	PH3 MFC set to  0.000000
2/20/2012	7:30:11 PM	SiCl4 MFC set to  0.000000
2/20/2012	7:30:11 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	7:30:11 PM	Tube furnace set to 0
2/20/2012	7:30:12 PM	Run finished at 7:30 PM
2/20/2012	7:30:17 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/20/2012	7:30:18 PM	Recipe started at 7:30 PM
2/20/2012	7:30:18 PM	Helium valve closed
2/20/2012	7:30:18 PM	H2 valve closed
2/20/2012	7:30:18 PM	BCl3 valve closed
2/20/2012	7:30:18 PM	PH3 valve closed
2/20/2012	7:30:18 PM	SiCl4 pre valve closed
2/20/2012	7:30:18 PM	SiCl4 post valve closed
2/20/2012	7:30:18 PM	Main Vac valve closed
2/20/2012	7:30:18 PM	Bypass valve closed
2/20/2012	7:30:18 PM	Bubbler valve closed
2/20/2012	7:30:18 PM	Helium MFC set to  0.000000
2/20/2012	7:30:18 PM	H2 MFC set to  0.000000
2/20/2012	7:30:18 PM	BCl3 MFC set to  0.000000
2/20/2012	7:30:18 PM	PH3 MFC set to  0.000000
2/20/2012	7:30:18 PM	SiCl4 MFC set to  0.000000
2/20/2012	7:30:18 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	7:30:18 PM	Tube furnace set to 0
2/20/2012	7:30:21 PM	H2 valve closed
2/20/2012	7:30:21 PM	BCl3 valve closed
2/20/2012	7:30:21 PM	PH3 valve closed
2/20/2012	7:30:21 PM	SiCl4 pre valve closed
2/20/2012	7:30:21 PM	SiCl4 post valve closed
2/20/2012	7:30:21 PM	Main Vac valve closed
2/20/2012	7:30:21 PM	Bypass valve closed
2/20/2012	7:30:21 PM	Bubbler valve closed
2/20/2012	7:30:21 PM	Helium valve opened
2/20/2012	7:30:21 PM	Helium MFC set to  500.000000
2/20/2012	7:30:21 PM	H2 MFC set to  0.000000
2/20/2012	7:30:21 PM	BCl3 MFC set to  0.000000
2/20/2012	7:30:21 PM	PH3 MFC set to  0.000000
2/20/2012	7:30:21 PM	SiCl4 MFC set to  0.000000
2/20/2012	7:30:21 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	7:30:22 PM	Tube furnace set to 0
2/20/2012	7:30:22 PM	Helium valve closed
2/20/2012	7:30:22 PM	H2 valve closed
2/20/2012	7:30:22 PM	BCl3 valve closed
2/20/2012	7:30:22 PM	PH3 valve closed
2/20/2012	7:30:22 PM	SiCl4 pre valve closed
2/20/2012	7:30:22 PM	SiCl4 post valve closed
2/20/2012	7:30:22 PM	Main Vac valve closed
2/20/2012	7:30:22 PM	Bypass valve closed
2/20/2012	7:30:22 PM	Bubbler valve closed
2/20/2012	7:30:22 PM	Helium MFC set to  0.000000
2/20/2012	7:30:22 PM	H2 MFC set to  0.000000
2/20/2012	7:30:22 PM	BCl3 MFC set to  0.000000
2/20/2012	7:30:22 PM	PH3 MFC set to  0.000000
2/20/2012	7:30:22 PM	SiCl4 MFC set to  0.000000
2/20/2012	7:30:22 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	7:30:22 PM	Tube furnace set to 0
2/20/2012	7:30:23 PM	Run finished at 7:30 PM
2/20/2012	7:30:23 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/20/2012	7:32:23 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/20/2012	7:32:23 PM	Recipe started at 7:32 PM
2/20/2012	7:32:23 PM	Helium valve closed
2/20/2012	7:32:23 PM	H2 valve closed
2/20/2012	7:32:23 PM	BCl3 valve closed
2/20/2012	7:32:23 PM	PH3 valve closed
2/20/2012	7:32:23 PM	SiCl4 pre valve closed
2/20/2012	7:32:23 PM	SiCl4 post valve closed
2/20/2012	7:32:23 PM	Main Vac valve closed
2/20/2012	7:32:23 PM	Bubbler valve closed
2/20/2012	7:32:23 PM	Bypass valve opened
2/20/2012	7:32:23 PM	Helium MFC set to  0.000000
2/20/2012	7:32:23 PM	H2 MFC set to  0.000000
2/20/2012	7:32:23 PM	BCl3 MFC set to  0.000000
2/20/2012	7:32:23 PM	PH3 MFC set to  0.000000
2/20/2012	7:32:23 PM	SiCl4 MFC set to  0.000000
2/20/2012	7:32:23 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	7:32:24 PM	Tube furnace set to 0
2/20/2012	7:33:22 PM	Helium valve closed
2/20/2012	7:33:22 PM	H2 valve closed
2/20/2012	7:33:22 PM	BCl3 valve closed
2/20/2012	7:33:22 PM	PH3 valve closed
2/20/2012	7:33:22 PM	SiCl4 pre valve closed
2/20/2012	7:33:22 PM	SiCl4 post valve closed
2/20/2012	7:33:22 PM	Main Vac valve closed
2/20/2012	7:33:22 PM	Bubbler valve closed
2/20/2012	7:33:22 PM	Bypass valve opened
2/20/2012	7:33:22 PM	Helium MFC set to  0.000000
2/20/2012	7:33:22 PM	H2 MFC set to  0.000000
2/20/2012	7:33:22 PM	BCl3 MFC set to  0.000000
2/20/2012	7:33:22 PM	PH3 MFC set to  0.000000
2/20/2012	7:33:22 PM	SiCl4 MFC set to  0.000000
2/20/2012	7:33:22 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	7:33:22 PM	Tube furnace set to 0
2/20/2012	7:34:22 PM	Helium valve closed
2/20/2012	7:34:22 PM	H2 valve closed
2/20/2012	7:34:22 PM	BCl3 valve closed
2/20/2012	7:34:22 PM	PH3 valve closed
2/20/2012	7:34:22 PM	SiCl4 pre valve closed
2/20/2012	7:34:22 PM	SiCl4 post valve closed
2/20/2012	7:34:22 PM	Bypass valve closed
2/20/2012	7:34:22 PM	Bubbler valve closed
2/20/2012	7:34:22 PM	Main Vac valve opened
2/20/2012	7:34:22 PM	Helium MFC set to  0.000000
2/20/2012	7:34:22 PM	H2 MFC set to  0.000000
2/20/2012	7:34:22 PM	BCl3 MFC set to  0.000000
2/20/2012	7:34:22 PM	PH3 MFC set to  0.000000
2/20/2012	7:34:22 PM	SiCl4 MFC set to  0.000000
2/20/2012	7:34:22 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	7:34:22 PM	Tube furnace set to 0
2/20/2012	7:34:23 PM	Run finished at 7:34 PM
2/20/2012	7:34:23 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/20/2012	7:42:48 PM	Recipe started at 7:42 PM
2/20/2012	7:42:48 PM	Helium valve closed
2/20/2012	7:42:48 PM	H2 valve closed
2/20/2012	7:42:48 PM	BCl3 valve closed
2/20/2012	7:42:48 PM	PH3 valve closed
2/20/2012	7:42:48 PM	SiCl4 pre valve closed
2/20/2012	7:42:48 PM	SiCl4 post valve closed
2/20/2012	7:42:48 PM	Bypass valve closed
2/20/2012	7:42:48 PM	Bubbler valve closed
2/20/2012	7:42:48 PM	Main Vac valve opened
2/20/2012	7:42:48 PM	Helium MFC set to  0.000000
2/20/2012	7:42:48 PM	H2 MFC set to  0.000000
2/20/2012	7:42:48 PM	BCl3 MFC set to  0.000000
2/20/2012	7:42:48 PM	PH3 MFC set to  0.000000
2/20/2012	7:42:48 PM	SiCl4 MFC set to  0.000000
2/20/2012	7:42:48 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	7:42:49 PM	Tube furnace set to 0
2/20/2012	7:43:19 PM	H2 valve closed
2/20/2012	7:43:19 PM	BCl3 valve closed
2/20/2012	7:43:19 PM	PH3 valve closed
2/20/2012	7:43:19 PM	SiCl4 pre valve closed
2/20/2012	7:43:19 PM	SiCl4 post valve closed
2/20/2012	7:43:19 PM	Bypass valve closed
2/20/2012	7:43:19 PM	Bubbler valve closed
2/20/2012	7:43:19 PM	Helium valve opened
2/20/2012	7:43:19 PM	Main Vac valve opened
2/20/2012	7:43:19 PM	Helium MFC set to  20.000000
2/20/2012	7:43:19 PM	H2 MFC set to  0.000000
2/20/2012	7:43:19 PM	BCl3 MFC set to  0.000000
2/20/2012	7:43:19 PM	PH3 MFC set to  0.000000
2/20/2012	7:43:19 PM	SiCl4 MFC set to  0.000000
2/20/2012	7:43:19 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	7:43:19 PM	Tube furnace set to 0
2/20/2012	7:43:49 PM	Helium valve closed
2/20/2012	7:43:49 PM	H2 valve closed
2/20/2012	7:43:49 PM	BCl3 valve closed
2/20/2012	7:43:49 PM	PH3 valve closed
2/20/2012	7:43:49 PM	SiCl4 pre valve closed
2/20/2012	7:43:49 PM	SiCl4 post valve closed
2/20/2012	7:43:49 PM	Bypass valve closed
2/20/2012	7:43:49 PM	Bubbler valve closed
2/20/2012	7:43:49 PM	Main Vac valve opened
2/20/2012	7:43:49 PM	Helium MFC set to  0.000000
2/20/2012	7:43:49 PM	H2 MFC set to  0.000000
2/20/2012	7:43:49 PM	BCl3 MFC set to  0.000000
2/20/2012	7:43:49 PM	PH3 MFC set to  0.000000
2/20/2012	7:43:49 PM	SiCl4 MFC set to  0.000000
2/20/2012	7:43:49 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	7:43:49 PM	Tube furnace set to 0
2/20/2012	7:44:19 PM	H2 valve closed
2/20/2012	7:44:19 PM	BCl3 valve closed
2/20/2012	7:44:19 PM	PH3 valve closed
2/20/2012	7:44:19 PM	SiCl4 pre valve closed
2/20/2012	7:44:19 PM	SiCl4 post valve closed
2/20/2012	7:44:19 PM	Bypass valve closed
2/20/2012	7:44:19 PM	Bubbler valve closed
2/20/2012	7:44:19 PM	Helium valve opened
2/20/2012	7:44:19 PM	Main Vac valve opened
2/20/2012	7:44:19 PM	Helium MFC set to  20.000000
2/20/2012	7:44:19 PM	H2 MFC set to  0.000000
2/20/2012	7:44:19 PM	BCl3 MFC set to  0.000000
2/20/2012	7:44:19 PM	PH3 MFC set to  0.000000
2/20/2012	7:44:19 PM	SiCl4 MFC set to  0.000000
2/20/2012	7:44:19 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	7:44:19 PM	Tube furnace set to 0
2/20/2012	7:44:49 PM	Helium valve closed
2/20/2012	7:44:49 PM	H2 valve closed
2/20/2012	7:44:49 PM	BCl3 valve closed
2/20/2012	7:44:49 PM	PH3 valve closed
2/20/2012	7:44:49 PM	SiCl4 pre valve closed
2/20/2012	7:44:49 PM	SiCl4 post valve closed
2/20/2012	7:44:49 PM	Bypass valve closed
2/20/2012	7:44:49 PM	Bubbler valve closed
2/20/2012	7:44:49 PM	Main Vac valve opened
2/20/2012	7:44:49 PM	Helium MFC set to  0.000000
2/20/2012	7:44:49 PM	H2 MFC set to  0.000000
2/20/2012	7:44:49 PM	BCl3 MFC set to  0.000000
2/20/2012	7:44:49 PM	PH3 MFC set to  0.000000
2/20/2012	7:44:49 PM	SiCl4 MFC set to  0.000000
2/20/2012	7:44:49 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	7:44:49 PM	Tube furnace set to 0
2/20/2012	7:45:19 PM	H2 valve closed
2/20/2012	7:45:19 PM	BCl3 valve closed
2/20/2012	7:45:19 PM	PH3 valve closed
2/20/2012	7:45:19 PM	SiCl4 pre valve closed
2/20/2012	7:45:19 PM	SiCl4 post valve closed
2/20/2012	7:45:19 PM	Bypass valve closed
2/20/2012	7:45:19 PM	Bubbler valve closed
2/20/2012	7:45:19 PM	Helium valve opened
2/20/2012	7:45:19 PM	Main Vac valve opened
2/20/2012	7:45:19 PM	Helium MFC set to  20.000000
2/20/2012	7:45:19 PM	H2 MFC set to  0.000000
2/20/2012	7:45:19 PM	BCl3 MFC set to  0.000000
2/20/2012	7:45:19 PM	PH3 MFC set to  0.000000
2/20/2012	7:45:19 PM	SiCl4 MFC set to  0.000000
2/20/2012	7:45:19 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	7:45:20 PM	Tube furnace set to 0
2/20/2012	7:45:50 PM	Helium valve closed
2/20/2012	7:45:50 PM	H2 valve closed
2/20/2012	7:45:50 PM	BCl3 valve closed
2/20/2012	7:45:50 PM	PH3 valve closed
2/20/2012	7:45:50 PM	SiCl4 pre valve closed
2/20/2012	7:45:50 PM	SiCl4 post valve closed
2/20/2012	7:45:50 PM	Bypass valve closed
2/20/2012	7:45:50 PM	Bubbler valve closed
2/20/2012	7:45:50 PM	Main Vac valve opened
2/20/2012	7:45:50 PM	Helium MFC set to  0.000000
2/20/2012	7:45:50 PM	H2 MFC set to  0.000000
2/20/2012	7:45:50 PM	BCl3 MFC set to  0.000000
2/20/2012	7:45:50 PM	PH3 MFC set to  0.000000
2/20/2012	7:45:50 PM	SiCl4 MFC set to  0.000000
2/20/2012	7:45:50 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	7:45:50 PM	Tube furnace set to 0
2/20/2012	7:46:20 PM	H2 valve closed
2/20/2012	7:46:20 PM	BCl3 valve closed
2/20/2012	7:46:20 PM	PH3 valve closed
2/20/2012	7:46:20 PM	SiCl4 pre valve closed
2/20/2012	7:46:20 PM	SiCl4 post valve closed
2/20/2012	7:46:20 PM	Bypass valve closed
2/20/2012	7:46:20 PM	Bubbler valve closed
2/20/2012	7:46:20 PM	Helium valve opened
2/20/2012	7:46:20 PM	Main Vac valve opened
2/20/2012	7:46:20 PM	Helium MFC set to  20.000000
2/20/2012	7:46:20 PM	H2 MFC set to  0.000000
2/20/2012	7:46:20 PM	BCl3 MFC set to  0.000000
2/20/2012	7:46:20 PM	PH3 MFC set to  0.000000
2/20/2012	7:46:20 PM	SiCl4 MFC set to  0.000000
2/20/2012	7:46:20 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	7:46:20 PM	Tube furnace set to 0
2/20/2012	7:46:50 PM	Helium valve closed
2/20/2012	7:46:50 PM	H2 valve closed
2/20/2012	7:46:50 PM	BCl3 valve closed
2/20/2012	7:46:50 PM	PH3 valve closed
2/20/2012	7:46:50 PM	SiCl4 pre valve closed
2/20/2012	7:46:50 PM	SiCl4 post valve closed
2/20/2012	7:46:50 PM	Bypass valve closed
2/20/2012	7:46:50 PM	Bubbler valve closed
2/20/2012	7:46:50 PM	Main Vac valve opened
2/20/2012	7:46:50 PM	Helium MFC set to  0.000000
2/20/2012	7:46:50 PM	H2 MFC set to  0.000000
2/20/2012	7:46:50 PM	BCl3 MFC set to  0.000000
2/20/2012	7:46:50 PM	PH3 MFC set to  0.000000
2/20/2012	7:46:50 PM	SiCl4 MFC set to  0.000000
2/20/2012	7:46:50 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	7:46:50 PM	Tube furnace set to 0
2/20/2012	7:47:20 PM	H2 valve closed
2/20/2012	7:47:20 PM	BCl3 valve closed
2/20/2012	7:47:20 PM	PH3 valve closed
2/20/2012	7:47:20 PM	SiCl4 pre valve closed
2/20/2012	7:47:20 PM	SiCl4 post valve closed
2/20/2012	7:47:20 PM	Bypass valve closed
2/20/2012	7:47:20 PM	Bubbler valve closed
2/20/2012	7:47:20 PM	Helium valve opened
2/20/2012	7:47:20 PM	Main Vac valve opened
2/20/2012	7:47:20 PM	Helium MFC set to  20.000000
2/20/2012	7:47:20 PM	H2 MFC set to  0.000000
2/20/2012	7:47:20 PM	BCl3 MFC set to  0.000000
2/20/2012	7:47:20 PM	PH3 MFC set to  0.000000
2/20/2012	7:47:20 PM	SiCl4 MFC set to  0.000000
2/20/2012	7:47:20 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	7:47:20 PM	Tube furnace set to 0
2/20/2012	7:47:50 PM	Helium valve closed
2/20/2012	7:47:50 PM	H2 valve closed
2/20/2012	7:47:50 PM	BCl3 valve closed
2/20/2012	7:47:50 PM	PH3 valve closed
2/20/2012	7:47:50 PM	SiCl4 pre valve closed
2/20/2012	7:47:50 PM	SiCl4 post valve closed
2/20/2012	7:47:50 PM	Bypass valve closed
2/20/2012	7:47:50 PM	Bubbler valve closed
2/20/2012	7:47:50 PM	Main Vac valve opened
2/20/2012	7:47:51 PM	Helium MFC set to  0.000000
2/20/2012	7:47:51 PM	H2 MFC set to  0.000000
2/20/2012	7:47:51 PM	BCl3 MFC set to  0.000000
2/20/2012	7:47:51 PM	PH3 MFC set to  0.000000
2/20/2012	7:47:51 PM	SiCl4 MFC set to  0.000000
2/20/2012	7:47:51 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	7:47:51 PM	Tube furnace set to 0
2/20/2012	7:48:21 PM	H2 valve closed
2/20/2012	7:48:21 PM	BCl3 valve closed
2/20/2012	7:48:21 PM	PH3 valve closed
2/20/2012	7:48:21 PM	SiCl4 pre valve closed
2/20/2012	7:48:21 PM	SiCl4 post valve closed
2/20/2012	7:48:21 PM	Bypass valve closed
2/20/2012	7:48:21 PM	Bubbler valve closed
2/20/2012	7:48:21 PM	Helium valve opened
2/20/2012	7:48:21 PM	Main Vac valve opened
2/20/2012	7:48:21 PM	Helium MFC set to  20.000000
2/20/2012	7:48:21 PM	H2 MFC set to  0.000000
2/20/2012	7:48:21 PM	BCl3 MFC set to  0.000000
2/20/2012	7:48:21 PM	PH3 MFC set to  0.000000
2/20/2012	7:48:21 PM	SiCl4 MFC set to  0.000000
2/20/2012	7:48:21 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	7:48:21 PM	Tube furnace set to 0
2/20/2012	7:48:51 PM	Helium valve closed
2/20/2012	7:48:51 PM	H2 valve closed
2/20/2012	7:48:51 PM	BCl3 valve closed
2/20/2012	7:48:51 PM	PH3 valve closed
2/20/2012	7:48:51 PM	SiCl4 pre valve closed
2/20/2012	7:48:51 PM	SiCl4 post valve closed
2/20/2012	7:48:51 PM	Bypass valve closed
2/20/2012	7:48:51 PM	Bubbler valve closed
2/20/2012	7:48:51 PM	Main Vac valve opened
2/20/2012	7:48:51 PM	Helium MFC set to  0.000000
2/20/2012	7:48:51 PM	H2 MFC set to  0.000000
2/20/2012	7:48:51 PM	BCl3 MFC set to  0.000000
2/20/2012	7:48:51 PM	PH3 MFC set to  0.000000
2/20/2012	7:48:51 PM	SiCl4 MFC set to  0.000000
2/20/2012	7:48:51 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	7:48:51 PM	Tube furnace set to 0
2/20/2012	7:49:21 PM	H2 valve closed
2/20/2012	7:49:21 PM	BCl3 valve closed
2/20/2012	7:49:21 PM	PH3 valve closed
2/20/2012	7:49:21 PM	SiCl4 pre valve closed
2/20/2012	7:49:21 PM	SiCl4 post valve closed
2/20/2012	7:49:21 PM	Bypass valve closed
2/20/2012	7:49:21 PM	Bubbler valve closed
2/20/2012	7:49:21 PM	Helium valve opened
2/20/2012	7:49:21 PM	Main Vac valve opened
2/20/2012	7:49:21 PM	Helium MFC set to  20.000000
2/20/2012	7:49:21 PM	H2 MFC set to  0.000000
2/20/2012	7:49:21 PM	BCl3 MFC set to  0.000000
2/20/2012	7:49:21 PM	PH3 MFC set to  0.000000
2/20/2012	7:49:21 PM	SiCl4 MFC set to  0.000000
2/20/2012	7:49:21 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	7:49:21 PM	Tube furnace set to 0
2/20/2012	7:49:51 PM	Helium valve closed
2/20/2012	7:49:51 PM	H2 valve closed
2/20/2012	7:49:51 PM	BCl3 valve closed
2/20/2012	7:49:51 PM	PH3 valve closed
2/20/2012	7:49:51 PM	SiCl4 pre valve closed
2/20/2012	7:49:51 PM	SiCl4 post valve closed
2/20/2012	7:49:51 PM	Bypass valve closed
2/20/2012	7:49:51 PM	Bubbler valve closed
2/20/2012	7:49:51 PM	Main Vac valve opened
2/20/2012	7:49:51 PM	Helium MFC set to  0.000000
2/20/2012	7:49:51 PM	H2 MFC set to  0.000000
2/20/2012	7:49:51 PM	BCl3 MFC set to  0.000000
2/20/2012	7:49:51 PM	PH3 MFC set to  0.000000
2/20/2012	7:49:51 PM	SiCl4 MFC set to  0.000000
2/20/2012	7:49:51 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	7:49:51 PM	Tube furnace set to 0
2/20/2012	7:50:22 PM	H2 valve closed
2/20/2012	7:50:22 PM	BCl3 valve closed
2/20/2012	7:50:22 PM	PH3 valve closed
2/20/2012	7:50:22 PM	SiCl4 pre valve closed
2/20/2012	7:50:22 PM	SiCl4 post valve closed
2/20/2012	7:50:22 PM	Bypass valve closed
2/20/2012	7:50:22 PM	Bubbler valve closed
2/20/2012	7:50:22 PM	Helium valve opened
2/20/2012	7:50:22 PM	Main Vac valve opened
2/20/2012	7:50:22 PM	Helium MFC set to  20.000000
2/20/2012	7:50:22 PM	H2 MFC set to  0.000000
2/20/2012	7:50:22 PM	BCl3 MFC set to  0.000000
2/20/2012	7:50:22 PM	PH3 MFC set to  0.000000
2/20/2012	7:50:22 PM	SiCl4 MFC set to  0.000000
2/20/2012	7:50:22 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	7:50:22 PM	Tube furnace set to 0
2/20/2012	7:50:52 PM	Helium valve closed
2/20/2012	7:50:52 PM	H2 valve closed
2/20/2012	7:50:52 PM	BCl3 valve closed
2/20/2012	7:50:52 PM	PH3 valve closed
2/20/2012	7:50:52 PM	SiCl4 pre valve closed
2/20/2012	7:50:52 PM	SiCl4 post valve closed
2/20/2012	7:50:52 PM	Bypass valve closed
2/20/2012	7:50:52 PM	Bubbler valve closed
2/20/2012	7:50:52 PM	Main Vac valve opened
2/20/2012	7:50:52 PM	Helium MFC set to  0.000000
2/20/2012	7:50:52 PM	H2 MFC set to  0.000000
2/20/2012	7:50:52 PM	BCl3 MFC set to  0.000000
2/20/2012	7:50:52 PM	PH3 MFC set to  0.000000
2/20/2012	7:50:52 PM	SiCl4 MFC set to  0.000000
2/20/2012	7:50:52 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	7:50:52 PM	Tube furnace set to 0
2/20/2012	7:51:22 PM	H2 valve closed
2/20/2012	7:51:22 PM	BCl3 valve closed
2/20/2012	7:51:22 PM	PH3 valve closed
2/20/2012	7:51:22 PM	SiCl4 pre valve closed
2/20/2012	7:51:22 PM	SiCl4 post valve closed
2/20/2012	7:51:22 PM	Bypass valve closed
2/20/2012	7:51:22 PM	Bubbler valve closed
2/20/2012	7:51:22 PM	Helium valve opened
2/20/2012	7:51:22 PM	Main Vac valve opened
2/20/2012	7:51:22 PM	Helium MFC set to  20.000000
2/20/2012	7:51:22 PM	H2 MFC set to  0.000000
2/20/2012	7:51:22 PM	BCl3 MFC set to  0.000000
2/20/2012	7:51:22 PM	PH3 MFC set to  0.000000
2/20/2012	7:51:22 PM	SiCl4 MFC set to  0.000000
2/20/2012	7:51:22 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	7:51:22 PM	Tube furnace set to 0
2/20/2012	7:51:52 PM	Helium valve closed
2/20/2012	7:51:52 PM	H2 valve closed
2/20/2012	7:51:52 PM	BCl3 valve closed
2/20/2012	7:51:52 PM	PH3 valve closed
2/20/2012	7:51:52 PM	SiCl4 pre valve closed
2/20/2012	7:51:52 PM	SiCl4 post valve closed
2/20/2012	7:51:52 PM	Bypass valve closed
2/20/2012	7:51:52 PM	Bubbler valve closed
2/20/2012	7:51:52 PM	Main Vac valve opened
2/20/2012	7:51:52 PM	Helium MFC set to  0.000000
2/20/2012	7:51:52 PM	H2 MFC set to  0.000000
2/20/2012	7:51:52 PM	BCl3 MFC set to  0.000000
2/20/2012	7:51:52 PM	PH3 MFC set to  0.000000
2/20/2012	7:51:52 PM	SiCl4 MFC set to  0.000000
2/20/2012	7:51:52 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	7:51:52 PM	Tube furnace set to 200
2/20/2012	7:52:22 PM	H2 valve closed
2/20/2012	7:52:22 PM	BCl3 valve closed
2/20/2012	7:52:22 PM	PH3 valve closed
2/20/2012	7:52:22 PM	SiCl4 pre valve closed
2/20/2012	7:52:22 PM	SiCl4 post valve closed
2/20/2012	7:52:22 PM	Bypass valve closed
2/20/2012	7:52:22 PM	Bubbler valve closed
2/20/2012	7:52:22 PM	Helium valve opened
2/20/2012	7:52:22 PM	Main Vac valve opened
2/20/2012	7:52:22 PM	Helium MFC set to  20.000000
2/20/2012	7:52:22 PM	H2 MFC set to  0.000000
2/20/2012	7:52:22 PM	BCl3 MFC set to  0.000000
2/20/2012	7:52:22 PM	PH3 MFC set to  0.000000
2/20/2012	7:52:22 PM	SiCl4 MFC set to  0.000000
2/20/2012	7:52:22 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	7:52:23 PM	Tube furnace set to 200
2/20/2012	7:52:53 PM	Helium valve closed
2/20/2012	7:52:53 PM	H2 valve closed
2/20/2012	7:52:53 PM	BCl3 valve closed
2/20/2012	7:52:53 PM	PH3 valve closed
2/20/2012	7:52:53 PM	SiCl4 pre valve closed
2/20/2012	7:52:53 PM	SiCl4 post valve closed
2/20/2012	7:52:53 PM	Bypass valve closed
2/20/2012	7:52:53 PM	Bubbler valve closed
2/20/2012	7:52:53 PM	Main Vac valve opened
2/20/2012	7:52:53 PM	Helium MFC set to  0.000000
2/20/2012	7:52:53 PM	H2 MFC set to  0.000000
2/20/2012	7:52:53 PM	BCl3 MFC set to  0.000000
2/20/2012	7:52:53 PM	PH3 MFC set to  0.000000
2/20/2012	7:52:53 PM	SiCl4 MFC set to  0.000000
2/20/2012	7:52:53 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	7:52:53 PM	Tube furnace set to 200
2/20/2012	7:53:23 PM	H2 valve closed
2/20/2012	7:53:23 PM	BCl3 valve closed
2/20/2012	7:53:23 PM	PH3 valve closed
2/20/2012	7:53:23 PM	SiCl4 pre valve closed
2/20/2012	7:53:23 PM	SiCl4 post valve closed
2/20/2012	7:53:23 PM	Bypass valve closed
2/20/2012	7:53:23 PM	Bubbler valve closed
2/20/2012	7:53:23 PM	Helium valve opened
2/20/2012	7:53:23 PM	Main Vac valve opened
2/20/2012	7:53:23 PM	Helium MFC set to  20.000000
2/20/2012	7:53:23 PM	H2 MFC set to  0.000000
2/20/2012	7:53:23 PM	BCl3 MFC set to  0.000000
2/20/2012	7:53:23 PM	PH3 MFC set to  0.000000
2/20/2012	7:53:23 PM	SiCl4 MFC set to  0.000000
2/20/2012	7:53:23 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	7:53:23 PM	Tube furnace set to 200
2/20/2012	7:53:53 PM	Helium valve closed
2/20/2012	7:53:53 PM	H2 valve closed
2/20/2012	7:53:53 PM	BCl3 valve closed
2/20/2012	7:53:53 PM	PH3 valve closed
2/20/2012	7:53:53 PM	SiCl4 pre valve closed
2/20/2012	7:53:53 PM	SiCl4 post valve closed
2/20/2012	7:53:53 PM	Bypass valve closed
2/20/2012	7:53:53 PM	Bubbler valve closed
2/20/2012	7:53:53 PM	Main Vac valve opened
2/20/2012	7:53:53 PM	Helium MFC set to  0.000000
2/20/2012	7:53:53 PM	H2 MFC set to  0.000000
2/20/2012	7:53:53 PM	BCl3 MFC set to  0.000000
2/20/2012	7:53:53 PM	PH3 MFC set to  0.000000
2/20/2012	7:53:53 PM	SiCl4 MFC set to  0.000000
2/20/2012	7:53:53 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	7:53:53 PM	Tube furnace set to 200
2/20/2012	7:54:23 PM	H2 valve closed
2/20/2012	7:54:23 PM	BCl3 valve closed
2/20/2012	7:54:23 PM	PH3 valve closed
2/20/2012	7:54:23 PM	SiCl4 pre valve closed
2/20/2012	7:54:23 PM	SiCl4 post valve closed
2/20/2012	7:54:23 PM	Bypass valve closed
2/20/2012	7:54:23 PM	Bubbler valve closed
2/20/2012	7:54:23 PM	Helium valve opened
2/20/2012	7:54:23 PM	Main Vac valve opened
2/20/2012	7:54:23 PM	Helium MFC set to  20.000000
2/20/2012	7:54:23 PM	H2 MFC set to  0.000000
2/20/2012	7:54:23 PM	BCl3 MFC set to  0.000000
2/20/2012	7:54:23 PM	PH3 MFC set to  0.000000
2/20/2012	7:54:23 PM	SiCl4 MFC set to  0.000000
2/20/2012	7:54:23 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	7:54:23 PM	Tube furnace set to 200
2/20/2012	7:54:53 PM	Helium valve closed
2/20/2012	7:54:53 PM	H2 valve closed
2/20/2012	7:54:53 PM	BCl3 valve closed
2/20/2012	7:54:53 PM	PH3 valve closed
2/20/2012	7:54:53 PM	SiCl4 pre valve closed
2/20/2012	7:54:53 PM	SiCl4 post valve closed
2/20/2012	7:54:53 PM	Bypass valve closed
2/20/2012	7:54:53 PM	Bubbler valve closed
2/20/2012	7:54:53 PM	Main Vac valve opened
2/20/2012	7:54:53 PM	Helium MFC set to  0.000000
2/20/2012	7:54:53 PM	H2 MFC set to  0.000000
2/20/2012	7:54:53 PM	BCl3 MFC set to  0.000000
2/20/2012	7:54:53 PM	PH3 MFC set to  0.000000
2/20/2012	7:54:53 PM	SiCl4 MFC set to  0.000000
2/20/2012	7:54:53 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	7:54:54 PM	Tube furnace set to 200
2/20/2012	7:55:24 PM	H2 valve closed
2/20/2012	7:55:24 PM	BCl3 valve closed
2/20/2012	7:55:24 PM	PH3 valve closed
2/20/2012	7:55:24 PM	SiCl4 pre valve closed
2/20/2012	7:55:24 PM	SiCl4 post valve closed
2/20/2012	7:55:24 PM	Bypass valve closed
2/20/2012	7:55:24 PM	Bubbler valve closed
2/20/2012	7:55:24 PM	Helium valve opened
2/20/2012	7:55:24 PM	Main Vac valve opened
2/20/2012	7:55:24 PM	Helium MFC set to  20.000000
2/20/2012	7:55:24 PM	H2 MFC set to  0.000000
2/20/2012	7:55:24 PM	BCl3 MFC set to  0.000000
2/20/2012	7:55:24 PM	PH3 MFC set to  0.000000
2/20/2012	7:55:24 PM	SiCl4 MFC set to  0.000000
2/20/2012	7:55:24 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	7:55:24 PM	Tube furnace set to 200
2/20/2012	7:55:54 PM	Helium valve closed
2/20/2012	7:55:54 PM	H2 valve closed
2/20/2012	7:55:54 PM	BCl3 valve closed
2/20/2012	7:55:54 PM	PH3 valve closed
2/20/2012	7:55:54 PM	SiCl4 pre valve closed
2/20/2012	7:55:54 PM	SiCl4 post valve closed
2/20/2012	7:55:54 PM	Bypass valve closed
2/20/2012	7:55:54 PM	Bubbler valve closed
2/20/2012	7:55:54 PM	Main Vac valve opened
2/20/2012	7:55:54 PM	Helium MFC set to  0.000000
2/20/2012	7:55:54 PM	H2 MFC set to  0.000000
2/20/2012	7:55:54 PM	BCl3 MFC set to  0.000000
2/20/2012	7:55:54 PM	PH3 MFC set to  0.000000
2/20/2012	7:55:54 PM	SiCl4 MFC set to  0.000000
2/20/2012	7:55:54 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	7:55:54 PM	Tube furnace set to 200
2/20/2012	7:56:24 PM	H2 valve closed
2/20/2012	7:56:24 PM	BCl3 valve closed
2/20/2012	7:56:24 PM	PH3 valve closed
2/20/2012	7:56:24 PM	SiCl4 pre valve closed
2/20/2012	7:56:24 PM	SiCl4 post valve closed
2/20/2012	7:56:24 PM	Bypass valve closed
2/20/2012	7:56:24 PM	Bubbler valve closed
2/20/2012	7:56:24 PM	Helium valve opened
2/20/2012	7:56:24 PM	Main Vac valve opened
2/20/2012	7:56:24 PM	Helium MFC set to  20.000000
2/20/2012	7:56:24 PM	H2 MFC set to  0.000000
2/20/2012	7:56:24 PM	BCl3 MFC set to  0.000000
2/20/2012	7:56:24 PM	PH3 MFC set to  0.000000
2/20/2012	7:56:24 PM	SiCl4 MFC set to  0.000000
2/20/2012	7:56:24 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	7:56:24 PM	Tube furnace set to 200
2/20/2012	7:56:54 PM	Helium valve closed
2/20/2012	7:56:54 PM	H2 valve closed
2/20/2012	7:56:54 PM	BCl3 valve closed
2/20/2012	7:56:54 PM	PH3 valve closed
2/20/2012	7:56:54 PM	SiCl4 pre valve closed
2/20/2012	7:56:54 PM	SiCl4 post valve closed
2/20/2012	7:56:54 PM	Bypass valve closed
2/20/2012	7:56:54 PM	Bubbler valve closed
2/20/2012	7:56:54 PM	Main Vac valve opened
2/20/2012	7:56:54 PM	Helium MFC set to  0.000000
2/20/2012	7:56:54 PM	H2 MFC set to  0.000000
2/20/2012	7:56:54 PM	BCl3 MFC set to  0.000000
2/20/2012	7:56:54 PM	PH3 MFC set to  0.000000
2/20/2012	7:56:54 PM	SiCl4 MFC set to  0.000000
2/20/2012	7:56:54 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	7:56:54 PM	Tube furnace set to 200
2/20/2012	7:57:24 PM	H2 valve closed
2/20/2012	7:57:24 PM	BCl3 valve closed
2/20/2012	7:57:24 PM	PH3 valve closed
2/20/2012	7:57:24 PM	SiCl4 pre valve closed
2/20/2012	7:57:24 PM	SiCl4 post valve closed
2/20/2012	7:57:24 PM	Bypass valve closed
2/20/2012	7:57:24 PM	Bubbler valve closed
2/20/2012	7:57:24 PM	Helium valve opened
2/20/2012	7:57:24 PM	Main Vac valve opened
2/20/2012	7:57:24 PM	Helium MFC set to  20.000000
2/20/2012	7:57:24 PM	H2 MFC set to  0.000000
2/20/2012	7:57:24 PM	BCl3 MFC set to  0.000000
2/20/2012	7:57:24 PM	PH3 MFC set to  0.000000
2/20/2012	7:57:24 PM	SiCl4 MFC set to  0.000000
2/20/2012	7:57:24 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	7:57:25 PM	Tube furnace set to 200
2/20/2012	7:57:55 PM	Helium valve closed
2/20/2012	7:57:55 PM	H2 valve closed
2/20/2012	7:57:55 PM	BCl3 valve closed
2/20/2012	7:57:55 PM	PH3 valve closed
2/20/2012	7:57:55 PM	SiCl4 pre valve closed
2/20/2012	7:57:55 PM	SiCl4 post valve closed
2/20/2012	7:57:55 PM	Bypass valve closed
2/20/2012	7:57:55 PM	Bubbler valve closed
2/20/2012	7:57:55 PM	Main Vac valve opened
2/20/2012	7:57:55 PM	Helium MFC set to  0.000000
2/20/2012	7:57:55 PM	H2 MFC set to  0.000000
2/20/2012	7:57:55 PM	BCl3 MFC set to  0.000000
2/20/2012	7:57:55 PM	PH3 MFC set to  0.000000
2/20/2012	7:57:55 PM	SiCl4 MFC set to  0.000000
2/20/2012	7:57:55 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	7:57:55 PM	Tube furnace set to 0
2/20/2012	7:57:56 PM	Run finished at 7:57 PM
2/20/2012	8:08:59 PM	Recipe started at 8:08 PM
2/20/2012	8:08:59 PM	Helium valve closed
2/20/2012	8:08:59 PM	H2 valve closed
2/20/2012	8:08:59 PM	BCl3 valve closed
2/20/2012	8:08:59 PM	PH3 valve closed
2/20/2012	8:08:59 PM	SiCl4 pre valve closed
2/20/2012	8:08:59 PM	SiCl4 post valve closed
2/20/2012	8:08:59 PM	Bypass valve closed
2/20/2012	8:08:59 PM	Bubbler valve closed
2/20/2012	8:08:59 PM	Main Vac valve opened
2/20/2012	8:08:59 PM	Helium MFC set to  0.000000
2/20/2012	8:08:59 PM	H2 MFC set to  0.000000
2/20/2012	8:08:59 PM	BCl3 MFC set to  0.000000
2/20/2012	8:08:59 PM	PH3 MFC set to  0.000000
2/20/2012	8:08:59 PM	SiCl4 MFC set to  0.000000
2/20/2012	8:08:59 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	8:08:59 PM	Tube furnace set to 0
2/20/2012	8:09:29 PM	H2 valve closed
2/20/2012	8:09:29 PM	BCl3 valve closed
2/20/2012	8:09:29 PM	PH3 valve closed
2/20/2012	8:09:29 PM	SiCl4 pre valve closed
2/20/2012	8:09:29 PM	SiCl4 post valve closed
2/20/2012	8:09:29 PM	Bypass valve closed
2/20/2012	8:09:29 PM	Bubbler valve closed
2/20/2012	8:09:29 PM	Helium valve opened
2/20/2012	8:09:29 PM	Main Vac valve opened
2/20/2012	8:09:29 PM	Helium MFC set to  20.000000
2/20/2012	8:09:29 PM	H2 MFC set to  0.000000
2/20/2012	8:09:29 PM	BCl3 MFC set to  0.000000
2/20/2012	8:09:29 PM	PH3 MFC set to  0.000000
2/20/2012	8:09:29 PM	SiCl4 MFC set to  0.000000
2/20/2012	8:09:29 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	8:09:29 PM	Tube furnace set to 0
2/20/2012	8:09:59 PM	Helium valve closed
2/20/2012	8:09:59 PM	H2 valve closed
2/20/2012	8:09:59 PM	BCl3 valve closed
2/20/2012	8:09:59 PM	PH3 valve closed
2/20/2012	8:09:59 PM	SiCl4 pre valve closed
2/20/2012	8:09:59 PM	SiCl4 post valve closed
2/20/2012	8:09:59 PM	Bypass valve closed
2/20/2012	8:09:59 PM	Bubbler valve closed
2/20/2012	8:09:59 PM	Main Vac valve opened
2/20/2012	8:09:59 PM	Helium MFC set to  0.000000
2/20/2012	8:09:59 PM	H2 MFC set to  0.000000
2/20/2012	8:09:59 PM	BCl3 MFC set to  0.000000
2/20/2012	8:09:59 PM	PH3 MFC set to  0.000000
2/20/2012	8:09:59 PM	SiCl4 MFC set to  0.000000
2/20/2012	8:09:59 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	8:09:59 PM	Tube furnace set to 0
2/20/2012	8:10:29 PM	H2 valve closed
2/20/2012	8:10:29 PM	BCl3 valve closed
2/20/2012	8:10:29 PM	PH3 valve closed
2/20/2012	8:10:29 PM	SiCl4 pre valve closed
2/20/2012	8:10:29 PM	SiCl4 post valve closed
2/20/2012	8:10:29 PM	Bypass valve closed
2/20/2012	8:10:29 PM	Bubbler valve closed
2/20/2012	8:10:29 PM	Helium valve opened
2/20/2012	8:10:29 PM	Main Vac valve opened
2/20/2012	8:10:29 PM	Helium MFC set to  20.000000
2/20/2012	8:10:29 PM	H2 MFC set to  0.000000
2/20/2012	8:10:29 PM	BCl3 MFC set to  0.000000
2/20/2012	8:10:29 PM	PH3 MFC set to  0.000000
2/20/2012	8:10:29 PM	SiCl4 MFC set to  0.000000
2/20/2012	8:10:29 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	8:10:30 PM	Tube furnace set to 0
2/20/2012	8:11:00 PM	Helium valve closed
2/20/2012	8:11:00 PM	H2 valve closed
2/20/2012	8:11:00 PM	BCl3 valve closed
2/20/2012	8:11:00 PM	PH3 valve closed
2/20/2012	8:11:00 PM	SiCl4 pre valve closed
2/20/2012	8:11:00 PM	SiCl4 post valve closed
2/20/2012	8:11:00 PM	Bypass valve closed
2/20/2012	8:11:00 PM	Bubbler valve closed
2/20/2012	8:11:00 PM	Main Vac valve opened
2/20/2012	8:11:00 PM	Helium MFC set to  0.000000
2/20/2012	8:11:00 PM	H2 MFC set to  0.000000
2/20/2012	8:11:00 PM	BCl3 MFC set to  0.000000
2/20/2012	8:11:00 PM	PH3 MFC set to  0.000000
2/20/2012	8:11:00 PM	SiCl4 MFC set to  0.000000
2/20/2012	8:11:00 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	8:11:00 PM	Tube furnace set to 0
2/20/2012	8:11:30 PM	H2 valve closed
2/20/2012	8:11:30 PM	BCl3 valve closed
2/20/2012	8:11:30 PM	PH3 valve closed
2/20/2012	8:11:30 PM	SiCl4 pre valve closed
2/20/2012	8:11:30 PM	SiCl4 post valve closed
2/20/2012	8:11:30 PM	Bypass valve closed
2/20/2012	8:11:30 PM	Bubbler valve closed
2/20/2012	8:11:30 PM	Helium valve opened
2/20/2012	8:11:30 PM	Main Vac valve opened
2/20/2012	8:11:30 PM	Helium MFC set to  20.000000
2/20/2012	8:11:30 PM	H2 MFC set to  0.000000
2/20/2012	8:11:30 PM	BCl3 MFC set to  0.000000
2/20/2012	8:11:30 PM	PH3 MFC set to  0.000000
2/20/2012	8:11:30 PM	SiCl4 MFC set to  0.000000
2/20/2012	8:11:30 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	8:11:30 PM	Tube furnace set to 0
2/20/2012	8:12:00 PM	Helium valve closed
2/20/2012	8:12:00 PM	H2 valve closed
2/20/2012	8:12:00 PM	BCl3 valve closed
2/20/2012	8:12:00 PM	PH3 valve closed
2/20/2012	8:12:00 PM	SiCl4 pre valve closed
2/20/2012	8:12:00 PM	SiCl4 post valve closed
2/20/2012	8:12:00 PM	Bypass valve closed
2/20/2012	8:12:00 PM	Bubbler valve closed
2/20/2012	8:12:00 PM	Main Vac valve opened
2/20/2012	8:12:00 PM	Helium MFC set to  0.000000
2/20/2012	8:12:00 PM	H2 MFC set to  0.000000
2/20/2012	8:12:00 PM	BCl3 MFC set to  0.000000
2/20/2012	8:12:00 PM	PH3 MFC set to  0.000000
2/20/2012	8:12:00 PM	SiCl4 MFC set to  0.000000
2/20/2012	8:12:00 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	8:12:00 PM	Tube furnace set to 0
2/20/2012	8:12:30 PM	H2 valve closed
2/20/2012	8:12:30 PM	BCl3 valve closed
2/20/2012	8:12:30 PM	PH3 valve closed
2/20/2012	8:12:30 PM	SiCl4 pre valve closed
2/20/2012	8:12:30 PM	SiCl4 post valve closed
2/20/2012	8:12:30 PM	Bypass valve closed
2/20/2012	8:12:30 PM	Bubbler valve closed
2/20/2012	8:12:30 PM	Helium valve opened
2/20/2012	8:12:30 PM	Main Vac valve opened
2/20/2012	8:12:30 PM	Helium MFC set to  20.000000
2/20/2012	8:12:30 PM	H2 MFC set to  0.000000
2/20/2012	8:12:30 PM	BCl3 MFC set to  0.000000
2/20/2012	8:12:30 PM	PH3 MFC set to  0.000000
2/20/2012	8:12:30 PM	SiCl4 MFC set to  0.000000
2/20/2012	8:12:30 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	8:12:30 PM	Tube furnace set to 0
2/20/2012	8:13:00 PM	Helium valve closed
2/20/2012	8:13:00 PM	H2 valve closed
2/20/2012	8:13:00 PM	BCl3 valve closed
2/20/2012	8:13:00 PM	PH3 valve closed
2/20/2012	8:13:00 PM	SiCl4 pre valve closed
2/20/2012	8:13:00 PM	SiCl4 post valve closed
2/20/2012	8:13:00 PM	Bypass valve closed
2/20/2012	8:13:00 PM	Bubbler valve closed
2/20/2012	8:13:00 PM	Main Vac valve opened
2/20/2012	8:13:00 PM	Helium MFC set to  0.000000
2/20/2012	8:13:00 PM	H2 MFC set to  0.000000
2/20/2012	8:13:00 PM	BCl3 MFC set to  0.000000
2/20/2012	8:13:00 PM	PH3 MFC set to  0.000000
2/20/2012	8:13:00 PM	SiCl4 MFC set to  0.000000
2/20/2012	8:13:00 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	8:13:01 PM	Tube furnace set to 0
2/20/2012	8:13:31 PM	H2 valve closed
2/20/2012	8:13:31 PM	BCl3 valve closed
2/20/2012	8:13:31 PM	PH3 valve closed
2/20/2012	8:13:31 PM	SiCl4 pre valve closed
2/20/2012	8:13:31 PM	SiCl4 post valve closed
2/20/2012	8:13:31 PM	Bypass valve closed
2/20/2012	8:13:31 PM	Bubbler valve closed
2/20/2012	8:13:31 PM	Helium valve opened
2/20/2012	8:13:31 PM	Main Vac valve opened
2/20/2012	8:13:31 PM	Helium MFC set to  20.000000
2/20/2012	8:13:31 PM	H2 MFC set to  0.000000
2/20/2012	8:13:31 PM	BCl3 MFC set to  0.000000
2/20/2012	8:13:31 PM	PH3 MFC set to  0.000000
2/20/2012	8:13:31 PM	SiCl4 MFC set to  0.000000
2/20/2012	8:13:31 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	8:13:31 PM	Tube furnace set to 0
2/20/2012	8:14:01 PM	Helium valve closed
2/20/2012	8:14:01 PM	H2 valve closed
2/20/2012	8:14:01 PM	BCl3 valve closed
2/20/2012	8:14:01 PM	PH3 valve closed
2/20/2012	8:14:01 PM	SiCl4 pre valve closed
2/20/2012	8:14:01 PM	SiCl4 post valve closed
2/20/2012	8:14:01 PM	Bypass valve closed
2/20/2012	8:14:01 PM	Bubbler valve closed
2/20/2012	8:14:01 PM	Main Vac valve opened
2/20/2012	8:14:01 PM	Helium MFC set to  0.000000
2/20/2012	8:14:01 PM	H2 MFC set to  0.000000
2/20/2012	8:14:01 PM	BCl3 MFC set to  0.000000
2/20/2012	8:14:01 PM	PH3 MFC set to  0.000000
2/20/2012	8:14:01 PM	SiCl4 MFC set to  0.000000
2/20/2012	8:14:01 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	8:14:01 PM	Tube furnace set to 0
2/20/2012	8:14:31 PM	H2 valve closed
2/20/2012	8:14:31 PM	BCl3 valve closed
2/20/2012	8:14:31 PM	PH3 valve closed
2/20/2012	8:14:31 PM	SiCl4 pre valve closed
2/20/2012	8:14:31 PM	SiCl4 post valve closed
2/20/2012	8:14:31 PM	Bypass valve closed
2/20/2012	8:14:31 PM	Bubbler valve closed
2/20/2012	8:14:31 PM	Helium valve opened
2/20/2012	8:14:31 PM	Main Vac valve opened
2/20/2012	8:14:31 PM	Helium MFC set to  20.000000
2/20/2012	8:14:31 PM	H2 MFC set to  0.000000
2/20/2012	8:14:31 PM	BCl3 MFC set to  0.000000
2/20/2012	8:14:31 PM	PH3 MFC set to  0.000000
2/20/2012	8:14:31 PM	SiCl4 MFC set to  0.000000
2/20/2012	8:14:31 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	8:14:31 PM	Tube furnace set to 0
2/20/2012	8:15:01 PM	Helium valve closed
2/20/2012	8:15:01 PM	H2 valve closed
2/20/2012	8:15:01 PM	BCl3 valve closed
2/20/2012	8:15:01 PM	PH3 valve closed
2/20/2012	8:15:01 PM	SiCl4 pre valve closed
2/20/2012	8:15:01 PM	SiCl4 post valve closed
2/20/2012	8:15:01 PM	Bypass valve closed
2/20/2012	8:15:01 PM	Bubbler valve closed
2/20/2012	8:15:01 PM	Main Vac valve opened
2/20/2012	8:15:01 PM	Helium MFC set to  0.000000
2/20/2012	8:15:01 PM	H2 MFC set to  0.000000
2/20/2012	8:15:01 PM	BCl3 MFC set to  0.000000
2/20/2012	8:15:01 PM	PH3 MFC set to  0.000000
2/20/2012	8:15:01 PM	SiCl4 MFC set to  0.000000
2/20/2012	8:15:01 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	8:15:01 PM	Tube furnace set to 0
2/20/2012	8:15:31 PM	H2 valve closed
2/20/2012	8:15:31 PM	BCl3 valve closed
2/20/2012	8:15:31 PM	PH3 valve closed
2/20/2012	8:15:31 PM	SiCl4 pre valve closed
2/20/2012	8:15:32 PM	SiCl4 post valve closed
2/20/2012	8:15:32 PM	Bypass valve closed
2/20/2012	8:15:32 PM	Bubbler valve closed
2/20/2012	8:15:32 PM	Helium valve opened
2/20/2012	8:15:32 PM	Main Vac valve opened
2/20/2012	8:15:32 PM	Helium MFC set to  20.000000
2/20/2012	8:15:32 PM	H2 MFC set to  0.000000
2/20/2012	8:15:32 PM	BCl3 MFC set to  0.000000
2/20/2012	8:15:32 PM	PH3 MFC set to  0.000000
2/20/2012	8:15:32 PM	SiCl4 MFC set to  0.000000
2/20/2012	8:15:32 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	8:15:32 PM	Tube furnace set to 0
2/20/2012	8:16:02 PM	Helium valve closed
2/20/2012	8:16:02 PM	H2 valve closed
2/20/2012	8:16:02 PM	BCl3 valve closed
2/20/2012	8:16:02 PM	PH3 valve closed
2/20/2012	8:16:02 PM	SiCl4 pre valve closed
2/20/2012	8:16:02 PM	SiCl4 post valve closed
2/20/2012	8:16:02 PM	Bypass valve closed
2/20/2012	8:16:02 PM	Bubbler valve closed
2/20/2012	8:16:02 PM	Main Vac valve opened
2/20/2012	8:16:02 PM	Helium MFC set to  0.000000
2/20/2012	8:16:02 PM	H2 MFC set to  0.000000
2/20/2012	8:16:02 PM	BCl3 MFC set to  0.000000
2/20/2012	8:16:02 PM	PH3 MFC set to  0.000000
2/20/2012	8:16:02 PM	SiCl4 MFC set to  0.000000
2/20/2012	8:16:02 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	8:16:02 PM	Tube furnace set to 0
2/20/2012	8:16:20 PM	H2 valve closed
2/20/2012	8:16:20 PM	BCl3 valve closed
2/20/2012	8:16:20 PM	PH3 valve closed
2/20/2012	8:16:20 PM	SiCl4 pre valve closed
2/20/2012	8:16:20 PM	SiCl4 post valve closed
2/20/2012	8:16:20 PM	Bypass valve closed
2/20/2012	8:16:20 PM	Bubbler valve closed
2/20/2012	8:16:20 PM	Helium valve opened
2/20/2012	8:16:20 PM	Main Vac valve opened
2/20/2012	8:16:20 PM	Helium MFC set to  20.000000
2/20/2012	8:16:20 PM	H2 MFC set to  0.000000
2/20/2012	8:16:20 PM	BCl3 MFC set to  0.000000
2/20/2012	8:16:20 PM	PH3 MFC set to  0.000000
2/20/2012	8:16:20 PM	SiCl4 MFC set to  0.000000
2/20/2012	8:16:20 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	8:16:20 PM	Tube furnace set to 0
2/20/2012	8:16:20 PM	Helium valve closed
2/20/2012	8:16:20 PM	H2 valve closed
2/20/2012	8:16:20 PM	BCl3 valve closed
2/20/2012	8:16:20 PM	PH3 valve closed
2/20/2012	8:16:20 PM	SiCl4 pre valve closed
2/20/2012	8:16:20 PM	SiCl4 post valve closed
2/20/2012	8:16:20 PM	Bypass valve closed
2/20/2012	8:16:20 PM	Bubbler valve closed
2/20/2012	8:16:20 PM	Main Vac valve opened
2/20/2012	8:16:20 PM	Helium MFC set to  0.000000
2/20/2012	8:16:20 PM	H2 MFC set to  0.000000
2/20/2012	8:16:20 PM	BCl3 MFC set to  0.000000
2/20/2012	8:16:20 PM	PH3 MFC set to  0.000000
2/20/2012	8:16:20 PM	SiCl4 MFC set to  0.000000
2/20/2012	8:16:20 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	8:16:21 PM	Tube furnace set to 0
2/20/2012	8:16:21 PM	H2 valve closed
2/20/2012	8:16:21 PM	BCl3 valve closed
2/20/2012	8:16:21 PM	PH3 valve closed
2/20/2012	8:16:21 PM	SiCl4 pre valve closed
2/20/2012	8:16:21 PM	SiCl4 post valve closed
2/20/2012	8:16:21 PM	Bypass valve closed
2/20/2012	8:16:21 PM	Bubbler valve closed
2/20/2012	8:16:21 PM	Helium valve opened
2/20/2012	8:16:21 PM	Main Vac valve opened
2/20/2012	8:16:21 PM	Helium MFC set to  20.000000
2/20/2012	8:16:21 PM	H2 MFC set to  0.000000
2/20/2012	8:16:21 PM	BCl3 MFC set to  0.000000
2/20/2012	8:16:21 PM	PH3 MFC set to  0.000000
2/20/2012	8:16:21 PM	SiCl4 MFC set to  0.000000
2/20/2012	8:16:21 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	8:16:21 PM	Tube furnace set to 0
2/20/2012	8:16:22 PM	Helium valve closed
2/20/2012	8:16:22 PM	H2 valve closed
2/20/2012	8:16:22 PM	BCl3 valve closed
2/20/2012	8:16:22 PM	PH3 valve closed
2/20/2012	8:16:22 PM	SiCl4 pre valve closed
2/20/2012	8:16:22 PM	SiCl4 post valve closed
2/20/2012	8:16:22 PM	Bypass valve closed
2/20/2012	8:16:22 PM	Bubbler valve closed
2/20/2012	8:16:22 PM	Main Vac valve opened
2/20/2012	8:16:22 PM	Helium MFC set to  0.000000
2/20/2012	8:16:22 PM	H2 MFC set to  0.000000
2/20/2012	8:16:22 PM	BCl3 MFC set to  0.000000
2/20/2012	8:16:22 PM	PH3 MFC set to  0.000000
2/20/2012	8:16:22 PM	SiCl4 MFC set to  0.000000
2/20/2012	8:16:22 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	8:16:22 PM	Tube furnace set to 200
2/20/2012	8:16:22 PM	H2 valve closed
2/20/2012	8:16:22 PM	BCl3 valve closed
2/20/2012	8:16:22 PM	PH3 valve closed
2/20/2012	8:16:22 PM	SiCl4 pre valve closed
2/20/2012	8:16:22 PM	SiCl4 post valve closed
2/20/2012	8:16:22 PM	Bypass valve closed
2/20/2012	8:16:22 PM	Bubbler valve closed
2/20/2012	8:16:22 PM	Helium valve opened
2/20/2012	8:16:22 PM	Main Vac valve opened
2/20/2012	8:16:22 PM	Helium MFC set to  20.000000
2/20/2012	8:16:22 PM	H2 MFC set to  0.000000
2/20/2012	8:16:22 PM	BCl3 MFC set to  0.000000
2/20/2012	8:16:22 PM	PH3 MFC set to  0.000000
2/20/2012	8:16:22 PM	SiCl4 MFC set to  0.000000
2/20/2012	8:16:22 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	8:16:22 PM	Tube furnace set to 200
2/20/2012	8:16:23 PM	Helium valve closed
2/20/2012	8:16:23 PM	H2 valve closed
2/20/2012	8:16:23 PM	BCl3 valve closed
2/20/2012	8:16:23 PM	PH3 valve closed
2/20/2012	8:16:23 PM	SiCl4 pre valve closed
2/20/2012	8:16:23 PM	SiCl4 post valve closed
2/20/2012	8:16:23 PM	Bypass valve closed
2/20/2012	8:16:23 PM	Bubbler valve closed
2/20/2012	8:16:23 PM	Main Vac valve opened
2/20/2012	8:16:23 PM	Helium MFC set to  0.000000
2/20/2012	8:16:23 PM	H2 MFC set to  0.000000
2/20/2012	8:16:23 PM	BCl3 MFC set to  0.000000
2/20/2012	8:16:23 PM	PH3 MFC set to  0.000000
2/20/2012	8:16:23 PM	SiCl4 MFC set to  0.000000
2/20/2012	8:16:23 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	8:16:23 PM	Tube furnace set to 200
2/20/2012	8:16:23 PM	H2 valve closed
2/20/2012	8:16:23 PM	BCl3 valve closed
2/20/2012	8:16:23 PM	PH3 valve closed
2/20/2012	8:16:23 PM	SiCl4 pre valve closed
2/20/2012	8:16:23 PM	SiCl4 post valve closed
2/20/2012	8:16:23 PM	Bypass valve closed
2/20/2012	8:16:23 PM	Bubbler valve closed
2/20/2012	8:16:23 PM	Helium valve opened
2/20/2012	8:16:23 PM	Main Vac valve opened
2/20/2012	8:16:23 PM	Helium MFC set to  20.000000
2/20/2012	8:16:23 PM	H2 MFC set to  0.000000
2/20/2012	8:16:23 PM	BCl3 MFC set to  0.000000
2/20/2012	8:16:23 PM	PH3 MFC set to  0.000000
2/20/2012	8:16:23 PM	SiCl4 MFC set to  0.000000
2/20/2012	8:16:23 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	8:16:24 PM	Tube furnace set to 200
2/20/2012	8:16:24 PM	Helium valve closed
2/20/2012	8:16:24 PM	H2 valve closed
2/20/2012	8:16:24 PM	BCl3 valve closed
2/20/2012	8:16:24 PM	PH3 valve closed
2/20/2012	8:16:24 PM	SiCl4 pre valve closed
2/20/2012	8:16:24 PM	SiCl4 post valve closed
2/20/2012	8:16:24 PM	Bypass valve closed
2/20/2012	8:16:24 PM	Bubbler valve closed
2/20/2012	8:16:24 PM	Main Vac valve opened
2/20/2012	8:16:24 PM	Helium MFC set to  0.000000
2/20/2012	8:16:24 PM	H2 MFC set to  0.000000
2/20/2012	8:16:24 PM	BCl3 MFC set to  0.000000
2/20/2012	8:16:24 PM	PH3 MFC set to  0.000000
2/20/2012	8:16:24 PM	SiCl4 MFC set to  0.000000
2/20/2012	8:16:24 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	8:16:24 PM	Tube furnace set to 200
2/20/2012	8:16:25 PM	H2 valve closed
2/20/2012	8:16:25 PM	BCl3 valve closed
2/20/2012	8:16:25 PM	PH3 valve closed
2/20/2012	8:16:25 PM	SiCl4 pre valve closed
2/20/2012	8:16:25 PM	SiCl4 post valve closed
2/20/2012	8:16:25 PM	Bypass valve closed
2/20/2012	8:16:25 PM	Bubbler valve closed
2/20/2012	8:16:25 PM	Helium valve opened
2/20/2012	8:16:25 PM	Main Vac valve opened
2/20/2012	8:16:25 PM	Helium MFC set to  20.000000
2/20/2012	8:16:25 PM	H2 MFC set to  0.000000
2/20/2012	8:16:25 PM	BCl3 MFC set to  0.000000
2/20/2012	8:16:25 PM	PH3 MFC set to  0.000000
2/20/2012	8:16:25 PM	SiCl4 MFC set to  0.000000
2/20/2012	8:16:25 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	8:16:25 PM	Tube furnace set to 200
2/20/2012	8:16:26 PM	Helium valve closed
2/20/2012	8:16:26 PM	H2 valve closed
2/20/2012	8:16:26 PM	BCl3 valve closed
2/20/2012	8:16:26 PM	PH3 valve closed
2/20/2012	8:16:26 PM	SiCl4 pre valve closed
2/20/2012	8:16:26 PM	SiCl4 post valve closed
2/20/2012	8:16:26 PM	Bypass valve closed
2/20/2012	8:16:26 PM	Bubbler valve closed
2/20/2012	8:16:26 PM	Main Vac valve opened
2/20/2012	8:16:26 PM	Helium MFC set to  0.000000
2/20/2012	8:16:26 PM	H2 MFC set to  0.000000
2/20/2012	8:16:26 PM	BCl3 MFC set to  0.000000
2/20/2012	8:16:26 PM	PH3 MFC set to  0.000000
2/20/2012	8:16:26 PM	SiCl4 MFC set to  0.000000
2/20/2012	8:16:26 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	8:16:26 PM	Tube furnace set to 200
2/20/2012	8:16:28 PM	H2 valve closed
2/20/2012	8:16:28 PM	BCl3 valve closed
2/20/2012	8:16:28 PM	PH3 valve closed
2/20/2012	8:16:28 PM	SiCl4 pre valve closed
2/20/2012	8:16:28 PM	SiCl4 post valve closed
2/20/2012	8:16:28 PM	Bypass valve closed
2/20/2012	8:16:28 PM	Bubbler valve closed
2/20/2012	8:16:28 PM	Helium valve opened
2/20/2012	8:16:28 PM	Main Vac valve opened
2/20/2012	8:16:28 PM	Helium MFC set to  20.000000
2/20/2012	8:16:28 PM	H2 MFC set to  0.000000
2/20/2012	8:16:28 PM	BCl3 MFC set to  0.000000
2/20/2012	8:16:28 PM	PH3 MFC set to  0.000000
2/20/2012	8:16:28 PM	SiCl4 MFC set to  0.000000
2/20/2012	8:16:28 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	8:16:29 PM	Tube furnace set to 200
2/20/2012	8:16:59 PM	Helium valve closed
2/20/2012	8:16:59 PM	H2 valve closed
2/20/2012	8:16:59 PM	BCl3 valve closed
2/20/2012	8:16:59 PM	PH3 valve closed
2/20/2012	8:16:59 PM	SiCl4 pre valve closed
2/20/2012	8:16:59 PM	SiCl4 post valve closed
2/20/2012	8:16:59 PM	Bypass valve closed
2/20/2012	8:16:59 PM	Bubbler valve closed
2/20/2012	8:16:59 PM	Main Vac valve opened
2/20/2012	8:16:59 PM	Helium MFC set to  0.000000
2/20/2012	8:16:59 PM	H2 MFC set to  0.000000
2/20/2012	8:16:59 PM	BCl3 MFC set to  0.000000
2/20/2012	8:16:59 PM	PH3 MFC set to  0.000000
2/20/2012	8:16:59 PM	SiCl4 MFC set to  0.000000
2/20/2012	8:16:59 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	8:16:59 PM	Tube furnace set to 200
2/20/2012	8:17:29 PM	H2 valve closed
2/20/2012	8:17:29 PM	BCl3 valve closed
2/20/2012	8:17:29 PM	PH3 valve closed
2/20/2012	8:17:29 PM	SiCl4 pre valve closed
2/20/2012	8:17:29 PM	SiCl4 post valve closed
2/20/2012	8:17:29 PM	Bypass valve closed
2/20/2012	8:17:29 PM	Bubbler valve closed
2/20/2012	8:17:29 PM	Helium valve opened
2/20/2012	8:17:29 PM	Main Vac valve opened
2/20/2012	8:17:29 PM	Helium MFC set to  20.000000
2/20/2012	8:17:29 PM	H2 MFC set to  0.000000
2/20/2012	8:17:29 PM	BCl3 MFC set to  0.000000
2/20/2012	8:17:29 PM	PH3 MFC set to  0.000000
2/20/2012	8:17:29 PM	SiCl4 MFC set to  0.000000
2/20/2012	8:17:29 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	8:17:29 PM	Tube furnace set to 200
2/20/2012	8:17:59 PM	Helium valve closed
2/20/2012	8:17:59 PM	H2 valve closed
2/20/2012	8:17:59 PM	BCl3 valve closed
2/20/2012	8:17:59 PM	PH3 valve closed
2/20/2012	8:17:59 PM	SiCl4 pre valve closed
2/20/2012	8:17:59 PM	SiCl4 post valve closed
2/20/2012	8:17:59 PM	Bypass valve closed
2/20/2012	8:17:59 PM	Bubbler valve closed
2/20/2012	8:17:59 PM	Main Vac valve opened
2/20/2012	8:17:59 PM	Helium MFC set to  0.000000
2/20/2012	8:17:59 PM	H2 MFC set to  0.000000
2/20/2012	8:17:59 PM	BCl3 MFC set to  0.000000
2/20/2012	8:17:59 PM	PH3 MFC set to  0.000000
2/20/2012	8:17:59 PM	SiCl4 MFC set to  0.000000
2/20/2012	8:17:59 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	8:17:59 PM	Tube furnace set to 200
2/20/2012	8:18:29 PM	H2 valve closed
2/20/2012	8:18:29 PM	BCl3 valve closed
2/20/2012	8:18:29 PM	PH3 valve closed
2/20/2012	8:18:29 PM	SiCl4 pre valve closed
2/20/2012	8:18:29 PM	SiCl4 post valve closed
2/20/2012	8:18:29 PM	Bypass valve closed
2/20/2012	8:18:29 PM	Bubbler valve closed
2/20/2012	8:18:29 PM	Helium valve opened
2/20/2012	8:18:29 PM	Main Vac valve opened
2/20/2012	8:18:29 PM	Helium MFC set to  20.000000
2/20/2012	8:18:29 PM	H2 MFC set to  0.000000
2/20/2012	8:18:29 PM	BCl3 MFC set to  0.000000
2/20/2012	8:18:29 PM	PH3 MFC set to  0.000000
2/20/2012	8:18:29 PM	SiCl4 MFC set to  0.000000
2/20/2012	8:18:29 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	8:18:29 PM	Tube furnace set to 200
2/20/2012	8:19:00 PM	Helium valve closed
2/20/2012	8:19:00 PM	H2 valve closed
2/20/2012	8:19:00 PM	BCl3 valve closed
2/20/2012	8:19:00 PM	PH3 valve closed
2/20/2012	8:19:00 PM	SiCl4 pre valve closed
2/20/2012	8:19:00 PM	SiCl4 post valve closed
2/20/2012	8:19:00 PM	Bypass valve closed
2/20/2012	8:19:00 PM	Bubbler valve closed
2/20/2012	8:19:00 PM	Main Vac valve opened
2/20/2012	8:19:00 PM	Helium MFC set to  0.000000
2/20/2012	8:19:00 PM	H2 MFC set to  0.000000
2/20/2012	8:19:00 PM	BCl3 MFC set to  0.000000
2/20/2012	8:19:00 PM	PH3 MFC set to  0.000000
2/20/2012	8:19:00 PM	SiCl4 MFC set to  0.000000
2/20/2012	8:19:00 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	8:19:00 PM	Tube furnace set to 0
2/20/2012	8:19:01 PM	Run finished at 8:19 PM
2/20/2012	8:25:27 PM	Main Vac valve closed
2/20/2012	8:25:36 PM	Main Vac valve opened
2/20/2012	8:26:18 PM	Recipe started at 8:26 PM
2/20/2012	8:26:18 PM	Helium valve closed
2/20/2012	8:26:18 PM	H2 valve closed
2/20/2012	8:26:18 PM	BCl3 valve closed
2/20/2012	8:26:18 PM	PH3 valve closed
2/20/2012	8:26:18 PM	SiCl4 pre valve closed
2/20/2012	8:26:18 PM	SiCl4 post valve closed
2/20/2012	8:26:18 PM	Main Vac valve closed
2/20/2012	8:26:18 PM	Bypass valve closed
2/20/2012	8:26:18 PM	Bubbler valve closed
2/20/2012	8:26:18 PM	Helium MFC set to  0.000000
2/20/2012	8:26:18 PM	H2 MFC set to  0.000000
2/20/2012	8:26:18 PM	BCl3 MFC set to  0.000000
2/20/2012	8:26:18 PM	PH3 MFC set to  0.000000
2/20/2012	8:26:18 PM	SiCl4 MFC set to  0.000000
2/20/2012	8:26:18 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	8:26:18 PM	Tube furnace set to 0
2/20/2012	8:26:21 PM	Helium valve closed
2/20/2012	8:26:21 PM	BCl3 valve closed
2/20/2012	8:26:21 PM	PH3 valve closed
2/20/2012	8:26:21 PM	SiCl4 pre valve closed
2/20/2012	8:26:21 PM	SiCl4 post valve closed
2/20/2012	8:26:21 PM	Main Vac valve closed
2/20/2012	8:26:21 PM	Bypass valve closed
2/20/2012	8:26:21 PM	Bubbler valve closed
2/20/2012	8:26:21 PM	H2 valve opened
2/20/2012	8:26:21 PM	Helium MFC set to  0.000000
2/20/2012	8:26:21 PM	H2 MFC set to  500.000000
2/20/2012	8:26:21 PM	BCl3 MFC set to  0.000000
2/20/2012	8:26:21 PM	PH3 MFC set to  0.000000
2/20/2012	8:26:21 PM	SiCl4 MFC set to  0.000000
2/20/2012	8:26:21 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	8:26:22 PM	Tube furnace set to 0
2/20/2012	8:27:25 PM	Helium valve closed
2/20/2012	8:27:25 PM	BCl3 valve closed
2/20/2012	8:27:25 PM	PH3 valve closed
2/20/2012	8:27:25 PM	SiCl4 pre valve closed
2/20/2012	8:27:25 PM	SiCl4 post valve closed
2/20/2012	8:27:25 PM	Main Vac valve closed
2/20/2012	8:27:25 PM	Bypass valve closed
2/20/2012	8:27:25 PM	H2 valve opened
2/20/2012	8:27:25 PM	Bubbler valve opened
2/20/2012	8:27:25 PM	Helium MFC set to  0.000000
2/20/2012	8:27:25 PM	H2 MFC set to  500.000000
2/20/2012	8:27:25 PM	BCl3 MFC set to  0.000000
2/20/2012	8:27:25 PM	PH3 MFC set to  0.000000
2/20/2012	8:27:25 PM	SiCl4 MFC set to  0.000000
2/20/2012	8:27:25 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	8:27:25 PM	Tube furnace set to 0
2/20/2012	8:27:26 PM	Helium valve closed
2/20/2012	8:27:26 PM	BCl3 valve closed
2/20/2012	8:27:26 PM	PH3 valve closed
2/20/2012	8:27:26 PM	SiCl4 pre valve closed
2/20/2012	8:27:26 PM	SiCl4 post valve closed
2/20/2012	8:27:26 PM	Main Vac valve closed
2/20/2012	8:27:26 PM	Bypass valve closed
2/20/2012	8:27:26 PM	H2 valve opened
2/20/2012	8:27:26 PM	Bubbler valve opened
2/20/2012	8:27:26 PM	Helium MFC set to  0.000000
2/20/2012	8:27:26 PM	H2 MFC set to  500.000000
2/20/2012	8:27:26 PM	BCl3 MFC set to  0.000000
2/20/2012	8:27:26 PM	PH3 MFC set to  0.000000
2/20/2012	8:27:26 PM	SiCl4 MFC set to  0.000000
2/20/2012	8:27:26 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	8:27:26 PM	Tube furnace set to 1000
2/20/2012	8:47:26 PM	Helium valve closed
2/20/2012	8:47:26 PM	BCl3 valve closed
2/20/2012	8:47:26 PM	Main Vac valve closed
2/20/2012	8:47:26 PM	Bypass valve closed
2/20/2012	8:47:26 PM	H2 valve opened
2/20/2012	8:47:26 PM	PH3 valve opened
2/20/2012	8:47:26 PM	SiCl4 pre valve opened
2/20/2012	8:47:26 PM	SiCl4 post valve opened
2/20/2012	8:47:26 PM	Bubbler valve opened
2/20/2012	8:47:26 PM	Helium MFC set to  0.000000
2/20/2012	8:47:26 PM	H2 MFC set to  500.000000
2/20/2012	8:47:26 PM	BCl3 MFC set to  0.000000
2/20/2012	8:47:26 PM	PH3 MFC set to  0.400000
2/20/2012	8:47:26 PM	SiCl4 MFC set to  50.000000
2/20/2012	8:47:26 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	8:47:26 PM	Tube furnace set to 1000
2/20/2012	9:02:26 PM	Helium valve closed
2/20/2012	9:02:26 PM	BCl3 valve closed
2/20/2012	9:02:26 PM	PH3 valve closed
2/20/2012	9:02:26 PM	SiCl4 pre valve closed
2/20/2012	9:02:26 PM	SiCl4 post valve closed
2/20/2012	9:02:26 PM	Main Vac valve closed
2/20/2012	9:02:26 PM	Bypass valve closed
2/20/2012	9:02:26 PM	H2 valve opened
2/20/2012	9:02:26 PM	Bubbler valve opened
2/20/2012	9:02:26 PM	Helium MFC set to  0.000000
2/20/2012	9:02:26 PM	H2 MFC set to  500.000000
2/20/2012	9:02:26 PM	BCl3 MFC set to  0.000000
2/20/2012	9:02:26 PM	PH3 MFC set to  0.000000
2/20/2012	9:02:26 PM	SiCl4 MFC set to  0.000000
2/20/2012	9:02:26 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	9:02:26 PM	Tube furnace set to 950
2/20/2012	9:04:26 PM	Helium valve closed
2/20/2012	9:04:26 PM	BCl3 valve closed
2/20/2012	9:04:26 PM	PH3 valve closed
2/20/2012	9:04:26 PM	SiCl4 pre valve closed
2/20/2012	9:04:26 PM	SiCl4 post valve closed
2/20/2012	9:04:26 PM	Main Vac valve closed
2/20/2012	9:04:26 PM	Bypass valve closed
2/20/2012	9:04:26 PM	H2 valve opened
2/20/2012	9:04:26 PM	Bubbler valve opened
2/20/2012	9:04:26 PM	Helium MFC set to  0.000000
2/20/2012	9:04:26 PM	H2 MFC set to  500.000000
2/20/2012	9:04:26 PM	BCl3 MFC set to  0.000000
2/20/2012	9:04:26 PM	PH3 MFC set to  0.000000
2/20/2012	9:04:26 PM	SiCl4 MFC set to  0.000000
2/20/2012	9:04:26 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	9:04:27 PM	Tube furnace set to 900
2/20/2012	9:06:27 PM	Helium valve closed
2/20/2012	9:06:27 PM	BCl3 valve closed
2/20/2012	9:06:27 PM	PH3 valve closed
2/20/2012	9:06:27 PM	SiCl4 pre valve closed
2/20/2012	9:06:27 PM	SiCl4 post valve closed
2/20/2012	9:06:27 PM	Main Vac valve closed
2/20/2012	9:06:27 PM	Bypass valve closed
2/20/2012	9:06:27 PM	H2 valve opened
2/20/2012	9:06:27 PM	Bubbler valve opened
2/20/2012	9:06:27 PM	Helium MFC set to  0.000000
2/20/2012	9:06:27 PM	H2 MFC set to  500.000000
2/20/2012	9:06:27 PM	BCl3 MFC set to  0.000000
2/20/2012	9:06:27 PM	PH3 MFC set to  0.000000
2/20/2012	9:06:27 PM	SiCl4 MFC set to  0.000000
2/20/2012	9:06:27 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	9:06:27 PM	Tube furnace set to 850
2/20/2012	9:08:27 PM	H2 valve closed
2/20/2012	9:08:27 PM	BCl3 valve closed
2/20/2012	9:08:27 PM	PH3 valve closed
2/20/2012	9:08:27 PM	SiCl4 pre valve closed
2/20/2012	9:08:27 PM	SiCl4 post valve closed
2/20/2012	9:08:27 PM	Main Vac valve closed
2/20/2012	9:08:27 PM	Bypass valve closed
2/20/2012	9:08:27 PM	Helium valve opened
2/20/2012	9:08:27 PM	Bubbler valve opened
2/20/2012	9:08:27 PM	Helium MFC set to  500.000000
2/20/2012	9:08:27 PM	H2 MFC set to  0.000000
2/20/2012	9:08:27 PM	BCl3 MFC set to  0.000000
2/20/2012	9:08:27 PM	PH3 MFC set to  0.000000
2/20/2012	9:08:27 PM	SiCl4 MFC set to  0.000000
2/20/2012	9:08:27 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	9:08:27 PM	Tube furnace set to 800
2/20/2012	9:10:27 PM	H2 valve closed
2/20/2012	9:10:27 PM	BCl3 valve closed
2/20/2012	9:10:27 PM	PH3 valve closed
2/20/2012	9:10:27 PM	SiCl4 pre valve closed
2/20/2012	9:10:27 PM	SiCl4 post valve closed
2/20/2012	9:10:27 PM	Main Vac valve closed
2/20/2012	9:10:27 PM	Bypass valve closed
2/20/2012	9:10:27 PM	Helium valve opened
2/20/2012	9:10:27 PM	Bubbler valve opened
2/20/2012	9:10:27 PM	Helium MFC set to  500.000000
2/20/2012	9:10:27 PM	H2 MFC set to  0.000000
2/20/2012	9:10:27 PM	BCl3 MFC set to  0.000000
2/20/2012	9:10:27 PM	PH3 MFC set to  0.000000
2/20/2012	9:10:27 PM	SiCl4 MFC set to  0.000000
2/20/2012	9:10:27 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	9:10:27 PM	Tube furnace set to 750
2/20/2012	9:12:27 PM	H2 valve closed
2/20/2012	9:12:27 PM	BCl3 valve closed
2/20/2012	9:12:27 PM	PH3 valve closed
2/20/2012	9:12:27 PM	SiCl4 pre valve closed
2/20/2012	9:12:27 PM	SiCl4 post valve closed
2/20/2012	9:12:27 PM	Main Vac valve closed
2/20/2012	9:12:27 PM	Bypass valve closed
2/20/2012	9:12:27 PM	Helium valve opened
2/20/2012	9:12:27 PM	Bubbler valve opened
2/20/2012	9:12:27 PM	Helium MFC set to  500.000000
2/20/2012	9:12:27 PM	H2 MFC set to  0.000000
2/20/2012	9:12:27 PM	BCl3 MFC set to  0.000000
2/20/2012	9:12:27 PM	PH3 MFC set to  0.000000
2/20/2012	9:12:27 PM	SiCl4 MFC set to  0.000000
2/20/2012	9:12:27 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	9:12:27 PM	Tube furnace set to 0
2/20/2012	9:32:27 PM	Helium valve closed
2/20/2012	9:32:27 PM	H2 valve closed
2/20/2012	9:32:27 PM	BCl3 valve closed
2/20/2012	9:32:27 PM	PH3 valve closed
2/20/2012	9:32:27 PM	SiCl4 pre valve closed
2/20/2012	9:32:27 PM	SiCl4 post valve closed
2/20/2012	9:32:27 PM	Main Vac valve closed
2/20/2012	9:32:27 PM	Bypass valve closed
2/20/2012	9:32:27 PM	Bubbler valve closed
2/20/2012	9:32:27 PM	Helium MFC set to  0.000000
2/20/2012	9:32:27 PM	H2 MFC set to  0.000000
2/20/2012	9:32:27 PM	BCl3 MFC set to  0.000000
2/20/2012	9:32:27 PM	PH3 MFC set to  0.000000
2/20/2012	9:32:27 PM	SiCl4 MFC set to  0.000000
2/20/2012	9:32:27 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	9:32:28 PM	Tube furnace set to 0
2/20/2012	9:32:29 PM	Run finished at 9:32 PM
2/20/2012	9:41:57 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/20/2012	9:41:58 PM	Recipe started at 9:41 PM
2/20/2012	9:41:58 PM	Helium valve closed
2/20/2012	9:41:58 PM	H2 valve closed
2/20/2012	9:41:58 PM	BCl3 valve closed
2/20/2012	9:41:58 PM	PH3 valve closed
2/20/2012	9:41:58 PM	SiCl4 pre valve closed
2/20/2012	9:41:58 PM	SiCl4 post valve closed
2/20/2012	9:41:58 PM	Main Vac valve closed
2/20/2012	9:41:58 PM	Bypass valve closed
2/20/2012	9:41:58 PM	Bubbler valve closed
2/20/2012	9:41:58 PM	Helium MFC set to  0.000000
2/20/2012	9:41:58 PM	H2 MFC set to  0.000000
2/20/2012	9:41:58 PM	BCl3 MFC set to  0.000000
2/20/2012	9:41:58 PM	PH3 MFC set to  0.000000
2/20/2012	9:41:58 PM	SiCl4 MFC set to  0.000000
2/20/2012	9:41:58 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	9:41:58 PM	Tube furnace set to 0
2/20/2012	9:42:02 PM	H2 valve closed
2/20/2012	9:42:02 PM	BCl3 valve closed
2/20/2012	9:42:02 PM	PH3 valve closed
2/20/2012	9:42:02 PM	SiCl4 pre valve closed
2/20/2012	9:42:02 PM	SiCl4 post valve closed
2/20/2012	9:42:02 PM	Main Vac valve closed
2/20/2012	9:42:02 PM	Bypass valve closed
2/20/2012	9:42:02 PM	Bubbler valve closed
2/20/2012	9:42:02 PM	Helium valve opened
2/20/2012	9:42:02 PM	Helium MFC set to  500.000000
2/20/2012	9:42:02 PM	H2 MFC set to  0.000000
2/20/2012	9:42:02 PM	BCl3 MFC set to  0.000000
2/20/2012	9:42:02 PM	PH3 MFC set to  0.000000
2/20/2012	9:42:02 PM	SiCl4 MFC set to  0.000000
2/20/2012	9:42:02 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	9:42:02 PM	Tube furnace set to 0
2/20/2012	9:42:04 PM	Helium valve closed
2/20/2012	9:42:04 PM	H2 valve closed
2/20/2012	9:42:04 PM	BCl3 valve closed
2/20/2012	9:42:05 PM	PH3 valve closed
2/20/2012	9:42:05 PM	SiCl4 pre valve closed
2/20/2012	9:42:05 PM	SiCl4 post valve closed
2/20/2012	9:42:05 PM	Main Vac valve closed
2/20/2012	9:42:05 PM	Bypass valve closed
2/20/2012	9:42:05 PM	Bubbler valve closed
2/20/2012	9:42:05 PM	Helium MFC set to  0.000000
2/20/2012	9:42:05 PM	H2 MFC set to  0.000000
2/20/2012	9:42:05 PM	BCl3 MFC set to  0.000000
2/20/2012	9:42:05 PM	PH3 MFC set to  0.000000
2/20/2012	9:42:05 PM	SiCl4 MFC set to  0.000000
2/20/2012	9:42:05 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	9:42:05 PM	Tube furnace set to 0
2/20/2012	9:42:06 PM	Run finished at 9:42 PM
2/20/2012	9:42:06 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/20/2012	9:44:28 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/20/2012	9:44:29 PM	Recipe started at 9:44 PM
2/20/2012	9:44:29 PM	Helium valve closed
2/20/2012	9:44:29 PM	H2 valve closed
2/20/2012	9:44:29 PM	BCl3 valve closed
2/20/2012	9:44:29 PM	PH3 valve closed
2/20/2012	9:44:29 PM	SiCl4 pre valve closed
2/20/2012	9:44:29 PM	SiCl4 post valve closed
2/20/2012	9:44:29 PM	Main Vac valve closed
2/20/2012	9:44:29 PM	Bubbler valve closed
2/20/2012	9:44:29 PM	Bypass valve opened
2/20/2012	9:44:29 PM	Helium MFC set to  0.000000
2/20/2012	9:44:29 PM	H2 MFC set to  0.000000
2/20/2012	9:44:29 PM	BCl3 MFC set to  0.000000
2/20/2012	9:44:29 PM	PH3 MFC set to  0.000000
2/20/2012	9:44:29 PM	SiCl4 MFC set to  0.000000
2/20/2012	9:44:29 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	9:44:30 PM	Tube furnace set to 0
2/20/2012	9:45:28 PM	Helium valve closed
2/20/2012	9:45:28 PM	H2 valve closed
2/20/2012	9:45:28 PM	BCl3 valve closed
2/20/2012	9:45:28 PM	PH3 valve closed
2/20/2012	9:45:28 PM	SiCl4 pre valve closed
2/20/2012	9:45:28 PM	SiCl4 post valve closed
2/20/2012	9:45:28 PM	Main Vac valve closed
2/20/2012	9:45:28 PM	Bubbler valve closed
2/20/2012	9:45:28 PM	Bypass valve opened
2/20/2012	9:45:28 PM	Helium MFC set to  0.000000
2/20/2012	9:45:28 PM	H2 MFC set to  0.000000
2/20/2012	9:45:28 PM	BCl3 MFC set to  0.000000
2/20/2012	9:45:28 PM	PH3 MFC set to  0.000000
2/20/2012	9:45:28 PM	SiCl4 MFC set to  0.000000
2/20/2012	9:45:28 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	9:45:28 PM	Tube furnace set to 0
2/20/2012	9:46:28 PM	Helium valve closed
2/20/2012	9:46:28 PM	H2 valve closed
2/20/2012	9:46:28 PM	BCl3 valve closed
2/20/2012	9:46:28 PM	PH3 valve closed
2/20/2012	9:46:28 PM	SiCl4 pre valve closed
2/20/2012	9:46:28 PM	SiCl4 post valve closed
2/20/2012	9:46:28 PM	Bypass valve closed
2/20/2012	9:46:28 PM	Bubbler valve closed
2/20/2012	9:46:28 PM	Main Vac valve opened
2/20/2012	9:46:28 PM	Helium MFC set to  0.000000
2/20/2012	9:46:28 PM	H2 MFC set to  0.000000
2/20/2012	9:46:28 PM	BCl3 MFC set to  0.000000
2/20/2012	9:46:28 PM	PH3 MFC set to  0.000000
2/20/2012	9:46:28 PM	SiCl4 MFC set to  0.000000
2/20/2012	9:46:28 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	9:46:28 PM	Tube furnace set to 0
2/20/2012	9:46:29 PM	Run finished at 9:46 PM
2/20/2012	9:46:29 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/20/2012	9:48:42 PM	Recipe started at 9:48 PM
2/20/2012	9:48:42 PM	Helium valve closed
2/20/2012	9:48:42 PM	H2 valve closed
2/20/2012	9:48:42 PM	BCl3 valve closed
2/20/2012	9:48:42 PM	PH3 valve closed
2/20/2012	9:48:42 PM	SiCl4 pre valve closed
2/20/2012	9:48:42 PM	SiCl4 post valve closed
2/20/2012	9:48:42 PM	Bypass valve closed
2/20/2012	9:48:42 PM	Bubbler valve closed
2/20/2012	9:48:42 PM	Main Vac valve opened
2/20/2012	9:48:42 PM	Helium MFC set to  0.000000
2/20/2012	9:48:42 PM	H2 MFC set to  0.000000
2/20/2012	9:48:42 PM	BCl3 MFC set to  0.000000
2/20/2012	9:48:42 PM	PH3 MFC set to  0.000000
2/20/2012	9:48:42 PM	SiCl4 MFC set to  0.000000
2/20/2012	9:48:42 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	9:48:43 PM	Tube furnace set to 0
2/20/2012	9:49:13 PM	H2 valve closed
2/20/2012	9:49:13 PM	BCl3 valve closed
2/20/2012	9:49:13 PM	PH3 valve closed
2/20/2012	9:49:13 PM	SiCl4 pre valve closed
2/20/2012	9:49:13 PM	SiCl4 post valve closed
2/20/2012	9:49:13 PM	Bypass valve closed
2/20/2012	9:49:13 PM	Bubbler valve closed
2/20/2012	9:49:13 PM	Helium valve opened
2/20/2012	9:49:13 PM	Main Vac valve opened
2/20/2012	9:49:13 PM	Helium MFC set to  20.000000
2/20/2012	9:49:13 PM	H2 MFC set to  0.000000
2/20/2012	9:49:13 PM	BCl3 MFC set to  0.000000
2/20/2012	9:49:13 PM	PH3 MFC set to  0.000000
2/20/2012	9:49:13 PM	SiCl4 MFC set to  0.000000
2/20/2012	9:49:13 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	9:49:13 PM	Tube furnace set to 0
2/20/2012	9:49:43 PM	Helium valve closed
2/20/2012	9:49:43 PM	H2 valve closed
2/20/2012	9:49:43 PM	BCl3 valve closed
2/20/2012	9:49:43 PM	PH3 valve closed
2/20/2012	9:49:43 PM	SiCl4 pre valve closed
2/20/2012	9:49:43 PM	SiCl4 post valve closed
2/20/2012	9:49:43 PM	Bypass valve closed
2/20/2012	9:49:43 PM	Bubbler valve closed
2/20/2012	9:49:43 PM	Main Vac valve opened
2/20/2012	9:49:43 PM	Helium MFC set to  0.000000
2/20/2012	9:49:43 PM	H2 MFC set to  0.000000
2/20/2012	9:49:43 PM	BCl3 MFC set to  0.000000
2/20/2012	9:49:43 PM	PH3 MFC set to  0.000000
2/20/2012	9:49:43 PM	SiCl4 MFC set to  0.000000
2/20/2012	9:49:43 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	9:49:43 PM	Tube furnace set to 0
2/20/2012	9:50:13 PM	H2 valve closed
2/20/2012	9:50:13 PM	BCl3 valve closed
2/20/2012	9:50:13 PM	PH3 valve closed
2/20/2012	9:50:13 PM	SiCl4 pre valve closed
2/20/2012	9:50:13 PM	SiCl4 post valve closed
2/20/2012	9:50:13 PM	Bypass valve closed
2/20/2012	9:50:13 PM	Bubbler valve closed
2/20/2012	9:50:13 PM	Helium valve opened
2/20/2012	9:50:13 PM	Main Vac valve opened
2/20/2012	9:50:13 PM	Helium MFC set to  20.000000
2/20/2012	9:50:13 PM	H2 MFC set to  0.000000
2/20/2012	9:50:13 PM	BCl3 MFC set to  0.000000
2/20/2012	9:50:13 PM	PH3 MFC set to  0.000000
2/20/2012	9:50:13 PM	SiCl4 MFC set to  0.000000
2/20/2012	9:50:13 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	9:50:13 PM	Tube furnace set to 0
2/20/2012	9:50:43 PM	Helium valve closed
2/20/2012	9:50:43 PM	H2 valve closed
2/20/2012	9:50:43 PM	BCl3 valve closed
2/20/2012	9:50:43 PM	PH3 valve closed
2/20/2012	9:50:43 PM	SiCl4 pre valve closed
2/20/2012	9:50:43 PM	SiCl4 post valve closed
2/20/2012	9:50:43 PM	Bypass valve closed
2/20/2012	9:50:43 PM	Bubbler valve closed
2/20/2012	9:50:43 PM	Main Vac valve opened
2/20/2012	9:50:43 PM	Helium MFC set to  0.000000
2/20/2012	9:50:43 PM	H2 MFC set to  0.000000
2/20/2012	9:50:43 PM	BCl3 MFC set to  0.000000
2/20/2012	9:50:43 PM	PH3 MFC set to  0.000000
2/20/2012	9:50:43 PM	SiCl4 MFC set to  0.000000
2/20/2012	9:50:43 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	9:50:43 PM	Tube furnace set to 0
2/20/2012	9:51:13 PM	H2 valve closed
2/20/2012	9:51:13 PM	BCl3 valve closed
2/20/2012	9:51:13 PM	PH3 valve closed
2/20/2012	9:51:13 PM	SiCl4 pre valve closed
2/20/2012	9:51:13 PM	SiCl4 post valve closed
2/20/2012	9:51:13 PM	Bypass valve closed
2/20/2012	9:51:13 PM	Bubbler valve closed
2/20/2012	9:51:13 PM	Helium valve opened
2/20/2012	9:51:13 PM	Main Vac valve opened
2/20/2012	9:51:13 PM	Helium MFC set to  20.000000
2/20/2012	9:51:13 PM	H2 MFC set to  0.000000
2/20/2012	9:51:13 PM	BCl3 MFC set to  0.000000
2/20/2012	9:51:13 PM	PH3 MFC set to  0.000000
2/20/2012	9:51:13 PM	SiCl4 MFC set to  0.000000
2/20/2012	9:51:13 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	9:51:14 PM	Tube furnace set to 0
2/20/2012	9:51:44 PM	Helium valve closed
2/20/2012	9:51:44 PM	H2 valve closed
2/20/2012	9:51:44 PM	BCl3 valve closed
2/20/2012	9:51:44 PM	PH3 valve closed
2/20/2012	9:51:44 PM	SiCl4 pre valve closed
2/20/2012	9:51:44 PM	SiCl4 post valve closed
2/20/2012	9:51:44 PM	Bypass valve closed
2/20/2012	9:51:44 PM	Bubbler valve closed
2/20/2012	9:51:44 PM	Main Vac valve opened
2/20/2012	9:51:44 PM	Helium MFC set to  0.000000
2/20/2012	9:51:44 PM	H2 MFC set to  0.000000
2/20/2012	9:51:44 PM	BCl3 MFC set to  0.000000
2/20/2012	9:51:44 PM	PH3 MFC set to  0.000000
2/20/2012	9:51:44 PM	SiCl4 MFC set to  0.000000
2/20/2012	9:51:44 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	9:51:44 PM	Tube furnace set to 0
2/20/2012	9:52:14 PM	H2 valve closed
2/20/2012	9:52:14 PM	BCl3 valve closed
2/20/2012	9:52:14 PM	PH3 valve closed
2/20/2012	9:52:14 PM	SiCl4 pre valve closed
2/20/2012	9:52:14 PM	SiCl4 post valve closed
2/20/2012	9:52:14 PM	Bypass valve closed
2/20/2012	9:52:14 PM	Bubbler valve closed
2/20/2012	9:52:14 PM	Helium valve opened
2/20/2012	9:52:14 PM	Main Vac valve opened
2/20/2012	9:52:14 PM	Helium MFC set to  20.000000
2/20/2012	9:52:14 PM	H2 MFC set to  0.000000
2/20/2012	9:52:14 PM	BCl3 MFC set to  0.000000
2/20/2012	9:52:14 PM	PH3 MFC set to  0.000000
2/20/2012	9:52:14 PM	SiCl4 MFC set to  0.000000
2/20/2012	9:52:14 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	9:52:14 PM	Tube furnace set to 0
2/20/2012	9:52:44 PM	Helium valve closed
2/20/2012	9:52:44 PM	H2 valve closed
2/20/2012	9:52:44 PM	BCl3 valve closed
2/20/2012	9:52:44 PM	PH3 valve closed
2/20/2012	9:52:44 PM	SiCl4 pre valve closed
2/20/2012	9:52:44 PM	SiCl4 post valve closed
2/20/2012	9:52:44 PM	Bypass valve closed
2/20/2012	9:52:44 PM	Bubbler valve closed
2/20/2012	9:52:44 PM	Main Vac valve opened
2/20/2012	9:52:44 PM	Helium MFC set to  0.000000
2/20/2012	9:52:44 PM	H2 MFC set to  0.000000
2/20/2012	9:52:44 PM	BCl3 MFC set to  0.000000
2/20/2012	9:52:44 PM	PH3 MFC set to  0.000000
2/20/2012	9:52:44 PM	SiCl4 MFC set to  0.000000
2/20/2012	9:52:44 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	9:52:44 PM	Tube furnace set to 0
2/20/2012	9:53:14 PM	H2 valve closed
2/20/2012	9:53:14 PM	BCl3 valve closed
2/20/2012	9:53:14 PM	PH3 valve closed
2/20/2012	9:53:14 PM	SiCl4 pre valve closed
2/20/2012	9:53:14 PM	SiCl4 post valve closed
2/20/2012	9:53:14 PM	Bypass valve closed
2/20/2012	9:53:14 PM	Bubbler valve closed
2/20/2012	9:53:14 PM	Helium valve opened
2/20/2012	9:53:14 PM	Main Vac valve opened
2/20/2012	9:53:14 PM	Helium MFC set to  20.000000
2/20/2012	9:53:14 PM	H2 MFC set to  0.000000
2/20/2012	9:53:14 PM	BCl3 MFC set to  0.000000
2/20/2012	9:53:14 PM	PH3 MFC set to  0.000000
2/20/2012	9:53:14 PM	SiCl4 MFC set to  0.000000
2/20/2012	9:53:14 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	9:53:14 PM	Tube furnace set to 0
2/20/2012	9:53:44 PM	Helium valve closed
2/20/2012	9:53:44 PM	H2 valve closed
2/20/2012	9:53:44 PM	BCl3 valve closed
2/20/2012	9:53:44 PM	PH3 valve closed
2/20/2012	9:53:44 PM	SiCl4 pre valve closed
2/20/2012	9:53:44 PM	SiCl4 post valve closed
2/20/2012	9:53:44 PM	Bypass valve closed
2/20/2012	9:53:44 PM	Bubbler valve closed
2/20/2012	9:53:44 PM	Main Vac valve opened
2/20/2012	9:53:44 PM	Helium MFC set to  0.000000
2/20/2012	9:53:44 PM	H2 MFC set to  0.000000
2/20/2012	9:53:44 PM	BCl3 MFC set to  0.000000
2/20/2012	9:53:44 PM	PH3 MFC set to  0.000000
2/20/2012	9:53:44 PM	SiCl4 MFC set to  0.000000
2/20/2012	9:53:44 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	9:53:45 PM	Tube furnace set to 0
2/20/2012	9:54:15 PM	H2 valve closed
2/20/2012	9:54:15 PM	BCl3 valve closed
2/20/2012	9:54:15 PM	PH3 valve closed
2/20/2012	9:54:15 PM	SiCl4 pre valve closed
2/20/2012	9:54:15 PM	SiCl4 post valve closed
2/20/2012	9:54:15 PM	Bypass valve closed
2/20/2012	9:54:15 PM	Bubbler valve closed
2/20/2012	9:54:15 PM	Helium valve opened
2/20/2012	9:54:15 PM	Main Vac valve opened
2/20/2012	9:54:15 PM	Helium MFC set to  20.000000
2/20/2012	9:54:15 PM	H2 MFC set to  0.000000
2/20/2012	9:54:15 PM	BCl3 MFC set to  0.000000
2/20/2012	9:54:15 PM	PH3 MFC set to  0.000000
2/20/2012	9:54:15 PM	SiCl4 MFC set to  0.000000
2/20/2012	9:54:15 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	9:54:15 PM	Tube furnace set to 0
2/20/2012	9:54:45 PM	Helium valve closed
2/20/2012	9:54:45 PM	H2 valve closed
2/20/2012	9:54:45 PM	BCl3 valve closed
2/20/2012	9:54:45 PM	PH3 valve closed
2/20/2012	9:54:45 PM	SiCl4 pre valve closed
2/20/2012	9:54:45 PM	SiCl4 post valve closed
2/20/2012	9:54:45 PM	Bypass valve closed
2/20/2012	9:54:45 PM	Bubbler valve closed
2/20/2012	9:54:45 PM	Main Vac valve opened
2/20/2012	9:54:45 PM	Helium MFC set to  0.000000
2/20/2012	9:54:45 PM	H2 MFC set to  0.000000
2/20/2012	9:54:45 PM	BCl3 MFC set to  0.000000
2/20/2012	9:54:45 PM	PH3 MFC set to  0.000000
2/20/2012	9:54:45 PM	SiCl4 MFC set to  0.000000
2/20/2012	9:54:45 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	9:54:45 PM	Tube furnace set to 0
2/20/2012	9:55:15 PM	H2 valve closed
2/20/2012	9:55:15 PM	BCl3 valve closed
2/20/2012	9:55:15 PM	PH3 valve closed
2/20/2012	9:55:15 PM	SiCl4 pre valve closed
2/20/2012	9:55:15 PM	SiCl4 post valve closed
2/20/2012	9:55:15 PM	Bypass valve closed
2/20/2012	9:55:15 PM	Bubbler valve closed
2/20/2012	9:55:15 PM	Helium valve opened
2/20/2012	9:55:15 PM	Main Vac valve opened
2/20/2012	9:55:15 PM	Helium MFC set to  20.000000
2/20/2012	9:55:15 PM	H2 MFC set to  0.000000
2/20/2012	9:55:15 PM	BCl3 MFC set to  0.000000
2/20/2012	9:55:15 PM	PH3 MFC set to  0.000000
2/20/2012	9:55:15 PM	SiCl4 MFC set to  0.000000
2/20/2012	9:55:15 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	9:55:15 PM	Tube furnace set to 0
2/20/2012	9:55:45 PM	Helium valve closed
2/20/2012	9:55:45 PM	H2 valve closed
2/20/2012	9:55:45 PM	BCl3 valve closed
2/20/2012	9:55:45 PM	PH3 valve closed
2/20/2012	9:55:45 PM	SiCl4 pre valve closed
2/20/2012	9:55:45 PM	SiCl4 post valve closed
2/20/2012	9:55:45 PM	Bypass valve closed
2/20/2012	9:55:45 PM	Bubbler valve closed
2/20/2012	9:55:45 PM	Main Vac valve opened
2/20/2012	9:55:45 PM	Helium MFC set to  0.000000
2/20/2012	9:55:45 PM	H2 MFC set to  0.000000
2/20/2012	9:55:45 PM	BCl3 MFC set to  0.000000
2/20/2012	9:55:45 PM	PH3 MFC set to  0.000000
2/20/2012	9:55:45 PM	SiCl4 MFC set to  0.000000
2/20/2012	9:55:45 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	9:55:45 PM	Tube furnace set to 0
2/20/2012	9:56:15 PM	H2 valve closed
2/20/2012	9:56:15 PM	BCl3 valve closed
2/20/2012	9:56:15 PM	PH3 valve closed
2/20/2012	9:56:15 PM	SiCl4 pre valve closed
2/20/2012	9:56:15 PM	SiCl4 post valve closed
2/20/2012	9:56:15 PM	Bypass valve closed
2/20/2012	9:56:15 PM	Bubbler valve closed
2/20/2012	9:56:15 PM	Helium valve opened
2/20/2012	9:56:16 PM	Main Vac valve opened
2/20/2012	9:56:16 PM	Helium MFC set to  20.000000
2/20/2012	9:56:16 PM	H2 MFC set to  0.000000
2/20/2012	9:56:16 PM	BCl3 MFC set to  0.000000
2/20/2012	9:56:16 PM	PH3 MFC set to  0.000000
2/20/2012	9:56:16 PM	SiCl4 MFC set to  0.000000
2/20/2012	9:56:16 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	9:56:16 PM	Tube furnace set to 0
2/20/2012	9:56:46 PM	Helium valve closed
2/20/2012	9:56:46 PM	H2 valve closed
2/20/2012	9:56:46 PM	BCl3 valve closed
2/20/2012	9:56:46 PM	PH3 valve closed
2/20/2012	9:56:46 PM	SiCl4 pre valve closed
2/20/2012	9:56:46 PM	SiCl4 post valve closed
2/20/2012	9:56:46 PM	Bypass valve closed
2/20/2012	9:56:46 PM	Bubbler valve closed
2/20/2012	9:56:46 PM	Main Vac valve opened
2/20/2012	9:56:46 PM	Helium MFC set to  0.000000
2/20/2012	9:56:46 PM	H2 MFC set to  0.000000
2/20/2012	9:56:46 PM	BCl3 MFC set to  0.000000
2/20/2012	9:56:46 PM	PH3 MFC set to  0.000000
2/20/2012	9:56:46 PM	SiCl4 MFC set to  0.000000
2/20/2012	9:56:46 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	9:56:46 PM	Tube furnace set to 0
2/20/2012	9:57:16 PM	H2 valve closed
2/20/2012	9:57:16 PM	BCl3 valve closed
2/20/2012	9:57:16 PM	PH3 valve closed
2/20/2012	9:57:16 PM	SiCl4 pre valve closed
2/20/2012	9:57:16 PM	SiCl4 post valve closed
2/20/2012	9:57:16 PM	Bypass valve closed
2/20/2012	9:57:16 PM	Bubbler valve closed
2/20/2012	9:57:16 PM	Helium valve opened
2/20/2012	9:57:16 PM	Main Vac valve opened
2/20/2012	9:57:16 PM	Helium MFC set to  20.000000
2/20/2012	9:57:16 PM	H2 MFC set to  0.000000
2/20/2012	9:57:16 PM	BCl3 MFC set to  0.000000
2/20/2012	9:57:16 PM	PH3 MFC set to  0.000000
2/20/2012	9:57:16 PM	SiCl4 MFC set to  0.000000
2/20/2012	9:57:16 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	9:57:16 PM	Tube furnace set to 0
2/20/2012	9:57:46 PM	Helium valve closed
2/20/2012	9:57:46 PM	H2 valve closed
2/20/2012	9:57:46 PM	BCl3 valve closed
2/20/2012	9:57:46 PM	PH3 valve closed
2/20/2012	9:57:46 PM	SiCl4 pre valve closed
2/20/2012	9:57:46 PM	SiCl4 post valve closed
2/20/2012	9:57:46 PM	Bypass valve closed
2/20/2012	9:57:46 PM	Bubbler valve closed
2/20/2012	9:57:46 PM	Main Vac valve opened
2/20/2012	9:57:46 PM	Helium MFC set to  0.000000
2/20/2012	9:57:46 PM	H2 MFC set to  0.000000
2/20/2012	9:57:46 PM	BCl3 MFC set to  0.000000
2/20/2012	9:57:46 PM	PH3 MFC set to  0.000000
2/20/2012	9:57:46 PM	SiCl4 MFC set to  0.000000
2/20/2012	9:57:46 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	9:57:46 PM	Tube furnace set to 200
2/20/2012	9:58:16 PM	H2 valve closed
2/20/2012	9:58:16 PM	BCl3 valve closed
2/20/2012	9:58:16 PM	PH3 valve closed
2/20/2012	9:58:16 PM	SiCl4 pre valve closed
2/20/2012	9:58:16 PM	SiCl4 post valve closed
2/20/2012	9:58:16 PM	Bypass valve closed
2/20/2012	9:58:16 PM	Bubbler valve closed
2/20/2012	9:58:16 PM	Helium valve opened
2/20/2012	9:58:16 PM	Main Vac valve opened
2/20/2012	9:58:16 PM	Helium MFC set to  20.000000
2/20/2012	9:58:16 PM	H2 MFC set to  0.000000
2/20/2012	9:58:16 PM	BCl3 MFC set to  0.000000
2/20/2012	9:58:16 PM	PH3 MFC set to  0.000000
2/20/2012	9:58:16 PM	SiCl4 MFC set to  0.000000
2/20/2012	9:58:16 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	9:58:16 PM	Tube furnace set to 200
2/20/2012	9:58:47 PM	Helium valve closed
2/20/2012	9:58:47 PM	H2 valve closed
2/20/2012	9:58:47 PM	BCl3 valve closed
2/20/2012	9:58:47 PM	PH3 valve closed
2/20/2012	9:58:47 PM	SiCl4 pre valve closed
2/20/2012	9:58:47 PM	SiCl4 post valve closed
2/20/2012	9:58:47 PM	Bypass valve closed
2/20/2012	9:58:47 PM	Bubbler valve closed
2/20/2012	9:58:47 PM	Main Vac valve opened
2/20/2012	9:58:47 PM	Helium MFC set to  0.000000
2/20/2012	9:58:47 PM	H2 MFC set to  0.000000
2/20/2012	9:58:47 PM	BCl3 MFC set to  0.000000
2/20/2012	9:58:47 PM	PH3 MFC set to  0.000000
2/20/2012	9:58:47 PM	SiCl4 MFC set to  0.000000
2/20/2012	9:58:47 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	9:58:47 PM	Tube furnace set to 200
2/20/2012	9:59:17 PM	H2 valve closed
2/20/2012	9:59:17 PM	BCl3 valve closed
2/20/2012	9:59:17 PM	PH3 valve closed
2/20/2012	9:59:17 PM	SiCl4 pre valve closed
2/20/2012	9:59:17 PM	SiCl4 post valve closed
2/20/2012	9:59:17 PM	Bypass valve closed
2/20/2012	9:59:17 PM	Bubbler valve closed
2/20/2012	9:59:17 PM	Helium valve opened
2/20/2012	9:59:17 PM	Main Vac valve opened
2/20/2012	9:59:17 PM	Helium MFC set to  20.000000
2/20/2012	9:59:17 PM	H2 MFC set to  0.000000
2/20/2012	9:59:17 PM	BCl3 MFC set to  0.000000
2/20/2012	9:59:17 PM	PH3 MFC set to  0.000000
2/20/2012	9:59:17 PM	SiCl4 MFC set to  0.000000
2/20/2012	9:59:17 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	9:59:17 PM	Tube furnace set to 200
2/20/2012	9:59:47 PM	Helium valve closed
2/20/2012	9:59:47 PM	H2 valve closed
2/20/2012	9:59:47 PM	BCl3 valve closed
2/20/2012	9:59:47 PM	PH3 valve closed
2/20/2012	9:59:47 PM	SiCl4 pre valve closed
2/20/2012	9:59:47 PM	SiCl4 post valve closed
2/20/2012	9:59:47 PM	Bypass valve closed
2/20/2012	9:59:47 PM	Bubbler valve closed
2/20/2012	9:59:47 PM	Main Vac valve opened
2/20/2012	9:59:47 PM	Helium MFC set to  0.000000
2/20/2012	9:59:47 PM	H2 MFC set to  0.000000
2/20/2012	9:59:47 PM	BCl3 MFC set to  0.000000
2/20/2012	9:59:47 PM	PH3 MFC set to  0.000000
2/20/2012	9:59:47 PM	SiCl4 MFC set to  0.000000
2/20/2012	9:59:47 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	9:59:47 PM	Tube furnace set to 200
2/20/2012	10:00:17 PM	H2 valve closed
2/20/2012	10:00:17 PM	BCl3 valve closed
2/20/2012	10:00:17 PM	PH3 valve closed
2/20/2012	10:00:17 PM	SiCl4 pre valve closed
2/20/2012	10:00:17 PM	SiCl4 post valve closed
2/20/2012	10:00:17 PM	Bypass valve closed
2/20/2012	10:00:17 PM	Bubbler valve closed
2/20/2012	10:00:17 PM	Helium valve opened
2/20/2012	10:00:17 PM	Main Vac valve opened
2/20/2012	10:00:17 PM	Helium MFC set to  20.000000
2/20/2012	10:00:17 PM	H2 MFC set to  0.000000
2/20/2012	10:00:17 PM	BCl3 MFC set to  0.000000
2/20/2012	10:00:17 PM	PH3 MFC set to  0.000000
2/20/2012	10:00:17 PM	SiCl4 MFC set to  0.000000
2/20/2012	10:00:17 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	10:00:17 PM	Tube furnace set to 200
2/20/2012	10:00:47 PM	Helium valve closed
2/20/2012	10:00:47 PM	H2 valve closed
2/20/2012	10:00:47 PM	BCl3 valve closed
2/20/2012	10:00:47 PM	PH3 valve closed
2/20/2012	10:00:47 PM	SiCl4 pre valve closed
2/20/2012	10:00:47 PM	SiCl4 post valve closed
2/20/2012	10:00:47 PM	Bypass valve closed
2/20/2012	10:00:47 PM	Bubbler valve closed
2/20/2012	10:00:47 PM	Main Vac valve opened
2/20/2012	10:00:47 PM	Helium MFC set to  0.000000
2/20/2012	10:00:47 PM	H2 MFC set to  0.000000
2/20/2012	10:00:47 PM	BCl3 MFC set to  0.000000
2/20/2012	10:00:47 PM	PH3 MFC set to  0.000000
2/20/2012	10:00:47 PM	SiCl4 MFC set to  0.000000
2/20/2012	10:00:47 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	10:00:48 PM	Tube furnace set to 200
2/20/2012	10:01:18 PM	H2 valve closed
2/20/2012	10:01:18 PM	BCl3 valve closed
2/20/2012	10:01:18 PM	PH3 valve closed
2/20/2012	10:01:18 PM	SiCl4 pre valve closed
2/20/2012	10:01:18 PM	SiCl4 post valve closed
2/20/2012	10:01:18 PM	Bypass valve closed
2/20/2012	10:01:18 PM	Bubbler valve closed
2/20/2012	10:01:18 PM	Helium valve opened
2/20/2012	10:01:18 PM	Main Vac valve opened
2/20/2012	10:01:18 PM	Helium MFC set to  20.000000
2/20/2012	10:01:18 PM	H2 MFC set to  0.000000
2/20/2012	10:01:18 PM	BCl3 MFC set to  0.000000
2/20/2012	10:01:18 PM	PH3 MFC set to  0.000000
2/20/2012	10:01:18 PM	SiCl4 MFC set to  0.000000
2/20/2012	10:01:18 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	10:01:18 PM	Tube furnace set to 200
2/20/2012	10:01:48 PM	Helium valve closed
2/20/2012	10:01:48 PM	H2 valve closed
2/20/2012	10:01:48 PM	BCl3 valve closed
2/20/2012	10:01:48 PM	PH3 valve closed
2/20/2012	10:01:48 PM	SiCl4 pre valve closed
2/20/2012	10:01:48 PM	SiCl4 post valve closed
2/20/2012	10:01:48 PM	Bypass valve closed
2/20/2012	10:01:48 PM	Bubbler valve closed
2/20/2012	10:01:48 PM	Main Vac valve opened
2/20/2012	10:01:48 PM	Helium MFC set to  0.000000
2/20/2012	10:01:48 PM	H2 MFC set to  0.000000
2/20/2012	10:01:48 PM	BCl3 MFC set to  0.000000
2/20/2012	10:01:48 PM	PH3 MFC set to  0.000000
2/20/2012	10:01:48 PM	SiCl4 MFC set to  0.000000
2/20/2012	10:01:48 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	10:01:48 PM	Tube furnace set to 200
2/20/2012	10:02:18 PM	H2 valve closed
2/20/2012	10:02:18 PM	BCl3 valve closed
2/20/2012	10:02:18 PM	PH3 valve closed
2/20/2012	10:02:18 PM	SiCl4 pre valve closed
2/20/2012	10:02:18 PM	SiCl4 post valve closed
2/20/2012	10:02:18 PM	Bypass valve closed
2/20/2012	10:02:18 PM	Bubbler valve closed
2/20/2012	10:02:18 PM	Helium valve opened
2/20/2012	10:02:18 PM	Main Vac valve opened
2/20/2012	10:02:18 PM	Helium MFC set to  20.000000
2/20/2012	10:02:18 PM	H2 MFC set to  0.000000
2/20/2012	10:02:18 PM	BCl3 MFC set to  0.000000
2/20/2012	10:02:18 PM	PH3 MFC set to  0.000000
2/20/2012	10:02:18 PM	SiCl4 MFC set to  0.000000
2/20/2012	10:02:18 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	10:02:18 PM	Tube furnace set to 200
2/20/2012	10:02:48 PM	Helium valve closed
2/20/2012	10:02:48 PM	H2 valve closed
2/20/2012	10:02:48 PM	BCl3 valve closed
2/20/2012	10:02:48 PM	PH3 valve closed
2/20/2012	10:02:48 PM	SiCl4 pre valve closed
2/20/2012	10:02:48 PM	SiCl4 post valve closed
2/20/2012	10:02:48 PM	Bypass valve closed
2/20/2012	10:02:48 PM	Bubbler valve closed
2/20/2012	10:02:48 PM	Main Vac valve opened
2/20/2012	10:02:48 PM	Helium MFC set to  0.000000
2/20/2012	10:02:48 PM	H2 MFC set to  0.000000
2/20/2012	10:02:48 PM	BCl3 MFC set to  0.000000
2/20/2012	10:02:48 PM	PH3 MFC set to  0.000000
2/20/2012	10:02:48 PM	SiCl4 MFC set to  0.000000
2/20/2012	10:02:48 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	10:02:48 PM	Tube furnace set to 200
2/20/2012	10:03:18 PM	H2 valve closed
2/20/2012	10:03:18 PM	BCl3 valve closed
2/20/2012	10:03:18 PM	PH3 valve closed
2/20/2012	10:03:18 PM	SiCl4 pre valve closed
2/20/2012	10:03:18 PM	SiCl4 post valve closed
2/20/2012	10:03:18 PM	Bypass valve closed
2/20/2012	10:03:18 PM	Bubbler valve closed
2/20/2012	10:03:18 PM	Helium valve opened
2/20/2012	10:03:18 PM	Main Vac valve opened
2/20/2012	10:03:18 PM	Helium MFC set to  20.000000
2/20/2012	10:03:18 PM	H2 MFC set to  0.000000
2/20/2012	10:03:18 PM	BCl3 MFC set to  0.000000
2/20/2012	10:03:18 PM	PH3 MFC set to  0.000000
2/20/2012	10:03:18 PM	SiCl4 MFC set to  0.000000
2/20/2012	10:03:18 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	10:03:19 PM	Tube furnace set to 200
2/20/2012	10:03:49 PM	Helium valve closed
2/20/2012	10:03:49 PM	H2 valve closed
2/20/2012	10:03:49 PM	BCl3 valve closed
2/20/2012	10:03:49 PM	PH3 valve closed
2/20/2012	10:03:49 PM	SiCl4 pre valve closed
2/20/2012	10:03:49 PM	SiCl4 post valve closed
2/20/2012	10:03:49 PM	Bypass valve closed
2/20/2012	10:03:49 PM	Bubbler valve closed
2/20/2012	10:03:49 PM	Main Vac valve opened
2/20/2012	10:03:49 PM	Helium MFC set to  0.000000
2/20/2012	10:03:49 PM	H2 MFC set to  0.000000
2/20/2012	10:03:49 PM	BCl3 MFC set to  0.000000
2/20/2012	10:03:49 PM	PH3 MFC set to  0.000000
2/20/2012	10:03:49 PM	SiCl4 MFC set to  0.000000
2/20/2012	10:03:49 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	10:03:49 PM	Tube furnace set to 0
2/20/2012	10:03:50 PM	Run finished at 10:03 PM
2/20/2012	10:05:01 PM	Main Vac valve closed
2/20/2012	10:05:08 PM	Main Vac valve opened
2/20/2012	10:11:37 PM	Recipe started at 10:11 PM
2/20/2012	10:11:37 PM	Helium valve closed
2/20/2012	10:11:37 PM	H2 valve closed
2/20/2012	10:11:37 PM	BCl3 valve closed
2/20/2012	10:11:37 PM	PH3 valve closed
2/20/2012	10:11:37 PM	SiCl4 pre valve closed
2/20/2012	10:11:37 PM	SiCl4 post valve closed
2/20/2012	10:11:37 PM	Bypass valve closed
2/20/2012	10:11:37 PM	Bubbler valve closed
2/20/2012	10:11:37 PM	Main Vac valve opened
2/20/2012	10:11:37 PM	Helium MFC set to  0.000000
2/20/2012	10:11:37 PM	H2 MFC set to  0.000000
2/20/2012	10:11:37 PM	BCl3 MFC set to  0.000000
2/20/2012	10:11:37 PM	PH3 MFC set to  0.000000
2/20/2012	10:11:37 PM	SiCl4 MFC set to  0.000000
2/20/2012	10:11:37 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	10:11:38 PM	Tube furnace set to 0
2/20/2012	10:12:08 PM	H2 valve closed
2/20/2012	10:12:08 PM	BCl3 valve closed
2/20/2012	10:12:08 PM	PH3 valve closed
2/20/2012	10:12:08 PM	SiCl4 pre valve closed
2/20/2012	10:12:08 PM	SiCl4 post valve closed
2/20/2012	10:12:08 PM	Bypass valve closed
2/20/2012	10:12:08 PM	Bubbler valve closed
2/20/2012	10:12:08 PM	Helium valve opened
2/20/2012	10:12:08 PM	Main Vac valve opened
2/20/2012	10:12:08 PM	Helium MFC set to  20.000000
2/20/2012	10:12:08 PM	H2 MFC set to  0.000000
2/20/2012	10:12:08 PM	BCl3 MFC set to  0.000000
2/20/2012	10:12:08 PM	PH3 MFC set to  0.000000
2/20/2012	10:12:08 PM	SiCl4 MFC set to  0.000000
2/20/2012	10:12:08 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	10:12:08 PM	Tube furnace set to 0
2/20/2012	10:12:38 PM	Helium valve closed
2/20/2012	10:12:38 PM	H2 valve closed
2/20/2012	10:12:38 PM	BCl3 valve closed
2/20/2012	10:12:38 PM	PH3 valve closed
2/20/2012	10:12:38 PM	SiCl4 pre valve closed
2/20/2012	10:12:38 PM	SiCl4 post valve closed
2/20/2012	10:12:38 PM	Bypass valve closed
2/20/2012	10:12:38 PM	Bubbler valve closed
2/20/2012	10:12:38 PM	Main Vac valve opened
2/20/2012	10:12:38 PM	Helium MFC set to  0.000000
2/20/2012	10:12:38 PM	H2 MFC set to  0.000000
2/20/2012	10:12:38 PM	BCl3 MFC set to  0.000000
2/20/2012	10:12:38 PM	PH3 MFC set to  0.000000
2/20/2012	10:12:38 PM	SiCl4 MFC set to  0.000000
2/20/2012	10:12:38 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	10:12:38 PM	Tube furnace set to 0
2/20/2012	10:13:08 PM	H2 valve closed
2/20/2012	10:13:08 PM	BCl3 valve closed
2/20/2012	10:13:08 PM	PH3 valve closed
2/20/2012	10:13:08 PM	SiCl4 pre valve closed
2/20/2012	10:13:08 PM	SiCl4 post valve closed
2/20/2012	10:13:08 PM	Bypass valve closed
2/20/2012	10:13:08 PM	Bubbler valve closed
2/20/2012	10:13:08 PM	Helium valve opened
2/20/2012	10:13:08 PM	Main Vac valve opened
2/20/2012	10:13:08 PM	Helium MFC set to  20.000000
2/20/2012	10:13:08 PM	H2 MFC set to  0.000000
2/20/2012	10:13:08 PM	BCl3 MFC set to  0.000000
2/20/2012	10:13:08 PM	PH3 MFC set to  0.000000
2/20/2012	10:13:08 PM	SiCl4 MFC set to  0.000000
2/20/2012	10:13:08 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	10:13:08 PM	Tube furnace set to 0
2/20/2012	10:13:38 PM	Helium valve closed
2/20/2012	10:13:38 PM	H2 valve closed
2/20/2012	10:13:38 PM	BCl3 valve closed
2/20/2012	10:13:38 PM	PH3 valve closed
2/20/2012	10:13:38 PM	SiCl4 pre valve closed
2/20/2012	10:13:38 PM	SiCl4 post valve closed
2/20/2012	10:13:38 PM	Bypass valve closed
2/20/2012	10:13:38 PM	Bubbler valve closed
2/20/2012	10:13:38 PM	Main Vac valve opened
2/20/2012	10:13:38 PM	Helium MFC set to  0.000000
2/20/2012	10:13:38 PM	H2 MFC set to  0.000000
2/20/2012	10:13:38 PM	BCl3 MFC set to  0.000000
2/20/2012	10:13:38 PM	PH3 MFC set to  0.000000
2/20/2012	10:13:38 PM	SiCl4 MFC set to  0.000000
2/20/2012	10:13:38 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	10:13:38 PM	Tube furnace set to 0
2/20/2012	10:14:08 PM	H2 valve closed
2/20/2012	10:14:08 PM	BCl3 valve closed
2/20/2012	10:14:08 PM	PH3 valve closed
2/20/2012	10:14:08 PM	SiCl4 pre valve closed
2/20/2012	10:14:08 PM	SiCl4 post valve closed
2/20/2012	10:14:08 PM	Bypass valve closed
2/20/2012	10:14:08 PM	Bubbler valve closed
2/20/2012	10:14:09 PM	Helium valve opened
2/20/2012	10:14:09 PM	Main Vac valve opened
2/20/2012	10:14:09 PM	Helium MFC set to  20.000000
2/20/2012	10:14:09 PM	H2 MFC set to  0.000000
2/20/2012	10:14:09 PM	BCl3 MFC set to  0.000000
2/20/2012	10:14:09 PM	PH3 MFC set to  0.000000
2/20/2012	10:14:09 PM	SiCl4 MFC set to  0.000000
2/20/2012	10:14:09 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	10:14:09 PM	Tube furnace set to 0
2/20/2012	10:14:39 PM	Helium valve closed
2/20/2012	10:14:39 PM	H2 valve closed
2/20/2012	10:14:39 PM	BCl3 valve closed
2/20/2012	10:14:39 PM	PH3 valve closed
2/20/2012	10:14:39 PM	SiCl4 pre valve closed
2/20/2012	10:14:39 PM	SiCl4 post valve closed
2/20/2012	10:14:39 PM	Bypass valve closed
2/20/2012	10:14:39 PM	Bubbler valve closed
2/20/2012	10:14:39 PM	Main Vac valve opened
2/20/2012	10:14:39 PM	Helium MFC set to  0.000000
2/20/2012	10:14:39 PM	H2 MFC set to  0.000000
2/20/2012	10:14:39 PM	BCl3 MFC set to  0.000000
2/20/2012	10:14:39 PM	PH3 MFC set to  0.000000
2/20/2012	10:14:39 PM	SiCl4 MFC set to  0.000000
2/20/2012	10:14:39 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	10:14:39 PM	Tube furnace set to 0
2/20/2012	10:15:09 PM	H2 valve closed
2/20/2012	10:15:09 PM	BCl3 valve closed
2/20/2012	10:15:09 PM	PH3 valve closed
2/20/2012	10:15:09 PM	SiCl4 pre valve closed
2/20/2012	10:15:09 PM	SiCl4 post valve closed
2/20/2012	10:15:09 PM	Bypass valve closed
2/20/2012	10:15:09 PM	Bubbler valve closed
2/20/2012	10:15:09 PM	Helium valve opened
2/20/2012	10:15:09 PM	Main Vac valve opened
2/20/2012	10:15:09 PM	Helium MFC set to  20.000000
2/20/2012	10:15:09 PM	H2 MFC set to  0.000000
2/20/2012	10:15:09 PM	BCl3 MFC set to  0.000000
2/20/2012	10:15:09 PM	PH3 MFC set to  0.000000
2/20/2012	10:15:09 PM	SiCl4 MFC set to  0.000000
2/20/2012	10:15:09 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	10:15:09 PM	Tube furnace set to 0
2/20/2012	10:15:39 PM	Helium valve closed
2/20/2012	10:15:39 PM	H2 valve closed
2/20/2012	10:15:39 PM	BCl3 valve closed
2/20/2012	10:15:39 PM	PH3 valve closed
2/20/2012	10:15:39 PM	SiCl4 pre valve closed
2/20/2012	10:15:39 PM	SiCl4 post valve closed
2/20/2012	10:15:39 PM	Bypass valve closed
2/20/2012	10:15:39 PM	Bubbler valve closed
2/20/2012	10:15:39 PM	Main Vac valve opened
2/20/2012	10:15:39 PM	Helium MFC set to  0.000000
2/20/2012	10:15:39 PM	H2 MFC set to  0.000000
2/20/2012	10:15:39 PM	BCl3 MFC set to  0.000000
2/20/2012	10:15:39 PM	PH3 MFC set to  0.000000
2/20/2012	10:15:39 PM	SiCl4 MFC set to  0.000000
2/20/2012	10:15:39 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	10:15:39 PM	Tube furnace set to 0
2/20/2012	10:16:09 PM	H2 valve closed
2/20/2012	10:16:09 PM	BCl3 valve closed
2/20/2012	10:16:09 PM	PH3 valve closed
2/20/2012	10:16:09 PM	SiCl4 pre valve closed
2/20/2012	10:16:09 PM	SiCl4 post valve closed
2/20/2012	10:16:09 PM	Bypass valve closed
2/20/2012	10:16:09 PM	Bubbler valve closed
2/20/2012	10:16:09 PM	Helium valve opened
2/20/2012	10:16:09 PM	Main Vac valve opened
2/20/2012	10:16:09 PM	Helium MFC set to  20.000000
2/20/2012	10:16:09 PM	H2 MFC set to  0.000000
2/20/2012	10:16:09 PM	BCl3 MFC set to  0.000000
2/20/2012	10:16:09 PM	PH3 MFC set to  0.000000
2/20/2012	10:16:09 PM	SiCl4 MFC set to  0.000000
2/20/2012	10:16:09 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	10:16:09 PM	Tube furnace set to 0
2/20/2012	10:16:40 PM	Helium valve closed
2/20/2012	10:16:40 PM	H2 valve closed
2/20/2012	10:16:40 PM	BCl3 valve closed
2/20/2012	10:16:40 PM	PH3 valve closed
2/20/2012	10:16:40 PM	SiCl4 pre valve closed
2/20/2012	10:16:40 PM	SiCl4 post valve closed
2/20/2012	10:16:40 PM	Bypass valve closed
2/20/2012	10:16:40 PM	Bubbler valve closed
2/20/2012	10:16:40 PM	Main Vac valve opened
2/20/2012	10:16:40 PM	Helium MFC set to  0.000000
2/20/2012	10:16:40 PM	H2 MFC set to  0.000000
2/20/2012	10:16:40 PM	BCl3 MFC set to  0.000000
2/20/2012	10:16:40 PM	PH3 MFC set to  0.000000
2/20/2012	10:16:40 PM	SiCl4 MFC set to  0.000000
2/20/2012	10:16:40 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	10:16:40 PM	Tube furnace set to 0
2/20/2012	10:17:10 PM	H2 valve closed
2/20/2012	10:17:10 PM	BCl3 valve closed
2/20/2012	10:17:10 PM	PH3 valve closed
2/20/2012	10:17:10 PM	SiCl4 pre valve closed
2/20/2012	10:17:10 PM	SiCl4 post valve closed
2/20/2012	10:17:10 PM	Bypass valve closed
2/20/2012	10:17:10 PM	Bubbler valve closed
2/20/2012	10:17:10 PM	Helium valve opened
2/20/2012	10:17:10 PM	Main Vac valve opened
2/20/2012	10:17:10 PM	Helium MFC set to  20.000000
2/20/2012	10:17:10 PM	H2 MFC set to  0.000000
2/20/2012	10:17:10 PM	BCl3 MFC set to  0.000000
2/20/2012	10:17:10 PM	PH3 MFC set to  0.000000
2/20/2012	10:17:10 PM	SiCl4 MFC set to  0.000000
2/20/2012	10:17:10 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	10:17:10 PM	Tube furnace set to 0
2/20/2012	10:17:40 PM	Helium valve closed
2/20/2012	10:17:40 PM	H2 valve closed
2/20/2012	10:17:40 PM	BCl3 valve closed
2/20/2012	10:17:40 PM	PH3 valve closed
2/20/2012	10:17:40 PM	SiCl4 pre valve closed
2/20/2012	10:17:40 PM	SiCl4 post valve closed
2/20/2012	10:17:40 PM	Bypass valve closed
2/20/2012	10:17:40 PM	Bubbler valve closed
2/20/2012	10:17:40 PM	Main Vac valve opened
2/20/2012	10:17:40 PM	Helium MFC set to  0.000000
2/20/2012	10:17:40 PM	H2 MFC set to  0.000000
2/20/2012	10:17:40 PM	BCl3 MFC set to  0.000000
2/20/2012	10:17:40 PM	PH3 MFC set to  0.000000
2/20/2012	10:17:40 PM	SiCl4 MFC set to  0.000000
2/20/2012	10:17:40 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	10:17:40 PM	Tube furnace set to 0
2/20/2012	10:18:10 PM	H2 valve closed
2/20/2012	10:18:10 PM	BCl3 valve closed
2/20/2012	10:18:10 PM	PH3 valve closed
2/20/2012	10:18:10 PM	SiCl4 pre valve closed
2/20/2012	10:18:10 PM	SiCl4 post valve closed
2/20/2012	10:18:10 PM	Bypass valve closed
2/20/2012	10:18:10 PM	Bubbler valve closed
2/20/2012	10:18:10 PM	Helium valve opened
2/20/2012	10:18:10 PM	Main Vac valve opened
2/20/2012	10:18:10 PM	Helium MFC set to  20.000000
2/20/2012	10:18:10 PM	H2 MFC set to  0.000000
2/20/2012	10:18:10 PM	BCl3 MFC set to  0.000000
2/20/2012	10:18:10 PM	PH3 MFC set to  0.000000
2/20/2012	10:18:10 PM	SiCl4 MFC set to  0.000000
2/20/2012	10:18:10 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	10:18:10 PM	Tube furnace set to 0
2/20/2012	10:18:40 PM	Helium valve closed
2/20/2012	10:18:40 PM	H2 valve closed
2/20/2012	10:18:40 PM	BCl3 valve closed
2/20/2012	10:18:40 PM	PH3 valve closed
2/20/2012	10:18:40 PM	SiCl4 pre valve closed
2/20/2012	10:18:40 PM	SiCl4 post valve closed
2/20/2012	10:18:40 PM	Bypass valve closed
2/20/2012	10:18:40 PM	Bubbler valve closed
2/20/2012	10:18:40 PM	Main Vac valve opened
2/20/2012	10:18:40 PM	Helium MFC set to  0.000000
2/20/2012	10:18:40 PM	H2 MFC set to  0.000000
2/20/2012	10:18:40 PM	BCl3 MFC set to  0.000000
2/20/2012	10:18:40 PM	PH3 MFC set to  0.000000
2/20/2012	10:18:40 PM	SiCl4 MFC set to  0.000000
2/20/2012	10:18:40 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	10:18:41 PM	Tube furnace set to 0
2/20/2012	10:19:11 PM	H2 valve closed
2/20/2012	10:19:11 PM	BCl3 valve closed
2/20/2012	10:19:11 PM	PH3 valve closed
2/20/2012	10:19:11 PM	SiCl4 pre valve closed
2/20/2012	10:19:11 PM	SiCl4 post valve closed
2/20/2012	10:19:11 PM	Bypass valve closed
2/20/2012	10:19:11 PM	Bubbler valve closed
2/20/2012	10:19:11 PM	Helium valve opened
2/20/2012	10:19:11 PM	Main Vac valve opened
2/20/2012	10:19:11 PM	Helium MFC set to  20.000000
2/20/2012	10:19:11 PM	H2 MFC set to  0.000000
2/20/2012	10:19:11 PM	BCl3 MFC set to  0.000000
2/20/2012	10:19:11 PM	PH3 MFC set to  0.000000
2/20/2012	10:19:11 PM	SiCl4 MFC set to  0.000000
2/20/2012	10:19:11 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	10:19:11 PM	Tube furnace set to 0
2/20/2012	10:19:41 PM	Helium valve closed
2/20/2012	10:19:41 PM	H2 valve closed
2/20/2012	10:19:41 PM	BCl3 valve closed
2/20/2012	10:19:41 PM	PH3 valve closed
2/20/2012	10:19:41 PM	SiCl4 pre valve closed
2/20/2012	10:19:41 PM	SiCl4 post valve closed
2/20/2012	10:19:41 PM	Bypass valve closed
2/20/2012	10:19:41 PM	Bubbler valve closed
2/20/2012	10:19:41 PM	Main Vac valve opened
2/20/2012	10:19:41 PM	Helium MFC set to  0.000000
2/20/2012	10:19:41 PM	H2 MFC set to  0.000000
2/20/2012	10:19:41 PM	BCl3 MFC set to  0.000000
2/20/2012	10:19:41 PM	PH3 MFC set to  0.000000
2/20/2012	10:19:41 PM	SiCl4 MFC set to  0.000000
2/20/2012	10:19:41 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	10:19:41 PM	Tube furnace set to 0
2/20/2012	10:20:11 PM	H2 valve closed
2/20/2012	10:20:11 PM	BCl3 valve closed
2/20/2012	10:20:11 PM	PH3 valve closed
2/20/2012	10:20:11 PM	SiCl4 pre valve closed
2/20/2012	10:20:11 PM	SiCl4 post valve closed
2/20/2012	10:20:11 PM	Bypass valve closed
2/20/2012	10:20:11 PM	Bubbler valve closed
2/20/2012	10:20:11 PM	Helium valve opened
2/20/2012	10:20:11 PM	Main Vac valve opened
2/20/2012	10:20:11 PM	Helium MFC set to  20.000000
2/20/2012	10:20:11 PM	H2 MFC set to  0.000000
2/20/2012	10:20:11 PM	BCl3 MFC set to  0.000000
2/20/2012	10:20:11 PM	PH3 MFC set to  0.000000
2/20/2012	10:20:11 PM	SiCl4 MFC set to  0.000000
2/20/2012	10:20:11 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	10:20:11 PM	Tube furnace set to 0
2/20/2012	10:20:41 PM	Helium valve closed
2/20/2012	10:20:41 PM	H2 valve closed
2/20/2012	10:20:41 PM	BCl3 valve closed
2/20/2012	10:20:41 PM	PH3 valve closed
2/20/2012	10:20:41 PM	SiCl4 pre valve closed
2/20/2012	10:20:41 PM	SiCl4 post valve closed
2/20/2012	10:20:41 PM	Bypass valve closed
2/20/2012	10:20:41 PM	Bubbler valve closed
2/20/2012	10:20:41 PM	Main Vac valve opened
2/20/2012	10:20:41 PM	Helium MFC set to  0.000000
2/20/2012	10:20:41 PM	H2 MFC set to  0.000000
2/20/2012	10:20:41 PM	BCl3 MFC set to  0.000000
2/20/2012	10:20:41 PM	PH3 MFC set to  0.000000
2/20/2012	10:20:41 PM	SiCl4 MFC set to  0.000000
2/20/2012	10:20:41 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	10:20:41 PM	Tube furnace set to 200
2/20/2012	10:21:11 PM	H2 valve closed
2/20/2012	10:21:11 PM	BCl3 valve closed
2/20/2012	10:21:11 PM	PH3 valve closed
2/20/2012	10:21:11 PM	SiCl4 pre valve closed
2/20/2012	10:21:11 PM	SiCl4 post valve closed
2/20/2012	10:21:11 PM	Bypass valve closed
2/20/2012	10:21:11 PM	Bubbler valve closed
2/20/2012	10:21:11 PM	Helium valve opened
2/20/2012	10:21:11 PM	Main Vac valve opened
2/20/2012	10:21:11 PM	Helium MFC set to  20.000000
2/20/2012	10:21:11 PM	H2 MFC set to  0.000000
2/20/2012	10:21:11 PM	BCl3 MFC set to  0.000000
2/20/2012	10:21:11 PM	PH3 MFC set to  0.000000
2/20/2012	10:21:11 PM	SiCl4 MFC set to  0.000000
2/20/2012	10:21:11 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	10:21:12 PM	Tube furnace set to 200
2/20/2012	10:21:42 PM	Helium valve closed
2/20/2012	10:21:42 PM	H2 valve closed
2/20/2012	10:21:42 PM	BCl3 valve closed
2/20/2012	10:21:42 PM	PH3 valve closed
2/20/2012	10:21:42 PM	SiCl4 pre valve closed
2/20/2012	10:21:42 PM	SiCl4 post valve closed
2/20/2012	10:21:42 PM	Bypass valve closed
2/20/2012	10:21:42 PM	Bubbler valve closed
2/20/2012	10:21:42 PM	Main Vac valve opened
2/20/2012	10:21:42 PM	Helium MFC set to  0.000000
2/20/2012	10:21:42 PM	H2 MFC set to  0.000000
2/20/2012	10:21:42 PM	BCl3 MFC set to  0.000000
2/20/2012	10:21:42 PM	PH3 MFC set to  0.000000
2/20/2012	10:21:42 PM	SiCl4 MFC set to  0.000000
2/20/2012	10:21:42 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	10:21:42 PM	Tube furnace set to 200
2/20/2012	10:22:12 PM	H2 valve closed
2/20/2012	10:22:12 PM	BCl3 valve closed
2/20/2012	10:22:12 PM	PH3 valve closed
2/20/2012	10:22:12 PM	SiCl4 pre valve closed
2/20/2012	10:22:12 PM	SiCl4 post valve closed
2/20/2012	10:22:12 PM	Bypass valve closed
2/20/2012	10:22:12 PM	Bubbler valve closed
2/20/2012	10:22:12 PM	Helium valve opened
2/20/2012	10:22:12 PM	Main Vac valve opened
2/20/2012	10:22:12 PM	Helium MFC set to  20.000000
2/20/2012	10:22:12 PM	H2 MFC set to  0.000000
2/20/2012	10:22:12 PM	BCl3 MFC set to  0.000000
2/20/2012	10:22:12 PM	PH3 MFC set to  0.000000
2/20/2012	10:22:12 PM	SiCl4 MFC set to  0.000000
2/20/2012	10:22:12 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	10:22:12 PM	Tube furnace set to 200
2/20/2012	10:22:42 PM	Helium valve closed
2/20/2012	10:22:42 PM	H2 valve closed
2/20/2012	10:22:42 PM	BCl3 valve closed
2/20/2012	10:22:42 PM	PH3 valve closed
2/20/2012	10:22:42 PM	SiCl4 pre valve closed
2/20/2012	10:22:42 PM	SiCl4 post valve closed
2/20/2012	10:22:42 PM	Bypass valve closed
2/20/2012	10:22:42 PM	Bubbler valve closed
2/20/2012	10:22:42 PM	Main Vac valve opened
2/20/2012	10:22:42 PM	Helium MFC set to  0.000000
2/20/2012	10:22:42 PM	H2 MFC set to  0.000000
2/20/2012	10:22:42 PM	BCl3 MFC set to  0.000000
2/20/2012	10:22:42 PM	PH3 MFC set to  0.000000
2/20/2012	10:22:42 PM	SiCl4 MFC set to  0.000000
2/20/2012	10:22:42 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	10:22:42 PM	Tube furnace set to 200
2/20/2012	10:22:43 PM	H2 valve closed
2/20/2012	10:22:43 PM	BCl3 valve closed
2/20/2012	10:22:43 PM	PH3 valve closed
2/20/2012	10:22:43 PM	SiCl4 pre valve closed
2/20/2012	10:22:43 PM	SiCl4 post valve closed
2/20/2012	10:22:43 PM	Bypass valve closed
2/20/2012	10:22:43 PM	Bubbler valve closed
2/20/2012	10:22:43 PM	Helium valve opened
2/20/2012	10:22:43 PM	Main Vac valve opened
2/20/2012	10:22:43 PM	Helium MFC set to  20.000000
2/20/2012	10:22:43 PM	H2 MFC set to  0.000000
2/20/2012	10:22:43 PM	BCl3 MFC set to  0.000000
2/20/2012	10:22:43 PM	PH3 MFC set to  0.000000
2/20/2012	10:22:43 PM	SiCl4 MFC set to  0.000000
2/20/2012	10:22:43 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	10:22:43 PM	Tube furnace set to 200
2/20/2012	10:22:46 PM	Helium valve closed
2/20/2012	10:22:46 PM	H2 valve closed
2/20/2012	10:22:46 PM	BCl3 valve closed
2/20/2012	10:22:46 PM	PH3 valve closed
2/20/2012	10:22:46 PM	SiCl4 pre valve closed
2/20/2012	10:22:46 PM	SiCl4 post valve closed
2/20/2012	10:22:46 PM	Bypass valve closed
2/20/2012	10:22:46 PM	Bubbler valve closed
2/20/2012	10:22:46 PM	Main Vac valve opened
2/20/2012	10:22:46 PM	Helium MFC set to  0.000000
2/20/2012	10:22:46 PM	H2 MFC set to  0.000000
2/20/2012	10:22:46 PM	BCl3 MFC set to  0.000000
2/20/2012	10:22:46 PM	PH3 MFC set to  0.000000
2/20/2012	10:22:46 PM	SiCl4 MFC set to  0.000000
2/20/2012	10:22:46 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	10:22:46 PM	Tube furnace set to 200
2/20/2012	10:22:46 PM	H2 valve closed
2/20/2012	10:22:46 PM	BCl3 valve closed
2/20/2012	10:22:46 PM	PH3 valve closed
2/20/2012	10:22:46 PM	SiCl4 pre valve closed
2/20/2012	10:22:46 PM	SiCl4 post valve closed
2/20/2012	10:22:46 PM	Bypass valve closed
2/20/2012	10:22:46 PM	Bubbler valve closed
2/20/2012	10:22:46 PM	Helium valve opened
2/20/2012	10:22:46 PM	Main Vac valve opened
2/20/2012	10:22:46 PM	Helium MFC set to  20.000000
2/20/2012	10:22:46 PM	H2 MFC set to  0.000000
2/20/2012	10:22:46 PM	BCl3 MFC set to  0.000000
2/20/2012	10:22:46 PM	PH3 MFC set to  0.000000
2/20/2012	10:22:46 PM	SiCl4 MFC set to  0.000000
2/20/2012	10:22:46 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	10:22:47 PM	Tube furnace set to 200
2/20/2012	10:22:47 PM	Helium valve closed
2/20/2012	10:22:47 PM	H2 valve closed
2/20/2012	10:22:47 PM	BCl3 valve closed
2/20/2012	10:22:47 PM	PH3 valve closed
2/20/2012	10:22:47 PM	SiCl4 pre valve closed
2/20/2012	10:22:47 PM	SiCl4 post valve closed
2/20/2012	10:22:47 PM	Bypass valve closed
2/20/2012	10:22:47 PM	Bubbler valve closed
2/20/2012	10:22:47 PM	Main Vac valve opened
2/20/2012	10:22:47 PM	Helium MFC set to  0.000000
2/20/2012	10:22:47 PM	H2 MFC set to  0.000000
2/20/2012	10:22:47 PM	BCl3 MFC set to  0.000000
2/20/2012	10:22:47 PM	PH3 MFC set to  0.000000
2/20/2012	10:22:47 PM	SiCl4 MFC set to  0.000000
2/20/2012	10:22:47 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	10:22:47 PM	Tube furnace set to 200
2/20/2012	10:22:47 PM	H2 valve closed
2/20/2012	10:22:47 PM	BCl3 valve closed
2/20/2012	10:22:48 PM	PH3 valve closed
2/20/2012	10:22:48 PM	SiCl4 pre valve closed
2/20/2012	10:22:48 PM	SiCl4 post valve closed
2/20/2012	10:22:48 PM	Bypass valve closed
2/20/2012	10:22:48 PM	Bubbler valve closed
2/20/2012	10:22:48 PM	Helium valve opened
2/20/2012	10:22:48 PM	Main Vac valve opened
2/20/2012	10:22:48 PM	Helium MFC set to  20.000000
2/20/2012	10:22:48 PM	H2 MFC set to  0.000000
2/20/2012	10:22:48 PM	BCl3 MFC set to  0.000000
2/20/2012	10:22:48 PM	PH3 MFC set to  0.000000
2/20/2012	10:22:48 PM	SiCl4 MFC set to  0.000000
2/20/2012	10:22:48 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	10:22:48 PM	Tube furnace set to 200
2/20/2012	10:22:48 PM	Helium valve closed
2/20/2012	10:22:48 PM	H2 valve closed
2/20/2012	10:22:48 PM	BCl3 valve closed
2/20/2012	10:22:48 PM	PH3 valve closed
2/20/2012	10:22:48 PM	SiCl4 pre valve closed
2/20/2012	10:22:48 PM	SiCl4 post valve closed
2/20/2012	10:22:48 PM	Bypass valve closed
2/20/2012	10:22:48 PM	Bubbler valve closed
2/20/2012	10:22:48 PM	Main Vac valve opened
2/20/2012	10:22:48 PM	Helium MFC set to  0.000000
2/20/2012	10:22:48 PM	H2 MFC set to  0.000000
2/20/2012	10:22:48 PM	BCl3 MFC set to  0.000000
2/20/2012	10:22:48 PM	PH3 MFC set to  0.000000
2/20/2012	10:22:48 PM	SiCl4 MFC set to  0.000000
2/20/2012	10:22:48 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	10:22:48 PM	Tube furnace set to 200
2/20/2012	10:22:49 PM	H2 valve closed
2/20/2012	10:22:49 PM	BCl3 valve closed
2/20/2012	10:22:49 PM	PH3 valve closed
2/20/2012	10:22:49 PM	SiCl4 pre valve closed
2/20/2012	10:22:49 PM	SiCl4 post valve closed
2/20/2012	10:22:49 PM	Bypass valve closed
2/20/2012	10:22:49 PM	Bubbler valve closed
2/20/2012	10:22:49 PM	Helium valve opened
2/20/2012	10:22:49 PM	Main Vac valve opened
2/20/2012	10:22:49 PM	Helium MFC set to  20.000000
2/20/2012	10:22:49 PM	H2 MFC set to  0.000000
2/20/2012	10:22:49 PM	BCl3 MFC set to  0.000000
2/20/2012	10:22:49 PM	PH3 MFC set to  0.000000
2/20/2012	10:22:49 PM	SiCl4 MFC set to  0.000000
2/20/2012	10:22:49 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	10:22:49 PM	Tube furnace set to 200
2/20/2012	10:22:50 PM	Helium valve closed
2/20/2012	10:22:50 PM	H2 valve closed
2/20/2012	10:22:50 PM	BCl3 valve closed
2/20/2012	10:22:50 PM	PH3 valve closed
2/20/2012	10:22:50 PM	SiCl4 pre valve closed
2/20/2012	10:22:50 PM	SiCl4 post valve closed
2/20/2012	10:22:50 PM	Bypass valve closed
2/20/2012	10:22:50 PM	Bubbler valve closed
2/20/2012	10:22:50 PM	Main Vac valve opened
2/20/2012	10:22:50 PM	Helium MFC set to  0.000000
2/20/2012	10:22:50 PM	H2 MFC set to  0.000000
2/20/2012	10:22:50 PM	BCl3 MFC set to  0.000000
2/20/2012	10:22:50 PM	PH3 MFC set to  0.000000
2/20/2012	10:22:50 PM	SiCl4 MFC set to  0.000000
2/20/2012	10:22:50 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	10:22:50 PM	Tube furnace set to 0
2/20/2012	10:22:51 PM	Run finished at 10:22 PM
2/20/2012	10:23:35 PM	Recipe started at 10:23 PM
2/20/2012	10:23:35 PM	Helium valve closed
2/20/2012	10:23:35 PM	H2 valve closed
2/20/2012	10:23:35 PM	BCl3 valve closed
2/20/2012	10:23:35 PM	PH3 valve closed
2/20/2012	10:23:35 PM	SiCl4 pre valve closed
2/20/2012	10:23:35 PM	SiCl4 post valve closed
2/20/2012	10:23:35 PM	Main Vac valve closed
2/20/2012	10:23:35 PM	Bypass valve closed
2/20/2012	10:23:35 PM	Bubbler valve closed
2/20/2012	10:23:35 PM	Helium MFC set to  0.000000
2/20/2012	10:23:35 PM	H2 MFC set to  0.000000
2/20/2012	10:23:35 PM	BCl3 MFC set to  0.000000
2/20/2012	10:23:35 PM	PH3 MFC set to  0.000000
2/20/2012	10:23:35 PM	SiCl4 MFC set to  0.000000
2/20/2012	10:23:35 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	10:23:35 PM	Tube furnace set to 0
2/20/2012	10:23:38 PM	Helium valve closed
2/20/2012	10:23:38 PM	BCl3 valve closed
2/20/2012	10:23:38 PM	PH3 valve closed
2/20/2012	10:23:38 PM	SiCl4 pre valve closed
2/20/2012	10:23:38 PM	SiCl4 post valve closed
2/20/2012	10:23:38 PM	Main Vac valve closed
2/20/2012	10:23:38 PM	Bypass valve closed
2/20/2012	10:23:38 PM	Bubbler valve closed
2/20/2012	10:23:38 PM	H2 valve opened
2/20/2012	10:23:38 PM	Helium MFC set to  0.000000
2/20/2012	10:23:38 PM	H2 MFC set to  500.000000
2/20/2012	10:23:38 PM	BCl3 MFC set to  0.000000
2/20/2012	10:23:38 PM	PH3 MFC set to  0.000000
2/20/2012	10:23:38 PM	SiCl4 MFC set to  0.000000
2/20/2012	10:23:38 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	10:23:39 PM	Tube furnace set to 0
2/20/2012	10:24:42 PM	Helium valve closed
2/20/2012	10:24:42 PM	BCl3 valve closed
2/20/2012	10:24:42 PM	PH3 valve closed
2/20/2012	10:24:42 PM	SiCl4 pre valve closed
2/20/2012	10:24:42 PM	SiCl4 post valve closed
2/20/2012	10:24:42 PM	Main Vac valve closed
2/20/2012	10:24:42 PM	Bypass valve closed
2/20/2012	10:24:42 PM	H2 valve opened
2/20/2012	10:24:42 PM	Bubbler valve opened
2/20/2012	10:24:42 PM	Helium MFC set to  0.000000
2/20/2012	10:24:42 PM	H2 MFC set to  500.000000
2/20/2012	10:24:42 PM	BCl3 MFC set to  0.000000
2/20/2012	10:24:42 PM	PH3 MFC set to  0.000000
2/20/2012	10:24:42 PM	SiCl4 MFC set to  0.000000
2/20/2012	10:24:42 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	10:24:42 PM	Tube furnace set to 0
2/20/2012	10:24:43 PM	Helium valve closed
2/20/2012	10:24:43 PM	BCl3 valve closed
2/20/2012	10:24:43 PM	PH3 valve closed
2/20/2012	10:24:43 PM	SiCl4 pre valve closed
2/20/2012	10:24:43 PM	SiCl4 post valve closed
2/20/2012	10:24:43 PM	Main Vac valve closed
2/20/2012	10:24:43 PM	Bypass valve closed
2/20/2012	10:24:43 PM	H2 valve opened
2/20/2012	10:24:43 PM	Bubbler valve opened
2/20/2012	10:24:43 PM	Helium MFC set to  0.000000
2/20/2012	10:24:43 PM	H2 MFC set to  500.000000
2/20/2012	10:24:43 PM	BCl3 MFC set to  0.000000
2/20/2012	10:24:43 PM	PH3 MFC set to  0.000000
2/20/2012	10:24:43 PM	SiCl4 MFC set to  0.000000
2/20/2012	10:24:43 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	10:24:43 PM	Tube furnace set to 1100
2/20/2012	10:24:52 PM	H2 valve closed
2/20/2012	10:24:52 PM	BCl3 valve closed
2/20/2012	10:24:52 PM	PH3 valve closed
2/20/2012	10:24:52 PM	SiCl4 pre valve closed
2/20/2012	10:24:52 PM	SiCl4 post valve closed
2/20/2012	10:24:52 PM	Main Vac valve closed
2/20/2012	10:24:52 PM	Bypass valve closed
2/20/2012	10:24:52 PM	Helium valve opened
2/20/2012	10:24:52 PM	Bubbler valve opened
2/20/2012	10:24:52 PM	Helium MFC set to  500.000000
2/20/2012	10:24:52 PM	H2 MFC set to  0.000000
2/20/2012	10:24:52 PM	BCl3 MFC set to  0.000000
2/20/2012	10:24:52 PM	PH3 MFC set to  0.000000
2/20/2012	10:24:52 PM	SiCl4 MFC set to  0.000000
2/20/2012	10:24:52 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	10:24:52 PM	Tube furnace set to 1100
2/20/2012	10:25:05 PM	H2 valve closed
2/20/2012	10:25:05 PM	BCl3 valve closed
2/20/2012	10:25:05 PM	PH3 valve closed
2/20/2012	10:25:05 PM	SiCl4 pre valve closed
2/20/2012	10:25:05 PM	SiCl4 post valve closed
2/20/2012	10:25:05 PM	Main Vac valve closed
2/20/2012	10:25:05 PM	Bypass valve closed
2/20/2012	10:25:05 PM	Helium valve opened
2/20/2012	10:25:05 PM	Bubbler valve opened
2/20/2012	10:25:05 PM	Helium MFC set to  400.000000
2/20/2012	10:25:05 PM	H2 MFC set to  0.000000
2/20/2012	10:25:05 PM	BCl3 MFC set to  0.000000
2/20/2012	10:25:05 PM	PH3 MFC set to  0.000000
2/20/2012	10:25:05 PM	SiCl4 MFC set to  0.000000
2/20/2012	10:25:05 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	10:25:05 PM	Tube furnace set to 1100
2/20/2012	10:25:19 PM	H2 valve closed
2/20/2012	10:25:19 PM	BCl3 valve closed
2/20/2012	10:25:19 PM	PH3 valve closed
2/20/2012	10:25:19 PM	SiCl4 pre valve closed
2/20/2012	10:25:19 PM	SiCl4 post valve closed
2/20/2012	10:25:19 PM	Main Vac valve closed
2/20/2012	10:25:19 PM	Bypass valve closed
2/20/2012	10:25:19 PM	Helium valve opened
2/20/2012	10:25:19 PM	Bubbler valve opened
2/20/2012	10:25:19 PM	Helium MFC set to  300.000000
2/20/2012	10:25:19 PM	H2 MFC set to  0.000000
2/20/2012	10:25:19 PM	BCl3 MFC set to  0.000000
2/20/2012	10:25:19 PM	PH3 MFC set to  0.000000
2/20/2012	10:25:19 PM	SiCl4 MFC set to  0.000000
2/20/2012	10:25:19 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	10:25:19 PM	Tube furnace set to 1100
2/20/2012	10:25:34 PM	H2 valve closed
2/20/2012	10:25:34 PM	BCl3 valve closed
2/20/2012	10:25:34 PM	PH3 valve closed
2/20/2012	10:25:34 PM	SiCl4 pre valve closed
2/20/2012	10:25:34 PM	SiCl4 post valve closed
2/20/2012	10:25:34 PM	Main Vac valve closed
2/20/2012	10:25:34 PM	Bypass valve closed
2/20/2012	10:25:34 PM	Helium valve opened
2/20/2012	10:25:34 PM	Bubbler valve opened
2/20/2012	10:25:34 PM	Helium MFC set to  200.000000
2/20/2012	10:25:34 PM	H2 MFC set to  0.000000
2/20/2012	10:25:34 PM	BCl3 MFC set to  0.000000
2/20/2012	10:25:34 PM	PH3 MFC set to  0.000000
2/20/2012	10:25:34 PM	SiCl4 MFC set to  0.000000
2/20/2012	10:25:34 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	10:25:34 PM	Tube furnace set to 1100
2/20/2012	10:26:03 PM	H2 valve closed
2/20/2012	10:26:03 PM	BCl3 valve closed
2/20/2012	10:26:03 PM	PH3 valve closed
2/20/2012	10:26:03 PM	SiCl4 pre valve closed
2/20/2012	10:26:03 PM	SiCl4 post valve closed
2/20/2012	10:26:03 PM	Main Vac valve closed
2/20/2012	10:26:03 PM	Bypass valve closed
2/20/2012	10:26:03 PM	Helium valve opened
2/20/2012	10:26:03 PM	Bubbler valve opened
2/20/2012	10:26:03 PM	Helium MFC set to  100.000000
2/20/2012	10:26:03 PM	H2 MFC set to  0.000000
2/20/2012	10:26:03 PM	BCl3 MFC set to  0.000000
2/20/2012	10:26:03 PM	PH3 MFC set to  0.000000
2/20/2012	10:26:03 PM	SiCl4 MFC set to  0.000000
2/20/2012	10:26:03 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	10:26:03 PM	Tube furnace set to 1100
2/20/2012	10:26:33 PM	H2 valve closed
2/20/2012	10:26:33 PM	BCl3 valve closed
2/20/2012	10:26:33 PM	PH3 valve closed
2/20/2012	10:26:33 PM	SiCl4 pre valve closed
2/20/2012	10:26:33 PM	SiCl4 post valve closed
2/20/2012	10:26:33 PM	Main Vac valve closed
2/20/2012	10:26:33 PM	Bypass valve closed
2/20/2012	10:26:33 PM	Helium valve opened
2/20/2012	10:26:33 PM	Bubbler valve opened
2/20/2012	10:26:33 PM	Helium MFC set to  50.000000
2/20/2012	10:26:33 PM	H2 MFC set to  0.000000
2/20/2012	10:26:33 PM	BCl3 MFC set to  0.000000
2/20/2012	10:26:33 PM	PH3 MFC set to  0.000000
2/20/2012	10:26:33 PM	SiCl4 MFC set to  0.000000
2/20/2012	10:26:33 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	10:26:33 PM	Tube furnace set to 1100
2/20/2012	10:27:28 PM	H2 valve closed
2/20/2012	10:27:28 PM	BCl3 valve closed
2/20/2012	10:27:28 PM	PH3 valve closed
2/20/2012	10:27:28 PM	SiCl4 pre valve closed
2/20/2012	10:27:28 PM	SiCl4 post valve closed
2/20/2012	10:27:28 PM	Main Vac valve closed
2/20/2012	10:27:28 PM	Bypass valve closed
2/20/2012	10:27:28 PM	Helium valve opened
2/20/2012	10:27:28 PM	Bubbler valve opened
2/20/2012	10:27:28 PM	Helium MFC set to  50.000000
2/20/2012	10:27:28 PM	H2 MFC set to  0.000000
2/20/2012	10:27:28 PM	BCl3 MFC set to  0.000000
2/20/2012	10:27:28 PM	PH3 MFC set to  0.000000
2/20/2012	10:27:28 PM	SiCl4 MFC set to  0.000000
2/20/2012	10:27:28 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	10:27:28 PM	Tube furnace set to 0
2/20/2012	10:27:29 PM	Run finished at 10:27 PM
2/20/2012	10:28:49 PM	Helium MFC set to  200.000000
2/20/2012	10:30:08 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/20/2012	10:30:09 PM	Recipe started at 10:30 PM
2/20/2012	10:30:09 PM	Helium valve closed
2/20/2012	10:30:09 PM	H2 valve closed
2/20/2012	10:30:09 PM	BCl3 valve closed
2/20/2012	10:30:09 PM	PH3 valve closed
2/20/2012	10:30:09 PM	SiCl4 pre valve closed
2/20/2012	10:30:09 PM	SiCl4 post valve closed
2/20/2012	10:30:09 PM	Main Vac valve closed
2/20/2012	10:30:09 PM	Bubbler valve closed
2/20/2012	10:30:09 PM	Bypass valve opened
2/20/2012	10:30:09 PM	Helium MFC set to  0.000000
2/20/2012	10:30:09 PM	H2 MFC set to  0.000000
2/20/2012	10:30:09 PM	BCl3 MFC set to  0.000000
2/20/2012	10:30:09 PM	PH3 MFC set to  0.000000
2/20/2012	10:30:09 PM	SiCl4 MFC set to  0.000000
2/20/2012	10:30:09 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	10:30:10 PM	Tube furnace set to 0
2/20/2012	10:30:55 PM	Helium valve closed
2/20/2012	10:30:55 PM	H2 valve closed
2/20/2012	10:30:55 PM	BCl3 valve closed
2/20/2012	10:30:55 PM	PH3 valve closed
2/20/2012	10:30:55 PM	SiCl4 pre valve closed
2/20/2012	10:30:55 PM	SiCl4 post valve closed
2/20/2012	10:30:55 PM	Main Vac valve closed
2/20/2012	10:30:55 PM	Bubbler valve closed
2/20/2012	10:30:55 PM	Bypass valve opened
2/20/2012	10:30:55 PM	Helium MFC set to  0.000000
2/20/2012	10:30:55 PM	H2 MFC set to  0.000000
2/20/2012	10:30:55 PM	BCl3 MFC set to  0.000000
2/20/2012	10:30:55 PM	PH3 MFC set to  0.000000
2/20/2012	10:30:55 PM	SiCl4 MFC set to  0.000000
2/20/2012	10:30:55 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	10:30:55 PM	Tube furnace set to 0
2/20/2012	10:31:55 PM	Helium valve closed
2/20/2012	10:31:55 PM	H2 valve closed
2/20/2012	10:31:55 PM	BCl3 valve closed
2/20/2012	10:31:55 PM	PH3 valve closed
2/20/2012	10:31:55 PM	SiCl4 pre valve closed
2/20/2012	10:31:55 PM	SiCl4 post valve closed
2/20/2012	10:31:55 PM	Bypass valve closed
2/20/2012	10:31:55 PM	Bubbler valve closed
2/20/2012	10:31:55 PM	Main Vac valve opened
2/20/2012	10:31:55 PM	Helium MFC set to  0.000000
2/20/2012	10:31:55 PM	H2 MFC set to  0.000000
2/20/2012	10:31:55 PM	BCl3 MFC set to  0.000000
2/20/2012	10:31:55 PM	PH3 MFC set to  0.000000
2/20/2012	10:31:55 PM	SiCl4 MFC set to  0.000000
2/20/2012	10:31:55 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	10:31:56 PM	Tube furnace set to 0
2/20/2012	10:31:57 PM	Run finished at 10:31 PM
2/20/2012	10:31:57 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/20/2012	10:35:35 PM	Main Vac valve closed
2/20/2012	10:35:41 PM	Main Vac valve opened
2/20/2012	10:39:44 PM	Main Vac valve closed
2/20/2012	10:39:49 PM	Main Vac valve opened
2/20/2012	10:49:52 PM	Main Vac valve closed
2/20/2012	10:50:00 PM	Main Vac valve opened
2/20/2012	10:50:11 PM	Recipe started at 10:50 PM
2/20/2012	10:50:11 PM	Helium valve closed
2/20/2012	10:50:11 PM	H2 valve closed
2/20/2012	10:50:11 PM	BCl3 valve closed
2/20/2012	10:50:11 PM	PH3 valve closed
2/20/2012	10:50:11 PM	SiCl4 pre valve closed
2/20/2012	10:50:11 PM	SiCl4 post valve closed
2/20/2012	10:50:11 PM	Main Vac valve closed
2/20/2012	10:50:11 PM	Bypass valve closed
2/20/2012	10:50:11 PM	Bubbler valve closed
2/20/2012	10:50:11 PM	Helium MFC set to  0.000000
2/20/2012	10:50:11 PM	H2 MFC set to  0.000000
2/20/2012	10:50:11 PM	BCl3 MFC set to  0.000000
2/20/2012	10:50:11 PM	PH3 MFC set to  0.000000
2/20/2012	10:50:11 PM	SiCl4 MFC set to  0.000000
2/20/2012	10:50:11 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	10:50:11 PM	Tube furnace set to 0
2/20/2012	10:50:14 PM	Helium valve closed
2/20/2012	10:50:14 PM	BCl3 valve closed
2/20/2012	10:50:14 PM	PH3 valve closed
2/20/2012	10:50:14 PM	SiCl4 pre valve closed
2/20/2012	10:50:14 PM	SiCl4 post valve closed
2/20/2012	10:50:14 PM	Main Vac valve closed
2/20/2012	10:50:14 PM	Bypass valve closed
2/20/2012	10:50:14 PM	Bubbler valve closed
2/20/2012	10:50:14 PM	H2 valve opened
2/20/2012	10:50:14 PM	Helium MFC set to  0.000000
2/20/2012	10:50:14 PM	H2 MFC set to  500.000000
2/20/2012	10:50:14 PM	BCl3 MFC set to  0.000000
2/20/2012	10:50:14 PM	PH3 MFC set to  0.000000
2/20/2012	10:50:14 PM	SiCl4 MFC set to  0.000000
2/20/2012	10:50:14 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	10:50:14 PM	Tube furnace set to 0
2/20/2012	10:51:16 PM	Helium valve closed
2/20/2012	10:51:16 PM	BCl3 valve closed
2/20/2012	10:51:16 PM	PH3 valve closed
2/20/2012	10:51:16 PM	SiCl4 pre valve closed
2/20/2012	10:51:16 PM	SiCl4 post valve closed
2/20/2012	10:51:16 PM	Main Vac valve closed
2/20/2012	10:51:16 PM	Bypass valve closed
2/20/2012	10:51:16 PM	H2 valve opened
2/20/2012	10:51:16 PM	Bubbler valve opened
2/20/2012	10:51:16 PM	Helium MFC set to  0.000000
2/20/2012	10:51:16 PM	H2 MFC set to  500.000000
2/20/2012	10:51:16 PM	BCl3 MFC set to  0.000000
2/20/2012	10:51:16 PM	PH3 MFC set to  0.000000
2/20/2012	10:51:16 PM	SiCl4 MFC set to  0.000000
2/20/2012	10:51:16 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	10:51:16 PM	Tube furnace set to 0
2/20/2012	10:51:17 PM	Helium valve closed
2/20/2012	10:51:17 PM	BCl3 valve closed
2/20/2012	10:51:17 PM	PH3 valve closed
2/20/2012	10:51:17 PM	SiCl4 pre valve closed
2/20/2012	10:51:17 PM	SiCl4 post valve closed
2/20/2012	10:51:17 PM	Main Vac valve closed
2/20/2012	10:51:17 PM	Bypass valve closed
2/20/2012	10:51:17 PM	H2 valve opened
2/20/2012	10:51:17 PM	Bubbler valve opened
2/20/2012	10:51:17 PM	Helium MFC set to  0.000000
2/20/2012	10:51:17 PM	H2 MFC set to  500.000000
2/20/2012	10:51:17 PM	BCl3 MFC set to  0.000000
2/20/2012	10:51:17 PM	PH3 MFC set to  0.000000
2/20/2012	10:51:17 PM	SiCl4 MFC set to  0.000000
2/20/2012	10:51:17 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	10:51:17 PM	Tube furnace set to 1000
2/20/2012	11:11:17 PM	Helium valve closed
2/20/2012	11:11:17 PM	BCl3 valve closed
2/20/2012	11:11:17 PM	SiCl4 pre valve closed
2/20/2012	11:11:17 PM	SiCl4 post valve closed
2/20/2012	11:11:17 PM	Main Vac valve closed
2/20/2012	11:11:17 PM	Bypass valve closed
2/20/2012	11:11:17 PM	H2 valve opened
2/20/2012	11:11:17 PM	PH3 valve opened
2/20/2012	11:11:17 PM	Bubbler valve opened
2/20/2012	11:11:17 PM	Helium MFC set to  0.000000
2/20/2012	11:11:17 PM	H2 MFC set to  500.000000
2/20/2012	11:11:17 PM	BCl3 MFC set to  0.000000
2/20/2012	11:11:17 PM	PH3 MFC set to  1.000000
2/20/2012	11:11:17 PM	SiCl4 MFC set to  0.000000
2/20/2012	11:11:17 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	11:11:17 PM	Tube furnace set to 1000
2/20/2012	11:21:17 PM	Helium valve closed
2/20/2012	11:21:17 PM	BCl3 valve closed
2/20/2012	11:21:17 PM	PH3 valve closed
2/20/2012	11:21:17 PM	SiCl4 pre valve closed
2/20/2012	11:21:17 PM	SiCl4 post valve closed
2/20/2012	11:21:17 PM	Main Vac valve closed
2/20/2012	11:21:17 PM	Bypass valve closed
2/20/2012	11:21:17 PM	H2 valve opened
2/20/2012	11:21:17 PM	Bubbler valve opened
2/20/2012	11:21:17 PM	Helium MFC set to  0.000000
2/20/2012	11:21:17 PM	H2 MFC set to  500.000000
2/20/2012	11:21:17 PM	BCl3 MFC set to  0.000000
2/20/2012	11:21:17 PM	PH3 MFC set to  0.000000
2/20/2012	11:21:17 PM	SiCl4 MFC set to  0.000000
2/20/2012	11:21:17 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	11:21:17 PM	Tube furnace set to 950
2/20/2012	11:23:17 PM	Helium valve closed
2/20/2012	11:23:17 PM	BCl3 valve closed
2/20/2012	11:23:17 PM	PH3 valve closed
2/20/2012	11:23:17 PM	SiCl4 pre valve closed
2/20/2012	11:23:17 PM	SiCl4 post valve closed
2/20/2012	11:23:17 PM	Main Vac valve closed
2/20/2012	11:23:18 PM	Bypass valve closed
2/20/2012	11:23:18 PM	H2 valve opened
2/20/2012	11:23:18 PM	Bubbler valve opened
2/20/2012	11:23:18 PM	Helium MFC set to  0.000000
2/20/2012	11:23:18 PM	H2 MFC set to  500.000000
2/20/2012	11:23:18 PM	BCl3 MFC set to  0.000000
2/20/2012	11:23:18 PM	PH3 MFC set to  0.000000
2/20/2012	11:23:18 PM	SiCl4 MFC set to  0.000000
2/20/2012	11:23:18 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	11:23:18 PM	Tube furnace set to 900
2/20/2012	11:25:18 PM	Helium valve closed
2/20/2012	11:25:18 PM	BCl3 valve closed
2/20/2012	11:25:18 PM	PH3 valve closed
2/20/2012	11:25:18 PM	SiCl4 pre valve closed
2/20/2012	11:25:18 PM	SiCl4 post valve closed
2/20/2012	11:25:18 PM	Main Vac valve closed
2/20/2012	11:25:18 PM	Bypass valve closed
2/20/2012	11:25:18 PM	H2 valve opened
2/20/2012	11:25:18 PM	Bubbler valve opened
2/20/2012	11:25:18 PM	Helium MFC set to  0.000000
2/20/2012	11:25:18 PM	H2 MFC set to  500.000000
2/20/2012	11:25:18 PM	BCl3 MFC set to  0.000000
2/20/2012	11:25:18 PM	PH3 MFC set to  0.000000
2/20/2012	11:25:18 PM	SiCl4 MFC set to  0.000000
2/20/2012	11:25:18 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	11:25:18 PM	Tube furnace set to 850
2/20/2012	11:27:18 PM	H2 valve closed
2/20/2012	11:27:18 PM	BCl3 valve closed
2/20/2012	11:27:18 PM	PH3 valve closed
2/20/2012	11:27:18 PM	SiCl4 pre valve closed
2/20/2012	11:27:18 PM	SiCl4 post valve closed
2/20/2012	11:27:18 PM	Main Vac valve closed
2/20/2012	11:27:18 PM	Bypass valve closed
2/20/2012	11:27:18 PM	Helium valve opened
2/20/2012	11:27:18 PM	Bubbler valve opened
2/20/2012	11:27:18 PM	Helium MFC set to  500.000000
2/20/2012	11:27:18 PM	H2 MFC set to  0.000000
2/20/2012	11:27:18 PM	BCl3 MFC set to  0.000000
2/20/2012	11:27:18 PM	PH3 MFC set to  0.000000
2/20/2012	11:27:18 PM	SiCl4 MFC set to  0.000000
2/20/2012	11:27:18 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	11:27:18 PM	Tube furnace set to 800
2/20/2012	11:29:18 PM	H2 valve closed
2/20/2012	11:29:18 PM	BCl3 valve closed
2/20/2012	11:29:18 PM	PH3 valve closed
2/20/2012	11:29:18 PM	SiCl4 pre valve closed
2/20/2012	11:29:18 PM	SiCl4 post valve closed
2/20/2012	11:29:18 PM	Main Vac valve closed
2/20/2012	11:29:18 PM	Bypass valve closed
2/20/2012	11:29:18 PM	Helium valve opened
2/20/2012	11:29:18 PM	Bubbler valve opened
2/20/2012	11:29:18 PM	Helium MFC set to  500.000000
2/20/2012	11:29:18 PM	H2 MFC set to  0.000000
2/20/2012	11:29:18 PM	BCl3 MFC set to  0.000000
2/20/2012	11:29:18 PM	PH3 MFC set to  0.000000
2/20/2012	11:29:18 PM	SiCl4 MFC set to  0.000000
2/20/2012	11:29:18 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	11:29:18 PM	Tube furnace set to 750
2/20/2012	11:31:18 PM	H2 valve closed
2/20/2012	11:31:18 PM	BCl3 valve closed
2/20/2012	11:31:18 PM	PH3 valve closed
2/20/2012	11:31:18 PM	SiCl4 pre valve closed
2/20/2012	11:31:18 PM	SiCl4 post valve closed
2/20/2012	11:31:18 PM	Main Vac valve closed
2/20/2012	11:31:18 PM	Bypass valve closed
2/20/2012	11:31:18 PM	Helium valve opened
2/20/2012	11:31:18 PM	Bubbler valve opened
2/20/2012	11:31:18 PM	Helium MFC set to  500.000000
2/20/2012	11:31:18 PM	H2 MFC set to  0.000000
2/20/2012	11:31:18 PM	BCl3 MFC set to  0.000000
2/20/2012	11:31:18 PM	PH3 MFC set to  0.000000
2/20/2012	11:31:18 PM	SiCl4 MFC set to  0.000000
2/20/2012	11:31:18 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	11:31:18 PM	Tube furnace set to 0
2/20/2012	11:51:19 PM	Helium valve closed
2/20/2012	11:51:19 PM	H2 valve closed
2/20/2012	11:51:19 PM	BCl3 valve closed
2/20/2012	11:51:19 PM	PH3 valve closed
2/20/2012	11:51:19 PM	SiCl4 pre valve closed
2/20/2012	11:51:19 PM	SiCl4 post valve closed
2/20/2012	11:51:19 PM	Main Vac valve closed
2/20/2012	11:51:19 PM	Bypass valve closed
2/20/2012	11:51:19 PM	Bubbler valve closed
2/20/2012	11:51:19 PM	Helium MFC set to  0.000000
2/20/2012	11:51:19 PM	H2 MFC set to  0.000000
2/20/2012	11:51:19 PM	BCl3 MFC set to  0.000000
2/20/2012	11:51:19 PM	PH3 MFC set to  0.000000
2/20/2012	11:51:19 PM	SiCl4 MFC set to  0.000000
2/20/2012	11:51:19 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	11:51:19 PM	Tube furnace set to 0
2/20/2012	11:51:20 PM	Run finished at 11:51 PM
2/20/2012	11:57:58 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/20/2012	11:57:59 PM	Recipe started at 11:57 PM
2/20/2012	11:57:59 PM	Helium valve closed
2/20/2012	11:57:59 PM	H2 valve closed
2/20/2012	11:57:59 PM	BCl3 valve closed
2/20/2012	11:57:59 PM	PH3 valve closed
2/20/2012	11:57:59 PM	SiCl4 pre valve closed
2/20/2012	11:57:59 PM	SiCl4 post valve closed
2/20/2012	11:57:59 PM	Main Vac valve closed
2/20/2012	11:57:59 PM	Bypass valve closed
2/20/2012	11:57:59 PM	Bubbler valve closed
2/20/2012	11:57:59 PM	Helium MFC set to  0.000000
2/20/2012	11:57:59 PM	H2 MFC set to  0.000000
2/20/2012	11:57:59 PM	BCl3 MFC set to  0.000000
2/20/2012	11:57:59 PM	PH3 MFC set to  0.000000
2/20/2012	11:57:59 PM	SiCl4 MFC set to  0.000000
2/20/2012	11:57:59 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	11:57:59 PM	Tube furnace set to 0
2/20/2012	11:58:02 PM	H2 valve closed
2/20/2012	11:58:02 PM	BCl3 valve closed
2/20/2012	11:58:02 PM	PH3 valve closed
2/20/2012	11:58:02 PM	SiCl4 pre valve closed
2/20/2012	11:58:02 PM	SiCl4 post valve closed
2/20/2012	11:58:02 PM	Main Vac valve closed
2/20/2012	11:58:02 PM	Bypass valve closed
2/20/2012	11:58:02 PM	Bubbler valve closed
2/20/2012	11:58:02 PM	Helium valve opened
2/20/2012	11:58:02 PM	Helium MFC set to  500.000000
2/20/2012	11:58:02 PM	H2 MFC set to  0.000000
2/20/2012	11:58:02 PM	BCl3 MFC set to  0.000000
2/20/2012	11:58:02 PM	PH3 MFC set to  0.000000
2/20/2012	11:58:02 PM	SiCl4 MFC set to  0.000000
2/20/2012	11:58:02 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	11:58:02 PM	Tube furnace set to 0
2/20/2012	11:58:05 PM	Helium valve closed
2/20/2012	11:58:05 PM	H2 valve closed
2/20/2012	11:58:05 PM	BCl3 valve closed
2/20/2012	11:58:05 PM	PH3 valve closed
2/20/2012	11:58:05 PM	SiCl4 pre valve closed
2/20/2012	11:58:05 PM	SiCl4 post valve closed
2/20/2012	11:58:05 PM	Main Vac valve closed
2/20/2012	11:58:05 PM	Bypass valve closed
2/20/2012	11:58:05 PM	Bubbler valve closed
2/20/2012	11:58:05 PM	Helium MFC set to  0.000000
2/20/2012	11:58:05 PM	H2 MFC set to  0.000000
2/20/2012	11:58:05 PM	BCl3 MFC set to  0.000000
2/20/2012	11:58:05 PM	PH3 MFC set to  0.000000
2/20/2012	11:58:05 PM	SiCl4 MFC set to  0.000000
2/20/2012	11:58:05 PM	Bypass solenoid MFC set to  0.000000
2/20/2012	11:58:05 PM	Tube furnace set to 0
2/20/2012	11:58:06 PM	Run finished at 11:58 PM
2/20/2012	11:58:06 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
